CN113814961B - Three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive - Google Patents

Three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive Download PDF

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CN113814961B
CN113814961B CN202111042569.0A CN202111042569A CN113814961B CN 113814961 B CN113814961 B CN 113814961B CN 202111042569 A CN202111042569 A CN 202111042569A CN 113814961 B CN113814961 B CN 113814961B
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ipmc
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CN113814961A (en
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于敏
吴雨薇
何青松
尹国校
陈成
徐显锐
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Nanjing University of Aeronautics and Astronautics
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
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    • B25J9/00Programme-controlled manipulators
    • B25J9/003Programme-controlled manipulators having parallel kinematics
    • B25J9/0045Programme-controlled manipulators having parallel kinematics with kinematics chains having a rotary joint at the base

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Abstract

本发明公开了一种基于螺旋形IPMC驱动的三自由度并联微动平台,包括基座组件、驱动组件和动平台,基座组件包括底座和与其相匹配的底座盖,该底座上设有三个固定支座,该固定支座铣有贯穿底座的斜向凹槽,该斜向凹槽的内壁面贴有铜箔;驱动组件为三个螺旋形IPMC,三个所述螺旋形IPMC一端夹装于所述斜向凹槽中,与铜箔接触,另一端连接所述动平台。螺旋形IPMC接收到信号后会产生径向扩张、轴向伸缩和整体扭转三种运动,从而拉动顶部动平台俯仰、侧倾和旋转。本发明提出的基于螺旋形IPMC驱动的三自由度并联微动平台具有结构简单、体积小巧、柔顺性好、功耗小等优点,可应用于微型装配、光学器件、微机电系统等领域。

Figure 202111042569

The invention discloses a three-degree-of-freedom parallel micro-movement platform driven by helical IPMC, comprising a base assembly, a driving assembly and a moving platform. The base assembly includes a base and a matching base cover, the base is provided with three Fixed support, the fixed support is milled with an oblique groove running through the base, and the inner wall of the oblique groove is affixed with copper foil; the driving component is three spiral IPMCs, and one end of the three spiral IPMCs is clamped In the oblique groove, it is in contact with the copper foil, and the other end is connected to the moving platform. After receiving the signal, the helical IPMC will produce three kinds of motions: radial expansion, axial expansion and overall torsion, thereby pulling the top moving platform to pitch, roll and rotate. The three-degree-of-freedom parallel micro-motion platform based on the helical IPMC drive proposed by the invention has the advantages of simple structure, small size, good flexibility, low power consumption, etc.

Figure 202111042569

Description

一种基于螺旋形IPMC驱动的三自由度并联微动平台A three-degree-of-freedom parallel micro-motion platform based on helical IPMC drive

技术领域technical field

本发明涉及三自由度平台技术领域,尤其涉及一种基于螺旋形IPMC驱动的三自由度并联微动平台。The invention relates to the technical field of three-degree-of-freedom platforms, in particular to a three-degree-of-freedom parallel micro-movement platform driven by a helical IPMC.

背景技术Background technique

多自由度运动平台可以模拟多种空间运动姿态,常见的多自由度运动平台包括三自由度运动平台和六自由度运动平台。相比六自由度运动平台,三自由度运动平台结构简单、成本低、易于解耦、便于控制(吴金波, 郭睿文, 于文超. 一种两转动一平动的三自由度运动平台. 中国发明专利, 201810897153.9),因而广泛应用于航空、航天、船舶、电子、娱乐设备、光学器件、精密制造、机器人系统等领域。The multi-DOF motion platform can simulate a variety of spatial motion postures. Common multi-DOF motion platforms include three-DOF motion platforms and six-DOF motion platforms. Compared with the six-DOF motion platform, the three-DOF motion platform is simple in structure, low in cost, easy to decouple, and easy to control (Wu Jinbo, Guo Ruiwen, Yu Wenchao. A three-degree-of-freedom motion platform with two rotations and one translation. Invention in China Patent, 201810897153.9), so it is widely used in aviation, aerospace, shipbuilding, electronics, entertainment equipment, optical devices, precision manufacturing, robotic systems and other fields.

按结构形式分类,三自由度运动平台可以分为串联式和并联式。相比串联式,并联式的三自由度运动平台具有惯性小、刚性好、响应速度快等优点(孙梦馨. 非共振式压电直线电机的研究及其在多自由度平台中的应用, [博士学位论文]. 南京: 南京航空航天大学, 2018.)。传统的三自由度并联运动平台采用伺服系统及伺服电动缸作为驱动组件,难以实现小型化,不适于在作业空间有限的条件下工作。因此,发明一种基于智能材料驱动的三自由度并联微动平台,不仅可以满足小尺寸、微行程、高精度的作业要求,也有利于促进新材料向更多应用领域发展。According to the structural form, the three-degree-of-freedom motion platform can be divided into series type and parallel type. Compared with the series type, the parallel type three-degree-of-freedom motion platform has the advantages of small inertia, good rigidity, and fast response speed (Sun Mengxin. Research on non-resonant piezoelectric linear motors and their application in multi-degree-of-freedom platforms, [Ph.D. Dissertation]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2018.). The traditional three-degree-of-freedom parallel motion platform uses servo system and servo electric cylinder as driving components, which is difficult to achieve miniaturization and is not suitable for working under the condition of limited working space. Therefore, the invention of a three-degree-of-freedom parallel micro-motion platform driven by smart materials can not only meet the operation requirements of small size, micro-stroke and high precision, but also help to promote the development of new materials to more application fields.

本发明使用新型智能材料IPMC以替代传统的伺服驱动组件。离子聚合物金属复合材料(Ionic Polymer Metal Composite,IPMC)是一种离子型电活性聚合物材料,由中间的离子交换膜和两侧的金属电极层构成,具有质量轻、驱动电压低、响应速度快、能量密度高、无噪声、柔性好等优点,作为驱动器有着广泛的应用前景(Mohsen Shahinpoor and KwangJ Kim. Ionic polymer–metal composites: I. Fundamentals. Smart Material andStructures, 2001, 10: 819-833.)。The present invention uses a new type of intelligent material IPMC to replace the traditional servo drive components. Ionic Polymer Metal Composite (IPMC) is an ionic electroactive polymer material composed of an ion exchange membrane in the middle and metal electrode layers on both sides. It has the advantages of fast speed, high energy density, no noise and good flexibility, and has a wide range of application prospects as a driver (Mohsen Shahinpoor and KwangJ Kim. Ionic polymer–metal composites: I. Fundamentals. Smart Material and Structures, 2001, 10: 819-833. ).

发明内容SUMMARY OF THE INVENTION

为解决上述问题,本发明提供一种基于螺旋形IPMC驱动的三自由度并联微动平台,采用能在电场作用下做三维运动的螺旋形IPMC代替传统的伺服系统及伺服电动缸,避免复杂的机械传动结构,可以在小空间内实现三自由度运动平台的俯仰、侧倾、旋转等动作。In order to solve the above-mentioned problems, the present invention provides a three-degree-of-freedom parallel micro-movement platform driven by a helical IPMC, using a helical IPMC capable of three-dimensional motion under the action of an electric field to replace the traditional servo system and servo electric cylinder, avoiding complicated The mechanical transmission structure can realize the pitch, roll, rotation and other actions of the three-degree-of-freedom motion platform in a small space.

一种基于螺旋形IPMC驱动的三自由度并联微动平台,包括基座组件、驱动组件和动平台,基座组件包括底座和与其相匹配的底座盖,该底座上设有三个固定支座,该固定支座铣有贯穿底座的斜向凹槽,该斜向凹槽的内壁面贴有铜箔;驱动组件为螺旋形IPMC,包括第一螺旋形IPMC、第二螺旋形IPMC和第三螺旋形IPMC,三个所述螺旋形IPMC一端夹装于所述斜向凹槽中,与所述铜箔接触,另一端连接所述动平台。A three-degree-of-freedom parallel micro-movement platform based on helical IPMC drive includes a base assembly, a drive assembly and a moving platform. The base assembly includes a base and a matching base cover, and the base is provided with three fixed supports, The fixed support is milled with an oblique groove running through the base, and the inner wall of the oblique groove is affixed with copper foil; the driving component is a spiral IPMC, including a first spiral IPMC, a second spiral IPMC and a third spiral One end of the three spiral IPMCs is clamped in the oblique groove, in contact with the copper foil, and the other end is connected to the moving platform.

作为优选,三个固定支座以底座的中心为圆心,呈等角度圆周阵列分布。该布局有利于提高三自由度并联微动平台的稳定性。Preferably, the three fixed supports are distributed in an equiangular circular array with the center of the base as the center of the circle. This layout is beneficial to improve the stability of the three-degree-of-freedom parallel micro-movement platform.

作为优选,三个固定支座沿底座的直径方向对称加工有导线孔。Preferably, the three fixed supports are symmetrically machined with wire holes along the diameter direction of the base.

作为优选,底座上设有与底座盖相配合的环形槽,底座盖可在所述环形槽内自由转动。Preferably, the base is provided with an annular groove matched with the base cover, and the base cover can rotate freely in the annular groove.

作为优选,底座铣有导线槽。导线伸入导线槽,穿过导线孔,焊接在斜向凹槽壁面的铜箔上,作为输入信号的载体。螺旋形IPMC接收到信号后会产生径向扩张、轴向伸缩和整体扭转三种运动,从而拉动顶部动平台俯仰、侧倾和旋转。Preferably, the base is milled with wire grooves. The wire extends into the wire groove, passes through the wire hole, and is welded to the copper foil on the oblique groove wall as the carrier of the input signal. After receiving the signal, the helical IPMC will produce three kinds of motions: radial expansion, axial expansion and contraction, and overall torsion, thereby pulling the top moving platform to pitch, roll and rotate.

作为优选,底座上设有与底座盖相配合的环形槽,底座盖可在所述环形槽内自由转动。Preferably, the base is provided with an annular groove matched with the base cover, and the base cover can rotate freely in the annular groove.

作为优选,底座盖上加工有三个底座盖通孔,三个底座盖通孔以底座盖的中心为圆心,呈圆周阵列分布,转动底座盖使三个底座盖通孔位于三个固定支座的正上方。Preferably, the base cover is machined with three base cover through holes, and the three base cover through holes take the center of the base cover as the center of the circle and are distributed in a circular array, and the base cover is rotated so that the three base cover through holes are located in the three fixed supports. Directly above.

作为优选,对第一螺旋形IPMC、第二螺旋形IPMC和第三螺旋形IPMC施加的电压为1~3V。过低的电压无法使IPMC有效驱动,而过高的电压会导致IPMC使用寿命缩短。Preferably, the voltage applied to the first helical IPMC, the second helical IPMC and the third helical IPMC is 1-3V. A voltage that is too low cannot make the IPMC drive effectively, and a voltage that is too high will shorten the life of the IPMC.

本发明还公开了基于螺旋形IPMC驱动的三自由度并联微动平台的工作方法,同时对所述螺旋形IPMC独立施加正向或反向电压,使其沿轴向伸长、缩短、向内收缩顺时针扭转或向外扩张逆时针扭转,以实现顶部动平台俯仰、侧倾、旋转的三自由度复合运动。The invention also discloses a working method of a three-degree-of-freedom parallel micro-movement platform driven by a helical IPMC. At the same time, a forward or reverse voltage is independently applied to the helical IPMC, so that the helical IPMC is elongated, shortened and inwardly extended in the axial direction. The contraction is clockwise and the outward expansion is counter-clockwise to realize the three-degree-of-freedom compound motion of pitch, roll and rotation of the top moving platform.

作为优选,对所述第一螺旋形IPMC、第二螺旋形IPMC施加正向/反向电压,同时对第三螺旋形IPMC施加与其相反的电压,以实现顶部动平台前俯/后仰;对第一螺旋形IPMC施加正向/反向电压,同时对第二螺旋形IPMC、第三螺旋形IPMC施加与其相反的电压,以实现顶部动平台右倾/左倾;同时对第一螺旋形IPMC、第二螺旋形IPMC和第三螺旋形IPMC施加正向/反向电压,以实现顶部动平台的逆时针/顺时针旋转。Preferably, a forward/reverse voltage is applied to the first helical IPMC and the second helical IPMC, and an opposite voltage is applied to the third helical IPMC to realize the forward pitch/backward pitch of the top moving platform; The forward/reverse voltage is applied to the first spiral IPMC, and the opposite voltage is applied to the second spiral IPMC and the third spiral IPMC to realize the right/left inclination of the top moving platform; The second helix IPMC and the third helix IPMC apply forward/reverse voltages to achieve counterclockwise/clockwise rotation of the top moving platform.

与现有技术相比,本发明具有如下的有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明创新性地提出采用智能材料IPMC作为驱动组件,设计出一种基于螺旋形IPMC驱动的三自由度并联微动平台,不仅可以实现俯仰、侧倾和旋转的三自由度复合运动,而且结构简单、体积小巧、拆卸方便、柔顺性好、功耗小、制造成本低、易于实现小型化,可以满足小尺寸、微行程、高精度的作业要求,在诸如微型装配、光学器件、微机电系统等领域中具有很好的应用前景。The invention innovatively proposes to use the intelligent material IPMC as the driving component, and designs a three-degree-of-freedom parallel micro-movement platform driven by the helical IPMC, which can not only realize the three-degree-of-freedom composite motion of pitch, roll and rotation, but also structurally Simple, small size, easy disassembly, good flexibility, low power consumption, low manufacturing cost, easy to achieve miniaturization, can meet the requirements of small size, micro-stroke, high-precision operation, such as micro-assembly, optical devices, micro-electromechanical systems. It has good application prospects in other fields.

附图说明Description of drawings

图1为本发明一个实施例的三自由度并联微动平台的结构示意图;1 is a schematic structural diagram of a three-degree-of-freedom parallel micro-movement platform according to an embodiment of the present invention;

图2为本发明一个实施例的三自由度并联微动平台的俯视图;2 is a top view of a three-degree-of-freedom parallel micro-movement platform according to an embodiment of the present invention;

图3为本发明一个实施例的底座的结构示意图;3 is a schematic structural diagram of a base according to an embodiment of the present invention;

图4为本发明一个实施例的底座的仰视图;Fig. 4 is the bottom view of the base of one embodiment of the present invention;

图5为本发明一个实施例的底座盖的结构示意图;5 is a schematic structural diagram of a base cover according to an embodiment of the present invention;

图6为本发明一个实施例的螺旋形IPMC的主视图。FIG. 6 is a front view of a spiral IPMC according to an embodiment of the present invention.

附图标记:1底座,1-1固定支座,1-2斜向凹槽,1-3导线孔,1-4环形槽,1-5导线槽,2底座盖,2-1底座盖通孔,3第一螺旋形IPMC,4动平台,5第二螺旋形IPMC,6第三螺旋形IPMC。Reference numerals: 1 base, 1-1 fixed support, 1-2 inclined groove, 1-3 wire hole, 1-4 annular groove, 1-5 wire groove, 2 base cover, 2-1 base cover through Hole, 3 first spiral IPMC, 4 moving platform, 5 second spiral IPMC, 6 third spiral IPMC.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

本发明公开了一种基于螺旋形IPMC驱动的三自由度并联微动平台,采用能在电场作用下做三维运动的螺旋形IPMC代替传统的伺服系统及伺服电动缸,避免复杂的机械传动结构,可以在小空间内实现三自由度运动平台的俯仰、侧倾、旋转等动作。The invention discloses a three-degree-of-freedom parallel micro-movement platform driven by a helical IPMC. The helical IPMC capable of three-dimensional motion under the action of an electric field is used to replace the traditional servo system and servo electric cylinder, and the complex mechanical transmission structure is avoided. The pitch, roll, rotation and other actions of the three-degree-of-freedom motion platform can be realized in a small space.

结合图1至图6,一种基于螺旋形IPMC驱动的三自由度并联微动平台包括基座组件、驱动组件和动平台4。With reference to FIGS. 1 to 6 , a three-degree-of-freedom parallel micro-movement platform based on helical IPMC drive includes a base assembly, a drive assembly and a moving platform 4 .

基座组件包括圆盘状底座1和底座盖2,如图3所示,底座1为圆盘状,本实施例取底座1的直径为50mm,在该底座1上设有三个固定支座1-1,固定支座1-1以底座1的圆心为圆心,呈等角度圆周阵列分布。固定支座1-1铣有贯穿底座1的斜向凹槽1-2,该斜向凹槽1-2的内壁面贴有铜箔。斜向凹槽的倾角决定了三自由度并联微动平台的整体高度,本实施例取倾角为60°。三个固定支座1-1沿底座1的直径方向对称加工有导线孔1-3,本实施例取导线孔1-3的孔径为1.5mm。底座1还铣有导线槽1-5,本实施例取槽深1mm。导线伸入导线槽1-5,穿过导线孔1-3,焊接在斜向凹槽1-2壁面的铜箔上,作为输入信号的载体。The base assembly includes a disc-shaped base 1 and a base cover 2. As shown in FIG. 3, the base 1 is disc-shaped. In this embodiment, the diameter of the base 1 is 50 mm, and three fixed supports 1 are arranged on the base 1. -1, the fixed support 1-1 is distributed in an equiangular circular array with the center of the base 1 as the center of the circle. The fixed support 1-1 is milled with an oblique groove 1-2 running through the base 1, and the inner wall surface of the oblique groove 1-2 is affixed with copper foil. The inclination angle of the oblique groove determines the overall height of the three-degree-of-freedom parallel micro-movement platform, and the inclination angle is taken as 60° in this embodiment. The three fixed supports 1-1 are symmetrically machined with wire holes 1-3 along the diameter direction of the base 1, and the diameter of the wire holes 1-3 in this embodiment is 1.5 mm. The base 1 is also milled with wire grooves 1-5, and the groove depth is 1 mm in this embodiment. The wire extends into the wire groove 1-5, passes through the wire hole 1-3, and is welded to the copper foil on the wall surface of the inclined groove 1-2, as the carrier of the input signal.

底座1设有与底座盖2相配合的环形槽1-4,槽深1mm,底座盖2可在所述环形槽1-4内自由转动。如图5所示,底座盖2加工有三个底座盖通孔2-1以对应三个固定支座1-1,本实施例取底座盖通孔的直径为16mm,三个底座盖通孔2-1以底座盖2的中心为圆心,呈圆周阵列分布,转动底座盖2使三个底座盖通孔2-1位于三个固定支座1-1的正上方。The base 1 is provided with an annular groove 1-4 matched with the base cover 2, the groove depth is 1 mm, and the base cover 2 can freely rotate in the annular groove 1-4. As shown in FIG. 5 , the base cover 2 is machined with three base cover through holes 2-1 to correspond to the three fixed supports 1-1. In this embodiment, the diameter of the base cover through holes is 16 mm, and the three base cover through holes 2 -1 With the center of the base cover 2 as the center of the circle, it is distributed in a circular array, and the base cover 2 is rotated so that the three base cover through holes 2-1 are located directly above the three fixed supports 1-1.

驱动组件为螺旋形IPMC,包括第一螺旋形IPMC 3、第二螺旋形IPMC 5和第三螺旋形IPMC 6。如图6所示,螺旋形IPMC是由片状IPMC在90℃水浴加热的条件下螺旋定型得到的,在本实施例中,其结构参数如下:直径为5.00mm,长度为20.09mm,螺距为6.47mm,宽度为1.49mm。螺旋形IPMC一端夹装于斜向凹槽1-2中,并与铜箔接触良好。对所述第一螺旋形IPMC 3、第二螺旋形IPMC 5和第三螺旋形IPMC 6施加1~3V电压。直流信号和交流信号均可以作为输入信号。动平台4的质量为0-50mg,本实施例中的动平台质量为40mg。其最大俯仰角为30°,最大侧倾角为30°,最大旋转角为45°。The driving assembly is a helical IPMC, including a first helical IPMC 3 , a second helical IPMC 5 and a third helical IPMC 6 . As shown in Figure 6, the helical IPMC is obtained by helical shaping of the sheet IPMC under the condition of heating in a water bath at 90 °C. In this embodiment, its structural parameters are as follows: the diameter is 5.00 mm, the length is 20.09 mm, and the pitch is 6.47mm with a width of 1.49mm. One end of the spiral IPMC is clamped in the inclined groove 1-2 and has good contact with the copper foil. A voltage of 1˜3V is applied to the first helical IPMC 3 , the second helical IPMC 5 and the third helical IPMC 6 . Both DC and AC signals can be used as input signals. The mass of the moving platform 4 is 0-50 mg, and the mass of the moving platform in this embodiment is 40 mg. The maximum pitch angle is 30°, the maximum roll angle is 30°, and the maximum rotation angle is 45°.

在电场作用下,离子交换膜内部的水合阳离子向阴极迁移,导致IPMC内、外两表面的应力和应变发生变化。基于此致动机理,螺旋形IPMC可同时产生三种空间运动形式:径向扩张运动、轴向伸缩运动和扭转运动。分别向第一螺旋形IPMC 3、第二螺旋形IPMC 5和第三螺旋形IPMC 6发送电信号,可独立控制三个螺旋形IPMC的运动,从而使顶部的动平台4实现俯仰、侧倾和旋转的三自由度复合运动。对第一螺旋形IPMC 3和第二螺旋形IPMC 5施加正向3V电压使其沿轴向伸长,同时对第三螺旋形IPMC 6施加反向3V电压使其沿轴向缩短,即可带动顶部动平台4前俯;对第一螺旋形IPMC 3和第二螺旋形IPMC 5施加反向3V电压使其沿轴向缩短,同时对第三螺旋形IPMC 6施加正向3V电压使其沿轴向伸长,即可带动顶部动平台4后仰;对第一螺旋形IPMC 3施加反向3V电压使其沿轴向缩短,同时对第二螺旋形IPMC5和第三螺旋形IPMC 6施加正向3V电压使其沿轴向伸长,即可带动顶部动平台4左倾;对第一螺旋形IPMC 3施加正向3V电压使其沿轴向伸长,同时对第二螺旋形IPMC 5和第三螺旋形IPMC 6施加反向3V电压使其沿轴向缩短,即可带动顶部动平台4右倾;对第一螺旋形IPMC3,第二螺旋形IPMC 5,第三螺旋形IPMC 6同时施加反向3V电压使其向内收缩顺时针扭转,即可带动顶部动平台4顺时针旋转;对第一螺旋形IPMC 3,第二螺旋形IPMC 5,第三螺旋形IPMC 6同时施加正向3V电压使其向外扩张逆时针扭转,即可带动顶部动平台4逆时针旋转。Under the action of the electric field, the hydrated cations inside the ion-exchange membrane migrate to the cathode, resulting in changes in stress and strain on the inner and outer surfaces of the IPMC. Based on this actuation mechanism, the helical IPMC can simultaneously generate three spatial motion forms: radial expansion motion, axial telescopic motion and torsional motion. Send electrical signals to the first helical IPMC 3, the second helical IPMC 5 and the third helical IPMC 6 respectively, and the movements of the three helical IPMCs can be independently controlled, so that the top moving platform 4 can achieve pitch, roll and Rotational three-degree-of-freedom compound motion. A forward 3V voltage is applied to the first spiral IPMC 3 and the second spiral IPMC 5 to elongate in the axial direction, while a reverse 3V voltage is applied to the third spiral IPMC 6 to shorten the axial direction, which can drive The top moving platform 4 is bent forward; the reverse 3V voltage is applied to the first helical IPMC 3 and the second helical IPMC 5 to shorten the axial direction, and the forward 3V voltage is applied to the third helical IPMC 6 to make it axially shorten. To elongate, the top moving platform 4 can be driven to lean back; apply a reverse 3V voltage to the first spiral IPMC 3 to shorten it in the axial direction, and at the same time apply a forward direction to the second spiral IPMC5 and the third spiral IPMC 6 The 3V voltage makes it elongate in the axial direction, which can drive the top moving platform 4 to tilt to the left; apply a forward 3V voltage to the first spiral IPMC 3 to elongate it in the axial direction, and simultaneously apply a forward 3V voltage to the first spiral IPMC 5 and the third spiral IPMC 5. The spiral IPMC 6 applies a reverse 3V voltage to shorten it in the axial direction, which can drive the top moving platform 4 to tilt to the right; apply a reverse 3V to the first spiral IPMC3, the second spiral IPMC 5, and the third spiral IPMC 6 at the same time The voltage makes it shrink inward and twist clockwise, which can drive the top moving platform 4 to rotate clockwise; apply forward 3V voltage to the first spiral IPMC 3, the second spiral IPMC 5, and the third spiral IPMC 6 at the same time to make it Expanding outward and twisting counterclockwise can drive the top moving platform 4 to rotate counterclockwise.

最后应说明的是:以上所述仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。Finally, it should be noted that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the The technical solutions described in the foregoing embodiments may be modified, or some technical features thereof may be equivalently replaced. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (9)

1. A three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive is characterized in that: comprises a base component, a driving component and a movable platform (4),
the base component comprises a base (1) and a base cover (2) matched with the base, wherein three fixed supports (1-1) are arranged on the base (1), inclined grooves (1-2) penetrating through the base (1) are milled in the fixed supports (1-1), and copper foils are attached to the inner wall surfaces of the inclined grooves (1-2);
the driving assembly is a spiral IPMC and comprises a first spiral IPMC (3), a second spiral IPMC (5) and a third spiral IPMC (6), one end of the first spiral IPMC (3), one end of the second spiral IPMC (5) and one end of the third spiral IPMC (6) are respectively clamped in the inclined grooves (1-2) and are in contact with the copper foil, and the other end of the first spiral IPMC, one end of the second spiral IPMC and one end of the third spiral IPMC are respectively connected with the movable platform (4);
and simultaneously, forward or reverse voltage is independently applied to the first spiral IPMC (3), the second spiral IPMC (5) and the third spiral IPMC (6), so that the first spiral IPMC, the second spiral IPMC and the third spiral IPMC extend, shorten, contract inwards, twist clockwise or expand outwards and twist anticlockwise along the axial direction, and three-degree-of-freedom compound motion of pitching, tilting and rotating of the top movable platform (4) is realized.
2. The three-degree-of-freedom parallel micro-motion platform based on the spiral IPMC drive of claim 1, wherein: the three fixed supports (1-1) are distributed in an equiangular circumferential array by taking the center of the base (1) as a circle center.
3. The spiral IPMC driven three-degree-of-freedom parallel micro-motion platform as claimed in claim 2, wherein: the three fixed supports (1-1) are symmetrically processed with wire holes (1-3) along the diameter direction of the base (1).
4. The three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive of claim 3, wherein: and a lead groove (1-5) is milled on the base (1), a lead extends into the lead groove (1-5), passes through the lead hole (1-3), and is welded on the copper foil on the wall surface of the inclined groove (1-2) to be used as a carrier of an input signal.
5. The three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive of claim 1 or 4, wherein: the base (1) is provided with an annular groove (1-4) matched with the base cover (2), and the base cover (2) can freely rotate in the annular groove (1-4).
6. The spiral IPMC driven three-degree-of-freedom parallel micro-motion platform as claimed in claim 5, wherein: the base cover (2) is provided with three base cover through holes (2-1), the three base cover through holes (2-1) are distributed in a circumferential array mode by taking the center of the base cover (2) as the circle center, and the base cover (2) is rotated to enable the three base cover through holes (2-1) to be located right above the three fixed supports (1-1).
7. The three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive of claim 1 or 6, wherein: and the voltage applied to the first spiral IPMC (3), the second spiral IPMC (5) and the third spiral IPMC (6) is 1-3V.
8. The spiral IPMC driven three-degree-of-freedom parallel micro-motion platform as claimed in claim 7, wherein: the mass of the movable platform (4) is 0-50 mg.
9. The working method of the three-degree-of-freedom parallel micro-motion platform based on the spiral IPMC drive as claimed in claim 8, wherein: forward/reverse voltage is applied to the first spiral IPMC (3) and the second spiral IPMC (5), and meanwhile, opposite voltage is applied to the third spiral IPMC (6) so as to realize forward/backward pitching of the top movable platform (4); applying a forward/reverse voltage to the first spiral IPMC (3) and simultaneously applying a reverse voltage to the second spiral IPMC (5) and the third spiral IPMC (6) so as to realize the right/left inclination of the top movable platform (4); simultaneously applying a forward/reverse voltage to said first, second and third spiral IPMC (3, 5, 6) to effect counter clockwise/clockwise rotation of the top moving platform (4).
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