CN2408572Y - Laser cooler for large integrated circuit cooling - Google Patents

Laser cooler for large integrated circuit cooling Download PDF

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Publication number
CN2408572Y
CN2408572Y CN 99258552 CN99258552U CN2408572Y CN 2408572 Y CN2408572 Y CN 2408572Y CN 99258552 CN99258552 CN 99258552 CN 99258552 U CN99258552 U CN 99258552U CN 2408572 Y CN2408572 Y CN 2408572Y
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laser
integrated circuits
scale integrated
cooling medium
cooling
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秦伟平
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

本实用新型属于激光制冷技术领域,利用反斯托克斯荧光制冷原理,提供一种用于大规模集成电路散热的制冷器。主要由导热反射层,制冷介质,激光器,高反射率的反射膜,光学透镜组等构成。为了给大规模集成电路散热,将激光制冷介质做成波导,以使制冷介质对泵浦激光有局陷作用,增加对泵浦光的吸收。用于大规模集成电路散热的激光制冷器具有体积小、重量轻、无电磁辐射、无振动、无噪声等优点。

The utility model belongs to the technical field of laser refrigeration, and uses the anti-Stokes fluorescent refrigeration principle to provide a refrigerator for large-scale integrated circuits to dissipate heat. It is mainly composed of a heat-conducting reflective layer, a cooling medium, a laser, a reflective film with high reflectivity, and an optical lens group. In order to dissipate heat for large-scale integrated circuits, the laser cooling medium is made into a waveguide, so that the cooling medium has a trapping effect on the pump laser and increases the absorption of the pump light. The laser refrigerator used for heat dissipation of large-scale integrated circuits has the advantages of small size, light weight, no electromagnetic radiation, no vibration, and no noise.

Description

用于大规模集成电路冷却的激光制冷器Laser Cooler for LSI Cooling

本实用新型属于激光制冷技术领域,根据反斯托克斯荧光制冷原理,设计出一种全新的用于大规模集成电路散热的激光制冷器。The utility model belongs to the technical field of laser refrigeration. According to the principle of anti-Stokes fluorescent refrigeration, a brand-new laser refrigerator for heat dissipation of large-scale integrated circuits is designed.

为了给大规模集成电路散热,人们以往多采用风扇的方法。由于风扇振动较大,使用时间长又会沾满灰尘发出很大的噪声等缺点,决定了它不是理想的散热器。In order to dissipate heat for large-scale integrated circuits, people have used fans in the past. Due to the large vibration of the fan, it will be covered with dust and make a lot of noise when used for a long time, which determines that it is not an ideal radiator.

使用温度是荧光制冷器件的一个重要指标,在低温下由于处于高能级的布居数非常小,因此实现激光制冷就较为困难。但是,由激光制冷的特点我们可以推断,使用温度越高实现荧光制冷越容易,可获得的制冷效率也就越大。The operating temperature is an important indicator of fluorescent cooling devices. At low temperatures, it is difficult to achieve laser cooling because the population number in the high energy level is very small. However, from the characteristics of laser refrigeration, we can infer that the higher the operating temperature, the easier it is to achieve fluorescent refrigeration, and the greater the cooling efficiency that can be obtained.

人们运用制冷技术时往往并不是一味地追求温度降得越低越好,而是寻求一个可以接受的平衡温度,只要系统产生的热与制冷器吸收的热在此温度下达到平衡就可以了。对大规模集成电路的冷却就是这样,只要芯片的温度不超过85℃,目的就达到了。而我们知道,温度越高荧光制冷所能达到的制冷效率也就越高。因此对于类似集成电路的器件进行恒温时,激光制冷是非常理想的选择。目前,微机上使用的是风扇会产生很大的振动和噪声,如果在高尖军事技术上使用这样的制冷方式,无疑会降低该军事技术的藏匿水平。如果引入激光制冷技术,就会解决这样的问题。因此我们可以说,高温下荧光制冷技术的应用将具有更广泛的前景。When people use refrigeration technology, they often do not blindly pursue the lower the temperature, but seek an acceptable equilibrium temperature, as long as the heat generated by the system and the heat absorbed by the refrigerator reach a balance at this temperature. This is the case for the cooling of large-scale integrated circuits. As long as the temperature of the chip does not exceed 85°C, the purpose is achieved. And we know that the higher the temperature, the higher the refrigeration efficiency that fluorescent refrigeration can achieve. Therefore, laser cooling is an ideal choice for constant temperature of devices like integrated circuits. At present, the fans used on microcomputers will generate a lot of vibration and noise. If such a cooling method is used in high-end military technology, it will undoubtedly reduce the concealment level of this military technology. If laser refrigeration technology is introduced, such problems will be solved. Therefore, we can say that the application of fluorescence refrigeration technology at high temperature will have a broader prospect.

本实用新型通过制冷介质对泵浦激光的局陷作用,吸收更多的泵浦光,目的是提供一种用于大规模集成电路散热的激光制冷器。The utility model absorbs more pumping light through the trapping effect of the cooling medium on the pumping laser, and aims to provide a laser refrigerator for heat dissipation of large-scale integrated circuits.

反斯托克斯荧光制冷技术将激光技术应用于制冷,为大规模集成电路的冷却开辟了新的途径。这项技术具有全光性,它的制冷器具有体积小、重量轻、无电磁辐射、无振动、无噪声等特点,因此也就具有了非常诱人的应用前景和符合军事、空间、集成光学、微电子、医学等领域的特殊要求,而被国外研究者所重视。做为一项基本技术,激光制冷研究的突破必然会导致许多对温度有特殊要求的高技术实用化,推动那些领域向前发展。Anti-Stokes fluorescent refrigeration technology applies laser technology to refrigeration, which opens up a new way for the cooling of large-scale integrated circuits. This technology is all-optical, and its refrigerator has the characteristics of small size, light weight, no electromagnetic radiation, no vibration, no noise, etc., so it has very attractive application prospects and meets the requirements of military, space, and integrated optics. , microelectronics, medicine and other fields of special requirements, and the attention of foreign researchers. As a basic technology, breakthroughs in laser refrigeration research will inevitably lead to the practical application of many high-tech technologies with special temperature requirements, and promote the development of those fields.

对于大规模、超大规模集成电路来说,由于内部的电子元件数量巨大,往往发热非常严重。在没有制冷措施时,它们通常会达到摄氏几百度的高温,或者烧坏或者无法正常使用。对其制冷后,它可以在85℃以下正常工作,因此制冷的工作温度相对来说比较高。而较高的工作温度对于激光制冷意味着比较高的制冷效率。当制冷介质的温度高于环境温度时,环境的热辐射就不会再对制冷效率产生严重的影响,因为此时制冷介质发出的热辐射已经大于从环境吸收的热辐射。考虑将激光制冷介质做成波导,以使制冷介质对泵浦激光有局陷作用,增加对泵浦光的吸收。For large-scale and ultra-large-scale integrated circuits, due to the huge number of internal electronic components, the heat is often very serious. Without refrigeration, they typically reach temperatures of several hundred degrees Celsius and either burn out or fail to function properly. After it is refrigerated, it can work normally below 85°C, so the working temperature of refrigeration is relatively high. The higher working temperature means higher cooling efficiency for laser cooling. When the temperature of the cooling medium is higher than the ambient temperature, the thermal radiation of the environment will no longer have a serious impact on the cooling efficiency, because the thermal radiation emitted by the cooling medium is already greater than the thermal radiation absorbed from the environment. It is considered to make the laser cooling medium into a waveguide, so that the cooling medium can trap the pump laser light and increase the absorption of the pump light.

下面结合附图和实施例对本实用新型作进一步详细的描述。Below in conjunction with accompanying drawing and embodiment the utility model is described in further detail.

图1为本实用新型的示意图。图中,1-大规模集成电路;2-导热反射层;3-激光制冷介质,激光制冷介质可以是不同成分和状态的物质,只要它具有激光制冷效应。本实施例采用ZBLANP:Yb3+玻璃作为激光制冷介质,其形状结构为平面波导;4、5-高反射率的反射膜;6-泵浦激光光束入射口;7-泵浦用激光器,8-会聚与准直光学透镜组;9-泵浦激光束,本实施例中激光束的波长为1015纳米;10-出射荧光。Fig. 1 is the schematic diagram of the utility model. In the figure, 1-large-scale integrated circuit; 2-heat conduction reflective layer; 3-laser cooling medium, the laser cooling medium can be a substance of different composition and state, as long as it has a laser cooling effect. This embodiment adopts ZBLANP: Yb 3+ glass as the laser cooling medium, and its shape structure is a planar waveguide; 4, 5-reflective film with high reflectivity; 6-pumping laser beam entrance; 7-pumping laser, 8 - converging and collimating optical lens group; 9 - pumping laser beam, the wavelength of the laser beam in this embodiment is 1015 nanometers; 10 - outgoing fluorescence.

本实施例具体工作如下:从二级管泵浦激光器7发出的1015纳米泵浦激光9由光学透镜组8进行会聚和准直后射入泵浦激光光束入射口6,泵浦激光9在平面波导型的制冷介质3中做直线和反射传播,当泵浦激光束9照射在高反射率的反射膜4、5上时发生反射。泵浦激光束9在激光制冷介质3中传播时被制冷介质3中的Yb3+离子所吸收,Yb3+离子发射出反斯托克斯荧光,即出射荧光10所发射的荧光从制冷介质3的上表面射出,并带走了能量,达到了制冷的目的。大规模集成电路10的上表面附着一层导热介质即导热反射层2,它可以将10所发出的热量传递给激光制冷介质3,并通过反斯托克斯荧光发射带出系统之外。另外该导热层对反斯托克斯荧光应具有较高的反射,以减少对荧光的再吸收。泵浦激光从制冷介质一侧的小孔输入,介质的两侧镀有高反层,以保证泵浦光在介质中被来回地反射以增加介质对它的吸收。制冷介质的外形做成薄片状,使得绝大部分反斯托克斯荧光在行进了很短的光程后就离开了制冷介质。The specific work of this embodiment is as follows: the 1015nm pump laser 9 sent from the diode pump laser 7 is converged and collimated by the optical lens group 8 and then enters the pump laser beam entrance 6, and the pump laser 9 is on the plane The waveguide-type cooling medium 3 conducts linear and reflection propagation, and reflection occurs when the pumping laser beam 9 is irradiated on the reflective films 4 and 5 with high reflectivity. When the pump laser beam 9 propagates in the laser cooling medium 3, it is absorbed by the Yb 3+ ions in the cooling medium 3, and the Yb 3+ ions emit anti-Stokes fluorescence, that is, the fluorescence emitted by the outgoing fluorescence 10 is emitted from the cooling medium The upper surface of 3 shoots out, and has taken away energy, has reached the purpose of refrigeration. The upper surface of the large-scale integrated circuit 10 is attached with a layer of heat-conducting medium, that is, the heat-conducting reflective layer 2, which can transfer the heat emitted by 10 to the laser cooling medium 3, and take it out of the system through anti-Stokes fluorescence emission. In addition, the heat conduction layer should have high reflection to the anti-Stokes fluorescence, so as to reduce the reabsorption of the fluorescence. The pump laser is input from the small hole on one side of the cooling medium, and the two sides of the medium are coated with high reflection layers to ensure that the pump light is reflected back and forth in the medium to increase its absorption by the medium. The shape of the cooling medium is made into a thin sheet, so that most of the anti-Stokes fluorescence leaves the cooling medium after traveling a short light path.

本实用新型根据反斯托克斯制冷原理,设计出一种用于大规模集成电路散热的装置,同现有的散热方法比较,具有体积小,重量轻,无振动,无噪声等特点。According to the principle of anti-Stokes refrigeration, the utility model designs a device for heat dissipation of large-scale integrated circuits. Compared with the existing heat dissipation method, the utility model has the characteristics of small volume, light weight, no vibration, no noise and the like.

Claims (3)

1、一种用于大规模集成电路冷却的激光制冷器,其特征是在大规模集成电路(1)上表面附着一层导热反射层(2),平面波导型的制冷介质(3)在导热反射层(2)上,制冷介质(3)外形作成薄片状,侧面镀有高反射率的反射膜(4)、(5),其中一侧开有小孔作为激光光束入射口(6);激光器(7)发出的泵浦激光束(9)由光学透镜组(8)会聚和准直后射入激光光束入射口(6);进入激光光束入射口(6)的泵浦激光在制冷介质(3)中做直线和反射传播。1. A laser refrigerator for cooling large-scale integrated circuits, which is characterized in that a layer of heat-conducting reflective layer (2) is attached to the upper surface of large-scale integrated circuits (1), and a planar waveguide type cooling medium (3) conducts heat On the reflective layer (2), the cooling medium (3) is made into a sheet shape, and the sides are coated with reflective films (4) and (5) with high reflectivity, and a small hole is opened on one side as the laser beam entrance (6); The pump laser beam (9) emitted by the laser (7) is converged and collimated by the optical lens group (8) and then enters the laser beam entrance (6); (3) do straight line and reflection propagation. 2、根据权利要求1所述的用于大规模集成电路冷却的激光制冷器,其特征是所用的激光器(7)为二级管泵浦激光器。2. The laser refrigerator for cooling large-scale integrated circuits according to claim 1, characterized in that the laser (7) used is a diode-pumped laser. 3、根据权利要求2所述的用于大规模集成电路冷却的激光制冷器,其特征是二级管泵浦激光器波长为1015纳米。3. The laser refrigerator for cooling large-scale integrated circuits according to claim 2, characterized in that the wavelength of the diode-pumped laser is 1015 nanometers.
CN 99258552 1999-12-23 1999-12-23 Laser cooler for large integrated circuit cooling Expired - Fee Related CN2408572Y (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107833868A (en) * 2017-11-02 2018-03-23 中国工程物理研究院流体物理研究所 Light refrigeration IC system based on periodic dielectric structures
CN109564056A (en) * 2016-07-29 2019-04-02 索尔库德公司 It is cooling with anti-Stokes fluorescence
CN110402358A (en) * 2017-03-29 2019-11-01 乔治洛德方法研究和开发液化空气有限公司 Optical refrigerating device and sensor including such refrigerator
CN111531480A (en) * 2020-05-27 2020-08-14 河南科技大学 A laser intelligent refrigeration grinding wheel
CN112594965A (en) * 2020-12-14 2021-04-02 南通大学 Equipment for realizing optical refrigeration by using mixed light
CN114136018A (en) * 2021-11-23 2022-03-04 北京量子信息科学研究院 Laser refrigeration system and laser refrigeration method
CN114131257A (en) * 2022-02-08 2022-03-04 徐州博尔越智能制造有限公司 Welding device with telescopic structure for agricultural machinery

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11067316B2 (en) * 2016-07-29 2021-07-20 Solcold Cooling with anti-stokes fluorescence
CN109564056A (en) * 2016-07-29 2019-04-02 索尔库德公司 It is cooling with anti-Stokes fluorescence
CN109564056B (en) * 2016-07-29 2021-08-27 索尔库德公司 Device for optical cooling of an object
CN110402358B (en) * 2017-03-29 2022-03-04 乔治洛德方法研究和开发液化空气有限公司 Optical refrigerator and sensor comprising such a refrigerator
CN110402358A (en) * 2017-03-29 2019-11-01 乔治洛德方法研究和开发液化空气有限公司 Optical refrigerating device and sensor including such refrigerator
CN107833868B (en) * 2017-11-02 2020-01-31 中国工程物理研究院流体物理研究所 Optical refrigeration integrated circuit system based on periodic dielectric structure
CN107833868A (en) * 2017-11-02 2018-03-23 中国工程物理研究院流体物理研究所 Light refrigeration IC system based on periodic dielectric structures
CN111531480A (en) * 2020-05-27 2020-08-14 河南科技大学 A laser intelligent refrigeration grinding wheel
CN112594965A (en) * 2020-12-14 2021-04-02 南通大学 Equipment for realizing optical refrigeration by using mixed light
CN112594965B (en) * 2020-12-14 2022-06-10 南通大学 A device for optical refrigeration using mixed light
CN114136018A (en) * 2021-11-23 2022-03-04 北京量子信息科学研究院 Laser refrigeration system and laser refrigeration method
CN114136018B (en) * 2021-11-23 2023-09-01 北京量子信息科学研究院 Laser refrigerating system and laser refrigerating method
CN114131257A (en) * 2022-02-08 2022-03-04 徐州博尔越智能制造有限公司 Welding device with telescopic structure for agricultural machinery

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