CN2508215Y - Polarization beam splitting shearing interferometer - Google Patents
Polarization beam splitting shearing interferometer Download PDFInfo
- Publication number
- CN2508215Y CN2508215Y CN 01270370 CN01270370U CN2508215Y CN 2508215 Y CN2508215 Y CN 2508215Y CN 01270370 CN01270370 CN 01270370 CN 01270370 U CN01270370 U CN 01270370U CN 2508215 Y CN2508215 Y CN 2508215Y
- Authority
- CN
- China
- Prior art keywords
- polarization beam
- polarization
- beam splitting
- apparatuss
- interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model relates to a polarization beam splitting dislocation type interferometer. One end of the interferometer is provided with a polarizer 1 with definite laser input window position and interference light output window position, a parallel polarization beam splitter prism 2, and an anti-clockwise 45 degree reciprocal optical rotator 3 and a clockwise 45 degree reciprocal optical rotator 4 side by side are arranged along the tested light path direction in sequence, then a 45 degree nonreciprocal optical rotator 5, a parallel polarization beam splitter prism 6, and a 45 degree nonreciprocal optical rotator 7 are arranged, and finally a fixed mirror 8 taking half of the end surface is arranged. The detecting light beam is emitted from the window on the other half of the end surface, and then returns back when reaching a measuring mirror 9. Because of adopting the polarization beam splitting dislocation technology, the interferometer has the ability of suppressing the reflected light to return back to the light source, and the suppression ratio is up to over 60 dB, thereby ensuring that the light source is not influenced by the reflected light. The interferometer has simple structure, convenience for operation, low cost, and high measuring accuracy, and thereby has an important application value in related scientific research and production field, in particular to high tech fields.
Description
Technical field
The utility model belongs to the optical interferometry instrument, particularly a kind of polarization beam splitting dislocation type interferometer.
Background technology
The optical interferometry instrument is the high precision measuring instrument of generally acknowledging, has a wide range of applications in scientific research and production field.Particularly in recent years, along with high-tech development, the importance of Technology of Precision Measurement is more and more obvious, the range of application of interferometer more and more widely, and gradually to the development of more scientific domain.It is mainly used in measures micrometric displacement, little vibration, little deformation and other physical quantity that can transform mutually with it, so it is a kind of requisite fine measuring instrument in numerous scientific domains such as information, biomedicine, mechanics, machinery, material.
But before making to the utility model, existing interferometer, all exist a shortcoming as Michelson interferometer, Mach one Zehnder interferometer, Sa Nake interferometer or the like, promptly use these interferometers in actual measurement, always to have certain reflected light and turn back to light source, cause the work of light source stable inadequately, influence measuring accuracy (Sun Peimao, Liu Zhengfei compile: " photoelectric technology ", PP.173-174, China Machine Press).Therefore the reason that produces this shortcoming is that each bar light path all has reversibility in these interferometers, and (have up to 1/2nd) that always have reflected light part that some element produces gets back to light source along corresponding light path.Usually in order to overcome above-mentioned shortcoming, improve measuring accuracy, have in light path, insert isolator.But this can make instrument constitute again and complicate, and increases the difficulty of adjusting and using, and can increase instrument cost significantly simultaneously.
Summary of the invention
Technical problem to be solved in the utility model is the shortcoming that overcomes above-mentioned existing interferometer.Technical scheme adopts polarization beam splitting dislocation technology, realize the nonreversibility of relevant light paths, make and self have the ability that inhibitory reflex light returns light source, a kind of interferometer that does not exist reflected light to influence light stability is provided, and instrument cost also is lower than the method that isolator is inserted in above-mentioned employing, the apparatus structure compactness is conveniently used simultaneously.
The technical solution of the utility model is:
Polarization beam splitting dislocation type interferometer is by polarizer, polarization beam splitter prism, the reciprocity polarization apparatus, nonreciprocal polarization apparatus becomes with the plane reflector group, this interferometer one end is the polarizer 1 with definite laser input window position and interference light output window position, is the parallel polarization beam splitter prism 2 that is arranged in order along the optical system for testing direction then, counterclockwise 45 ° of reciprocity polarization apparatuss 3 and clockwise 45 ° of reciprocity polarization apparatuss 4 arranged side by side, the back is 45 ° of nonreciprocal polarization apparatuss 5 successively, parallel polarization beam splitter prism 6,45 ° of nonreciprocal polarization apparatuss 7, be the fixed mirror 8 that occupies half end face at last.Detecting light beam arrives measurement mirror 9 and returns from the window outgoing of other half end face.
The polarizer 1 of this polarization beam splitting dislocation type interferometer, parallel polarization beam splitter prism 2, two 45 ° of reciprocity polarization apparatuss 3 arranged side by side and 4,45 ° of nonreciprocal polarization apparatuss 5,6,45 ° of nonreciprocal polarization apparatuss 7 of parallel polarization beam splitter prism, fixed mirror 8, can be the one-piece construction that is arranged in order to compactness, as shown in Figure 1.
A described polarizer is polaroid or polarizing prism, device end face light-plated antireflective film;
Described two parallel polarization beam splitter prisms are made by birefringece crystal, its end face light-plated antireflective film;
Described two 45 ° of reciprocity polarization apparatuss, one of them is for turning clockwise, and another is for being rotated counterclockwise its end face light-plated antireflective film;
Described two 45 ° of nonreciprocal polarization apparatuss are made of gyrotropi crystal and annular permanent-magnet body, gyrotropi crystal end face light-plated antireflective film;
Described two plane mirrors are made of plating total reflection film of planar optics glass, and one is fixed mirror, and one for measuring the border.Measuring mirror 9 can be connected with measured body.
Polarization beam splitting dislocation type interferometer provided by the utility model has following characteristics:
1. this apparatus structure is simple, and is easy to use;
2. self have the ability that inhibitory reflex light turns back to light source, rejection ratio reaches more than the 60dB;
3. owing to suppressed reflected light, measuring accuracy is improved greatly;
4. compare with the method for traditional in the past adding isolator, cost greatly reduces.
5. the integral structure of instrument has increased reliability.
This shows, polarization beam splitting dislocation type interferometer provided by the utility model is better than well known interferometer, because this product has overcome the remarkable shortcoming of existing interferometer, and can form compact integral structure, reduced cost, therefore use also more conveniently, have excellent popularization at above-mentioned numerous relevant sciemtifec and technical sphere and be worth and application prospect.
Description of drawings Fig. 1: the one-piece construction synoptic diagram of polarization beam splitting dislocation type interferometer; Fig. 2, Fig. 3: the fundamental diagram of polarization beam splitting dislocation type interferometer.
Embodiment
In conjunction with the accompanying drawings 1,2 couples of the present invention of accompanying drawing are described in further detail:
As shown in Figure 1, this interferometer one end is the polarizer 1 with definite laser input window position and interference light output window position, be the parallel polarization beam splitter prism 2 that is arranged in order along the Z direction then, along directions X counterclockwise 45 ° of reciprocity polarization apparatuss 3 arranged side by side and 4,45 ° of nonreciprocal polarization apparatuss 5 of clockwise 45 ° of reciprocity polarization apparatuss, 6,45 ° of nonreciprocal polarization apparatuss 7 of parallel polarization beam splitter prism, be the fixed mirror 8 that occupies half end face along directions X at last.Detecting light beam arrives measurement mirror 9 and returns from the window outgoing of other half end face.
Fig. 2, Fig. 3 are the courses of work of described polarization beam splitting dislocation type interferometer, and it is to illustrate that by light-beam position and polarization direction on each element end face wherein annulus is represented the position, and annulus interior lines segment table shows direction.Accompanying drawing 2 expressions arrive the process of measuring mirror and fixed mirror along the laser beam of Z axle positive dirction incident by interferometer.The non-linear polarization of incident (also linear polarization) laser beam arrives the Z10 plane, by become behind the polarizer 1 with X, Y-axis linearly polarized light at 45 to the Z11 plane, arrive the Z12 plane by 2 beam splitting of parallel beam splitter polarizing prism again, two light beams rotate to the Z13 plane by two 45 ° of reciprocity polarization apparatuss 3,4 respectively then, all rotate to the Z14 plane again by 45 ° of non-easy polarization apparatuss [5], then arrive the Z15 plane by parallel polarization beam splitter prism 6, rotate to the Z16 plane by 45 ° of nonreciprocal polarization apparatuss 7 again, at last respectively by fixed mirror 8 and 9 reflections of measurement mirror.Accompanying drawing 3 is opposite with above-mentioned direction, i.e. the process of propagating along negative Z direction.Pass through 45 ° of nonreciprocal polarization apparatuss 7,6,45 ° of nonreciprocal polarization apparatuss 5 of parallel beam splitter polarizing prism successively, pass through 45 ° 3 and 4 respectively again by two light beams of measuring the reflection of mirror and fixed mirror respectively, successively by parallel beam splitter polarizing prism 2, polarizer 1, its change procedure is shown in plane Z16, Z15, Z14, Z13, Z12, Z11, Z10 successively then.This shows after measurement mirror and fixed mirror folded light beam are interfered and on the Z10 plane, export interference light, receive by detecting device and can obtain result of interference.Simultaneously, Fig. 2, Fig. 3 have also shown the characteristics of polarization beam splitting and dislocation.
Claims (8)
1. polarization beam splitting dislocation type interferometer, it is characterized by: it is to be provided with the polarizer (1) of determining laser input window position and interference light output window position that this interferometer constitutes an end, is thereafter that the parallel polarization beam splitter prism (2) that is aligned in sequence with along the optical system for testing direction, counterclockwise 45 ° of reciprocity polarization apparatuss (3) arranged side by side and clockwise 45 ° of reciprocity polarization apparatuss (4), back are 45 ° of nonreciprocal polarization apparatuss (5), parallel polarization beam splitter prism (6), 45 ° of nonreciprocal polarization apparatuss (7) successively, are the fixed mirrors (8) that occupies half end face at last.The detecting light beam that enters from the window outgoing of other half end face, arrives measurement mirror (9) and returns after above-mentioned member effect.
2. according to claims 1 described polarization beam splitting dislocation type interferometer, it is characterized in that polarizer (1), parallel polarization beam splitter prism (2), two 45 ° reciprocity polarization apparatuss (3) arranged side by side and (4), 45 ° of nonreciprocal polarization apparatuss (5), parallel polarization beam splitter prism (6), 45 ° of nonreciprocal polarization apparatuss (7), fixed mirror (8), be arranged in order one-piece construction for fitting tightly.
3. according to claim 1 or 2 described polarization beam splitting dislocation type interferometers, it is characterized in that a described polarizer can be polaroid or polarizing prism.
4. according to claim 1 or 2 described polarization beam splitting dislocation type interferometers, it is characterized in that polarization beam splitter prism made by birefringece crystal.
5. according to claim 1 or 2 described polarization beam splitting dislocation type interferometers, it is characterized in that nonreciprocal polarization apparatus is made of gyrotropi crystal and annular permanent-magnet body.
6. according to claim 1 or 2 described polarization beam splitting dislocation type interferometers, it is characterized in that the end face of described polarizer (1), parallel polarization beam splitter prism (2) and (6), 45 ° of reciprocity polarization apparatuss (3) and (4), 45 ° of nonreciprocal polarization apparatuss (5) and (7) all plates antireflective film.
7. according to claim 1 or 2 described polarization beam splitting dislocation type interferometers, it is characterized in that the reflecting surface of fixed mirror (8), measurement mirror (9) all plates the film that is all-trans.
8. according to claim 1 or 2 described polarization beam splitting dislocation type interferometers, it is characterized in that measuring mirror (9) and be connected with measured body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01270370 CN2508215Y (en) | 2001-11-09 | 2001-11-09 | Polarization beam splitting shearing interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01270370 CN2508215Y (en) | 2001-11-09 | 2001-11-09 | Polarization beam splitting shearing interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2508215Y true CN2508215Y (en) | 2002-08-28 |
Family
ID=33676003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01270370 Expired - Fee Related CN2508215Y (en) | 2001-11-09 | 2001-11-09 | Polarization beam splitting shearing interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2508215Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1306241C (en) * | 2004-02-20 | 2007-03-21 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN101694369B (en) * | 2005-01-27 | 2011-07-06 | 4D技术公司 | Fizeau interferometer with simultaneous phase shifting |
| CN108885092A (en) * | 2016-03-29 | 2018-11-23 | 应用材料公司 | Metering system for base plate stress and deformation measurement |
-
2001
- 2001-11-09 CN CN 01270370 patent/CN2508215Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1306241C (en) * | 2004-02-20 | 2007-03-21 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN101694369B (en) * | 2005-01-27 | 2011-07-06 | 4D技术公司 | Fizeau interferometer with simultaneous phase shifting |
| CN108885092A (en) * | 2016-03-29 | 2018-11-23 | 应用材料公司 | Metering system for base plate stress and deformation measurement |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109839644B (en) | Real-time absolute ranging method and system based on single-cavity double-femtosecond optical comb cross-correlation analysis | |
| CN108592800B (en) | A kind of laser heterodyne interference measuring device and method based on plane mirror reflection | |
| CN101586941B (en) | Low non-linear error and low temperature drift two-frequency laser interference device | |
| CN106225667A (en) | A kind of single frequency laser interferometer nonlinear error compensation device | |
| CN110174054B (en) | High-stability four-optical-path laser interferometry system | |
| CN102853771A (en) | Miniaturization high-speed and ultra-precision laser heterodyne interferometry method and miniaturization high-speed and ultra-precision laser heterodyne interferometry device | |
| CN105004273A (en) | Laser interference displacement measuring system | |
| CN103256991B (en) | Spatial phase shift lateral shearing interferometer | |
| CN101113927A (en) | Phase-shifting lateral shearing interferometer | |
| CN110487173A (en) | Reflective quadrature in phase single-frequency laser interference measuring device and measuring method | |
| CN203606417U (en) | Double-crystal optics voltage-sensing unit based on Pockel effect, and voltage transformer | |
| CN107024338A (en) | Use the common light path point diffraction simultaneous phase-shifting interference testing device of prismatic decomposition | |
| CN104729411A (en) | High-resolution grating interferometer based on high-density gratings | |
| CN101319873B (en) | Space phase shifter for synchronous phase-shifting interferometer | |
| CN103424878B (en) | Light splitting device | |
| CN102865820B (en) | Light path compensation based laser heterodyne interference measurement method and light path compensation based laser heterodyne interference measurement device | |
| CN2508215Y (en) | Polarization beam splitting shearing interferometer | |
| CN201622124U (en) | Polarization lateral shearing interferometer | |
| CN103759655A (en) | Two-freedom homodyne grating interferometer displacement measuring system based on optical octave method | |
| CN106643478B (en) | A kind of displacement measurement optical system | |
| CN203881971U (en) | Solid-state high-speed 1x2 switch | |
| CN112082492B (en) | Device and method for simultaneously measuring thickness and refractive index of film with angle monitoring function | |
| CN203606418U (en) | Longitudinal-modulation reciprocity-type optical voltage sensor | |
| CN101303254A (en) | Novel double-cat eye movable lens interferometer | |
| CN103424196B (en) | Two flat-plate polarizing phase shift shearing interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |