CN2457741Y - Nanometer stepped positioning driver - Google Patents
Nanometer stepped positioning driver Download PDFInfo
- Publication number
- CN2457741Y CN2457741Y CN 00245049 CN00245049U CN2457741Y CN 2457741 Y CN2457741 Y CN 2457741Y CN 00245049 CN00245049 CN 00245049 CN 00245049 U CN00245049 U CN 00245049U CN 2457741 Y CN2457741 Y CN 2457741Y
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- nanometer
- oil pocket
- displacement
- totally enclosed
- type oil
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Abstract
The utility model relates to a nanometer stepped positioning driver, belonging to the technical field of nanometer driving positioning. The nanometer stepped positioning driver is characterized in that a two-stage stepped driving structure is used, and a piezoelectric driver (1) drives a pair of friction slide blocks (2) clamped on a precision lead screw (3) to do reciprocating flat movement in a mutual opposite direction; the precision lead screw (3) is connected with a slide column (6) by balls (5) and is arranged inside a fixing nut (4), and the slide column (6) is connected with a metal flat diaphragm (7) arranged at the displacement input end of a totally enclosed oil reservoir (8), while a metal flat diaphragm (9) arranged at the output end of the displacement of the oil reservoir (8) is connected with an output shaft (11). The utility model has the advantages of large driving load capacity, high driving positioning accuracy, favorable power-off and self-locking properties.
Description
The utility model is a kind of nanometer stepping anchor drive, belongs to the improvement to the micro-displacement driver structure, is applicable to produce nanometer scale stepping translation displacement under big loading condiction.
Adopt electrostriction material (for example piezoelectric ceramic PZT) in little Driving technique widely, its operation principle is based on the inverse piezoelectric effect of electrostriction material---be directly proportional with the voltage that the is applied thereto phenomenon of (in the linear zone of performance curve) of the dilatation amount of electrostriction material.Existing correlation technique includes: 1. the micro-displacement driver that adopts laminated structure to make by the electrostriction material thin slice.It has the response frequency height, precision can reach unlimited small advantage in theory, is applicable to the application scenario of quick dynamic adjustments; But it can't cut off self-lock.----quotes People's Republic of China's patent as proof: " micro-displacement driver notification number CN2048242U ".2. the micro-displacement driver of being produced by U.S. New Focus company adopts mechanical structure, have the advantage that stroke is big, can cut off self-lock, but its driving load capacity is little, only is 10N; The axial location precision only reaches 20 nanometers.----quotes United States Patent (USP) as proof: " Piezoelectric Actuator For Optical Alignment Screws, 5410206, April 25,1995 ".
The purpose of this utility model is to avoid above-mentioned the deficiencies in the prior art, and a kind of nanometer stepping anchor drive is provided.It is big that it drives load capacity, and the stepper drive positioning accuracy is less than 10 nanometer scale, and still can cut off self-lock.
The purpose of this utility model can reach by following measure: adopt two-stage stepper drive structure, piezoelectric actuator drives a pair of friction slip that is clamped on the precision lead screw and does reverse each other reciprocal translation, precision lead screw is connected with traveller by ball and places in the hold-down nut, traveller contacts with the metal flat diaphragm of totally enclosed type oil pocket displacement input, and the metal flat diaphragm of totally enclosed type oil pocket displacement output contacts with output shaft.
The purpose of this utility model also reaches by following measure: the both ends of the surface of totally enclosed type oil pocket cavity are ladder sharp mouth rigid seal structure respectively and between the metal flat diaphragm; The displacement input accent area of oil pocket is less than displacement output accent area; At the output of oil pocket, be arranged on the output shaft of cover plate dish-shaped compression spring is housed.
Description of drawings:
Fig. 1 is the utility model structure chart;
Fig. 2 is the utility model first order mechanical structure schematic diagram;
Fig. 3 is the ladder sharp mouth sealed structure chart that adopt at hydraulic structure oil pocket two ends, the utility model second level;
Fig. 4 is the displacement one time characteristic curve of the utility model when load is 200N.
The utility model is described further below in conjunction with accompanying drawing:
As depicted in figs. 1 and 2, piezoelectric actuator (1) source that is used as power drives a pair of friction slip (2) that is clamped in precision lead screw (3) and does reverse each other reciprocal translation, precision lead screw (3) is connected with traveller (6) by ball (5) and places in the hold-down nut (4), acceleration on the both direction of the reciprocal translation of friction slip (2) does not wait, thereby the relative slippage that produces on both direction between friction slip (2) and the precision lead screw (3) is not waited, therefore, precision lead screw (3) will produce the trace rotation after the each back and forth translation of friction slip (2).The conversion that this trace rotates through ball (5), traveller (6) forms micro-translation displacement, acts on second level hydraulic structure.
Being ladder sharp mouth rigid seal structure (as shown in Figure 3) between the metal flat diaphragm (7) at the both ends of the surface of totally enclosed type oil pocket cavity (13) and two ends, (9), is high strength hydraulic oil in the oil pocket (8).The displacement input accent area of oil pocket (8) is less than the accent area of displacement output, and on the output shaft (11) that metal flat diaphragm (9) is connected dish-shaped compression spring (10) is housed.
The exportable 200N of driver drives load capacity, average step pitch is the stepper drive (as shown in Figure 4) of 1.5 nanometers.
The utility model is compared prior art and is had following advantage:
1, adopts machinery and hydraulic two-stage stepper drive structure, greatly improved stepper drive Positioning accuracy, average step pitch reaches 1.5 nanometers.
2, adopted totally enclosed type oil pocket (8) displacement input accent area less than displacement The structure of the accent area of output, thus make on the output shaft (11) power output with respect to Input Forces is pressed the accent Area Ratio and is increased, and has improved the driving load capacity, drives load capacity and reaches 200N.
3, in hydraulic structure, adopt ladder sharp mouth rigid seal structure between the both ends of the surface of totally enclosed type oil pocket cavity (13) and metal flat diaphragm (7), (9).Because the sealing pressure that ladder sharp mouth increment produces is big, good seal makes oil pocket (8) have good sealing reliability; Thereby combine with the leading screw self-locking, guaranteed and to have cut off self-lock.
4, the spring (10) on the output shaft (11) can make driver export forward and reverse little translation displacement.
Claims (4)
1, comprise that electrostriction material is as power source, produce the driving load capacity by mechanical structure, the nanometer stepping anchor drive that can cut off self-lock, it is characterized in that adopting two-stage stepper drive structure, piezoelectric actuator (1) drives a pair of friction slip (2) that is clamped on the precision lead screw (3) and does reverse each other reciprocal translation, precision lead screw (3) is connected with traveller (6) by ball (5) and places in the hold-down nut (4), traveller (6) is connected with the metal flat diaphragm (7) of totally enclosed type oil pocket (8) displacement input, and the metal flat diaphragm (9) of totally enclosed type oil pocket (8) displacement output is connected with output shaft (11).
2, nanometer stepping anchor drive as claimed in claim 1 is characterized in that being ladder sharp mouth rigid seal structure between the both ends of the surface of cavity (13) of totally enclosed type oil pocket (8) and metal flat diaphragm (7), (9).
3, nanometer stepping anchor drive as claimed in claim 1 or 2, the displacement input accent area that it is characterized in that totally enclosed type oil pocket (8) is less than displacement output accent area.
4, as claim 1 or 2 or 3 described nanometer stepping anchor drives, it is characterized in that totally enclosed type oil pocket (8) output, be arranged on the output shaft of cover plate (12) spring (10) arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00245049 CN2457741Y (en) | 2000-11-30 | 2000-11-30 | Nanometer stepped positioning driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00245049 CN2457741Y (en) | 2000-11-30 | 2000-11-30 | Nanometer stepped positioning driver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2457741Y true CN2457741Y (en) | 2001-10-31 |
Family
ID=33604609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00245049 Expired - Fee Related CN2457741Y (en) | 2000-11-30 | 2000-11-30 | Nanometer stepped positioning driver |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2457741Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101710574B (en) * | 2009-09-30 | 2012-01-11 | 日东电子科技(深圳)有限公司 | COG glass substrate positioning device |
| CN106827094A (en) * | 2017-04-11 | 2017-06-13 | 青岛铠硕机械科技有限公司 | A kind of automatic plane saw main shaft moves axially adjustment structure |
-
2000
- 2000-11-30 CN CN 00245049 patent/CN2457741Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101710574B (en) * | 2009-09-30 | 2012-01-11 | 日东电子科技(深圳)有限公司 | COG glass substrate positioning device |
| CN106827094A (en) * | 2017-04-11 | 2017-06-13 | 青岛铠硕机械科技有限公司 | A kind of automatic plane saw main shaft moves axially adjustment structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |