CN106426085A - High-throughput multi-mode representation system and method based on micro-nano manipulation robot - Google Patents
High-throughput multi-mode representation system and method based on micro-nano manipulation robot Download PDFInfo
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- CN106426085A CN106426085A CN201610962971.3A CN201610962971A CN106426085A CN 106426085 A CN106426085 A CN 106426085A CN 201610962971 A CN201610962971 A CN 201610962971A CN 106426085 A CN106426085 A CN 106426085A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
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- Analysing Materials By The Use Of Radiation (AREA)
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Abstract
The invention discloses a high-throughput multi-mode representation system and method based on a micro-nano manipulation robot. The high-throughput multi-mode representation system based on the micro-nano manipulation robot is applied under a scanning electron microscope and mainly comprises the micro-nano manipulation robot, a testing unit switching device and multi-mode testing units. The method adopted by the system comprises the following steps of: quickly locking a destination by using the large visual field search capability of the scanning electron microscope; driving the micro-nano manipulation robot to carry out accurate micro manipulation on represented objects; and realizing rapid switching of the multi-mode testing units by controlling the testing unit switching device to achieve the purposes of automatic change of end effectors and concurrent implementation of multiple performance representation, thereby realizing high-throughput multi-mode representation testing. The high-throughput multi-mode representation system has the characteristics of high-throughput multi-mode representation capability, fast manipulation speed, high representation efficiency and the like.
Description
Technical field
The invention discloses a kind of high flux multi-mode based on micro-nano operation robot characterizes system and method, belong to micro-
Receive technology, micro-nano operating technology, technical field of measurement and test.
Background technology
Laboratory facilities are the important method of material science research, can be to new synthesis material using different experimental apparatus and method
The performance of material or micro structure is tested and is characterized, so as to realize the foundation of material large database concept, while being also " material gene
The target pursued by group " concept.At present, atomic force microscope（AFM）It is the instrument of conventional material or micro structure test sign,
Its resolution possesses excellent power or electric performance test ability and microcell three-dimensional appearance imaging capability up to atomic level.But,
Due to the restriction of its image-forming principle and structure, also constrain the features such as its sweep limits is little, test speed is slow, test mode is single
Further develop.Scanning electron microscope has the pattern imaging capability that field range is big, quick locomotivity is strong and good,
Characterize in material morphology and analysis field has obvious advantage, but which is only limitted to morphology characterization and component analyses, it is impossible to material
Material micro-property is characterized.Meanwhile, single performance characterization pattern must carry out multiple recanalization and setting to sample and equipment,
Increased testing time and difficulty.And the appearance of micro-nano operation robot, expand under minute yardstick and object of study has been operated
With the ability for characterizing so that micro Nano material research becomes more diversification.Iron-enriched yeast technology pursues high speed, high efficiency
Target, it is desirable to realize the maximization of experimental data amount within a short period of time, therefore also requiring that further improves material characterization technology
Single-mode and method.
Content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the invention provides a kind of high flux based on micro-nano operation robot
Multi-mode characterizes system and method, solves that existing test instrunment representation pattern is single, characterize the low problem of efficiency, while will be micro-
Operation robot of receiving is integrated to be carried out the test of high flux multi-mode under a scanning electron microscope and can realize fast search target, precisely
Microcell manipulation and the function of multidimensional performance characterization, possess high flux multi-mode and characterize ability, and speed is fast, characterize effect with manipulating
The features such as rate is high.
In order to achieve the above object, idea of the invention is that：Micro-nano operation robot is arranged on scanning electron microscope
Interior, test cell switching device is respectively mounted on its motion platform, multi-mode test cell is respectively fixedly connected with and switches in test cell
On the different station fixture of device, different end effectors is separately mounted on multi-mode test cell.Using scanning electron
The big visual field search capability quick lock in target of microscope, drives micro-nano operation robot to carry out precisely micro- manipulation to characterizing target,
The rapid translating of multi-mode test cell is realized by automatically controlling test cell switching device, reaches end effector automatically more
The purpose with multi-mode performance test parallel practice is changed, so as to realize high flux multi-mode sign.
Conceived according to foregoing invention, the present invention adopts following technical proposals：
A kind of high flux multi-mode based on micro-nano operation robot characterizes system, applies under a scanning electron microscope, micro-nano
Operation robot is respectively mounted test single in scanning electron microscope on the motion platform of the micro-nano operation robot
First switching device, multi-mode test cell is respectively fixedly connected with the different station fixture of test cell switching device, different end
End executor is separately mounted on multi-mode test cell.
A kind of high flux multi-mode characterizing method based on micro-nano operation robot, what application was above-mentioned operates machine based on micro-nano
The high flux multi-mode of device people characterizes system, and operating procedure is as follows：
1）Target is characterized using the big visual field search capability quick lock in of scanning electron microscope, and A1 is numbered to which,
A2 ..., An；
2）The motion platform of control micro-nano operation robot so as to be moved to sign target area, using micro-nano operation robot
Precisely micro- manipulation is carried out to characterizing target, obtain the orientation needed for characterization test and attitude；
3）Drive the test cell switching device on micro-nano operation robot motion platform, fast automatic conversion testing unit switching
Different fixture stations on device, so as to change the multi-mode test cell on different station fixture；
4）The different targets that characterize are existed by the multi-mode test cell on control different station fixture using the cooperation of many end effectors
Concurrent testing is carried out under given pattern；
5）Repeat the above steps 2）To step 4）, realize surveying while carrying out precisely micro- manipulation and multi-mode to each sign target and characterizing
Examination；
6）Real-time parallel processes the test data for obtaining under each pattern, transmits to integrated terminal upper computer, sets up large database concept,
So as to realize carrying out multi-mode iron-enriched yeast to characterizing target.
The present invention compared with prior art, obviously projects substantive distinguishing features and remarkable advantage with following：
The present invention for existing test instrunment characteristic manner single, characterize the low problem of efficiency, will be integrated for micro-nano operation robot
Carry out high flux multi-mode test under a scanning electron microscope, fast search target, the manipulation of accurate microcell and multidimensional can be realized
The function of performance characterization, possesses high flux multi-mode and characterizes ability, and the features such as have that manipulation speed is fast, characterize efficiency high.
Description of the drawings
Fig. 1 is the high flux multi-mode characterizing method basic flow sheet based on micro-nano operation robot.
Fig. 2 is that the high flux multi-mode based on micro-nano operation robot characterizes system block diagram.
Fig. 3 is the iron-enriched yeast platform schematic diagram based on micro-nano operation robot.
Fig. 4 be based on the high pass of micro-nano operation robot measure one's own ability electrical property characterize flow chart.
Specific embodiment
Below in conjunction with the accompanying drawings the preferred embodiment in the present invention is clearly and completely described, it is clear that described reality
Apply a part of embodiment that example is only the present invention.
Referring to Fig. 2 ~ Fig. 3, a kind of high flux multi-mode based on micro-nano operation robot characterizes system, applies in scanning electricity
Under sub- microscope, micro-nano operation robot is arranged in scanning electron microscope, the motion platform of the micro-nano operation robot
On be respectively mounted test cell switching device, multi-mode test cell is respectively fixedly connected with the different station in test cell switching device
On fixture, different end effectors is separately mounted on multi-mode test cell.
Referring to Fig. 1 ~ Fig. 4, a kind of high pass based on micro-nano operation robot is measured one's own ability power mode characterizing method, applies above-mentioned
High flux multi-mode based on micro-nano operation robot characterizes system, and operating procedure is as follows：
1）Target is characterized using the big visual field search capability quick lock in of scanning electron microscope, and A1, A2 is numbered to which,
A3；
2）The motion platform of control micro-nano operation robot so as to be moved to sign target area A1, operate machine using micro-nano
People carries out precisely micro- manipulation to characterizing target, obtains the orientation needed for characterization test and attitude；
3）The test cell switching device on micro-nano operation robot motion platform is driven, fast automatic switch fixture is to force mode
Test station, drives end effector cooperation to make parallel power performance test to characterizing target using force mode test cell, obtains
Characterize each Young's moduluss of target；
4）The test cell switching device on micro-nano operation robot motion platform is driven, fast automatic switch fixture is to power mode
Test station, drives end effector cooperation to make parallel electric performance test to characterizing target using power mode test cell, obtains
Characterize each electrical conductivity of target；
5）Repeat the above steps 2）To step 4）, realize characterizing while carrying out precisely micro- manipulation and power power mode to each sign target
The purpose of test；
6）Real-time parallel processes the test data for obtaining under each pattern, transmits to integrated terminal upper computer, sets up large database concept,
So as to realize carrying out power power mode iron-enriched yeast to characterizing target.
Embodiments of the invention by integrated for micro-nano operation robot under a scanning electron microscope, power is carried out to object of study
Power mode iron-enriched yeast, can realize the function of fast search target, the manipulation of accurate microcell and multidimensional performance characterization, with manipulation
Speed is fast, the features such as characterize efficiency high.
Claims (2)
1. a kind of high flux multi-mode based on micro-nano operation robot characterizes system, applies under a scanning electron microscope, its
It is characterised by：Micro-nano operation robot is arranged in scanning electron microscope, on the motion platform of the micro-nano operation robot
Test cell switching device is respectively mounted, multi-mode test cell is respectively fixedly connected with the different station folder in test cell switching device
On tool, different end effectors is separately mounted on multi-mode test cell.
2. a kind of high flux multi-mode characterizing method based on micro-nano operation robot, apply in claim 1 based on micro-nano
The high flux multi-mode of operation robot characterizes system, it is characterised in that operating procedure is as follows：
1）Target is characterized using the big visual field search capability quick lock in of scanning electron microscope, and A1 is numbered to which,
A2 ..., An；
2）The motion platform of control micro-nano operation robot so as to be moved to sign target area, using micro-nano operation robot
Precisely micro- manipulation is carried out to characterizing target, obtain the orientation needed for characterization test and attitude；
3）Drive the test cell switching device on micro-nano operation robot motion platform, fast automatic conversion testing unit switching
Different fixture stations on device, so as to change the multi-mode test cell on different station fixture；
4）The different targets that characterize are existed by the multi-mode test cell on control different station fixture using the cooperation of many end effectors
Concurrent testing is carried out under given pattern；
5）Repeat the above steps 2）To step 4）, realize surveying while carrying out precisely micro- manipulation and multi-mode to each sign target and characterizing
The purpose of examination；
6）Real-time parallel processes the test data for obtaining under each pattern, transmits to integrated terminal upper computer, sets up large database concept,
So as to realize carrying out multi-mode iron-enriched yeast to characterizing target.
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| CN201610962971.3A CN106426085B (en) | 2016-10-28 | 2016-10-28 | High-throughput multi-mode based on micro-nano operation robot characterizes system and method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110270978A (en) * | 2019-07-15 | 2019-09-24 | 哈尔滨工业大学 | Micro-nano robot report control platform system under a kind of more physical energy fields coupling |
| CN114571458A (en) * | 2022-03-21 | 2022-06-03 | 苏州大学 | Micro-nano robot assembly track learning method based on dynamic motion primitives |
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| CN2510248Y (en) * | 2001-11-18 | 2002-09-11 | 华中科技大学 | Micro-assembling robot suitable for operating submillimeter-level micro-object |
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| US8229080B2 (en) * | 2006-11-10 | 2012-07-24 | Verizon Patent And Licensing Inc. | Testing and quality assurance of multimodal applications |
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| CN110270978A (en) * | 2019-07-15 | 2019-09-24 | 哈尔滨工业大学 | Micro-nano robot report control platform system under a kind of more physical energy fields coupling |
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| CN114571458B (en) * | 2022-03-21 | 2022-11-15 | 苏州大学 | Micro-nano robot assembly track learning method based on dynamic motion elements |
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