CN2339589Y - Flexible-winding film-plating machine - Google Patents
Flexible-winding film-plating machine Download PDFInfo
- Publication number
- CN2339589Y CN2339589Y CN 98231060 CN98231060U CN2339589Y CN 2339589 Y CN2339589 Y CN 2339589Y CN 98231060 CN98231060 CN 98231060 CN 98231060 U CN98231060 U CN 98231060U CN 2339589 Y CN2339589 Y CN 2339589Y
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- Prior art keywords
- isolation channel
- chamber
- cooling roller
- film
- flexible
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- Expired - Fee Related
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Abstract
The utility model relates to a flexible winding film-plating machine which is composed of a winding chamber, a film-plating chamber and an auxiliary device, wherein in the film-plating chamber, a plurality of magnetic-controlled sputtering targets are installed around a cooling roller. An isolation trench is installed between two targets, and the isolation trench is communicated with an air extractor. The distance between the isolation trench and the cooling roller is not greater than 10mm, and each target is provided with an independent air-distributing pipe. The utility model realizes the continuous plating of the low-radiation film on the flexible material.
Description
The utility model relates to the equipment that carries out winding film plating on flexible parent metal.
Low-radiation film system is that a kind of widely used film is.Usually, it is to be that base material carries out plated film with glass.The main body of its filming equipment is horizontally disposed separate target chamber.Each target chamber is finished the plated film of a rete.Obviously, carry out plated film with this kind equipment, its production is can not successive, and production efficiency is not high.And the size of plated film is subjected to the restriction of target chamber size.On the other hand, the equipment that carries out the flexible winding plated film is arranged in the prior art, the flexible winding coating equipment of producing as Japanese vacuum Co., Ltd..This equipment mainly comprises the coiling chamber, coating chamber and supplementary unit.The coiling chamber is by wind-up roll, and compositions such as let off roll are finished the folding and unfolding process of flexible parent metal; Coating chamber mainly is made up of evaporation source and air-supply duct, finishes coating process; Supplementary unit comprises air extractor, refrigerating unit etc.But this equipment is merely able to plate a skim.
The utility model purpose provides a kind of equipment that can realize on flexible parent metal that low-radiation film plates continuously.
Technical solutions of the utility model are to be provided with a plurality of magnetron sputtering targets around cooling roller in coating chamber, are provided with isolation channel between per two magnetron sputtering targets, and this isolation channel is communicated with air extractor, is provided with venting hole and communicates with target chamber on isolation channel; Distance between isolation channel and the cooling roller is not more than 10mm; Each magnetron sputtering target is furnished with independently gas distribution pipe.
Plate low-radiation film on flexible parent metal, must adopt the many target position of spirally wound to plate continuously, and each layer requires the interface clear in the film system, metal level wherein (being Ag mostly) can not oxidation, so requires the control of atmosphere and be isolated into the key issue of this device.In the utility model, coiling chamber and coating chamber are isolated.Because the distance between isolation channel and the cooling roller is not more than 10mm, add that each magnetron sputtering target is furnished with the venting hole of offering on the independently gas distribution pipe and isolation channel, make and do not collaborate between each target chamber, can realize smoothly that multiwalled plates continuously.Quantity as for target chamber is determined by concrete coating process.For example, for TiO2-Ag-TiO2 film system, need three target chambers at least.
Further improving is at the control of the air-flow in the target chamber, is provided with the tunnel of bleeding in the utility model in isolation channel, and this tunnel of bleeding is communicated with air extractor, offers venting hole on the tunnel of bleeding and communicates with isolation channel.Like this, reduced the influence of air extractor to atmosphere in the target chamber, such design can increase the homogeneity of air feed, improves the quality of rete.
Between each isolation channel and cooling roller, also be provided with and decide baffle plate.Should decide baffle plate block on rete, and made the rete of reeling, do not have plated film formation, guaranteed further just that the interface between each rete was clear when deciding this section that baffle plate covers.
Aspect the coating monitoring, the utility model adopts the directly probe of measurement rete optical property, rather than traditional method that thicknesses of layers is measured.In coiling plating process, monitor each tunic thickness respectively and can't implement, and supervisory system will be very complicated.And, can reflect the situation that each rete is thick, so that can adjust thicknesses of layers at any time effectively by monitoring the final performance of rete.
The flexible winding coating equipment that the utility model provides can be implemented in the continuous plating of carrying out low-radiation film on the flexible parent metal.
Fig. 1 is the structural representation of the utility model embodiment;
Fig. 2 is the sectional view of isolation channel among the utility model embodiment;
Fig. 3 is the sectional view of isolation channel among the utility model embodiment.
Embodiment
As shown in Figure 1, the utility model embodiment is made up of coiling chamber 2 and coating chamber 17 etc., separates with median septum 9 between coiling chamber 2 and the coating chamber 17.Be provided with wind-up roll 3 and let off roll 1 in the coiling chamber 2, dispose one group of guide roller 6 separately, tensioning roller 7, pressure roller 8 is provided with ion cleaning device 18 in the side near let off roll 1, and the flexible parent metal before the plated film is cleaned.Be provided with the monitoring probe 4 of measuring the rete transmittance in a side near wind-up roll 3.Have viewing window 5 on the shell of coiling chamber 2.Be provided with cooling roller 15 in the coating chamber 17, be provided with 5 magnetron sputtering targets 10 around cooling roller.The target source of each target requires to decide according to actual coating process.Each magnetron sputtering target 10 is furnished with independently gas distribution pipe 13.Be provided with isolation channel 14 between two targets.Be provided with between isolation channel 14 and the cooling roller 15 and decide baffle plate 11.Respectively being provided with row's aspirating hole 21,22,23 on the isolation channel 14 with on 12 contacted of target chambers and the face relative, as Fig. 2, shown in 3 with cooling roller 15.In isolation channel 14, also be provided with the tunnel 16 of bleeding.On the tunnel 16 of bleeding, also offer row's aspirating hole 20.This tunnel 16 of bleeding communicates with air extractor.
Claims (4)
1. flexible winding coating equipment, comprise coiling chamber and coating chamber and supplementary unit, it is characterized in that in coating chamber, being provided with a plurality of magnetron sputtering targets around cooling roller, be provided with isolation channel between per two magnetron sputtering targets, this isolation channel and air extractor UNICOM are provided with venting hole and communicate with target chamber on isolation channel; Distance between isolation channel and the cooling roller is not more than 10mm; Each magnetron sputtering target is furnished with independently gas distribution pipe.
2. flexible winding coating equipment according to claim 1 is characterized in that being provided with the tunnel of bleeding in isolation channel, also offer venting hole on this tunnel of bleeding and communicate with isolation channel; The tunnel of bleeding communicates with air extractor.
3. flexible winding coating equipment according to claim 1, it is characterized in that being provided with in the coiling chamber direct measurement institute plated film is the probe of transmittance.
4. flexible winding coating equipment according to claim 1 is characterized in that being provided with certain baffle plate between each isolation channel and cooling roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98231060 CN2339589Y (en) | 1998-07-15 | 1998-07-15 | Flexible-winding film-plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98231060 CN2339589Y (en) | 1998-07-15 | 1998-07-15 | Flexible-winding film-plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2339589Y true CN2339589Y (en) | 1999-09-22 |
Family
ID=33980528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 98231060 Expired - Fee Related CN2339589Y (en) | 1998-07-15 | 1998-07-15 | Flexible-winding film-plating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2339589Y (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1874032B (en) * | 2005-06-01 | 2010-05-26 | 索尼株式会社 | Cathode for secondary battery, secondary battery, and method of manufacturing cathode for secondary battery |
| CN101314311B (en) * | 2007-05-30 | 2011-06-15 | 中国印钞造币总公司 | False proof thin film and producing method thereof |
| CN103361623A (en) * | 2013-07-30 | 2013-10-23 | 林正亮 | Winding evaporation type vacuum coating machine |
| CN104294225A (en) * | 2013-07-19 | 2015-01-21 | 日东电工株式会社 | Sputtering device |
| CN105063561A (en) * | 2015-07-21 | 2015-11-18 | 赛柏利安工业技术（苏州）有限公司 | Single-drum vertical continuous magnetron sputtering vacuum equipment for composite winding indium tin oxide (ITO) flexible base material |
| CN105887014A (en) * | 2015-07-21 | 2016-08-24 | 赛柏利安工业技术（苏州）有限公司 | Normal-temperature single-drum vertical continuous vapor deposition equipment system for multiple layers of ITO flexible substrates |
| CN106011773A (en) * | 2016-06-20 | 2016-10-12 | 广东振华科技股份有限公司 | EMI shielding film magnetic control winding coating machine |
| CN108588668A (en) * | 2018-04-28 | 2018-09-28 | 东北大学 | Winding film plating system for manufacturing flexible substrates plural layers |
| CN109252144A (en) * | 2018-12-01 | 2019-01-22 | 安徽方兴光电新材料科技有限公司 | A kind of flexible winding filming equipment miscellaneous gas cleaning isolating device |
| CN109554680A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of devices of coiled vacuum coating machine |
-
1998
- 1998-07-15 CN CN 98231060 patent/CN2339589Y/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1874032B (en) * | 2005-06-01 | 2010-05-26 | 索尼株式会社 | Cathode for secondary battery, secondary battery, and method of manufacturing cathode for secondary battery |
| CN101314311B (en) * | 2007-05-30 | 2011-06-15 | 中国印钞造币总公司 | False proof thin film and producing method thereof |
| CN104294225A (en) * | 2013-07-19 | 2015-01-21 | 日东电工株式会社 | Sputtering device |
| CN103361623B (en) * | 2013-07-30 | 2016-07-06 | 林正亮 | A kind of winding vaporation-type vacuum coating equipment |
| CN103361623A (en) * | 2013-07-30 | 2013-10-23 | 林正亮 | Winding evaporation type vacuum coating machine |
| CN105887014A (en) * | 2015-07-21 | 2016-08-24 | 赛柏利安工业技术（苏州）有限公司 | Normal-temperature single-drum vertical continuous vapor deposition equipment system for multiple layers of ITO flexible substrates |
| CN105063561A (en) * | 2015-07-21 | 2015-11-18 | 赛柏利安工业技术（苏州）有限公司 | Single-drum vertical continuous magnetron sputtering vacuum equipment for composite winding indium tin oxide (ITO) flexible base material |
| CN105887014B (en) * | 2015-07-21 | 2019-02-19 | 赛柏利安工业技术（苏州）有限公司 | The vertical continuous vapor deposition apparatus system of room temperature multilayer ITO flexible parent metal single-drum |
| CN106011773A (en) * | 2016-06-20 | 2016-10-12 | 广东振华科技股份有限公司 | EMI shielding film magnetic control winding coating machine |
| CN108588668A (en) * | 2018-04-28 | 2018-09-28 | 东北大学 | Winding film plating system for manufacturing flexible substrates plural layers |
| CN109252144A (en) * | 2018-12-01 | 2019-01-22 | 安徽方兴光电新材料科技有限公司 | A kind of flexible winding filming equipment miscellaneous gas cleaning isolating device |
| CN109554680A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of devices of coiled vacuum coating machine |
| CN109554680B (en) * | 2019-02-12 | 2024-02-09 | 浙江德佑新材料科技有限公司 | Winding type vacuum coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHANGHAI KAILIDE COATING TECHNOLOGY CO., LTD. Free format text: FORMER NAME OR ADDRESS: BADA FILM ELECTRONIC TECHNOLOGY INST., CHANGSHA NATIONAL DEFENCE SCIENCE + TECHN |
|
| CP03 | Change of name, title or address |
Address after: 200000 Shanghai city Jingan District Yanping Road No. 69 room 1005 Patentee after: Shanghai kaiyeah Lide Coating Technology Co. Ltd. Address before: 410037 Changsha City, Hunan Province on the big ridge Patentee before: Bada Film Electronic Technology Inst., Changsha National Defence Science & Techn |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |