CN100585840C - Multi-stage type ion fluidic device and method - Google Patents
Multi-stage type ion fluidic device and method Download PDFInfo
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- CN100585840C CN100585840C CN200810201599A CN200810201599A CN100585840C CN 100585840 C CN100585840 C CN 100585840C CN 200810201599 A CN200810201599 A CN 200810201599A CN 200810201599 A CN200810201599 A CN 200810201599A CN 100585840 C CN100585840 C CN 100585840C
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Abstract
The invention discloses a multi-step typed ion jet device and a method, belonging to the fields of aerospace technology and microelectronic technique; the device comprises a first accelerating electrode, a second accelerating electrode, and an end hollow electrode; the first accelerating electrode and the second accelerating electrode are alternatively arranged so as to form a multi-step electrode structure; an insulation layer is arranged between every two adjacent first accelerating electrode and second accelerating electrode so as to lead the first accelerating electrode and the second accelerating electrode to be insulated with each other; the method utilizes the electric field convergence effect of polarized electrode array tip part, reinforces the electric field strength of region adjacent to the electrode, thus ionizing the gas molecular of adjacent area; the multi-step ion jet device structure is adopted and voltage is applied on the structure, thus forming ion jet. The device and the method can improve the ionization efficiency, reduce the working voltage, and work under the environment of multi-gas-plasma.
Description
Technical field
What the present invention relates to is the ion fluidizing device and the method for a kind of field of aerospace technology and microelectronics technology, and specifically, what relate to is a kind of multi-stag ion fluidizing device and method.
Background technology
The effect of ion propeller in space technology is extremely important, compare with solid or aqueous chemical rocket, ion propeller has ten times of high efficient, ten times of big specific impulses, effective jet velocity of ten times high, and there is much longer running time, though the thrust that chemical rocket produces exceeds several magnitude than ion propeller, above-mentioned feature makes ion propeller aspect the inching of space flight and attitude, track bigger adaptability be arranged in the length of aircraft.This be because, because ion propeller efficient is higher, running time is longer, though the little instantaneous acceleration that makes of its thrust is little, and then make aircraft can not reach the speed that chemical rocket can reach at short notice when promoting, but, it can be so that aircraft be in the state of continuous acceleration in the much longer time, therefore, if the interplanetary navigation of long distance, use ion propeller can move much longer distance so that aircraft reaches flying speed much higher when advancing than chemical rocket.On the other hand, because the adjustment of attitude of flight vehicle and track needs very high control precision, the high thrust feature that chemical rocket had has just become a disadvantage, and on the contrary, the means of aircraft flight attitude and track are accurately controlled in the then easier conduct of low thrust ion propeller.
Find through literature search prior art, Application No.: US 7,306,189, August 2 2007 applying date, title " System and method for an ambient atmosphere ionthruster " (a kind of system and method for normal pressure ion propeller), introduced a kind of ion propeller that can work in near-earth orbit, it is characterized in that, it relies on and makes H, He, O, N plasma in the terrestrial space be accelerated in the propeller electrode, thereby realizes jet and offer load with thrust, twisting resistance etc.But its primary structure comprises the electrode of a pair of ion penetration, between electrode, apply voltage and produce electric field, the ion in the acceleration environment and no longer further ionization, the perhaps further molecule in the ionization environment and the ion in the environment quickened jointly, needn't carry any additional fuel, can provide 10
-6N-10
-4The thrust of the N order of magnitude.The range of application of this propulsion plant is narrow, can only in environment, exist in the gaseous environment of certain degree of ionization and just have certain technical advantage, when working gass such as use xenon, this structure only is a pair of mesh-like electrode, does not have tangible technical advantage during with the main thruster of spacecraft as interplanetary flight.
The real ion propeller that needs most technically, must be when guaranteeing high specific impulse, these two features of long running time, has " explosive force " certain, that chemical rocket had, that is can be under some specific condition, under for example brake hard condition, no-load voltage ratio is dashed the bigger thrust of output, and when spacecraft needs the orbit keeping speed of service or adjusts attitude, under the situation that does not have or have only the extremely fuel supply of trace, can realize the power or the moment output that can meet the demands.Above-mentioned document obviously can not provide and satisfy the propeller that requires like this.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of multi-stag ion fluidizing device and method are provided, are applicable to the ion in the direct acceleration terrestrial space, also be applicable to the ionic fluid in the atmospheric air, can be used for simultaneously ionization and quicken aerospace fuel, for example xenon etc.Because the introducing of nano electrode battle arrays such as 1-dimention nano pole and accurate 1-dimention nano pole makes ionization process to carry out in littler operating voltage, thereby can significantly improve degree of ionization, and then realize the thrust output that ion propeller is bigger.Under normal pressure, because the introducing of nano electrode battle array, ionization process can carry out under littler voltage, thereby expands its application greatly.The electric field enhancement effect that the nano electrode battle array is caused occurs over just nano electrode battle array tip portion adjacent domain, this just means, but because ionization partly is scattered among the multilevel hierarchy, therefore, can greatly increase ionization probability with respect to simple electrode structure, significantly increase the degree of ionization of ionic fluid, and, the efficient of electric field acceleration also can be increased.
The present invention realizes by following technology:
A kind of multi-stag ion fluidizing device involved in the present invention, comprise first accelerating electrode, second accelerating electrode and terminal hollow out electrode, first accelerating electrode and second accelerating electrode are alternately arranged, constitute multistage electrode structure, between per two adjacent first accelerating electrodes and second accelerating electrode, be provided with insulating barrier and make both mutually insulateds, terminal hollow out electrode is positioned at the end of multistage electrode structure, between terminal hollow out electrode and first accelerating electrode that is adjacent or second accelerating electrode, be provided with insulating barrier and make both mutually insulateds;
First accelerating electrode and second accelerating electrode all are made up of hollow out electrode, polarizing electrode array and electrode support three parts, the polarizing electrode of each first accelerating electrode and be adjacent and and the hollow out electrode of contacted second accelerating electrode of its electrode support between, there is gas gap, on the contrary, the polarizing electrode of each second accelerating electrode and be adjacent and and the hollow out electrode of contacted first accelerating electrode of its electrode support between, have gas gap;
In first accelerating electrode and second accelerating electrode, described polarizing electrode array comprises that quantity forms greater than two a plurality of discrete polarizing electrode, each discrete polarizing electrode all is positioned at the not surface of openwork part of hollow out electrode, between per two discrete polarizing electrodes, exist gas gap that it is isolated mutually;
Electrode support or a sealed whole body, or by the array of forming more than two discrete electrode support, between per two discrete electrode supports, exist gas gap that it is isolated mutually, each discrete electrode support is positioned at the not part of hollow out of hollow out electrode surface, perhaps just be positioned at the marginal portion of hollow out electrode surface, perhaps be positioned at edge and other parts of hollow out electrode surface;
For any two the first adjacent accelerating electrodes and second accelerating electrode, the structure of hollow out electrode must satisfy following feature: when gas after the polarizing electrode tip of first accelerating electrode or second accelerating electrode is ionized, the hollow out electrode that can pass adjacent accelerating electrode enters the gas gap of next stage accelerating electrode.
A kind of multi-stag ion fluidizing method involved in the present invention comprises following concrete steps:
The first step: form the multi-stag ion fluidizing structure.
Utilization has the electric field convergent validity of draw ratio greater than 10 wire, tubulose or banded polarizing electrode array tip portion, make the electric field strength of electrode adjacent domain strengthen, the hollow out electrode is set near polarizing electrode array tip, thereby formation electrode gap, there is gas in the local hollow out of hollow out electrode and at least there is insulating barrier to cover near polarizing electrode one side surface in the electrode gap;
Adopt the multi-stag ion fluidizing structure, end is provided with the polarizing electrode array, another end is provided with the hollow out electrode, be provided with a plurality of polarizing electrode arrays and hollow out electrode between two ends, form a plurality of described electrode gaps, gas can circulate between each electrode gap;
Second step: give polarizing electrode array and hollow out electrode application voltage, thereby in electrode gap, produce electric field, make the gas that is in polarizing electrode array adjacent domain in the electrode gap by partly ionization, cation under electric field action to the hollow out electrode movement, thereby drive the fluid that neutral gas molecule or atom form lotus positive electricity;
In the multi-stag ion fluidizing structure, by the relation of the on-load voltage on each polarizing electrode array and the hollow out electrode is set, make the fluid of the lotus positive electricity that forms in the electrode gap when entering contiguous electrode gap, can further be quickened by electric field, and further ionization, thereby make its movement velocity more and more faster, be in another terminal hollow out electrode up to outflow, form ionic fluid.
In second step, give polarizing electrode array and hollow out electrode application voltage, and the voltage of polarizing electrode array is higher than the voltage of hollow out electrode, thereby in electrode gap, produce electric field, when electric field strength greater than the field-ionization threshold values of gas molecule or atom or with the ionization threshold values of electron collision, and less than producing the needed electric field strength threshold values of heat balance plasma, the gas that is in polarizing electrode array adjacent domain in the electrode gap is by partly ionization, cation under electric field action to the hollow out electrode movement, thereby drive the fluid that neutral gas molecule or atom form lotus positive electricity;
In second step, in the multi-stag ion fluidizing structure, the relation of the on-load voltage on each polarizing electrode array and the hollow out electrode has following feature: from being positioned at terminal polarizing electrode array, on-load voltage descends gradually, the on-load voltage that is positioned at another terminal hollow out electrode is minimum, thereby make the fluid of the lotus positive electricity that forms in the electrode gap when entering contiguous electrode gap, can be continued to quicken by electric field, and, when moving to another polarizing electrode array tip that is adjacent, more gas molecule or atom can be ionized in this fluid, thereby increase the carrying capacity of lotus positive electricity fluid, and then the effect of increase electric field acceleration, by that analogy, described fluid all can further be quickened in each electrode gap, further ionization, thereby make its movement velocity more and more faster, be in another terminal hollow out electrode, form ionic fluid up to outflow.
Described polarizing electrode array, wherein the electrode material of each discrete polarizing electrode is conductor or semiconductive, draw ratio greater than 10 large length-diameter ratio electrode material, electrode material has the shape facility of band shape, needle-like, tubulose or strip, wherein two kinds of electrode materials are monodimension nanometer material and quasi-one-dimensional nanometer material, if electrode material then is furnished with the metal level of single or multiple lift not by the preparation of original position manufacturing process between electrode material and the substrate.
Described monodimension nanometer material comprises in carbon nano-tube, silicon carbide nanometer line, metal nanometer line, metal nitride nano wire or the metal oxide nano-wire a kind of.
Described electrode support is arranged on two different substrates with the hollow out electrode.
When described electrode support is semi-conducting material or conductor material, then and between the hollow out electrode insulate.
When described hollow out electrode is semi-conducting material or conductor material, then and between the electrode support insulate, when described hollow out electrode is an insulating material, then be provided with polarizing electrode array one side surface, not with electrode support and scope that the polarizing electrode array contacts in, be furnished with conductor material or semiconductor material thin film, this film links to each other with the polarizing electrode array, and, if not being insulating material or surface, electrode support do not have insulating material film, then insulate with electrode support.
Each discrete polarizing electrode in the openwork part of described hollow out electrode and the polarizing electrode array must satisfy following relation: when observing any two the first adjacent accelerating electrodes and second accelerating electrode perpendicular to the direction of hollow out electrode surface, the projecting figure of the openwork part of hollow out electrode on the hollow out electrode surface, must comprise each discrete polarizing electrode projecting figure on the hollow out electrode surface corresponding fully with it, the outline of two kinds of projecting figures must be non-intersect, not tangent, but have the gap between the two.
Compared with prior art, the present invention has following beneficial effect:
At first, technology provided by the invention, utilize electric field convergent validities that large length-diameter ratio electrode array had, strong such as nano electrode battle array, make two kinds of ionization mechanism of ionization by collision and field-ionization under lower on-load voltage, to take place, thereby can improve the efficient of electric field energy to the ionization energy conversion of particle, under littler on-load voltage, improve the carrying capacity of gas, thereby improve the amplitude of the suffered electric field force of gas, thereby under littler on-load voltage, just can increase the power of injection apparatus.
Secondly, the method and structure plan of establishment provided by the invention, utilize the setting of multistage accelerating electrode, make charged particle can utilize the voltage drop in the electrode gap to a greater extent, this be because, the electric field convergent validity of large length-diameter ratio electrode concentrates on most advanced and sophisticated part, and do not have this effect on most electrode height, therefore, if the single-stage electrode structure, so, the voltage that on electrode gap, is applied, can not all be used for the acceleration of charged air-flow, because gas is just just charged because of partial ionization at tip portion.But, in the multistage electrode, voltage loads on each electrode dispersedly, gas is after first order accelerating electrode tip is ionized and is charged, can be before the polarizing electrode tip that arrives the next stage accelerating electrode, promptly be subjected to the effect of electric field force and obtain bigger kinetic energy, therefore, even if the setting of multistage also can not make whole voltages load the kinetic energy that effectively is converted to charged fluid, but can significantly improve this conversion efficiency.
Once more, the method and structure plan of establishment provided by the present invention can be applicable to the gas that has certain air pressure in the environment but not have the situation of the ion of sufficient density, for example under the earth atmosphere condition; Go for existing in the environment ion of certain density again, make unnecessary loading too high voltages just can realize the situation that ion quickens and advances; Simultaneously again can be in the environment that belongs to vacuum basically, by providing gaseous fuel to ion accelerator, polarizing electrode can make that gas is charged and be accelerated, thereby can be operated in the vacuum environment.Therefore, method provided by the present invention is with a wide range of applications, and for example at space industry, can be used for the interplanetary flight of spacecraft, can satisfy simultaneously in the situation of the orbit keeping speed of service and maintenance, change operation attitude the requirement to propulsion system again.
At last, the structure plan of establishment that method provided by the present invention is required can realize in enough microelectronic processing technology manufacturings, therefore can increase substantially the structural parameter control precision, in addition, be beneficial to miniaturization, microminiaturization, meet the instructions for use in grapefruit satellite, minute vehicle field.
Description of drawings
Fig. 1 is a multi-stag ion fluidizing device structural representation of the present invention;
Wherein, polarizing electrode array 1, hollow out electrode 2, electrode support 3, first accelerating electrode 4, second accelerating electrode 5 and terminal hollow out electrode 6.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
A kind of ionic fluid method, concrete steps are:
The first step, as shown in Figure 1, form the multi-stag ion fluidizing structure, progression is level Four, each accelerating electrode constitutes one-level, and each accelerating electrode constitutes by a silicon chip, and a plurality of first accelerating electrodes and second accelerating electrode are alternately arranged, form final structure by " silica-silica " bonding, the multi-stag ion fluidizing device structure that present embodiment relates to is as follows:
Comprise first accelerating electrode 4, second accelerating electrode 5 and terminal hollow out electrode 6, first accelerating electrode 4 and second accelerating electrode 5 are alternately arranged, constitute multistage electrode structure, between per two adjacent first accelerating electrodes 4 and second accelerating electrode 5, be provided with insulating barrier and make both mutually insulateds, terminal hollow out electrode 6 is positioned at the end of multistage electrode structure, between terminal hollow out electrode 6 and first accelerating electrode 4 or second accelerating electrode 5 that are adjacent, be provided with insulating barrier and make both mutually insulateds;
First accelerating electrode 4 and second accelerating electrode 5 all are made up of hollow out electrode 2, polarizing electrode array 1 and electrode support 3 three parts, the polarizing electrode 1 of each first accelerating electrode 4 and be adjacent and and the hollow out electrode 2 of its electrode support 3 contacted second accelerating electrodes 5 between, there is gas gap, on the contrary, the polarizing electrode 1 of each second accelerating electrode 5 and be adjacent and and the hollow out electrode 2 of its electrode support 3 contacted first accelerating electrodes 4 between, have gas gap;
In first accelerating electrode 4 and second accelerating electrode 5, described polarizing electrode array 1 comprises that quantity forms greater than two a plurality of discrete polarizing electrode, each discrete polarizing electrode all is positioned at the not surface of openwork part of hollow out electrode 2, between per two discrete polarizing electrodes, exist gas gap that it is isolated mutually;
Electrode support 3 or a sealed whole body, or by the array of forming more than two discrete electrode support, between per two discrete electrode supports, exist gas gap that it is isolated mutually, each discrete electrode support is positioned at the not part of hollow out of hollow out electrode 2 surfaces, perhaps just be positioned at the marginal portion on hollow out electrode 2 surfaces, perhaps be positioned at edge and other parts on hollow out electrode 2 surfaces;
For any two the first adjacent accelerating electrodes 4 and second accelerating electrode 5, the structure of hollow out electrode 2 must satisfy following feature: when gas after the polarizing electrode tip of first accelerating electrode 4 or second accelerating electrode 5 is ionized, the hollow out electrode 2 that can pass adjacent accelerating electrode enters the gas gap of next stage accelerating electrode.
The polarizing electrode array is made up of the carbon nano pipe array of oriented growth, and the average diameter of carbon nano-tube and average height are respectively 10nm and 30 μ m.Hollow out electrode and electrode support are arranged on the same silicon chip, and silicon chip surface after oxidation, is coated with the insulating layer of silicon oxide of 2 μ m thickness in etching, and the hollow out electrode forms the array of " little hole " structure by standard silicon technology.Be provided with the surface of carbon nano pipe array one side at the hollow out electrode, deposit the Cr/Au electrode film of 30nm/300nm, the hollow out electrode pattern of first and second accelerating electrodes forms by etching, both features that structure had, make gas after the polarizing electrode tip is ionized, promptly passes adjacent hollow out electrode and to enter next stage accelerating electrode gap.Openwork part is circular, and diameter is 80 μ m.Average distance between polarizing electrode array tip and the hollow out electrode is 12 μ m.The diameter of device nozzle-end is 7cm, has 76 spouts.
In second step, the on-load voltage on accelerating electrodes at different levels is respectively 200V, 150V, 100V, 50V, terminal hollow out electrode grounding.Test is carried out in vacuum chamber, and gas is atmospheric air in the vacuum chamber, is pumped down to about 90Torr air pressure, makes gas by partial ionization by four pairs of sparking electrodes, O
+And N
+The number density of ion all is maintained at about 10
4-10
6/ cm
3The level of the order of magnitude.
Through measuring, the power output of propulsion plant approximates 97 little oxen.
Embodiment 2
A kind of ionic fluid method, concrete steps are:
The first step as shown in Figure 1, forms multi-stag ion fluidizing device version such as embodiment 1.
In second step, the on-load voltage on accelerating electrodes at different levels is respectively 100V, 75V, 50V, 25V, terminal hollow out electrode grounding.Test is carried out in vacuum chamber, and gas is atmospheric air in the vacuum chamber, is pumped down to 10
-4The air pressure of Pa by the air inlet of vacuum chamber, is provided with a flexible air feed channel and links to each other with the porch of ion fluidizing device, and the gas of sending into is N
2Gas, flow velocity are 5.1m/s, and the flow velocity of effluent gases is 12.4m/s, and mass velocity is 0.031g/s, and through measuring, thrust is about 230 little oxen.
Embodiment 1 and 2 explanations, technical scheme provided by the present invention can be under the on-load voltage with the special magnitude of one, two hectovolts, in the thrust that has output tens little oxen under the partially ionized condition, perhaps under the condition that the gaseous fuel input is arranged, export the thrust of the little ox of hundreds of, if further improve the progression of voltage and increase fluidic device, thrust output can further increase.
Embodiment 3
A kind of ionic fluid method is to produce air-flow under normal pressure, its concrete steps are:
The first step as shown in Figure 1, forms multi-stag ion fluidizing device version such as embodiment 1.
In second step, the on-load voltage on accelerating electrodes at different levels is respectively 200V, 150V, 100V, 50V, terminal hollow out electrode grounding.Test is carried out in atmospheric air, device is installed on the slide rail during test, moves along being parallel to the test platform direction with the speed of 0.001m/s, and the accelerating electrode of air inlet is in the front end on the direction of motion, the flow velocity of measuring the jet exit place is 9.3m/s, and mass velocity is 0.079g/s.
Compare with the ion wind generation device of a routine, this device is that the needle electrode formula corona discharge structure of 20 microns of 350 microns, needle point minimum diameter is formed by the gap, its more stable operating voltage is between 4200-4900V, and the ion wind flow velocity that ionic fluid produces is about 2.7m/s.As seen, technical scheme provided by the present invention can provide bigger ionic fluid speed under littler on-load voltage.
Above embodiment explanation, technical scheme provided by the present invention can improve ionizing efficiency, reduces operating voltage, works under multiple gases-plasma environment, has wide application.
Claims (11)
1. multi-stag ion fluidizing device, it is characterized in that, comprise first accelerating electrode, second accelerating electrode and terminal hollow out electrode, first accelerating electrode and second accelerating electrode are alternately arranged, constitute multistage electrode structure, be provided with insulating barrier between per two the first adjacent accelerating electrodes and second accelerating electrode and make both mutually insulateds, terminal hollow out electrode is positioned at the end of multistage electrode structure, is provided with insulating barrier between terminal hollow out electrode and first accelerating electrode that is adjacent or second accelerating electrode and makes both mutually insulateds;
First accelerating electrode and second accelerating electrode all are made up of hollow out electrode, polarizing electrode array and electrode support three parts, the polarizing electrode of each first accelerating electrode and be adjacent and and the hollow out electrode of contacted second accelerating electrode of its electrode support between, there is gas gap, on the contrary, the polarizing electrode of each second accelerating electrode and be adjacent and and the hollow out electrode of contacted first accelerating electrode of its electrode support between, have gas gap;
In first accelerating electrode and second accelerating electrode, described polarizing electrode array comprises that quantity forms greater than two a plurality of discrete polarizing electrode, each discrete polarizing electrode all is positioned at the not surface of openwork part of hollow out electrode, between per two discrete polarizing electrodes, exist gas gap that it is isolated mutually;
For any two the first adjacent accelerating electrodes and second accelerating electrode, the structure of hollow out electrode must satisfy following feature: when gas after the polarizing electrode tip of first accelerating electrode or second accelerating electrode is ionized, the hollow out electrode that can pass adjacent accelerating electrode enters the gas gap of next stage accelerating electrode.
2. multi-stag ion fluidizing device as claimed in claim 1 is characterized in that, the electrode material of described polarizing electrode is monodimension nanometer material and quasi-one-dimensional nanometer material.
3. multi-stag ion fluidizing device as claimed in claim 2 is characterized in that, described monodimension nanometer material comprises in carbon nano-tube, silicon carbide nanometer line, metal nanometer line, metal nitride nano wire or the metal oxide nano-wire a kind of.
4. multi-stag ion fluidizing device as claimed in claim 1 is characterized in that, described electrode support and hollow out electrode are arranged on two substrates.
5. as claim 1 or 4 described multi-stag ion fluidizing devices, it is characterized in that,, then and between the hollow out electrode insulate when described electrode support is semi-conducting material or conductor material.
6. as claim 1 or 4 described multi-stag ion fluidizing device structures, it is characterized in that, described electrode support is a sealed whole body, or by the array of forming more than two discrete electrode support, between per two discrete electrode supports, exist gas gap that it is isolated mutually, each discrete electrode support is positioned at the not part of hollow out of hollow out electrode surface, perhaps just be positioned at the marginal portion of hollow out electrode surface, perhaps be positioned at edge and other parts of hollow out electrode surface.
7. multi-stag ion fluidizing device as claimed in claim 1, it is characterized in that, when described hollow out electrode is semi-conducting material or conductor material, then and between the electrode support insulate, when described hollow out electrode is an insulating material, then be provided with polarizing electrode array one side surface, not with electrode support and scope that the polarizing electrode array contacts in, be furnished with conductor material or semiconductor material thin film, this film links to each other with the polarizing electrode array, and, if not being insulating material or surface, electrode support do not have insulating material film, then insulate with electrode support.
8. multi-stag ion fluidizing device as claimed in claim 1, it is characterized in that, each discrete polarizing electrode in the openwork part of described hollow out electrode and the polarizing electrode array must satisfy following relation: when observing any two the first adjacent accelerating electrodes and second accelerating electrode perpendicular to the direction of hollow out electrode surface, the projecting figure of the openwork part of hollow out electrode on the hollow out electrode surface, must comprise each discrete polarizing electrode projecting figure on the hollow out electrode surface corresponding fully, have the gap between the outline of two kinds of projecting figures with it.
9. a multi-stag ion fluidizing method is characterized in that comprising the steps:
The first step: utilize to have the electric field convergent validity of draw ratio greater than 10 wire, tubulose or banded polarizing electrode array tip portion, make the electric field strength of electrode adjacent domain strengthen, the hollow out electrode is set near polarizing electrode array tip, thereby formation electrode gap, the local hollow out of hollow out electrode and having insulating barrier to cover near polarizing electrode one side surface at least, there is gas in the electrode gap, forms the multi-stag ion fluidizing structure;
Utilize the multi-stag ion fluidizing structure, end is provided with the polarizing electrode array, another end is provided with the hollow out electrode, be provided with a plurality of polarizing electrode arrays and hollow out electrode between two ends, form a plurality of described electrode gaps, gas can circulate between each electrode gap;
Second step: give polarizing electrode array and hollow out electrode application voltage, thereby in electrode gap, produce electric field, make the gas that is in polarizing electrode array adjacent domain in the electrode gap by partly ionization, cation under electric field action to the hollow out electrode movement, thereby drive the fluid that neutral gas molecule or atom form lotus positive electricity;
In the multi-stag ion fluidizing structure, by the relation of the on-load voltage on each polarizing electrode array and the hollow out electrode is set, make the fluid of the lotus positive electricity that forms in the electrode gap when entering contiguous electrode gap, can further be quickened by electric field, and further ionization, thereby make its movement velocity more and more faster, be in another terminal hollow out electrode up to outflow, form ionic fluid.
10. multi-stag ion fluidizing method according to claim 9, it is characterized in that, in second step, give polarizing electrode array and hollow out electrode application voltage, and the voltage of polarizing electrode array is higher than the voltage of hollow out electrode, thereby in electrode gap, produce electric field, when electric field strength greater than the field-ionization threshold values of gas molecule or atom or with the ionization threshold values of electron collision, and less than producing the needed electric field strength threshold values of heat balance plasma, the gas that is in polarizing electrode array adjacent domain in the electrode gap is by partly ionization, cation under electric field action to the hollow out electrode movement, thereby drive the fluid that neutral gas molecule or atom form lotus positive electricity.
11. multi-stag ion fluidizing method according to claim 9, it is characterized in that, in second step, in the multi-stag ion fluidizing device structure, the relation of the on-load voltage on each polarizing electrode array and the hollow out electrode has following feature: from being positioned at terminal polarizing electrode array, on-load voltage descends gradually, the on-load voltage that is positioned at another terminal hollow out electrode is minimum, thereby make the fluid of the lotus positive electricity that forms in the electrode gap when entering contiguous electrode gap, can be continued to quicken by electric field, and, when moving to another polarizing electrode array tip that is adjacent, more gas molecule or atom can be ionized in this fluid, thereby increase the carrying capacity of lotus positive electricity fluid, and then increase the effect that electric field quickens, by that analogy, described fluid all can further be quickened in each electrode gap, further ionization, thereby make its movement velocity more and more faster, be in another terminal hollow out electrode, form ionic fluid up to outflow.
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