CN2572716Y - Organic material coated high-energy x-ray focusing combined lens - Google Patents

Abstract

The utility model relates to an organic material coated high-energy x-ray focusing combined lens, which comprises a bedding substrate 1, an organic lens array 2, an electroformed cathode film 3, a mask absorber 4 and an air gap 5. The surface of the bedding substrate is coated with organic material dopes; a solidified and growing metallic film on the upper surface is served as the electroformed cathode; the upper surface of the electroformed cathode is coated with photoresist; a photo-etching, developing, film-hardening and growing metallic layer is served as the mask absorber. The organic material coated high-energy x-ray focusing combined lens is made by removing the photoresist and the metallic film under the photoresist and being directly etched by excimer laser collimated light beams. The utility model is composed of a plurality of plano-concave refracting units which are arranged. Due to the adoption of the excimer laser etching technique, the utility model has the advantages of large device depth-width ratio, steep and straight side wall, high dimension precision and low surface roughness, cross section manufacturing with various geometric shapes, easy batch manufacture and easy microminiaturization; the organic material can reduce cost, simplify preparing process, and promote the technical development of optical elements with microstructures taking non-metal materials as main bodies.

Description

Organic material high-energy X-ray focusing combined lens

Technical field: the utility model belongs to the X ray micro-optical device, relates to a kind of refraction of X-ray effect of utilizing to the high energy (＞5KeV) new-type element that focuses on of X-radiation.

Background technology: because a little less than the refraction too of X ray wave band all material, absorbs too by force, so make the X ray lens for a long time and be considered to impossible.In order to realize the focusing to X-ray beam, scientists has successively been developed glancing incidence X ray completely reflecting mirror, transmission-type X ray zone plate, multilayer film and crystal X ray Bragg-Fresnel element and X ray duct element etc.But these elements all are difficult to be used in the sigmatron wave band.Snigirev had reported a kind of X ray compound lens that can be used for the sigmatron wave band in 1996.This compound lens has many advantages, as the light path of need not turning back, high-temperature stability is good and easily cooling, simple and compact for structure, require low to the lens surface roughness.Therefore this element has wide practical use in the research of Science and Technology.In order to make this compound lens have good comprehensive optical property, its material selection, structure and manufacturing technology all are key links and are relative to each other.

High-energy X-ray focusing combined lens is domestic does not at present appear in the newspapers as yet.Chang Yong sigmatron compound lens is made by metal material in the world, be on the material of reguline metal, process dozens of to hundreds of measure-alike, to each other apart from being the column circular hole of constant.If the compound lens to this structure decomposes, the plano-concave that this compound lens is placed by a plurality of symmetries reflects the unit to constituting.Present existing manufacturing technology generally adopts ultraprecise computer control grinding, and this also is to select one of cylindric compound lens structural reason.Figure 1 shows that the high-energy X-ray focusing combined lens made with metallic aluminium (Department ofphysics, Oblin College, Oblin, OH44074), it is dimerous by aluminium (1) and air-gap (2).These lens are made with electric discharge machining method on aluminium.Circularhole diameter is 100 microns, and pitch of holes is approximately 25 microns.Made technology limitation, this textural association lens are difficult to do column circular hole size very little, and the circular hole axiality is difficult for making accurately.

Summary of the invention: the purpose of this utility model is to solve background technology to adopt metal material processing, can only make columniform lens arrangement because of limited by manufacture method, can not process arbitrary shape, and machining accuracy is low, be difficult for problem such as batch making.The utility model will provide a kind of high-energy X-ray focusing combined lens of making of organic material for this reason.

The utility model is to be rearranged by dozens of to hundreds of plano-concave refraction sequence of unit.The focal length size of compound lens is much larger than the thickness of compound lens.It comprises substrate base, organic substance lens arra, electroforming cathode thin film, mask absorber, air-gap, the organic substance lens arra is positioned at the top of substrate base and contacts with substrate base, the electroforming cathode thin film is positioned at the top of organic substance lens arra and contacts with the organic substance lens arra, the mask absorber is positioned at the top of electroforming cathode thin film and contacts with the electroforming cathode thin film, forms air-gap by substrate base, organic substance lens arra, electroforming cathode thin film, mask absorber.Substrate base adopts silicon chip, glass, pottery or the metal material except that aluminium, and the organic substance lens arra adopts polymeric material, and the electroforming cathode thin film adopts metal material, and the mask absorber adopts metal material.

Advantage of the present utility model is: the utility model solves the selection of prior art material, manufacturing technology and structural problem.Rearranged to hundreds of plano-concave refraction sequence of unit by dozens of, the focal length size of compound lens is much larger than the thickness of compound lens.Employing is based on the laser LIGA technology of quasi-molecule laser etching, and closet spare depth-to-width ratio is big, and sidewall is steep, the dimensional accuracy height, and surface roughness is low, can make the cross section of various geometries, is easy to batch making, and helps further microminaturization.Adopt organic material can reduce cost, simplify technology, and can promote technical development based on the Microstructure Optics element of nonmetallic materials as the material of sigmatron compound lens.

Description of drawings:

Fig. 1 is the prior art front view

Fig. 2 is the utility model device front view

Fig. 3 is the vertical view of Fig. 2

Embodiment: as shown in Figures 2 and 3, it comprises substrate base (1) the utility model organic material high-energy X-ray focusing combined lens, organic substance lens arra (2), electroforming cathode thin film (3), mask absorber (4), air-gap (5).Substrate base (1) can adopt silicon chip: i.e. the silicon chip in crystal orientation such as (111), (110) (100); Maybe can adopt glass: i.e. quartz glass, Pyrex glass or simple glass; Maybe can adopt pottery; Maybe can adopt metal: i.e. copper, titanium and alloy etc.The material that substrate base (1) is gone up the organic substance lens arra (2) of preparation is a polymeric material: can select trimethyl acrylic acid fat (PMMA), polyimides (PI), polycarbonate etc. for use.Select for use copper, titanium, nickel, gold or titanium oxide to make the material of electroforming cathode thin film (3).Adhesion type mask absorber (4) is selected the metal that the excimer laser of λ=193nm is had the higher absorption coefficient for use, and as gold, chromium, tungsten etc., the wavelength of excimer pulsed laser beam is 193nm.Thick photoresist is selected the AZP4903 positive photoresist for use.

Manufacturing process steps of the present utility model is as follows: (A), the substrate base clean, (B), apply one deck organic material coating in the spin of step (A) surface, (C), step (B) is placed in the baking oven solidifies, the temperature of solidifying, time can be set as required, (D), grow the layer of metal film as the electroforming negative electrode at the upper surface of step (C), (E), upper surface in step (D) applies one deck thick photoresist, (F), upper surface to step (E) carries out photoetching, develop, post bake, (G), upper surface growing metal layer in step (F), as adhesion type mask absorber, (H), remove the photoresist of step (G) upper surface and following metallic film thereof, (I), the upper surface that to finish (H) step carries out direct etching with excimer pulsed laser beam, finishes element manufacturing.

Claims (2)

1, organic material high-energy X-ray focusing combined lens, it comprises: air-gap (5), it is characterized in that: also include substrate base (1), organic substance lens arra (2), electroforming cathode thin film (3), mask absorber (4), organic substance lens arra (2) is positioned at the top of substrate base (1) and contacts with substrate base (1), electroforming cathode thin film (3) is positioned at the top of organic substance lens arra (2) and contacts with organic substance lens arra (2), mask absorber (4) is positioned at the top of electroforming cathode thin film (3) and contacts with electroforming cathode thin film (3), by substrate base (1), organic substance lens arra (2), electroforming cathode thin film (3), mask absorber (4) forms air-gap (5).

2, organic material high-energy X-ray focusing combined lens according to claim 1, it is characterized in that: substrate base (1) adopts silicon chip, glass, pottery or metal material, organic substance lens arra (2) adopts polymeric material, electroforming cathode thin film (3) adopts copper, titanium, nickel, gold or titania meterial, and mask absorber (4) adopts gold, chromium, tungsten metal material.

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