CN2457741Y - Nanometer stepping positioning driver - Google Patents

Abstract

A nano-step positioning driver belongs to the technical field of nano-drive positioning. It is characterized in that it adopts a two-stage stepping drive structure, the piezoelectric driver (1) drives a pair of friction sliders (2) clamped on the precision lead screw (3) to perform reciprocating translation in opposite directions, and the precision lead screw (3) Connect the sliding column (6) through the ball (5) and place it in the fixed nut (4), and the sliding column (6) is connected to the metal flat diaphragm (7) at the displacement input end of the fully enclosed oil chamber (8) , the metal flat diaphragm (9) at the displacement output end of the oil chamber (8) is connected to the output shaft (11). It has the advantages of large driving load capacity, high driving positioning accuracy, and self-locking when power is off.

Description

Nano-step positioning driver

The utility model is a nanometer step positioning driver, which belongs to the improvement of the structure of the micro displacement driver, and is suitable for generating nanometer level stepping translational displacement under relatively large load conditions.

Electrostrictive materials (such as piezoelectric ceramics PZT) are widely used in micro-drive technology. The phenomenon that the voltage on the voltage is proportional (in the linear region of the performance curve). Existing related technologies include: 1. A micro-displacement actuator made of thin sheets of electrostrictive material with a laminated structure. It has the advantages of high response frequency and theoretically infinite precision, and is suitable for fast and dynamic adjustment applications; but it cannot self-lock when power is off. ----Cite the patent of the People's Republic of China: "Micro-displacement driver announcement number CN2048242U". 2. The micro-displacement driver produced by the New Focus company in the United States adopts a mechanical structure and has the advantages of large stroke and self-locking when power is off, but its driving load capacity is small, only 10N; the axial positioning accuracy is only 20 nanometers. ----Cite the US patent: "Piezoelectric Actuator For Optical Alignment Screws, 5410206, April 25, 1995".

The purpose of the utility model is to avoid the disadvantages of the above-mentioned prior art, and provide a nano-stepping positioning driver. Its driving load capacity is large, the positioning accuracy of the stepping drive is less than 10 nanometers, and it can still be self-locking when power is off.

The purpose of this utility model can be achieved through the following measures: a two-stage stepping drive structure is adopted, and a piezoelectric driver drives a pair of friction sliders clamped on the precision lead screw to perform reciprocating translation in opposite directions, and the precision lead screw The ball is connected with the sliding column and placed in the fixed nut. The sliding column is in contact with the metal flat diaphragm at the displacement input end of the fully enclosed oil chamber, and the metal flat diaphragm at the displacement output end of the fully enclosed oil chamber is in contact with the output shaft.

The purpose of this utility model is also achieved by the following measures: the two ends of the fully enclosed oil cavity and the metal flat diaphragm are respectively a stepped sharp tooth rigid sealing structure; the area of the displacement input port of the oil cavity is smaller than the displacement output The area of the port cavity; at the output end of the oil chamber, the output shaft located in the cover plate is equipped with a disc-shaped pressure spring.

Description of drawings:

Fig. 1 is a structural diagram of the utility model;

Fig. 2 is a schematic diagram of the first-stage mechanical structure of the utility model;

Fig. 3 is a structural diagram of the stepped sharp tooth seal adopted at both ends of the oil chamber of the second stage hydraulic structure of the utility model;

Fig. 4 is the displacement-time characteristic curve of the utility model when the load is 200N.

The utility model will be further described below in conjunction with accompanying drawing:

As shown in Figure 1 and Figure 2, the piezoelectric actuator (1) is used as a power source to drive a pair of friction sliders (2) clamped on the precision screw (3) to perform reciprocating translation in opposite directions, and the precision screw (3) The ball (5) is connected with the sliding column (6) and placed in the fixed nut (4), the acceleration in the two directions of the reciprocating translation of the friction slider (2) is not equal, so that the friction slider ( 2) and the precision lead screw (3) have different relative slips in two directions, therefore, the precision lead screw (3) will produce a small amount of rotation after each reciprocating translation of the friction slider (2) . This micro-rotation forms a micro-translational displacement through the conversion of the ball (5) and the sliding column (6), which acts on the second-stage hydraulic structure.

The two ends of the fully enclosed oil chamber (13) and the metal flat diaphragms (7) and (9) at both ends are stepped and sharp-toothed rigid sealing structures (as shown in Figure 3), and the inside of the oil chamber (8) For high strength hydraulic oil. The cavity area of the displacement input end of the oil chamber (8) is smaller than the cavity area of the displacement output end, and the output shaft (11) connected with the metal flat diaphragm (9) is equipped with a disc pressure spring (10).

The driver can output a stepping driver with a driving load capacity of 200N and an average step distance of 1.5 nanometers (as shown in Figure 4).

Compared with the prior art, the utility model has the following advantages:

1. The mechanical and hydraulic two-stage stepping drive structure is adopted, which greatly improves the positioning accuracy of the stepping drive, with an average step distance of 1.5 nanometers.

2. The fully enclosed oil chamber (8) adopts a structure in which the cavity area of the displacement input port is smaller than the cavity area of the displacement output port, so that the output force on the output shaft (11) increases in proportion to the input force according to the cavity area ratio , Improved drive load capacity, drive load capacity up to 200N.

3. In the hydraulic structure, a stepped sharp tooth rigid sealing structure is adopted between the two ends of the fully enclosed oil chamber (13) and the metal flat diaphragms (7) and (9). Because the sealing pressure generated by the tooth ends of the stepped sharp teeth is strong and the sealing is good, the oil chamber (8) has good sealing reliability; thus, it is combined with the self-locking of the lead screw to ensure the self-locking when power is off.

4. The spring (10) on the output shaft (11) can make the driver output positive and negative micro-translational displacements.

Claims (4)

1, comprise that electrostriction material is as power source, produce the driving load capacity by mechanical structure, the nanometer stepping anchor drive that can cut off self-lock, it is characterized in that adopting two-stage stepper drive structure, piezoelectric actuator (1) drives a pair of friction slip (2) that is clamped on the precision lead screw (3) and does reverse each other reciprocal translation, precision lead screw (3) is connected with traveller (6) by ball (5) and places in the hold-down nut (4), traveller (6) is connected with the metal flat diaphragm (7) of totally enclosed type oil pocket (8) displacement input, and the metal flat diaphragm (9) of totally enclosed type oil pocket (8) displacement output is connected with output shaft (11).

2, nanometer stepping anchor drive as claimed in claim 1 is characterized in that being ladder sharp mouth rigid seal structure between the both ends of the surface of cavity (13) of totally enclosed type oil pocket (8) and metal flat diaphragm (7), (9).

3, nanometer stepping anchor drive as claimed in claim 1 or 2, the displacement input accent area that it is characterized in that totally enclosed type oil pocket (8) is less than displacement output accent area.

4, as claim 1 or 2 or 3 described nanometer stepping anchor drives, it is characterized in that totally enclosed type oil pocket (8) output, be arranged on the output shaft of cover plate (12) spring (10) arranged.

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