CN2559987Y - Vibrating beam type angular-rate sensor - Google Patents
Vibrating beam type angular-rate sensor Download PDFInfo
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- CN2559987Y CN2559987Y CN 02270981 CN02270981U CN2559987Y CN 2559987 Y CN2559987 Y CN 2559987Y CN 02270981 CN02270981 CN 02270981 CN 02270981 U CN02270981 U CN 02270981U CN 2559987 Y CN2559987 Y CN 2559987Y
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Abstract
A vibrating beam angular rate transducer calculates movement angular rate by changing the electrostatic charge in a capacitance through vibrating beam movement. The sensitive devices are the vibrating beam and the controlling circuit which are hung in a base through a steel wire. Electrode slices are arranged on the surface of the cubic column vibrating beam, and electrode slices which are corresponding one by one on the inner wall of the base constitute a driving capacitance C model - (3), a reading capacitance C model - (2), a damping capacitance C model - (4), and a motion signal capacitance C model - (1), wherein each capacitance is the component part of the controlling circuit. C model - (3) vibrates the vibrating beam while C model - (1) maintains the vibrating beam in normal working preparation status through closed-loop feedback. The movement of the measured body changes the capacity value of the C model - (2) to ensure the controlling circuit to obtain motion state output signal. The utility model has light weight, small size, long service life, high reliability and complete solid state, thus the whole use stability is greatly enhanced, and the stability of the proportional coefficient in complete temperature range can reach above 0.05%, and the zero drift can be smaller than 0.006 DEG/s/h.
Description
Technical field
The utility model relates to a kind of angular rate sensor, is meant a kind of mechanics sensor of measuring carrier at inertial space motion angular speed especially, and this sensor goes out the motion angular speed by measurement because of electrostatic charge change calculations in the kinetic electric capacity of the beam that shakes.
Background technology
At present, western developed countries such as America and Japan have been developed multiple vibration beam type angular rate sensor, list or the beam types that shake such as double-tone forked type, rectangular cross section or triangular section are arranged, these sensors all adopt piezoelectric transducer to finish sensing function, and promptly to be used to drive the transducer that shakes beam motion and read motor message all be to adopt piezoelectric ceramic piece to sensor.Piezoelectric transducer is simple in structure, cost is low though use, but because piezoelectric transducer temperature influence parameter changes greatly, cause the poor stability of some key technical index such as scale-up factor, the output zero-bit etc. of sensor, the typical proportion coefficient changes in total temperature-50 ℃+70 ℃ scope and reaches more than 5%, output zero drift 0.2 °/more than the s/h, make the range of application of sensor be subjected to limiting significantly.The relevant technologies parameter sees Table one.
Summary of the invention
The purpose of this utility model provides the shake beam motion of a kind of employing static driven, and adopts the capacitance measurement kinetic electrostatic charge of beam that shakes to change, and makes the utility model key technical index improve two orders of magnitude than prior art.
Designed a kind of vibration beam type angular rate sensor according to above-mentioned purpose, in metal shell, be provided with the Sensitive Apparatus support, Sensitive Apparatus is shake beam and the control circuit thereof that is installed in the pedestal, this beam that shakes is the square-section cube rod beam that shakes, pedestal is cube casing that is complementary with the beam that shakes, and the beam that shakes is installed in the pedestal; On the surface of beam that shakes, be manufactured with the fused quartz electrode slice, also be manufactured with the fused quartz electrode slice in the inwall corresponding position of pedestal.Wherein, be produced on the lip-deep fused quartz electrode slice of the beam that shakes and be positioned at cube column type and shake on four sides of beam, size and size are consistent with each other, have four; Fused quartz electrode slice on the base internal wall is corresponding mutually with electrode slice on the beam that shakes, and corresponding fused quartz electrode slice constitutes an electric capacity, comprises the capacitor C of the beam motor message that shakes when being used to read along the pedestal axial rotation
2, the capacitor C that is used to drive
3, be used to increase the capacitor C of damping
4, be used to measure the C of actuation movement feedback signal electric capacity
1, each electric capacity all is connected with control circuit, is the element of control circuit.
A kind of embodiment during assembling is, the molten English electrode slice in pedestal on the beam that shakes is provided with a tunnel type support, and the fused quartz electrode slice is positioned on the inwall of tunnel type support and pedestal.The beam that shakes then is suspended in the pedestal by supporting steel wire, and supporting wire is installed in the first-harmonic node place of the beam that shakes, and the fused quartz electrode slice is arranged between the first-harmonic node.
In control circuit, constitute the driving capacitor C
3Electrode slice be connected C when powering up with power supply and voltage expansion circuit respectively
3Generation makes the electrostatic force of the beam shake of shaking, and the shake of the beam that shakes makes capacitor C
1Produce a feedback signal, this feedback signal enters metering circuit and obtains V
FSignal; One road V
FSignal arrives gain amplifying circuit, another road V through error amplifying circuit again through rectification circuit
FSignal also enters gain amplifying circuit, two-way V behind frequency changer circuit and phase-shift circuit
FEnter voltage expansion circuit after the signal stack and arrive C again
3, Third Road V
FSignal is reconciled circuit output restituted signal to phase sensitivity behind the phase shift limiting amplifier.The shake of beam of shaking causes constituting reads capacitor C
2Electrode slice on electrostatic charge be that capacitance value changes, the signal of this variable quantity enters phase sensitivity again to proportional amplifier and reconciles circuit behind sensing circuit, after phase sensitivity is reconciled the circuit demodulation, deliver to the low pass amplifying circuit, obtain the output signal V of sensor movement state
OutIn addition, the signal of being exported by frequency changer circuit also has one the tunnel to enter phase-shift circuit, and the signal V after the output intake resistance modulation circuit generation modulation of ratio amplifying circuit
rBe transported to damping capacitor C
4Each element circuit is traditional ripe circuit in the described here control circuit.
Piezoelectric energy-conversion type vibration beam type sensor is in light weight, volume is little except keep adopting for the utility model, the characteristic of long service life, reliability height, all solid stateization, also increased substantially stability, scale-up factor can reach more than 0.05% at total temperature scope internal stability, zero drift can be less than 0.006 °/s/h, and the relevant technologies parameter sees Table two.
Description of drawings
Accompanying drawing 1 (1) is that the complete section assembling master of the utility model pedestal looks synoptic diagram, and accompanying drawing 1 (2) is that synoptic diagram is looked on the complete section left side of (1), and accompanying drawing 1 (3) is the parts branch unreeling side synoptic diagram of (1); Accompanying drawing 2 is theory diagrams of the utility model control circuit.
Embodiment
From the circuit block diagram of accompanying drawing 2 course of work of the present utility model as can be known.
At first, C
3, C
1The beam that shakes that constitutes drive with feedback circuit be a closed-loop stabilization shake loop, and provide signal source for other circuit.Wherein voltage expansion driving circuit 20 can produce a voltage jump V when powering on
DAnd be applied to capacitor C
3Two pole pieces 5,9 on, produce thus an electrostatic force make the beam that shakes begin the shake.The shake of beam of shaking makes capacitor C immediately
1Produce a feedback signal, obtain V through capacitance measurement circuit 18
FSignal.One road V
FSignal through rectification circuit 22 output and with reference signal V
RCompare and obtain a difference voltage Δ V
F, deliver to gain amplifying circuit 19 through error amplifying circuit 23 again; Another road V
FSignal also is sent to gain amplifying circuit 19 through entering behind the frequency changer circuit 21 after phase-shift circuit 17 is handled, and enters voltage expansion circuit after the two paths of signals stack and is sent to capacitor C again
3Two electrode slices, to keep the stable shake of the beam that shakes.Also has Third Road V in addition
FSignal is exported restituted signal to low pass amplifying circuit 28 behind phase shift limiting amplifier 24.Simultaneously, in order to keep the stable shake of the beam that shakes, also need certain damping parameter and process auxiliary drive, these are by damping capacitor C
4Provide, its course of work is that the signal of being exported by frequency changer circuit 21 has also entered phase-shift circuit 29, delivers to resistance with the output of ratio amplifying circuit then and reconciles circuit 30, reconciles the signal V after circuit will be modulated then
rDeliver to capacitor C
4Electrode on.
The shake of beam drives the electrode slice motion owing to shake, and the appearance value of the electric capacity of electrode slice composition is changed with shake track, chattering frequency.When the utility model remained static, its signal output was stationary value; When the utility model moves with measured body, the reacting condition of capacitor's capacity the state of measured body motion.Capacitor C
2The variation of appearance value is delivered to phase demodulation circuit 27 behind sensing circuit 25, proportional amplifier 26, just obtained the output signal V of measured body motion state again after the demodulation of low pass amplifying circuit
Out
And the effect of power source special 31 is to provide reference power source to voltage expansion driving circuit and resistance conciliation circuit, and the electrode slice on the Xiang Zhenliang provides reference power supply.
Table one: the typical vibrating beam type angular-rate sensor technical data of several use PZT (piezoelectric transducer)s
| Index name | ARS-C131--1A (watson company) | Angular rate sensor (ministry of electronics industry of Panasonic product) | VYRO (GE company) | Gyroscope ENV-05S (Murata Manufacturing Co. Ltd.) | NEC-HE (NEC household electrical appliance) |
| Maximum angular speed (°/s) | +100 | More than ± 100 | 2000 (can select) | ±90 | ±200 |
| Calibration factor (V °/s) | 0.1 | Arbitrarily | 0.1 | 0.03 | 0.05 |
| Resolution ratio (°/s) | 0.04 | ＜0.02 | 0.01 | 0.01 | 0.02 |
| Linearity (%FS) | 0.1 | ＜2 | ±1.0 | ±0.1 | 0.1 |
| Lag behind (%) | Do not have | -- | 0.1 | Do not have | 0.5 |
| Frequency characteristic (Hz) | 70 | 50 | 30 resonance points | -- | -- |
| Temperature drift (%/℃) | 0.5 | -- | -- | 0.1 | 0.15 |
| The serviceability temperature scope (℃) | -40～+70 | -20～+70 | -55～+85 | -20～+60 | -10～+60 |
| Start-up time (s) | 1 | ＜1 | -- | ＜1 | -- |
| Power supply | 5V DC20mA | 4.5V DC10mA | -- | 8～13.5 V DC13mA | -- |
| Size (mm) | 29×35×64 | 43×35×25 | 36×36×78 | 24×24×58 | 35×35×60 |
| Weight (g) | 110 | 55 | 135 | 41 | 130 |
| Shape | Tuning fork shape | Tuning fork shape | The square section | The equilateral triangle section | H shape |
Table two: the utility model measuring technology parameter
| Index name | XG-4A | XG-4B | XG-4C |
| Working power voltage (V) | ±15±0.1 | ±15±0.1 | ±36±1 |
| Working power electric current (mA) | ＜60 | ＜60 | ＜60 |
| Output voltage range (V) | 0～±10 | 0～±10 | 0～±30 |
| Measurement category (can select) (°/s) | 0～3600 | 0～3600 | 0～3600 |
| Output voltage zero drift (mV/h) (1 σ) | ＜±2 | ＜±1.5 | ＜±1 |
| Resolution ratio (°/s) | ＜0.015 | 0.015 | 0.015 |
| The linearity (%) | ＜0.5 | ＜0.2 | ＜0.5 |
| Cross-couplings (%) | ＜0.5 | ＜0.2 | ＜0.5 |
| Intrinsic frequency (Hz) | ＞120 | ＞120 | ＞120 |
| Damping ratio | 0.7±0.1 | 0.7±0.1 | 0.7±0.1 |
| Working life (h) | ＞3×10 5 | ＞3×10 5 | ＞3×10 5 |
| Storage period (year) | ＞8 | ＞8 | ＞8 |
| Appearance and size (mm) | 28×36×66 | 28×36×66 | 28×36×66 |
| Miniaturization (mm) | 26×36×50 | 26×36×50 | 26×36×50 |
| Total null voltage scope (mV) | ±10 | ±5 | ±3 |
Claims (7)
1, a kind of vibration beam type angular rate sensor is provided with the Sensitive Apparatus support in metal shell, and Sensitive Apparatus is characterized in that for being installed in beam that shakes (1) and the control circuit thereof in the pedestal (4)
The beam that shakes is the square-section cube rod beam that shakes, cube casing of pedestal for being complementary with the beam that shakes, and the beam that shakes is installed in the pedestal;
On the surface of the described beam that shakes, be manufactured with fused quartz electrode slice (5,6,7,8), also be manufactured with fused quartz electrode slice (9,10,11,12) in the inwall corresponding position of pedestal.
2, sensor according to claim 1 is characterized in that being produced on the lip-deep fused quartz electrode slice of beam that shakes and is positioned at cube column type and shakes on four sides of beam, and size and size are consistent with each other, have four; Fused quartz electrode slice on the base internal wall is corresponding mutually with electrode slice on the beam that shakes, shake when being configured for reading along the pedestal axial rotation capacitor C of beam motor message of fused quartz electrode slice (6,10)
2, electrode slice (5, the 9) capacitor C that is configured for driving
3, electrode slice (8,12) is configured for increasing the capacitor C of damping
4, electrode slice (7,11) is configured for measuring the C of actuation movement feedback signal electric capacity
1, each electric capacity is connected with control circuit.
3, sensor according to claim 2 is characterized in that the molten English electrode slice that centers on the beam that shakes in the pedestal is provided with a tunnel type support, and the fused quartz electrode slice is positioned on the inwall of tunnel type support and pedestal.
4, according to claim 2 or 3 described sensors, the beam that it is characterized in that shaking is suspended in the pedestal by supporting steel wire (2,3), and supporting wire is installed in the first-harmonic nodal point (15,16) of the beam that shakes and locates, and the fused quartz electrode slice is arranged between the first-harmonic node.
5,, it is characterized in that the driving capacitor C that electrode slice (5,9) constitutes according to claim 2 or 3 described sensors
3Be connected C when powering up with power supply (31) and voltage expansion circuit (20)
3Generation makes the electrostatic force of the beam shake of shaking, and the shake of the beam that shakes makes capacitor C
1Produce a feedback signal, this feedback signal enters metering circuit (18) and obtains V
FSignal; One road V
FSignal arrives gain amplifying circuit (19), another road V through error amplifying circuit (23) again through rectification circuit (22)
FSignal also enters gain amplifying circuit, two-way V behind frequency changer circuit (21) and phase-shift circuit (17)
FEnter voltage expansion circuit after the signal stack and arrive C again
3, Third Road V
FSignal is reconciled circuit (27) output restituted signal to phase sensitivity behind phase shift limiting amplifier (24).
6, sensor according to claim 5, the shake of the beam that it is characterized in that shaking cause the capacitor C of reading that electrode slice (6,10) constitutes
2Capacitance value change, the signal of this variable quantity enters phase sensitivity again to proportional amplifier (26) and reconciles circuit through sensing circuit (25) after, deliver to low pass amplifying circuit (28) after the demodulation of phase sensitivity conciliation circuit, obtains the output signal V of sensor movement state
Out
7, sensor according to claim 5 is characterized in that also having one the tunnel to enter phase-shift circuit (29) by the signal of frequency changer circuit (21) output, and the signal V after output intake resistance modulation circuit (30) the generation modulation of ratio amplifying circuit (26)
rBe transported to damping capacitor C
4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02270981 CN2559987Y (en) | 2002-06-06 | 2002-06-06 | Vibrating beam type angular-rate sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02270981 CN2559987Y (en) | 2002-06-06 | 2002-06-06 | Vibrating beam type angular-rate sensor |
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|---|---|
| CN2559987Y true CN2559987Y (en) | 2003-07-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02270981 Expired - Fee Related CN2559987Y (en) | 2002-06-06 | 2002-06-06 | Vibrating beam type angular-rate sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487776B (en) * | 2013-09-14 | 2018-10-02 | 西安奇维科技有限公司 | One kind being based on FPGA error calibration methods |
-
2002
- 2002-06-06 CN CN 02270981 patent/CN2559987Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487776B (en) * | 2013-09-14 | 2018-10-02 | 西安奇维科技有限公司 | One kind being based on FPGA error calibration methods |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |