CN2503687Y - Massenfilter for manufacturing superhard film ionization source device - Google Patents
Massenfilter for manufacturing superhard film ionization source device Download PDFInfo
- Publication number
- CN2503687Y CN2503687Y CN 01247038 CN01247038U CN2503687Y CN 2503687 Y CN2503687 Y CN 2503687Y CN 01247038 CN01247038 CN 01247038 CN 01247038 U CN01247038 U CN 01247038U CN 2503687 Y CN2503687 Y CN 2503687Y
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- massenfilter
- source device
- filter tube
- ion source
- thin film
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Abstract
The utility model relates to a mass filter of an ion source device for manufacturing a super-hard film, the utility model comprises the mass filter, a solenoid coil which is arranged on the outside of the mass filter and connected with a magnetic field power supply, and an exit aperture arranged on the outlet part of the mass filter, an arrester is arranged inside the mass filter, the solenoid coil is wrapped by a conducting wire, and the mass filter is a corrugated tube structure; the mass filter is a bent tube. The utility model has the advantages that the structure is simple, the production is convenient, the magnetic field intensity, the mass filter length, and the curvature radius are adjustable, and the large granule and the neutral particle can be filtrated reliably.
Description
The utility model relates to a kind of massenfilter for preparing the ion source device of superhard thin film.
In the arc coating deposition process, arc discharge will produce a large amount of big particles, and these bulky grains may deposit on the sample surfaces, destroy adhesive force, density and the uniformity of film, make the debase of film.In addition, arc discharge also produces a large amount of neutral particles except that producing a large amount of ions, and these neutral particles deposit on the sample, will reduce the quality of adhesion of thin film and film.Filter these bulky grains and neutral particle and adopt the method for electromagnetism filtering medium usually.The form of electromagnetism filtering medium is a lot, forms such as for example magnetic deflection, cross(ed) field and quadrupole field.At present external adopt advanced is a kind of massenfilter of twin elbow form, it be shaped as a long bend pipe, on the bend pipe evenly around on the copper conductor winding, form the solenoid form.Its operation principle is: when copper conductor alives, will produce the longitudinal flux figured stone in the solenoid; When charged particle passes through magnetic field, move in a circle, oarse-grained moving radius is bigger, will and can't pass through massenfilter by the collection of the diaphragm of trap on the bend pipe wall and outlet.Neutral particle, will be collected by the trap on the bend pipe wall when by bend pipe owing to be not subjected to the effect in magnetic field, make unwanted particle can't pass through massenfilter.The key of this electromagnetism massenfilter design is the intensity in magnetic field, the bending curvature of bend pipe and the length of massenfilter.Because the length of massenfilter is relevant with ion energy, quality and magnetic field intensity, so it is an adjustable variable.The external at present massenfilter of making all adopts the stainless steel cylinder to be welded, complex manufacturing technology, be difficult for realizing, the massenfilter of this form is once make, its length, bend pipe shape promptly immobilize, for the ion of different quality and different-energy, can only be by changing the purpose that magnetic field reaches filtering medium.The shortcoming of this structure mainly contained two: one, and the adjusting in magnetic field is limited, if go beyond the scope, needed the redesign massenfilter; The 2nd, complex manufacturing technology is difficult to guarantee axle rotation symmetry, therefore just is difficult to guarantee magnetic field rotating shaft symmetry, and the ion motion track also just can not guarantee the rotation symmetry so.
The purpose of this utility model is to avoid above-mentioned weak point of the prior art, and provide a kind of simple in structure, simple for production, magnetic field intensity, filter tube length and radius of curvature are adjustable, reliably the massenfilter of the ion source device of the preparation superhard thin film of filtering bulky grain and neutral particle.
Technical solution of the present utility model is:
A kind of massenfilter for preparing the ion source device of superhard thin film, comprise filter tube 2, be arranged at the outside and solenoid 3 that join with magnetic field power supply 1 of filter tube 2, the exit aperture 5 that is arranged at filter tube 2 exits, be provided with trap 4 in the described filter tube 2, described solenoid 3 is formed by the lead coiling, and its special character is: described filter tube 2 is bellows structure; Described filter tube 2 is a bend pipe, and its radius of curvature is 90～120 °, and the number of ampere turns of described coiling solenoid 3 is the numbers of ampere turns that can produce 10～40mT controlling magnetic field.
Above-mentioned massenfilter 2 can be single bend pipe or three-dimensional twin elbow.
The radius of curvature of above-mentioned massenfilter 2 is good with 120 °.
Above-mentioned trap 4 can be made of the link slot in the bellows, or by being welded with the corresponding stainless steel ring of filter tube 2 internal diameters.
The lead of above-mentioned coiling solenoid 3 can be solid conductor or hollow conductor, the cooling fluid of can packing in the described hollow conductor.
Above-mentioned exit aperture 5 can be arranged at the picture point place of filter tube 2.
Above-mentioned exit aperture 5 outsides can be provided with pre-electric field 7 partially.
Above-mentioned magnetic field power supply 1 can be one, two or more.
The exit of above-mentioned filter tube 2 can be provided with X, Y scanner 6.
The utility model compared with prior art has following advantage:
1, adopt bellows as ion channel, can adjust and change the angle of bend and the length of bellows arbitrarily, adapting to the ion of different quality and different potentials, and manufacture craft is easy, the symmetry of axle rotation can be guaranteed, thereby the axial symmetry of magnetic field rotation can be guaranteed;
2, in order to stop that effectively neutral particle passes through filter tube, can be with filter tube at crooked two 120 degree of three dimensions, first bending will stop most of neutral ion and bulky grain particle, and second bending will stop that first crooked back by the ion that electronics neutralizes, can reliably filter out impurities;
3, in order to stop the particle that is blocked effectively, a solder side can be made 60 degree oblique angles in the filter tube;
4, the magnetic field power is adjustable, and filter tube adopts single kinking structure, the reliably ion of filtering different quality, different potentials;
5, the exit aperture with bellows is placed on the picture point place, the diameter of the ion beam current that can restrict export;
6, the field coil that can place X, Y direction respectively outside the massenfilter outlet is as scanner, so that the ion beam current of drawing can be at the heavy film of a bigger area;
7, solenoid can adopt hollow conductor, and the cooling fluid in it can be guaranteed the intensity and the accuracy in magnetic field;
8, superhard thin film adhesive force, density and the uniformity that adopts the utility model to make is all good, has promptly realized the high-quality plated film.
Accompanying drawing is a structural representation of the present utility model.
The utility model is described in further detail below in conjunction with accompanying drawing:
Referring to accompanying drawing, the outer setting of the utility model filter tube 2 has the solenoid 3 that joins with magnetic field power supply 1, and the exit of filter tube 2 is provided with exit aperture 5.Be provided with trap 4 in the filter tube 2.Filter tube 2 is a bend pipe, desirable 90～120 ° of its radius of curvature, with 120 ° for being best, massenfilter 2 can adopt single bend pipe or three-dimensional twin elbow.So-called three-dimensional twin elbow be meant on filtering medium 2 devices two bendings not at grade.For example, a bending is positioned on the horizontal plane, and another bending then is positioned on the vertical plane, solenoid is curved two 120 ° of bend pipes at three dimensions, can make the ion of sputter can not pass through bend pipe, because consider from sputter, the particle incident angle is less than 30 °, and at this moment sputtering raste is less.Two bend pipes can guarantee that neutral particle is fully stopped to fall.Described solenoid 3 is formed by the lead coiling, and the number of ampere turns of coiling solenoid 3 is the numbers of ampere turns that can produce 10～40mT controlling magnetic field.The lead of coiling solenoid 3 can be solid conductor or hollow conductor, and the cooling fluid of can packing in the described hollow conductor is to guarantee the magnetic field operate as normal.If massenfilter 2 adopts bellows, then trap 4 can be made of the link slot in the bellows; If massenfilter 2 adopts plain tube, then trap 4 can be by being welded with the corresponding stainless steel ring of filter tube 2 internal diameters.Because long magnetic field has the characteristic of focal imaging to charged particle, therefore can utilize the operation of long magnetically confined charged particle.Exit aperture 5 can be arranged at the picture point place of filter tube 2.Exit aperture 5 outsides can be provided with pre-electric field 7 partially.Pre-electric field 7 partially can make charged ion produce the deflection of certain angle, just in time beats on sample, and neutral particle is then kept off by baffle plate.Magnetic field power supply 1 can adopt one, also can be made of two or more, to simplify power supply architecture, dwindles power volume and maybe can adopt universal standard power supply.The exit of filter tube 2 can be provided with X, Y scanner 6.
Claims (9)
1, a kind of massenfilter for preparing the ion source device of superhard thin film, comprise filter tube (2), be arranged at the outside and solenoid (3) that join with magnetic field power supply (1) of filter tube (2), the exit aperture (5) that is arranged at filter tube (2) exit, be provided with trap (4) in the described filter tube (2), described solenoid (3) is formed by the lead coiling, it is characterized in that: described filter tube (2) is a bellows structure; Described filter tube (2) is a bend pipe, and its radius of curvature is 90～120 °, and the number of ampere turns of described coiling solenoid (3) is the number of ampere turns that can produce 10～40mT controlling magnetic field.
2, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 1 is characterized in that: described massenfilter (2) is single bend pipe or three-dimensional twin elbow.
3, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 2 is characterized in that: the radius of curvature of described massenfilter (2) is 120 °.
4, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 1 is characterized in that: described trap (4) is made of the link slot in the bellows, or by being welded with the corresponding stainless steel ring of filter tube (2) internal diameter.
5, as the massenfilter of the ion source device of claim 1 or 2 or 4 described preparation superhard thin films, it is characterized in that: the lead of described coiling solenoid (3) is solid conductor or hollow conductor, in the described hollow conductor cooling fluid is housed.
6, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 5 is characterized in that: described exit aperture (5) is arranged at the picture point place of filter tube (2).
7, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 6 is characterized in that: described exit aperture (5) outer setting has pre-electric field (7) partially.
8, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 7 is characterized in that: described magnetic field power supply (1) is one, two or more.
9, the massenfilter of the ion source device of preparation superhard thin film as claimed in claim 8 is characterized in that: the exit of described filter tube (2) is provided with X, Y scanner (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01247038 CN2503687Y (en) | 2001-09-14 | 2001-09-14 | Massenfilter for manufacturing superhard film ionization source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01247038 CN2503687Y (en) | 2001-09-14 | 2001-09-14 | Massenfilter for manufacturing superhard film ionization source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2503687Y true CN2503687Y (en) | 2002-07-31 |
Family
ID=33657950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01247038 Expired - Fee Related CN2503687Y (en) | 2001-09-14 | 2001-09-14 | Massenfilter for manufacturing superhard film ionization source device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2503687Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105887035A (en) * | 2014-12-23 | 2016-08-24 | 北京师范大学 | Circular target cathode vacuum arc source plasma magnetic filtration rectangular diversion device |
| CN110075995A (en) * | 2019-04-22 | 2019-08-02 | 中国电子科技集团公司第三十八研究所 | A kind of magnetic filter |
| CN116234145A (en) * | 2023-01-09 | 2023-06-06 | 中国科学院近代物理研究所 | Compact strong current H 2+ Ion beam generating device |
-
2001
- 2001-09-14 CN CN 01247038 patent/CN2503687Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105887035A (en) * | 2014-12-23 | 2016-08-24 | 北京师范大学 | Circular target cathode vacuum arc source plasma magnetic filtration rectangular diversion device |
| CN105887035B (en) * | 2014-12-23 | 2018-06-05 | 北京师范大学 | Circular cathodic vacuum arc source plasma Magnetic filter rectangle ejector |
| CN110075995A (en) * | 2019-04-22 | 2019-08-02 | 中国电子科技集团公司第三十八研究所 | A kind of magnetic filter |
| CN116234145A (en) * | 2023-01-09 | 2023-06-06 | 中国科学院近代物理研究所 | Compact strong current H 2+ Ion beam generating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |