CN2400795Y

CN2400795Y - Ion beam sputtering deposition film pressure transducer

Info

Publication number: CN2400795Y
Application number: CN 99249979
Authority: CN
Inventors: 王洪业
Original assignee: Individual
Current assignee: Individual
Priority date: 1999-12-23
Filing date: 1999-12-23
Publication date: 2000-10-11
Anticipated expiration: 2009-12-23

Abstract

The utility model relates to an ion beam sputtering deposition film pressure transducer, which is composed of a pressure guiding spout, an acoustics filtering head, a shell, and an output socket. The back end of the pressure guiding spout is fixed with sensing element assemblies, and each of the element assemblies comprises an internal sleeve, a wiring terminal, and elastic sensing elements. Each of the is made of ion beam sputtering deposition and ion beam dry etching, and the elastic sensing element is also provided with an insulating layer, a resistance grid, guiding layer lines, and a film resistance foil gauge of a passivation layer, wherein, the film resistance foil gauge is made on the elastic sensing element. The utility model has the advantages of strong anti-interference ability, high precision, long service life, and good long-term stability.

Description

The ion beam sputter depositing diaphragm pressure sensor

The utility model relates to a kind of device for pressure measurement, is specifically related to a kind of pressure transducer.

Existing pressure transducer is all chewed by impulse, elasticity and sensitive element, compositions such as shell, there are the following problems for this structure: impulse is chewed the undamped characteristic, can't avoid of the harmful effect of gaging pressure transient-upset to precision, impulse is chewed unstressed isolation channel between pedestal and flexible sheet, can not reduce the harmful effect that sensor uses installation and thermal stress, sensitive element is generally pastes the foil resistance foil gauge, the hand paste bearing accuracy is poor, the foil resistance foil gauge is difficult for obtaining high internal resistance, glue-line exists creep, not ageing-resistant, shortcoming such as radioresistance does not make sensor accuracy low, power consumption is big, reliability and long-time stability descend.

The purpose of the utility model aims to provide that a kind of antijamming capability is strong, measuring accuracy is high, no creep, ageing-resistant, radioresistance, internal resistance height, low in energy consumption, long service life, ion beam sputter depositing diaphragm pressure sensor that long-time stability are good.

Technical solution of the present utility model is: this ion beam sputter depositing diaphragm pressure sensor has impulse and chews, acoustics filtering head, shell, accessory power outlet, chew rear end fixation pressure sensitive element assembly at impulse, the pressure-sensing device assembly comprises elastic sensing element and interior cover and binding post, elastic sensing element comprises flexible member and sensitive element again, sensitive element is ion beam sputter depositing and the making of ion beam dry etching and contains insulation course, resistance grid, trace layer, the sheet resistance foil gauge of passivation layer, the sheet resistance foil gauge directly is made on the flexible member.

Advantage and good effect: the utility model adopts the sheet resistance allergic effect sheet of being made by the ion beam sputter depositing etching, no creep, ageing-resistant, radioresistance, the internal resistance height, low in energy consumption, the bearing accuracy height, form one with intermolecular combination of flexible member, the measuring accuracy and the long-time stability of sensitive element have been improved, acoustics filtering head provides the decay of measuring the high-frequency pressure disturbance to external world, prevent flexible member moment overload, prolong the serviceable life of sensor, elastic sensing element and impulse are chewed pedestal stress isolation groove can reduce the influence that sensor uses erection stress when installing, and increases the job stability of sensor construction.Therefore, the utility model antijamming capability is strong, measuring accuracy is high, long service life, long-time stability are good.

Fig. 1 is the utility model structure longitudinal sectional view;

Fig. 2 is the elastic sensing element vertical view;

Fig. 3 is a sheet resistance foil gauge structure cut-open view.

Below in conjunction with accompanying drawing the utility model is further described in detail:

As shown in drawings, the utility model is chewed 1 lower end at impulse the kapillary of thread connection or acoustics filtering that the damping fiber is formed 2 is housed, cup-shaped elastic sensing element 3 and impulse are chewed on the 1 rear end welding pedestal has stress isolation groove 4, impulse chew 1 with shell 5 welding, the electrical lead wire of elastic sensing element 3 is through interior cover 6 and accessory power outlet 7 outputs, R1 among the figure, R2, R3, R4 is the sheet resistance foil gauge that ion beam sputter depositing and ion beam dry etching are made, 8 is the trace layer of sheet resistance foil gauge, 9,10 is the insulation and the passivation film layer of sheet resistance foil gauge.

Claims

1, a kind of ion beam sputter depositing diaphragm pressure sensor, have that impulse is chewed, acoustics filtering head, shell, accessory power outlet, it is characterized in that chewing rear end fixation pressure sensitive element assembly at impulse, the pressure-sensing device assembly comprises elastic sensing element and interior cover and binding post, elastic sensing element comprises flexible member and sensitive element again, sensitive element is the sheet resistance foil gauge that insulation course, resistance grid, trace layer, passivation layer were made and contained to ion beam sputter depositing and ion beam dry etching, and the sheet resistance foil gauge directly is made on the flexible member.