CN2353026Y

CN2353026Y - Corrosion resistant electric capacitor

Info

Publication number: CN2353026Y
Application number: CN 98225673
Authority: CN
Inventors: 袁才来; 蒋宝财; 庞加满
Original assignee: Shanghai Institute of Optics and Fine Mechanics of CAS
Current assignee: Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date: 1998-11-19
Filing date: 1998-11-19
Publication date: 1999-12-08
Anticipated expiration: 2008-11-19

Abstract

The utility model relates to a corrosion resistant electric capacitor, which is mainly suitable to an excimer laser and a fluorine molecular laser. The utility model comprises an outer shell and a core body arranged in the outer shell, wherein, the core body comprises two electrodes with wiring terminals and an insulating layer between the two electrodes; the outer shell is composed of an outer corrosion resistant layer and an inner dense packed layer without air spaces. The corrosion resistant electric capacitor of the utility model can be applied to any corrosive medium, the capacitor self can not be corroded, and the environmental can not be polluted; compared with the already present art, the service life of the capacitor is raised one order of magnitude.

Description

The anti-corrosion electric container

The utility model is a kind of anti-corrosion electric container, is mainly used in the peaking capacitor in excimer laser and the fluorine molecular laser, is one of vitals of above-mentioned laser.

The excitation rate that excimer laser need be exceedingly fast.For this reason, need to reduce the inductance of connecting line, improve discharge rate peaking capacitor as much as possible near electrode.So, usually peaking capacitor is put into the resonant cavity of laser.Closely link to each other with electrode.And the working media that charges in the laser resonant cavity (for example: HCl, F ₂Deng gas) have a deep-etching performance, the capacitor in the prior art is by shell 1 and place the binding post that contains the belt electrode lead-out wire 201 in the

shell

1 and 205 two electrodes 202,204, and the core body 2 that accompanies insulating barrier 203 between two electrodes constitutes.As shown in Figure 1.The shell 1 of this laser usually can with these corrosive gas generation chemical reactions, not only can damage capacitor itself.And, because the impurity that chemical reaction generates can influence the useful life of laser greatly.

The purpose of this utility model is in order to overcome the defective of above-mentioned capacitor, a kind of anti-corrosion electric container is provided, insert in the above-mentioned laser resonant cavity that contains corrosive gas, being corroded property gas attack not, neither damage capacitor itself, can not pollute the cavity of laser again, will improve the useful life of laser.

Capacitor arrangement of the present utility model comprises shell 1 and the core body 2 that places in the shell 1.Core body 2 contains two ends and has the binding post 201 of electrode outlet line and 205 two

electrodes

202 and 204 respectively, and accompanies insulating barrier 203 between two electrodes 202 and 204.Shell 1 is made of by packed layer 102 outer anti-corrosion layer 101 and internal layer.Core body 2 places in the shell 1, and two ends binding

post

201 and 205 exposes shell 1, so that capacitor is inserted in the used circuit easily.

Being full of between the outermost anti-corrosion layer 101 of shell 1 and the core body 2 has packed layer 102, that is to say between anti-corrosion layer 102 and the core body 2 to be linked to each other by the packed layer compact substance.Can not contain air gap between the two.As shown in Figure 2.

The outer anti-corrosion layer 101 of said shell 1 is to the medium that is corrosive, as F ₂, gases such as HCl, HBr, the alundum (Al (Al of corrosion-resisting function is arranged ₂O ₃) ceramic layer.

Said packed layer 102 is the close epoxy resin layers that do not contain air gap of matter, or the insulation glue-line.

Insulating barrier in the said core body 2 between two

electrodes

202 and 204 is a ceramic layer.So the utility model also is a noninductive capacitor.

The utility model has the advantages that capacitor of the present utility model can be applied in any mordant medium.Capacitor itself can not be corroded.Therefore, just do not pollute the environment yet.When using in above-mentioned laser resonant cavity, promptly can not destroy capacitor itself, can not cause the objectionable impurities in the laser resonant cavity to occur again, prolonged the useful life of capacitor itself, simultaneously the useful life of the laser that also prolongs.Give and bring very big benefit economically.

Description of drawings:

Capacitor arrangement schematic diagram in Fig. 1 prior art.

Fig. 2 anti-corrosion electric structure of container of the present utility model schematic diagram.

Embodiment:

Anti-corrosion electric container as shown in Figure 2 pack into argon fluoride (ArF) excimer laser and fluorine (F ₂) in the resonant cavity of molecular laser, the ArF excimer laser has turned round more than 3 years, does not find that as yet capacitor damages, and once inflates 10 of the capacitor of life-span from prior art ⁴Subpulse is brought up to 10 of the utility model anti-corrosion electric container ⁵Subpulse, the useful life of having improved a magnitude.Thereby the life-span of laser has also improved more than 10 times, and effect is significant.At F ₂Use in the molecular laser, laser also turned round nearly 2 years, and capacitor is excellent.If with the capacitor of prior art, not only will often clean in the resonant cavity of laser, and capacitor will often change, and this illustrates that also the utility model has marked improvement.

Claims

1. anti-corrosion electric container, comprise shell (1) and place the interior core body (2) of shell (1), core body (2) contains the binding post (201) that two ends have electrode outlet line respectively and two electrodes (202) and (204) of (205), and two insulating barrier (203) that accompanies between electrode (202) and (204), it is characterized in that shell (1) is is that anti-corrosion layer (101) and internal layer are constituted by packed layer (102) by skin, that is to say to have by the close packed layer that does not contain air gap (102) compact substance of matter between the outer anti-corrosion layer (101) of the core body (2) that places in the shell (1) and shell (1) to link to each other.

2. according to the anti-corrosion electric container of claim 1, the outer anti-corrosion layer that it is characterized in that shell (1) is the alundum (Al ceramic layer.

3. according to the anti-corrosion electric container of claim 1, the internal layer (102) that it is characterized in that shell (1) is the close epoxy resin layer that does not contain air gap of matter, or the insulation glue-line.