CN2510248Y - Micro-assembling robot suitable for operating submillimeter-level micro-object - Google Patents

Micro-assembling robot suitable for operating submillimeter-level micro-object Download PDF

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Publication number
CN2510248Y
CN2510248Y CN 01252465 CN01252465U CN2510248Y CN 2510248 Y CN2510248 Y CN 2510248Y CN 01252465 CN01252465 CN 01252465 CN 01252465 U CN01252465 U CN 01252465U CN 2510248 Y CN2510248 Y CN 2510248Y
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China
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micro
switch
manipulator
vacuum
tool
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Expired - Fee Related
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CN 01252465
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Chinese (zh)
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黄心汉
王敏
陈国良
刘敏
吕遐东
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The micro-assembly robot suitable for the operation of the sub-millimeter minimal objects disclosed by the utility model consists of a main controller, a micro operation manipulator, a vacuum micro-tool and a microscope with a camera. The micro operation manipulator consists of a micro motion stage, which is provided with a limit switch and a zero position switch and is connected with a servo-motor with a photoelectric encoder. The manipulator controller consists of a multi-axial moving controlling card, an adapter panel and a driver, the three of which are connected successively. The multi-axial moving controlling card is connected to the main controller. The vacuum micro-tool consists of a pressure control valve, a first switch, a second switch, a vacuum generator and a sucker. The vacuum micro-tool is a microcontroller, which is connected respectively to the main controller, the pressure control valve, the first and the second switches. The utility model can easily and effectively make the automatic and semi-automatic operation and the assembly to the sub-millimeter minimal objects, the positioning accuracy of which can reach 1-5Mum and the moving range of the three-dimensional space can reach 50-150mm. The utility model has a broad application prospect and considerable social and economic benefits.

Description

Be applicable to little assembly robot of submillimeter level small items operation
Technical field
The utility model belongs to the Robotics field, specifically, it relates to a kind of little assembly robot that is applicable to the operation of submillimeter level small items, be a kind ofly can operate little assembly robot with assembling work to the submillimeter level object, this robot is made up of microoperation manipulator, vacuum micro-tool, micro-vision and controller four parts, and it can be used for the choosing of submillimeter level microbarn, diamond and various little parts and chooses, processes and assemble.
Background technology
In recent years, the experimental study that the overseas utilization robot is operated the submillimeter level particulate objects has been obtained certain progress, " being used to finish the robot system of submillimeter level extracting and operation task " (1994) as Australian R.A.Russell research, the positioning accuracy of its experimental provision is 0.05mm, and can be that 0.2mm operates to the target of 2mm to size." the miniature end effector of binding type that is used for miniature operation " (1997) of people such as the F.Arai research of Japan Nagoya university, a kind of novel method of putting of picking up that is used for microoperation has been proposed, pressure that this method produces based on variations in temperature in the micro-hole changes, and the absorption affinity that makes the end effector surface changes and picks up and put down object." using the visual guidance microcosmic assembling of light microscope and active vision technology " (1997) of people such as B.Vikramaditya research adopt the visual servo motion can obtain the repeatable accuracy of submillimeter level, and experimental result shows that its repeatable accuracy reaches 8 μ m.Dynamics and operating principle and experimental technique between particulate objects have been analyzed in " the machinery assembling of particulate objects three-dimensional structure " (1997) of people such as the Hideki Miyazaki of Tokyo Univ Japan research.
Domesticly carry out having of micro-manipulating robot research, the injection cell that is used for biomedical engineering of Nankai University, BJ University of Aeronautics ﹠ Astronautics's research and the micro-manipulating robot of transgeneic procedure, the jiggle robot of Guangdong University of Technology's research can be used for micromachined, their common feature is the precision height, range of movement is little and lower-mobility, still can not satisfy the requirement of little assembling.Simultaneously, domesticly at present little assembling is also lacked effective instrument (little folder), mostly adopt manual operations and utilize extremely easy instrument (as with the Electrostatic Absorption of animal hair to microbarn) and carry out little assembling by microscope, operation easier is big, and reliability and efficient are low.
In a word, though the domestic and international at present research work to micro-manipulating robot has obtained some progress, there are the following problems but also: 1) only focus on the wherein research of certain part rather than the integral body of system, as dynamic analysis, operating principle and the test method etc. of miniature end effector, active vision, little assembling process; 2) for system research two kinds of situations are arranged, the one, add certain device construction system of oneself studying by existing robots, the 2nd, at the system of certain specific object structure, as be used for the injection cell of biomedical engineering and the micro-manipulating robot of transgeneic procedure, be used for the jiggle robot of micromachined etc.; 3) range of movement is little, has only micron order usually, can not satisfy the required three-dimensional range of movement of little assembling.
Australian R.A.Russell research " being used to finish the robot system of submillimeter level extracting and operation task " (sees R.Andrew Russell.A robotic system forperforming sub-millimeter grasping and manipulation tasks.Robotics and Automation Systems, 1994-13:209-218), it is formed by main control system, manipulator with as little folder of end effector.Its manipulator adopts parallel frame for movement, and its paw (little folder) is positioned at parallel-connection structure framework inside, can not stretch out, and the particulate objects that therefore can only be opposite on the inner table top of its framework is operated, and space is restricted, and can't cooperate with micro-vision.Its manipulator adopts the drawing structure of spring, drives with stepper motor, and its pulse equivalency is 0.037mm, and the positioning accuracy of system can only reach 0.05mm; Its little folder is to adopt two to refer to folder tweezer mode, can't overcome the adhesion strength (comprising electrostatic force, Van der Waals force and surface tension) between finger tip and the particulate objects, therefore can be very difficult when the release microparticles object.
The utility model content
The purpose of this utility model is to provide a kind of little assembly robot that is applicable to the operation of submillimeter level small items, the space of this robot is open, and can match with micro-vision easily, satisfy the technological requirement of little assembling, and this robot positioning accuracy height, its end effector (vacuum micro-tool) can overcome the adhesion strength between finger tip and the particulate objects.
For realizing above-mentioned utility model purpose, the little assembly robot that is applicable to that the submillimeter level small items is operated of the present utility model comprises main control system, microoperation manipulator, vacuum micro-tool, has the microscope of camera, and described microoperation manipulator, vacuum micro-tool, microscope are connected with main control system with image pick-up card by manipulator controller, vacuum micro-tool controller respectively; Described microoperation manipulator is combined by micromotion platform, and described micromotion platform is provided with by the limit switch of the driven by servomotor that has photoelectric encoder and zero-bit switch; Described manipulator controller is made up of the multi-axis motion control card, keyset and the driver that link to each other successively, and multi-axis motion control card is connected with main control system, and driver and photoelectric encoder and servomotor interconnect; Described vacuum micro-tool is made of pressure-regulating valve, first switch, second switch, vacuum generator, vacuum generator is between two switches, suction pipe links to each other with vacuum generator by vacuum hose, and first switch links to each other with pressure source outside the system by pressure-regulating valve; Described vacuum micro-tool controller is a single-chip microcomputer, and it links to each other with main control system, pressure-regulating valve and first and second switch respectively.
Above-mentioned micromotion platform can be made of three high accuracy roller screw mandrel micromotion platforms, and first switch and second switch can be selected two-port valve for use.
The utility model is complete, a system with practicality that Robotics, microoperation technology, micro manipulator tool (being vacuum micro-tool) and micro-vision are organically combined.Its manipulator adopts the fisher's formula structure, and its paw (being vacuum micro-tool) is installed in the end of manipulator, and its space is open, can cooperate with micro-vision easily, satisfies the technological requirement of little assembling.The designed manipulator of the utility model can adopt high accuracy roller screw mandrel micromotion platform to combine, and with the AC servo control that has position feedback (being detected by photoelectric encoder), its positioning accuracy can reach 0.002mm.And the end effector that the utility model adopted, be that vacuum micro-tool designs according to vacuum adsorption principle, size by positive/negative pressure in the control suction pipe, can overcome the adhesion strength between pipette tip and the particulate objects effectively, thereby draw reliably and the release microparticles object, more convenient to operate.
In a word, the utility model can make things convenient for, efficiently the submillimeter level small items be carried out automatically and semi-automatic operation and assembling work, preparation as microbarn, the measurement of diamond and miniature parts, letter sorting, processing and assembling etc., its positioning accuracy can reach 1~5 μ m, and three-dimensional range of movement can reach 50~150mm.Along with high-tech product is accelerated day by day to the trend of microminiaturization development, application prospect of the present utility model and economic results in society are considerable.
Description of drawings
Below in conjunction with accompanying drawing the utility model is described in further detail.
Fig. 1 is the general structure schematic diagram of the utility model based on little assembly robot of micro-vision;
Fig. 2 is the syndeton schematic diagram of vacuum micro-tool and controller thereof among Fig. 1;
Fig. 3 is manipulator controller and a syndeton schematic diagram thereof among Fig. 1.
The specific embodiment
As shown in Figure 1, the utility model is made up of main control system 1, manipulator controller 2, microoperation manipulator 3, vacuum micro-tool controller 4, vacuum micro-tool 5, image pick-up card 7 and the microscope 8 that has a camera, and microoperation manipulator 3, vacuum micro-tool 5, microscope 8 are connected with main control system 1 with image pick-up card 7 by manipulator controller 2, vacuum micro-tool controller 4 respectively.Vacuum micro-tool can be opposite on the operating platform 6 small items and operate.Wherein, main control system 1, manipulator controller 2, vacuum micro-tool controller 4 constitute controller part of the present utility model, and image pick-up card 7 constitutes micro-vision part of the present utility model with the microscope 8 that has camera.
In the present embodiment, manipulator 3 is combined by a plurality of micromotion platforms, adopting three positioning accuracies is 2 μ m, and range of movement is that the high accuracy roller screw mandrel micromotion platform of 50~150mm constitutes three-dimensional micromotion platform, to satisfy the requirement of three-dimensional location of manipulator X-Y-Z and range of movement.Limit switch and zero-bit switch are installed on the micromotion platform, and are directly driven by the AC servo motor that has photoelectric encoder, photoelectric encoder provides the Position And Velocity feedback information for controller, thereby guarantees that manipulator has accurate Position And Velocity control.The control of manipulator attitude can be decided according to the needs of practical application, common little assembling is less demanding to attitude, the utility model can design a kind of anchor clamps of adjustable angle, it is installed on the three-dimensional micromotion platform or the suction pipe bending of vacuum micro-tool had a certain degree to satisfy the requirement of attitude.
Vacuum micro-tool 5 is end effectors of microoperation manipulator 3, is the instrument of drawing and discharge submillimeter level small items or micro workpiece in little assembly manipulation.According to utility model people's research, when object was the submillimeter level particulate objects, the gravity of object no longer played a leading role, and electrostatic force, Van der Waals force (being intermolecular active force) and capillary influence are much larger than the influence of gravity.At this moment, adopt conventional folder tweezer mode to be difficult to meet the demands.The utility model adopts the vacuum adsorption principle design, under the control of single-chip microcomputer 22, can produce the positive and negative air-pressure that is of moderate size in pipette tip, thereby finishes reliable absorption and accurate placement the to micro workpiece automatically.As shown in Figure 2, vacuum micro-tool is made of pressure-regulating valve 20, first switch 15, second switch 16 and vacuum generator 17 and suction pipe 19.Suction pipe 19 links to each other with vacuum generator 17 by vacuum hose 18, and first switch 15 joins by the pressure source 21 outside pressure-regulating valve 20 and the system, and first and second switch 15,16 can be selected two-port valve for use.Vacuum micro-tool controller 4 is made of single-chip microcomputer 22 and control corresponding software thereof.Single-chip microcomputer 22 links to each other with pressure-regulating valve 20 with two switches 15,16 respectively.Main control system sends instruction according to the requirement of assembly technology to single-chip microcomputer, the control signal of single-chip microcomputer output is controlled pressure control valve and first switch and second switch respectively, make vacuum generator produce negative pressure or malleation air-flow, draw small items when producing negative pressure, discharge small items when producing malleation.The size of positive/negative pressure is regulated by pressure-regulating valve, makes the end of suction pipe produce the positive and negative air-pressure that is of moderate size, thereby draws or place small items reliably.
The controller of little assembly robot is made of two-level computer system, host computer is that main control system 1 can be selected PC or industrial computer for use, it is mainly finished microoperation manipulator 3 and controls with the coordination of vacuum micro-tool 5, the safety of system and management, the collection of micro-image, demonstration and demarcation.Slave computer comprises manipulator controller 2 and vacuum micro-tool controller 4.
The manipulator controller is made up of multi-axis motion control card 9, keyset 10, driver 11, servomotor 13 and photoelectric encoder 12, and their connected mode as shown in Figure 3.Multi-axis motion control card 9 is connected with main control system 1 by the ISA/PCI bus, accept the instruction of main control system, by keyset 10 each control parameter and data are sent into corresponding driver 11, receive the position feedback information of photoelectric encoder 12 (by driver and keyset) simultaneously, make system form close-loop control mode, thereby improve control accuracy.Driver 11 is by the control parameter and the data of keyset 10 reception multi-axis motion control cards 9, for each servomotor 13 provides power source.The three-dimensional micromotion platform 14 of each servomotor 13 direct driving device hand, thus the coordination that realizes three-dimensional position, speed and acceleration is controlled.
The vacuum micro-tool controller by single-chip microcomputer 22 finish with the communicating by letter of main frame, and output to the control signal of pressure-regulating valve 21, first switch 15 and second switch 16.
Micro-vision is made of microscope 8, image pick-up card 7 and the main control system 1 of band camera.Be installed in the dynamic image of small items, vacuum micro-tool and assembly manipulation process thereof on the camera picked-up workbench on the microscope, image pick-up card 7 becomes digital image information to send into main control system 1 image transitions.Functions such as the detection of system calibrating, coordinate transform, movable scale and workpiece and demonstration are finished by main control system operation related software.

Claims (3)

1. little assembly robot that is applicable to submillimeter level small items operation, comprise main control system, manipulator, little folder, it is characterized in that: this robot also comprises the microscope (8) that has camera, described manipulator is microoperation manipulator (3), described little folder is vacuum micro-tool (5), and microoperation manipulator (3), vacuum micro-tool (5) and microscope (8) are connected with main control system (1) by manipulator controller (2), vacuum micro-tool controller (4) and image pick-up card (7) respectively;
Described microoperation manipulator (3) is combined by a plurality of micromotion platforms (14), described micromotion platform is provided with by the servomotor that has photoelectric encoder (12) (13), driver (11), limit switch and zero-bit switch, and servomotor (13) drives limit switch and zero-bit switch by driver (11);
Described manipulator controller (2) is made up of the multi-axis motion control card (9), keyset (10) and the driver (11) that link to each other successively, multi-axis motion control card (9) is connected with main control system (1), and driver (11) interconnects with photoelectric encoder (12) and servomotor (13);
Described vacuum micro-tool (5) is made of pressure-regulating valve (20), first switch (15), second switch (16), vacuum generator (17), vacuum generator (17) is positioned between two switches (15,16), suction pipe (19) links to each other with vacuum generator (17) by vacuum hose (18), and first switch (15) passes through pressure-regulating valve (20) and links to each other with pressure source (21) outside the system;
Described vacuum micro-tool controller (4) is single-chip microcomputer (22), and described single-chip microcomputer links to each other with main control system (1), pressure-regulating valve (20) and first and second switch (15,16) respectively.
2. the little assembly robot that is applicable to the operation of submillimeter level small items according to claim 1, it is characterized in that: described micromotion platform is made of three high accuracy roller screw mandrel micromotion platforms.
3. the little make-up machinery people who is applicable to the operation of submillimeter level small items according to claim 1 and 2, it is characterized in that: first switch (15) and second switch (16) are two-port valve.
CN 01252465 2001-11-18 2001-11-18 Micro-assembling robot suitable for operating submillimeter-level micro-object Expired - Fee Related CN2510248Y (en)

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Cited By (11)

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CN100349704C (en) * 2005-10-20 2007-11-21 中国科学技术大学 Electrostatic force driven minisized tri-arm gripping device
CN101984038A (en) * 2010-09-10 2011-03-09 北京航空航天大学 Pneumatic micro-operation device for tiny organisms
CN102581837A (en) * 2012-03-28 2012-07-18 中国科学院自动化研究所 Vacuum clamping device for micro parts
CN102873523A (en) * 2012-09-13 2013-01-16 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
US8959833B2 (en) 2004-08-26 2015-02-24 Monsanto Technology Llc Methods of seed breeding using high throughput nondestructive seed sampling
US8997398B2 (en) 2006-03-02 2015-04-07 Monsanto Technology Llc Automated high-throughput seed sampler and methods of sampling, testing and bulking seeds
US9027278B2 (en) 2006-03-02 2015-05-12 Monsanto Technology Llc Automated contamination-free seed sampler and methods of sampling, testing and bulking seeds
CN106426085A (en) * 2016-10-28 2017-02-22 上海大学 High-throughput multi-mode representation system and method based on micro-nano manipulation robot
CN108155127A (en) * 2017-12-27 2018-06-12 昆山思雷电子科技有限公司 A kind of die bond ancillary equipment and bonder
US10132725B2 (en) 2004-08-26 2018-11-20 Monsanto Technology Llc Automated seed sampler and methods of sampling, testing and bulking seeds
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Cited By (24)

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US9986699B2 (en) 2004-08-26 2018-06-05 Monsanto Technology Llc Methods of seed breeding using high throughput nondestructive seed sampling
US11530963B2 (en) 2004-08-26 2022-12-20 Monsanto Technology Llc Automated seed sampler and methods of sampling, testing and bulking seeds
US11006593B2 (en) 2004-08-26 2021-05-18 Monsanto Technology Llc Methods of seed breeding using high throughput nondestructive seed sampling
US10775275B2 (en) 2004-08-26 2020-09-15 Monsanto Technology Llc Automated seed sampler and methods of sampling, testing and bulking seeds
US10132725B2 (en) 2004-08-26 2018-11-20 Monsanto Technology Llc Automated seed sampler and methods of sampling, testing and bulking seeds
US8959833B2 (en) 2004-08-26 2015-02-24 Monsanto Technology Llc Methods of seed breeding using high throughput nondestructive seed sampling
CN100349704C (en) * 2005-10-20 2007-11-21 中国科学技术大学 Electrostatic force driven minisized tri-arm gripping device
US11293840B2 (en) 2006-03-02 2022-04-05 Monsanto Technology Llc Automated contamination-free seed sampler and methods of sampling, testing and bulking seeds
US9383291B2 (en) 2006-03-02 2016-07-05 Monsanto Technology Llc Automated contamination-free seed sampler and methods of sampling, testing and bulking seeds
US8997398B2 (en) 2006-03-02 2015-04-07 Monsanto Technology Llc Automated high-throughput seed sampler and methods of sampling, testing and bulking seeds
US9551636B2 (en) 2006-03-02 2017-01-24 Monsanto Technology Llc Automated high-throughput seed sampler and methods of sampling, testing and bulking seeds
US11357159B2 (en) 2006-03-02 2022-06-14 Monsanto Technology Llc Automated high-throughput seed sampler and methods of sampling, testing and bulking seeds
US9027278B2 (en) 2006-03-02 2015-05-12 Monsanto Technology Llc Automated contamination-free seed sampler and methods of sampling, testing and bulking seeds
US10254200B2 (en) 2006-03-02 2019-04-09 Monsanto Technology Llc Automated contamination-free seed sampler and methods of sampling, testing and bulking seeds
US10542661B2 (en) 2006-03-02 2020-01-28 Monsanto Technology Llc Automated high-throughput seed sampler and methods of sampling, testing and bulking seeds
US10705102B2 (en) 2010-07-20 2020-07-07 Monsanto Technology Llc Automated systems for removing tissue samples from seeds, and related methods
CN101984038A (en) * 2010-09-10 2011-03-09 北京航空航天大学 Pneumatic micro-operation device for tiny organisms
CN101984038B (en) * 2010-09-10 2013-04-03 北京航空航天大学 Pneumatic micro-operation device for tiny organisms
CN102581837A (en) * 2012-03-28 2012-07-18 中国科学院自动化研究所 Vacuum clamping device for micro parts
CN102873523A (en) * 2012-09-13 2013-01-16 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
CN102873523B (en) * 2012-09-13 2014-10-22 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
CN106426085B (en) * 2016-10-28 2019-01-11 上海大学 High-throughput multi-mode based on micro-nano operation robot characterizes system and method
CN106426085A (en) * 2016-10-28 2017-02-22 上海大学 High-throughput multi-mode representation system and method based on micro-nano manipulation robot
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