CN117949134A - Base for pressure sensor and pressure sensor thereof - Google Patents
Base for pressure sensor and pressure sensor thereof Download PDFInfo
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- CN117949134A CN117949134A CN202410356164.1A CN202410356164A CN117949134A CN 117949134 A CN117949134 A CN 117949134A CN 202410356164 A CN202410356164 A CN 202410356164A CN 117949134 A CN117949134 A CN 117949134A
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- pressure sensor
- strain gauge
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- 230000008878 coupling Effects 0.000 claims abstract description 13
- 238000010168 coupling process Methods 0.000 claims abstract description 13
- 238000005859 coupling reaction Methods 0.000 claims abstract description 13
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 5
- 230000000903 blocking effect Effects 0.000 abstract description 3
- 230000006698 induction Effects 0.000 description 14
- 239000012530 fluid Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229920001967 Metal rubber Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Measuring Fluid Pressure (AREA)
Abstract
The invention belongs to the technical field of sensors, and particularly relates to a base for a pressure sensor and the pressure sensor thereof, which comprises a base body, wherein a flow channel is formed in the base body along the axial direction of the base body, the flow channel penetrates through the end face of one end of the base body along the axial direction of the base body to form an open end, the other end of the flow channel is a closed end, a press-fit surface formed by radial extension of the base body is arranged at the position, close to the closed end, of the base body, a sensing surface formed by axial extension is arranged at the position, close to the closed end, of the base body, a strain gauge is attached to the sensing surface, and a stress release ring is radially protruded at the position, located between the press-fit surface and the sensing surface, of the base body; according to the invention, the stress release ring arranged between the sensing surface and the press-mounting surface is used for blocking the transmission path of stress to the strain gauge, so that most of stress is released at the stress release ring, and the coupling stress borne by the strain gauge is greatly reduced, thereby improving the sensor precision.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a base for a pressure sensor and the pressure sensor thereof.
Background
In an electronic hydraulic brake-by-wire chassis system of a vehicle, high pressure sensors, which are indispensable components of the brake-by-wire chassis system, are used. The device is used for converting the pressure change of brake fluid of the drive-by-wire chassis into an electric signal to be output. Along with the development trend of the miniaturization and integration of the automobile electronic hydraulic drive-by-wire chassis system, the miniaturization design requirement on the high-pressure sensor for the automobile electronic hydraulic drive-by-wire chassis system is higher.
Most of the existing pressure sensors mostly adopt split type welding structures or transverse strain gauge structures, wherein the split type welding structures have welding leakage so as to cause the risk of ECU short circuit fire caused by brake fluid leakage, and the transverse strain gauge structures need a plurality of rigid circuit boards and are connected through flexible circuit boards, so that the cost is high, the structure is complex, and mass production is difficult.
The Chinese patent with the application number of CN202323325961.3 discloses a metal elastomer and a packaging pressure sensor thereof, wherein the body is directly provided with an axial hole, so that a fluid channel is directly provided with an inner plane, a thin wall is formed between the inner plane and a pressure surface, a strain gauge is attached to the pressure surface, the scheme adopts an integrated structure and laterally sets the strain gauge, the technical problems are overcome, however, certain press-fitting force is required to be applied to the press-fitting surface of a base in the sensor manufacturing process and the client application process, and the applied press-fitting force can generate stress coupling to the laterally designed strain gauge structure and cause the sensor to generate larger signal drift.
Disclosure of Invention
The invention aims to solve the technical problems that: in order to solve the problems that in the prior art, certain press-fitting force needs to be applied to a press-fitting surface of a base in the sensor manufacturing process and the client application process, the applied press-fitting force can generate stress coupling on a strain gauge structure designed laterally and cause a sensor to generate larger signal drift, the base for the pressure sensor and the pressure sensor thereof are provided.
In order to solve the technical problems, the invention adopts the following technical scheme: the base for the pressure sensor comprises a base body, wherein a flow channel is formed in the base body along the axial direction of the base body, the flow channel penetrates through the base body to form an open end along the end face of one end of the base body along the axial direction of the base body, and the other end of the flow channel is a closed end;
The part of the base body, which is close to the opening end, is provided with a press-fit surface formed by radial extension, the part of the base body, which is close to the closed end, is provided with an induction surface formed by axial extension, strain gauges are attached to the induction surface, namely the strain gauges are laterally arranged, a thin wall is formed between the induction surface and the wall surface of the flow channel, fluid enters the flow channel from the opening end, and the strain gauges attached to the induction surface can induce the pressure change of the fluid in the flow channel through the thin wall;
The stress release ring is arranged at the position of the base body between the press-fit surface and the induction surface in a radial protruding manner and used for releasing stress coupling generated by the strain gauge by the press-fit force on the press-fit surface, and the stress coupling is generated by the laterally arranged strain gauge because the press-fit force on the press-fit surface is approximately axial and basically consistent with the direction of the laterally arranged strain gauge, so that the stress coupling is generated by the laterally arranged strain gauge, the stress release ring is arranged between the press-fit surface and the induction surface and isolates the stress from the press-fit surface and the induction surface, a transmission path of stress to the strain gauge is blocked, most of stress is released in the stress release ring, coupling stress born by the strain gauge is greatly reduced, and the sensor precision is improved;
the stress release ring and the induction surface form a first neck part, the axial extension distance of the first neck part is L1, the press-fit surface protrudes towards the direction of the closed end to form a step, the stress release ring and the step form a second neck part, the axial extension distance of the second neck part is L3, the larger the L1 is larger than or equal to L3, the farther the L1 distance is, the stress generated by the self-press fit surface can be released mostly through the stress release ring, the stress of the residual small part is transferred to the induction surface along the first neck part, and the farther the transfer distance is, the stress reaching the strain gauge is smaller.
According to the technical scheme, the stress release ring arranged between the sensing surface and the press-fit surface is used for blocking the transmission path of stress to the strain gauge, so that most of stress is released at the stress release ring, the coupling stress borne by the strain gauge is greatly reduced, and the sensor precision is improved.
Further, the axial extension distance of the stress release ring is L2, L1 is 1.0-3.0 mm, L2 is 0.3-1.0 mm, L3 is 1.0-2.0 mm, the diameter D1 of the flow channel is phi 2.4-phi 4.0 mm, the diameter D2 of the first neck is phi 3.0-phi 4.6 mm, and the distance W1 between the sensing surface and the axis of the base body is 1.55-2.05 mm.
Further, L1 is 1.35-1.45 mm, L2 is 0.45-0.55 mm, L3 is 1.05-1.15 mm, D1 is phi 2.95-phi 3.05 mm, D2 is phi 3.55-phi 3.65 mm, and W1 is 1.80-1.90 mm.
Further, the connection part of the stress release ring and the base body is subjected to corner cleaning treatment to concentrate stress at the part, so that the stress reaching the strain gauge is reduced.
Further, the stress release ring is circular in cross section, the circular cross section is easy to process, and stress can be uniformly released in all directions.
A pressure sensor, comprising:
The base;
One end of the shell is contacted with the press-fit surface, a mounting cavity is formed by surrounding the shell and the press-fit surface, and the closed end of the base extends into the mounting cavity;
the circuit board is positioned in the mounting cavity, and a connecting wire is arranged between the circuit board and the strain gauge;
The support ring is used for fixing the circuit board and is soldered and fixed with the circuit board through connecting pins on the support ring;
And one end of the connecting piece is connected with the circuit board, and the other end of the connecting piece extends out of the mounting cavity.
Furthermore, a gap is reserved between the inner peripheral wall of the supporting ring and the outer peripheral wall of the stress release ring, the inner peripheral wall of the supporting ring and the outer peripheral wall of the stress release ring are not contacted, and the outer peripheral wall of the stress release ring is arranged in a suspending manner so that the stress is released better.
Further, one end of the connecting wire is connected with the strain gauge in a bonding way, the other end of the connecting wire is bent towards the end face of the closed end of the base body and is connected with the circuit board in a bonding way, or one end of the connecting wire is connected with the strain gauge in a bonding way, and the other end of the connecting wire is bent towards the side face of the base body and is connected with the circuit board in a bonding way.
Further, the strain gage is in a full bridge structure or a half bridge structure.
The beneficial effects of the invention are as follows: according to the invention, the stress release ring arranged between the sensing surface and the press-mounting surface is used for blocking the transmission path of stress to the strain gauge, so that most of stress is released at the stress release ring, and the coupling stress borne by the strain gauge is greatly reduced, thereby improving the sensor precision.
Drawings
The invention will be further described with reference to the drawings and examples.
Fig. 1 is a perspective view of a first embodiment;
Fig. 2 is a cross-sectional view of the first embodiment;
fig. 3 is a cross-sectional view of the first embodiment from a second perspective;
Fig. 4 is a perspective sectional view of the first embodiment;
Fig. 5 is a perspective view of the second embodiment;
FIG. 6 is an exploded view of embodiment two;
FIG. 7 is a cross-sectional view of a second embodiment;
FIG. 8 is an exploded view of embodiment three;
fig. 9 is a schematic structural diagram of a circuit board and a base body in the third embodiment;
FIG. 10 is a top view of the base body in the third embodiment;
FIG. 11 is an exploded view of the fourth embodiment;
fig. 12 is a perspective view of a base body in the fourth embodiment;
FIG. 13 is an exploded view of embodiment five;
Fig. 14 is a perspective view of a base body in the fifth embodiment;
FIG. 15 is a stress diagram of a strain gage press-fit (with stress relief ring);
FIG. 16 is a stress diagram of a strain gage press-fit (no stress relief ring);
FIG. 17 is a comparison of signal drift for an unstressed ring versus an unstressed ring at low temperature (-40 ℃);
FIG. 18 is a comparison of signal drift for an unstressed ring versus an unstressed ring at normal temperature (25 ℃);
FIG. 19 is a comparison of signal drift for an unstressed ring versus an unstressed ring at high temperature (125 ℃);
In the figure:
1. A base body; 101. an open end; 102. a closed end; 103. pressing and mounting the surface; 104. an induction surface; 105. a stress relief ring; 106. a first step; 107. a second step; 108. a first neck; 109. a second neck; 110. a flow passage; 111. grooving; 2. a strain gage; 3. a housing; 4. a circuit board; 401. a support leg; 5. a support ring; 6. a connecting piece; 7. a base; 701. a slot; 702. a mounting groove; 8. a cover plate; 9. a connecting wire; f is the press fit force; p is the fluid pressure.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic representations which merely illustrate the basic structure of the invention and therefore show only the structures which are relevant to the invention.
1-4, The present invention is a base for a pressure sensor, including a base body 1, wherein a flow channel 110 is formed in the base body 1 along an axial direction thereof, and the flow channel 110 penetrates through an end surface of the base body 1 along an axial direction thereof to form an open end 101, and the other end is a closed end 102;
The base body 1 is provided with a press-fit surface 103 formed by extending along the radial direction at the position close to the opening end 101, the press-fit surface 103 is circular, so that the press-fit force can be applied uniformly, the press-fit surface 103 protrudes towards the direction of the closed end 102 to form a step, and the step comprises a first step 106 of an annular structure and a second step 107 of the annular structure protruding from the first step 106;
The part of the base body 1, which is close to the closed end 102, is provided with an induction surface 104 formed by extending along the axial direction so as to form the closed end 102 with an oblong cross section, the induction surface 104 is attached with strain gauges 2, namely the strain gauges 2 are arranged laterally, the direction of the strain gauges is the same as the direction of the press-fit force, a thin wall is formed between the induction surface 104 and the wall surface of the flow channel 110, fluid enters the flow channel 110 from the open end 101, and the strain gauges 2 attached to the induction surface 104 can induce the change of the fluid pressure P in the flow channel 110 through the thin wall; the base body 1 is provided with a stress release ring 105 protruding radially at a position between the press-fitting surface 103 and the sensing surface 104 for releasing stress coupling generated by the strain gauge 2 by the press-fitting force on the press-fitting surface 103, and the base body 1 and the stress release ring 105 are integrally formed.
The cross section of the stress release ring 105 may be various regular or irregular shapes such as a circle, an ellipse, a polygon, etc., and only needs to be disposed between the sensing surface 104 and the press-mounting surface 103 to block the stress from the press-mounting surface 103, in this embodiment, the cross section is preferably a circular cross section, which is easy to process, and can uniformly release the stress in all directions.
The connection part of the stress release ring 105 and the base body 1 is subjected to corner cleaning treatment, or a notch is formed in the connection part to concentrate stress at the part, so that the stress reaching the strain gauge 2 is reduced, and in actual processing and production, in order to reduce processing difficulty, a round angle R less than or equal to 0.1 can be arranged at the connection part, so that the stress is concentrated at the part as much as possible.
A first neck 108 is formed between the stress release ring 105 and the sensing surface 104, the axial extension distance of the first neck 108 is L1, a second neck 109 is formed between the stress release ring 105 and the second step 107, the axial extension distance of the second neck 109 is L3, L1 is larger than or equal to L3, the larger the L1 distance is, which means that the farther the stress release ring 105 is spaced from the sensing surface 104, the stress generated from the press-fit surface 103 can be released mostly through the stress release ring 105, the rest small part of the stress is transferred to the sensing surface 104 along the first neck 108, the farther the transfer distance is L1, the stress reaching the strain gauge 2 is smaller, and therefore, the stress born by the strain gauge 2 can be reduced by setting the L1 with a large size.
The axial extension distance of the stress relief ring 105 is L2, specifically, L1 is 1.0-3.0mm, L2 is 0.3-1.0 mm, L3 is 1.0-2.0 mm, the diameter D1 of the flow channel 110 is Φ2.4- Φ4.0 mm, the diameter D2 of the first neck 108 is Φ3.0- Φ4.6 mm, the distance W1 between the sensing surface 104 and the axis of the base body 1 is 1.55-2.05 mm, and the preferred dimensions are: l1 is 1.35-1.45 mm, L2 is 0.45-0.55 mm, L3 is 1.05-1.15 mm, D1 is phi 2.95-phi 3.05 mm, D2 is phi 3.55-phi 3.65 mm, and W1 is 1.80-1.90 mm.
When an axial press-fitting force is applied to the press-fitting surface 103, the press-fitting force is transmitted to the sensing surface 104, the sensing surface 104 receives press-fitting forces with different magnitudes along the axial position of the sensing surface, and the strain gauge 2 attached to the sensing surface 104 causes resistance change of the strain gauge 2 due to piezoresistance effect and thus signal drift of a product is caused;
As shown in FIG. 16, according to ANSYS finite element simulation analysis, the stress difference of the sensing surface 104 (black line segment area) where the full-bridge strain gauge 2 is positioned can reach about 10Bar, and the tensile stress of the central area is about 6.42Bar; as shown in fig. 15, with the structure of the stress release ring design, the stress difference at the sensing surface 104 (black line segment area) where the full-bridge strain gauge 2 is located is only about 1.5Bar, the compressive stress at the central area is about 0.65Bar, and the stress is reduced by 90%, so that the signal drift of the sensor is greatly reduced;
The signal drift performance of the sensor in this embodiment is tested, and compared with the standard test of 6 groups of samples of the sensor with the stress-free ring design structure under the full range of the full temperature area, namely A1 (B1), A2 (B2), A3 (B3), A4 (B4), A5 (B5) and A6 (B6), as shown in fig. 17-19, the full range signal drift of the full temperature area is reduced by about 1%, and the performance consistency among groups of the sensors is greatly improved.
In a second embodiment, as shown in fig. 5-7, the second embodiment provides a pressure sensor, including:
The base body 1;
The shell 3 is in a cylindrical hollow structure, one end of the shell is in butt joint with the press-fit surface 103 and is welded and fixed with the first step 106 on the base body 1, the shell 3 and the press-fit surface 103 are enclosed to form a mounting cavity, and the closed end 102 of the base body 1 extends into the mounting cavity;
The circuit board 4 is of a rectangular structure, is longitudinally arranged in the mounting cavity, and is provided with a connecting wire 9 between the circuit board and the strain gauge 2, the strain gauge 2 is of a full-bridge structure, one end of the connecting wire 9 is connected with the strain gauge 2 in a bonding way, and the other end of the connecting wire is bent towards the end face of the closed end 102 of the base body 1 and is connected with the circuit board 4 in a bonding way;
The support ring 5 is used for fixing the circuit board 4, one end of the support ring is sleeved outside the closed end 102 and welded and fixed with the second step 107 on the base body 1, and the other end of the support ring is welded and fixed with the circuit board 4 through connecting pins on the support ring so as to realize rigid connection between the circuit board 4 and the base body 1, so that the connecting wire 9 is prevented from shaking; a gap is reserved between the inner peripheral wall of the supporting ring 5 and the outer peripheral wall of the stress release ring 105, the inner peripheral wall and the outer peripheral wall are not contacted, and the outer peripheral wall of the stress release ring 105 is arranged in a suspending manner so as to release stress better;
one end of the connecting piece 6 is connected with the circuit board 4, and the other end extends out of the mounting cavity to be connected with an external control unit, and the connecting piece can be a spring;
The fixing seat is positioned at the other end of the shell 3 and used for installing the connecting piece 6, and comprises a base 7 and a cover plate 8, the base 7 is provided with a slot 701 for inserting the circuit board 4 and a mounting groove 702 for mounting a spring, and the spring is connected with the circuit board 4 inserted into the slot 701 after being inserted into the mounting groove 702.
Embodiment III, as shown in FIGS. 8-10, differs from embodiment II in that: the circuit board 4 in this embodiment extends to the opening end 101 of the base body 1 to form two legs 401, a notch is formed between the two legs 401, one end of the connecting wire 9 is connected with the strain gauge 2 in a bonding way, the other end is bent to the side of the base body 1 and connected with the legs 401 of the circuit board 4 in a bonding way, the cross section of the closed end 102 is approximately T-shaped, i.e. two sides of the closed end 102 with an oblong structure in the first embodiment are provided with cutting grooves 111 for inserting the two legs 401.
Embodiment four, as shown in fig. 11 and 12, differs from embodiment two in that: the strain gauges 2 are of a half-bridge structure, the two strain gauges 2 are transversely arranged, a group of connecting wires 9 are arranged between each strain gauge 2 and the circuit board 4, one end of each group of connecting wires 9 is connected with the corresponding strain gauge 2 in a bonding way, and the other end of each group of connecting wires 9 is bent towards the end face of the closed end 102 of the base body 1 and is connected with the circuit board 4 in a bonding way.
Embodiment five, as shown in fig. 13 and 14, differs from embodiment four in that: the two strain gauges 2 are longitudinally arranged, one end of each group of connecting wires 9 is connected with the strain gauge 2 in a bonding way, and the other end of each group of connecting wires is bent towards the side surface of the base body 1 and is connected with the supporting legs 401 on the circuit board 4 in a bonding way.
Working principle:
Because the compressive loading force of the press-loading surface 103 is approximately axial and is basically consistent with the direction of the laterally arranged strain gauge 2, stress coupling is generated on the laterally arranged strain gauge 2, and the stress release ring 105 is positioned between the press-loading surface 103 and the sensing surface 104 to isolate the press-loading surface 103 from the sensing surface 104, so that the transmission path of stress to the strain gauge 2 is blocked, most of the stress is released in the stress release ring 105, the coupling stress to which the strain gauge 2 is subjected is greatly reduced, and the sensor precision is improved.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (9)
1. A base for a pressure sensor, characterized by: the novel water heater comprises a base body (1), wherein a flow channel (110) is formed in the base body (1) along the axial direction of the base body, the flow channel (110) penetrates through the base body (1) to form an open end (101) along the end face of one end in the axial direction of the base body, and the other end is a closed end (102);
The base body (1) is provided with a press-fit surface (103) formed by extending along the radial direction at the position close to the opening end (101), the base body (1) is provided with a sensing surface (104) formed by extending along the axial direction at the position close to the closed end (102), the sensing surface (104) is stuck with a strain gauge (2), and a stress release ring (105) for releasing stress coupling generated by the strain gauge (2) by the press-fit force borne by the press-fit surface (103) is protruded along the radial direction at the position between the press-fit surface (103) and the sensing surface (104);
A first neck (108) is formed between the stress release ring (105) and the sensing surface (104), the axial extension distance of the first neck is L1, a step is formed by protruding the press-fit surface (103) towards the direction of the closed end (102), a second neck (109) is formed between the stress release ring (105) and the step, and the axial extension distance of the second neck is L3, and the L1 is more than or equal to L3.
2. A base for a pressure sensor as claimed in claim 1, wherein: the axial extension distance of the stress release ring (105) is L2, L1 is 1.0-3.0 mm, L2 is 0.3-1.0 mm, L3 is 1.0-2.0 mm, the diameter D1 of the flow channel (110) is phi 2.4-phi 4.0 mm, the diameter D2 of the first neck (108) is phi 3.0-phi 4.6 mm, and the distance W1 between the sensing surface (104) and the axis of the base body (1) is 1.55-2.05 mm.
3. A base for a pressure sensor as claimed in claim 2, wherein: l1 is 1.35-1.45 mm, L2 is 0.45-0.55 mm, L3 is 1.05-1.15 mm, D1 is phi 2.95-phi 3.05 mm, D2 is phi 3.55-phi 3.65 mm, and W1 is 1.80-1.90 mm.
4. A base for a pressure sensor as claimed in claim 1, wherein: the connection part of the stress release ring (105) and the base body (1) is subjected to corner cleaning treatment.
5. A base for a pressure sensor as claimed in claim 1, wherein: the stress relief ring (105) is circular in cross-section.
6. A pressure sensor comprising a base for a pressure sensor according to any one of claims 1-5, characterized in that: further comprises:
one end of the shell (3) is fixed with the press-fit surface (103) and forms a mounting cavity by surrounding the shell and the press-fit surface;
The circuit board (4) is positioned in the mounting cavity, and a connecting wire (9) is arranged between the circuit board and the strain gauge (2);
a support ring (5) for fixing the circuit board (4);
And a connecting piece (6) with one end connected with the circuit board (4) and the other end extending out of the mounting cavity.
7. A pressure sensor as claimed in claim 6, wherein: a gap is reserved between the inner peripheral wall of the supporting ring (5) and the outer peripheral wall of the stress release ring (105).
8. A pressure sensor as claimed in claim 6, wherein: one end of the connecting wire (9) is connected with the strain gauge (2) in a bonding way, the other end of the connecting wire (9) is bent towards the end face of the closed end (102) of the base body (1) and is connected with the circuit board (4) in a bonding way, or one end of the connecting wire (9) is connected with the strain gauge (2) in a bonding way, the other end of the connecting wire is bent towards the side face of the base body (1) and is connected with the circuit board (4) in a bonding way, and the connecting wire (9) is an aluminum wire or a gold wire.
9. A pressure sensor as claimed in claim 6, wherein: the strain gauge (2) is of a full-bridge structure or a half-bridge structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410356164.1A CN117949134B (en) | 2024-03-27 | Base for pressure sensor and pressure sensor thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410356164.1A CN117949134B (en) | 2024-03-27 | Base for pressure sensor and pressure sensor thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117949134A true CN117949134A (en) | 2024-04-30 |
| CN117949134B CN117949134B (en) | 2024-07-09 |
Family
ID=
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2400795Y (en) * | 1999-12-23 | 2000-10-11 | 王洪业 | Ion beam sputtering deposition film pressure transducer |
| US20090293630A1 (en) * | 2008-06-02 | 2009-12-03 | Dipaola David J | Pressure Sensor Apparatus |
| CN102410864A (en) * | 2011-07-27 | 2012-04-11 | 莆田市力天量控有限公司 | Load sensor |
| CN104803341A (en) * | 2015-04-17 | 2015-07-29 | 北京必创科技股份有限公司 | Stress releasing device of pressure sensor |
| CN214251361U (en) * | 2021-02-04 | 2021-09-21 | 龙微科技无锡有限公司 | Pressure sensor mounting structure capable of releasing stress |
| CN217569528U (en) * | 2022-05-24 | 2022-10-14 | 上海相友超声科技有限公司 | Improved structure of head of amplitude transformer of transducer |
| CN220322611U (en) * | 2023-12-07 | 2024-01-09 | 敏之捷传感科技(常州)有限公司 | Metal elastomer and packaging pressure sensor thereof |
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2400795Y (en) * | 1999-12-23 | 2000-10-11 | 王洪业 | Ion beam sputtering deposition film pressure transducer |
| US20090293630A1 (en) * | 2008-06-02 | 2009-12-03 | Dipaola David J | Pressure Sensor Apparatus |
| CN102410864A (en) * | 2011-07-27 | 2012-04-11 | 莆田市力天量控有限公司 | Load sensor |
| CN104803341A (en) * | 2015-04-17 | 2015-07-29 | 北京必创科技股份有限公司 | Stress releasing device of pressure sensor |
| CN214251361U (en) * | 2021-02-04 | 2021-09-21 | 龙微科技无锡有限公司 | Pressure sensor mounting structure capable of releasing stress |
| CN217569528U (en) * | 2022-05-24 | 2022-10-14 | 上海相友超声科技有限公司 | Improved structure of head of amplitude transformer of transducer |
| CN220322611U (en) * | 2023-12-07 | 2024-01-09 | 敏之捷传感科技(常州)有限公司 | Metal elastomer and packaging pressure sensor thereof |
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