CN2470922Y

CN2470922Y - Three-freedom super-precision-positioning and micro operation platform

Info

Publication number: CN2470922Y
Application number: CN 01202335
Authority: CN
Inventors: 宗光华; 毕树生; 陈瑜; 于靖军
Original assignee: YUANTAI-TONGDA SCIENCE AND TECHNOLOGY DEVELOPMENT Co Ltd BEIJING
Current assignee: YUANTAI-TONGDA SCIENCE AND TECHNOLOGY DEVELOPMENT Co Ltd BEIJING
Priority date: 2001-02-23
Filing date: 2001-02-23
Publication date: 2002-01-09
Anticipated expiration: 2011-02-23

Abstract

The utility model relates to a minuteness operation platform for precise automatic positioning in 3D space, which is formed by a joint 1, a basal seat 2, a lower platform 3, a minor arm 4, a major arm 8, a piezoelectric ceramic actuator 6, a pillar 7, and a moving platform 9. The lower platform 3 has three branches, thereon, each branch respectively forms three moving branch chains with the minor arm 4 and the major arm 8. The basal seat 2 and the moving platform 9 are connected via the three branch chains. Each branch chain includes seven flexible hinge chains. By adopting piezoelectric ceramic as actuator, the precise motion output of driving source can be ensured; by adopting flexible hinge chain for each revolute pairs, the motion transmission is ensured with continuity and compact structure, without hysteresis, friction, and mechanical loss.

Description

3 freedom degree ultra-precise location and fine operating platform

The utility model relates to a kind of three-degree-of-freedom motion platform that is used for accurate location automatically and fine operation.

At present, mostly the kind of drive that is widely used in the precision positioning device in each field is the mechanical type hard friction transmission be made up of a plurality of parts, therefore, exist the gap inevitably, friction is whirled stagnant, and easily heating, bearing accuracy is difficult to rise to " sub-micron ", " nanometer " level, and the ultraprecise locating device of the piezoelectric ceramic actuator flexible hinge form that occurs in recent years has no gap, there is not friction, exempt to lubricate, advantage such as do not generate heat, precision also can reach " nanometer ", but it can only be that folk prescription is to the location, if when wanting multi-direction location, it can only be that each folk prescription assembles to the stack of the device of location, therefore, can produce cumulative errors, make complex structure.

The purpose of this utility model is, make a kind ofly have the submicron order bearing accuracy, do not have friction, no gap, do not generate heat, cumulative errors is little, can realize the fine operating platform of precision positioning on X, Y, Z all directions.

Technical solution of the present utility model is, is connected by three movement branched chain between motion platform and the base, and is symmetrically and distributes; Contain seven flexible hinges on every side chain; Is connected by cylindrical pins between lower platform on each side chain and forearm, forearm and the big arm, big arm upper end embeds in the fluting of motion platform, and by two screws connections; Be connected by three sunk screws between column and the base; Piezoelectric actuator embeds in the fluting of column, bottom and little arm contact.

The utility model is owing to adopted piezoelectric ceramics as actuator, the high-precision motion output and the fast response speed of drive source have been guaranteed, power output is big, do not produce magnetic field, again because each revolute pair has all adopted flexible hinge, therefore guaranteed continuity of movement transmission, do not have whirl stagnant, do not have friction, exempt to lubricate, do not have mechanical loss, and a compact conformation.The utility model both can also can be assemblied in the end of industry mechanical arm separately as microoperation, mini positioning platform usefulness, and precision positioning and the error compensation finished in the big working range are used.Application comprises that fiber alignment in the optical engineering, light path are proofreaied and correct, microsurgery, microelectron-mechanical processing and assembling, the making of biochip and the research of physics near field optic etc. in the cell in the bioengineering or genetic manipulation, the engineering in medicine.

Fig. 1 is external form figure of the present utility model;

Fig. 2 is a wiring layout of the present utility model.

The utility model is made up of plug 1, base 2, lower platform 3, forearm 4, big arm 8, piezoelectric actuator 6, column 7 and motion platform 9 etc.Be connected by three side chains between base 2 and the motion platform 9, each side chain comprises a branch, forearm 4, the big arm 8 of lower platform 3; Lower platform 3 is installed on the base 2 by screw 14, and cooperates the location by the boss 15 on the base 2 with the endoporus of lower platform 3; Three branches are arranged on the lower platform 3, and each branch embeds in the fluting of forearm 4, and affixed by two cylindrical pins 5; The lower end of big arm 6 embeds in the fluting of forearm 4, and affixed with two cylindrical pins 5; The upper end of big arm 8 embeds in the fluting of motion platform 9, and affixed with two screws 10; Comprise seven flexible hinges on every side chain.

Column 7 is installed on the base 2 by three screws 13, and cooperates the location by the external cylindrical surface of column with the counterbore seam 12 of base; Piezoelectric actuator 6 embeds in the fluting of column 7, and top contacts with column, and the lower end props up forearm 4, and keeps certain pretightning force; Power lead on the piezoelectric ceramics 6 and umbilical cable 17 are passed the open-work on the forearm 4, coil in the groove 11 that is placed on the base 2, and fixing with screw 16;

Plug

1 and 18 is fixed on the base 2 by screw 19.

Claims

1. a 3 freedom degree ultra-precise location and a fine operating platform of being made up of piezoelectric actuator, flexible hinge is characterized in that, is connected by three movement branched chain between motion platform and the base, and is distribution symmetrically; Contain seven revolute pair flexible hinges on every side chain; Is connected by cylindrical pins between lower platform on each side chain and forearm, forearm and the big arm, big arm embeds in the fluting of motion platform, and by two screws connections; Be connected by three sunk screws between column and the base; Piezoelectric actuator embeds in the fluting of column, bottom and little arm contact.