CN113814961B - Three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive - Google Patents
Three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive Download PDFInfo
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- CN113814961B CN113814961B CN202111042569.0A CN202111042569A CN113814961B CN 113814961 B CN113814961 B CN 113814961B CN 202111042569 A CN202111042569 A CN 202111042569A CN 113814961 B CN113814961 B CN 113814961B
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- ISRUGXGCCGIOQO-UHFFFAOYSA-N Rhoden Chemical compound CNC(=O)OC1=CC=CC=C1OC(C)C ISRUGXGCCGIOQO-UHFFFAOYSA-N 0.000 title claims abstract 50
- 230000033001 locomotion Effects 0.000 claims abstract description 27
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000011889 copper foil Substances 0.000 claims abstract description 9
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 3
- 230000009471 action Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003014 ion exchange membrane Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009347 mechanical transmission Effects 0.000 description 2
- 239000002905 metal composite material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000002520 smart material Substances 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229920001746 electroactive polymer Polymers 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229920000831 ionic polymer Polymers 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000036544 posture Effects 0.000 description 1
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- 238000005096 rolling process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
- B25J9/0045—Programme-controlled manipulators having parallel kinematics with kinematics chains having a rotary joint at the base
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Abstract
The invention discloses a three-degree-of-freedom parallel micro-motion platform based on spiral IPMC driving, which comprises a base component, a driving component and a moving platform, wherein the base component comprises a base and a base cover matched with the base; the driving assembly comprises three spiral IPMCs, one ends of the three spiral IPMCs are clamped in the inclined grooves and are in contact with the copper foil, and the other ends of the three spiral IPMCs are connected with the movable platform. After receiving the signals, the spiral IPMC can generate three motions of radial expansion, axial expansion and overall torsion, so that the top movable platform is pulled to pitch, roll and rotate. The three-degree-of-freedom parallel micro-motion platform based on the spiral IPMC drive has the advantages of simple structure, small size, good flexibility, low power consumption and the like, and can be applied to the fields of micro-assembly, optical devices, micro-electro-mechanical systems and the like.
Description
Technical Field
The invention relates to the technical field of three-degree-of-freedom platforms, in particular to a three-degree-of-freedom parallel micro-motion platform based on spiral IPMC driving.
Background
The multi-degree-of-freedom motion platform can simulate various spatial motion postures, and common multi-degree-of-freedom motion platforms comprise a three-degree-of-freedom motion platform and a six-degree-of-freedom motion platform. Compared with a six-degree-of-freedom motion platform, the three-degree-of-freedom motion platform is simple in structure, low in cost, easy to decouple and convenient to control (Wu jin Wen, Guo Rui Wen, the Chinese invention patent is 201810897153.9), so that the three-degree-of-freedom motion platform is widely applied to the fields of aviation, aerospace, ships, electronics, entertainment equipment, optical devices, precision manufacturing, robot systems and the like.
According to structural form classification, the three-degree-of-freedom motion platform can be divided into a serial type and a parallel type. Compared with a series connection type and parallel connection type three-degree-of-freedom motion platform, the parallel connection type three-degree-of-freedom motion platform has the advantages of small inertia, good rigidity, high response speed and the like (Sun dream, research of the non-resonance piezoelectric linear motor and application of the piezoelectric linear motor in the multi-degree-of-freedom platform, [ doctor academic thesis ]. Nanjing: Nanjing aerospace university, 2018 ]). The traditional three-degree-of-freedom parallel motion platform adopts a servo system and a servo electric cylinder as driving components, is difficult to realize miniaturization, and is not suitable for working under the condition of limited working space. Therefore, the three-degree-of-freedom parallel micro-motion platform based on intelligent material driving can meet the operation requirements of small size, micro stroke and high precision, and is favorable for promoting the development of new materials to more application fields.
The present invention uses a new smart material IPMC to replace the traditional servo drive assembly. An Ionic Polymer Metal Composite (IPMC) is an Ionic electroactive Polymer Material, consists of a middle ion exchange membrane and Metal electrode layers on two sides, has the advantages of light weight, low driving voltage, high response speed, high energy density, no noise, good flexibility and the like, and has wide application prospect as a driver (Mohsen hinpoor and Kwang J Kim. Ionic Polymer-Metal composites: I. fundamentals. Smart materials and Structures, 2001, 10: 819. 833.).
Disclosure of Invention
In order to solve the problems, the invention provides a three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive, which adopts a spiral IPMC capable of three-dimensional motion under the action of an electric field to replace a traditional servo system and a servo electric cylinder, thereby avoiding a complex mechanical transmission structure and realizing pitching, tilting, rotating and other actions of the three-degree-of-freedom motion platform in a small space.
A three-degree-of-freedom parallel micro-motion platform based on spiral IPMC driving comprises a base assembly, a driving assembly and a moving platform, wherein the base assembly comprises a base and a base cover matched with the base assembly; the driving assembly is a spiral IPMC and comprises a first spiral IPMC, a second spiral IPMC and a third spiral IPMC, one end of each of the three spiral IPMCs is clamped in the inclined groove and is in contact with the copper foil, and the other end of each of the three spiral IPMCs is connected with the movable platform.
Preferably, the three fixed supports are distributed in an equiangular circumferential array by taking the center of the base as a circle center. The layout is beneficial to improving the stability of the three-degree-of-freedom parallel micro-motion platform.
Preferably, the three fixed supports are symmetrically processed with wire holes along the diameter direction of the base.
Preferably, the base is provided with an annular groove matched with the base cover, and the base cover can freely rotate in the annular groove.
Preferably, the base is milled with a wire guide groove. The lead extends into the lead groove, passes through the lead hole, is welded on the copper foil on the wall surface of the inclined groove and serves as a carrier of an input signal. After receiving the signals, the spiral IPMC can generate three motions of radial expansion, axial expansion and overall torsion, so that the top movable platform is pulled to pitch, roll and rotate.
Preferably, the base is provided with an annular groove matched with the base cover, and the base cover can freely rotate in the annular groove.
Preferably, the base cover is provided with three base cover through holes, the three base cover through holes are distributed in a circumferential array by taking the center of the base cover as the center of a circle, and the base cover is rotated to enable the three base cover through holes to be positioned right above the three fixed supports.
Preferably, the voltage applied to the first, second and third spiral IPMCs is 1-3V. Too low a voltage does not allow efficient driving of the IPMC, while too high a voltage results in a shortened lifetime of the IPMC.
The invention also discloses a working method of the three-degree-of-freedom parallel micro-motion platform based on the spiral IPMC drive, and simultaneously, the spiral IPMC is independently applied with forward or reverse voltage to extend, shorten, contract inwards and twist clockwise or expand outwards and twist anticlockwise so as to realize the three-degree-of-freedom compound motion of pitching, tilting and rotating of the top movable platform.
Preferably, a forward/reverse voltage is applied to the first spiral IPMC and the second spiral IPMC, and a voltage opposite to the forward/reverse voltage is applied to the third spiral IPMC at the same time, so that the top movable platform can pitch forwards/backwards; applying a forward/reverse voltage to the first spiral IPMC, and simultaneously applying a voltage opposite to the first spiral IPMC and the third spiral IPMC to realize the right/left inclination of the top movable platform; simultaneously applying a forward/reverse voltage to the first, second and third spiral IPMCs to effect counter clockwise/clockwise rotation of the top moving platform.
Compared with the prior art, the invention has the following beneficial effects:
the invention innovatively provides a three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive, which adopts intelligent material IPMC as a drive component, can realize three-degree-of-freedom compound motion of pitching, rolling and rotating, has simple structure, small volume, convenient disassembly, good flexibility, low power consumption, low manufacturing cost and easy miniaturization, can meet the operation requirements of small size, micro stroke and high precision, and has good application prospect in the fields of micro assembly, optical devices, micro electro mechanical systems and the like.
Drawings
Fig. 1 is a schematic structural diagram of a three-degree-of-freedom parallel micro-motion platform according to an embodiment of the present invention;
FIG. 2 is a top view of a three-degree-of-freedom parallel micro-motion platform according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a base according to an embodiment of the present invention;
FIG. 4 is a bottom view of the base of one embodiment of the present invention;
FIG. 5 is a schematic view of a base cover according to an embodiment of the present invention;
FIG. 6 is a front view of a spiral IPMC in accordance with one embodiment of the present invention.
Reference numerals are as follows: the device comprises a base 1, a fixed support 1-1, an inclined groove 1-2, a wire guide 1-3, an annular groove 1-4, a wire guide 1-5, a base cover 2-1 through hole 3, a first spiral IPMC, a movable platform 4, a second spiral IPMC 5 and a third spiral IPMC 6.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention discloses a three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive, which adopts a spiral IPMC capable of three-dimensional motion under the action of an electric field to replace a traditional servo system and a servo electric cylinder, avoids a complex mechanical transmission structure and can realize pitching, side tilting, rotating and other actions of the three-degree-of-freedom motion platform in a small space.
With reference to fig. 1 to fig. 6, a three-degree-of-freedom parallel micro-motion platform based on a spiral IPMC drive includes a base assembly, a drive assembly, and a movable platform 4.
The base component comprises a disc-shaped base 1 and a base cover 2, as shown in fig. 3, the base 1 is disc-shaped, the diameter of the base 1 is 50mm, three fixing supports 1-1 are arranged on the base 1, and the fixing supports 1-1 are distributed in an equiangular circumferential array by taking the circle center of the base 1 as the circle center. The fixed support 1-1 is milled with an inclined groove 1-2 penetrating through the base 1, and copper foil is pasted on the inner wall surface of the inclined groove 1-2. The inclination angle of the oblique groove determines the overall height of the three-degree-of-freedom parallel micro-motion platform, and the inclination angle is 60 degrees in the embodiment. The three fixed supports 1-1 are symmetrically processed with wire holes 1-3 along the diameter direction of the base 1, and the diameter of the wire hole 1-3 is 1.5mm in the embodiment. The base 1 is also milled with conductor grooves 1-5, in this embodiment, the groove depth is 1 mm. The lead extends into the lead groove 1-5, passes through the lead hole 1-3, is welded on the copper foil on the wall surface of the inclined groove 1-2 and is used as a carrier of an input signal.
The base 1 is provided with an annular groove 1-4 matched with the base cover 2, the depth of the groove is 1mm, and the base cover 2 can freely rotate in the annular groove 1-4. As shown in fig. 5, the base cover 2 is processed with three base cover through holes 2-1 to correspond to three fixing supports 1-1, in this embodiment, the diameter of the base cover through hole is 16mm, the three base cover through holes 2-1 are distributed in a circumferential array with the center of the base cover 2 as the center of circle, and the base cover 2 is rotated to make the three base cover through holes 2-1 be located right above the three fixing supports 1-1.
The drive assembly is a helical IPMC including a first helical IPMC 3, a second helical IPMC 5 and a third helical IPMC 6. As shown in FIG. 6, the spiral IPMC is obtained by spirally forming sheet IPMC under the condition of heating in water bath at 90 ℃, and in the embodiment, the structure parameters are as follows: the diameter is 5.00mm, the length is 20.09mm, the screw pitch is 6.47mm, and the width is 1.49 mm. One end of the spiral IPMC is clamped in the inclined groove 1-2 and is in good contact with the copper foil. And applying 1-3V voltage to the first spiral IPMC 3, the second spiral IPMC 5 and the third spiral IPMC 6. Both a dc signal and an ac signal may be used as input signals. The mass of the movable platform 4 is 0-50mg, and the mass of the movable platform in the embodiment is 40 mg. The maximum pitch angle is 30 degrees, the maximum roll angle is 30 degrees, and the maximum rotation angle is 45 degrees.
Under the action of an electric field, hydrated cations in the ion exchange membrane migrate to the cathode, so that the stress and strain of the inner surface and the outer surface of the IPMC are changed. Based on this actuation mechanism, the spiral IPMC can generate three spatial motion forms simultaneously: radial expansion movement, axial telescoping movement and torsional movement. Electric signals are respectively sent to the first spiral IPMC 3, the second spiral IPMC 5 and the third spiral IPMC 6, and the movement of the three spiral IPMCs can be independently controlled, so that the movable platform 4 at the top can realize three-degree-of-freedom compound movement of pitching, tilting and rotating. Applying forward 3V voltage to the first spiral IPMC 3 and the second spiral IPMC 5 to enable the first spiral IPMC and the second spiral IPMC to extend along the axial direction, and applying reverse 3V voltage to the third spiral IPMC 6 to enable the third spiral IPMC to shorten along the axial direction, so that the top movable platform 4 can be driven to bow forwards; applying reverse 3V voltage to the first spiral IPMC 3 and the second spiral IPMC 5 to enable the first spiral IPMC and the second spiral IPMC to be shortened along the axial direction, and simultaneously applying forward 3V voltage to the third spiral IPMC 6 to enable the third spiral IPMC to extend along the axial direction, so that the top movable platform 4 can be driven to tilt backwards; applying reverse 3V voltage to the first spiral IPMC 3 to enable the first spiral IPMC to be shortened along the axial direction, and simultaneously applying forward 3V voltage to the second spiral IPMC 5 and the third spiral IPMC 6 to enable the first spiral IPMC to extend along the axial direction, so that the top movable platform 4 can be driven to incline left; applying forward 3V voltage to the first spiral IPMC 3 to enable the first spiral IPMC to extend along the axial direction, and applying reverse 3V voltage to the second spiral IPMC 5 and the third spiral IPMC 6 to enable the second spiral IPMC to shorten along the axial direction, so that the top movable platform 4 can be driven to tilt right; applying reverse 3V voltage to the first spiral IPMC 3, the second spiral IPMC 5 and the third spiral IPMC 6 simultaneously to enable the first spiral IPMC, the second IPMC and the third spiral IPMC to contract inwards and twist clockwise, and then the top movable platform 4 can be driven to rotate clockwise; and simultaneously applying forward 3V voltage to the first spiral IPMC 3, the second spiral IPMC 5 and the third spiral IPMC 6 to enable the first spiral IPMC, the second spiral IPMC and the third spiral IPMC to expand outwards and twist anticlockwise, and then driving the top movable platform 4 to rotate anticlockwise.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive is characterized in that: comprises a base component, a driving component and a movable platform (4),
the base component comprises a base (1) and a base cover (2) matched with the base, wherein three fixed supports (1-1) are arranged on the base (1), inclined grooves (1-2) penetrating through the base (1) are milled in the fixed supports (1-1), and copper foils are attached to the inner wall surfaces of the inclined grooves (1-2);
the driving assembly is a spiral IPMC and comprises a first spiral IPMC (3), a second spiral IPMC (5) and a third spiral IPMC (6), one end of the first spiral IPMC (3), one end of the second spiral IPMC (5) and one end of the third spiral IPMC (6) are respectively clamped in the inclined grooves (1-2) and are in contact with the copper foil, and the other end of the first spiral IPMC, one end of the second spiral IPMC and one end of the third spiral IPMC are respectively connected with the movable platform (4);
and simultaneously, forward or reverse voltage is independently applied to the first spiral IPMC (3), the second spiral IPMC (5) and the third spiral IPMC (6), so that the first spiral IPMC, the second spiral IPMC and the third spiral IPMC extend, shorten, contract inwards, twist clockwise or expand outwards and twist anticlockwise along the axial direction, and three-degree-of-freedom compound motion of pitching, tilting and rotating of the top movable platform (4) is realized.
2. The three-degree-of-freedom parallel micro-motion platform based on the spiral IPMC drive of claim 1, wherein: the three fixed supports (1-1) are distributed in an equiangular circumferential array by taking the center of the base (1) as a circle center.
3. The spiral IPMC driven three-degree-of-freedom parallel micro-motion platform as claimed in claim 2, wherein: the three fixed supports (1-1) are symmetrically processed with wire holes (1-3) along the diameter direction of the base (1).
4. The three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive of claim 3, wherein: and a lead groove (1-5) is milled on the base (1), a lead extends into the lead groove (1-5), passes through the lead hole (1-3), and is welded on the copper foil on the wall surface of the inclined groove (1-2) to be used as a carrier of an input signal.
5. The three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive of claim 1 or 4, wherein: the base (1) is provided with an annular groove (1-4) matched with the base cover (2), and the base cover (2) can freely rotate in the annular groove (1-4).
6. The spiral IPMC driven three-degree-of-freedom parallel micro-motion platform as claimed in claim 5, wherein: the base cover (2) is provided with three base cover through holes (2-1), the three base cover through holes (2-1) are distributed in a circumferential array mode by taking the center of the base cover (2) as the circle center, and the base cover (2) is rotated to enable the three base cover through holes (2-1) to be located right above the three fixed supports (1-1).
7. The three-degree-of-freedom parallel micro-motion platform based on spiral IPMC drive of claim 1 or 6, wherein: and the voltage applied to the first spiral IPMC (3), the second spiral IPMC (5) and the third spiral IPMC (6) is 1-3V.
8. The spiral IPMC driven three-degree-of-freedom parallel micro-motion platform as claimed in claim 7, wherein: the mass of the movable platform (4) is 0-50 mg.
9. The working method of the three-degree-of-freedom parallel micro-motion platform based on the spiral IPMC drive as claimed in claim 8, wherein: forward/reverse voltage is applied to the first spiral IPMC (3) and the second spiral IPMC (5), and meanwhile, opposite voltage is applied to the third spiral IPMC (6) so as to realize forward/backward pitching of the top movable platform (4); applying a forward/reverse voltage to the first spiral IPMC (3) and simultaneously applying a reverse voltage to the second spiral IPMC (5) and the third spiral IPMC (6) so as to realize the right/left inclination of the top movable platform (4); simultaneously applying a forward/reverse voltage to said first, second and third spiral IPMC (3, 5, 6) to effect counter clockwise/clockwise rotation of the top moving platform (4).
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103143176A (en) * | 2013-03-12 | 2013-06-12 | 西安交通大学 | Three-degree-of-freedom bionic eye based on IPMC drive |
| CN103963066A (en) * | 2014-04-28 | 2014-08-06 | 哈尔滨工程大学 | Multi-freedom-degree mechanical grabber with simplified structure based on IPMC electric actuation material |
| CN106426268A (en) * | 2016-09-28 | 2017-02-22 | 中国科学院合肥物质科学研究院 | Octopus-tentacle-simulated curved and torsional flexible joint |
| CN108085639A (en) * | 2017-12-14 | 2018-05-29 | 浙江理工大学 | A kind of monolithic spiral shape ionic polymer metal composite material linear drive unit and preparation method thereof |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN110524523A (en) * | 2019-09-27 | 2019-12-03 | 南京林业大学 | A kind of modularization software manipulator |
| CN110625639A (en) * | 2019-09-16 | 2019-12-31 | 南京航空航天大学 | Software manipulator |
| CN111081862A (en) * | 2019-12-31 | 2020-04-28 | 清华大学 | Dielectric effect-based electrostrictive device and manufacturing method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6714858B2 (en) * | 2016-09-12 | 2020-07-01 | 株式会社デンソー | Actuator device |
-
2021
- 2021-09-07 CN CN202111042569.0A patent/CN113814961B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103143176A (en) * | 2013-03-12 | 2013-06-12 | 西安交通大学 | Three-degree-of-freedom bionic eye based on IPMC drive |
| CN103963066A (en) * | 2014-04-28 | 2014-08-06 | 哈尔滨工程大学 | Multi-freedom-degree mechanical grabber with simplified structure based on IPMC electric actuation material |
| CN106426268A (en) * | 2016-09-28 | 2017-02-22 | 中国科学院合肥物质科学研究院 | Octopus-tentacle-simulated curved and torsional flexible joint |
| CN108085639A (en) * | 2017-12-14 | 2018-05-29 | 浙江理工大学 | A kind of monolithic spiral shape ionic polymer metal composite material linear drive unit and preparation method thereof |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN110625639A (en) * | 2019-09-16 | 2019-12-31 | 南京航空航天大学 | Software manipulator |
| CN110524523A (en) * | 2019-09-27 | 2019-12-03 | 南京林业大学 | A kind of modularization software manipulator |
| CN111081862A (en) * | 2019-12-31 | 2020-04-28 | 清华大学 | Dielectric effect-based electrostrictive device and manufacturing method thereof |
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