CN2314365Y - Vacuum low temperature making apparatus for optic measure of semiconductor - Google Patents
Vacuum low temperature making apparatus for optic measure of semiconductor Download PDFInfo
- Publication number
- CN2314365Y CN2314365Y CN 97246539 CN97246539U CN2314365Y CN 2314365 Y CN2314365 Y CN 2314365Y CN 97246539 CN97246539 CN 97246539 CN 97246539 U CN97246539 U CN 97246539U CN 2314365 Y CN2314365 Y CN 2314365Y
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- vacuum
- low temperature
- specimen chamber
- steel container
- utility
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Abstract
The utility model relates to a vacuum auxiliary low temperature making apparatus for the optical measurement of semiconductors, which belongs to the optical measuring auxiliary equipment. The utility model is sealed by a polytetrafluoroethylene cover (11), upper and lower two optical glass windows with a 6 mm gap seals a vacuum sample chamber (4), a resistance heating wire (10) is arranged in the gap to ensure no frosting in the glass windows, the sample chamber (4) and an oxygen-free copper radiator are made together and put into a stainless steel container (2) with vacuum sandwich layers to form the low temperature of a sample (7), consequently the field optical measurement of the sample is realized. The utility model has the advantages of low cost, simple manufacture, convenience and practicality, and the utility model is suitable for the use of various low temperature optical systems in the state of low temperature.
Description
The utility model belongs to the semiconductor optical test accessory, is a kind of vacuum aided Cryo Equipment of conveniently carrying out optical measurement specifically.
In the light-fluorescence measurement of some semiconductor material and device, in order to obtain to characterize the parameter and the curve of its feature, need institute's test sample product to remain under the liquid nitrogen temperature usually, on-the-spot (in situ) finishes in light-fluorescence measurement.At present, except using the import attemperating unit, generally be that sample directly is immersed in the liquid nitrogen of Dewar flask, in measuring process, will measure with the frost that blowing of hair dryer Dewar flask is surveyed on the wall wicket every planting somewhat.Replenishing of liquid nitrogen also is manual operations, needs lid is taken down additional liquid nitrogen.This easy equipment, this measuring method make that sample is difficult to keep measuring temperature, and measurement need intermittently be carried out.
The design's purpose is to adopt the oxygen-free copper heating radiator and make the in-site measurement of having realized light-fluorescence with the vacuum specimen chamber of double-deck optical window.
The design's major technique feature is that top is become uncovered cylindrical shape vacuum specimen chamber (4), the bottom is the oxygen-free copper heating radiator (3) of concentric garden post, put into the rustless steel container (2) of band vacuum interlayer with one heart by adiabatic rigid foam lid (12), the center convex (6) of vacuum specimen chamber (4) is gone up and is placed sample (7), the one side also outwards is communicated with vacuum line (5), lower floor's leaded light glass window (9) is stamped in the top that is sealed in vacuum specimen chamber (4) by vacuum grease, storing has upper strata leaded light glass window (8) and resistance heating wire's (10) teflon lid (11) by screw thread and vacuum specimen chamber (4) sealed connection, passes adiabatic rigid foam lid (12) and has vent hole (13) and the additional liquid nitrogen hole (14) that is communicated with rustless steel container (2).
Following conjunction with figs. is described the design's feature and operation in detail.
Accompanying drawing is the structural representation of the design's vacuum aided Cryo Equipment, also is Figure of abstract.
Among the figure: 1. shell, 2. the band vacuum interlayer rustless steel container, 3. the oxygen-free copper heating radiator,
Vacuum specimen chamber, 5. vacuum line, 6. convex, 7. sample,
Upper strata leaded light glass window, 9. lower floor's leaded light glass window, 10. the resistance heating wire,
11. teflon lid, 12. adiabatic rigid foam lids, 13. vent holes,
14. replenish the liquid nitrogen hole
The design adopts the vacuum interlayer rustless steel container (2) of band shell (1), and it is suitable for reading, being stamped of sealing The lid (12) of adiabatic rigid foam has guaranteed liquid nitrogen temperature, has prevented unnecessary heat exchange, the anaerobic copper The radiator (3) that becomes, by adiabatic rigid foam lid (12), in the rustless steel container of packing into (2), by Be the fabulous material of heat conduction of garden cylindricality in the bottom of (3), do so low temperature well can be delivered to (3) In the vacuum specimen chamber (4) of all-in-one-piece opening garden tubular, the convex (6) and the sample that are made of one with (3) On the product (7). The upper strata leaded light glass window (8) of seal cover on top, sample room (4) used polytetrafluoroethylene (PTFE) Lid (11) is connected compression by screw and seals with sample room (4), upper strata leaded light glass window (9) and Resistance heating wire (10) sealing is installed in the top of polytetrafluoroethylene (PTFE) lid (11), and makes two-layer leaded light glass Certain space is arranged between the window. The additional liquid nitrogen hole (14) of leaving by adiabatic rigid foam lid (12), Air vent (13) directly is communicated with rustless steel container (2), connects the vacuum line of vacuum specimen chamber (4) Can vacuumize and remain on 10 by vavuum pump-3Torr.
The design's a embodiment is as follows: upper and lower layer leaded light glass window adopts k9 glass, diameter is 30 millimeters, thick is 1.5 millimeters, and spacing is 6 millimeters between the layer glass window, and the resistance heating wire is 2 Ohmages, oxygen-free copper heating radiator diameter is 20 millimeters, 10 millimeters of convex diameters, platform is high 5 millimeters, 30 millimeters of vacuum specimen chamber diameters, 2 millimeters of wall thickness, vacuum pumping chamber to 10
-3Torr, direct current 15V resistive heater, power are 112 watts.
The design's vacuum aided Cryo Equipment can be used on various cryogenic optics measuring systems and cooperates optical instruments to carry out in-site measurement, is a kind of cheapness, easy, Cryo Equipment that practicality is extremely strong.
Claims (1)
1, a kind of semiconductor optical is measured the vacuum aided Cryo Equipment, include the barrel-shaped rustless steel container in garden (2) that the outside is with the band vacuum interlayer of lagging casing (1), adiabatic rigid foam lid (12), replenish liquid nitrogen hole (14) and vent hole (13) etc., it is characterized in that top is become uncovered garden tubular vacuum specimen chamber (4), the bottom is the oxygen-free copper heating radiator (3) of concentric garden post, put into the rustless steel container (2) of band vacuum interlayer with one heart by adiabatic rigid foam lid (12), the center convex (6) of vacuum specimen chamber (4) is gone up and is placed sample (7), (4) a side direction is communicated with vacuum line (5) outward, be stamped lower floor's leaded light glass window (9) by grease seal in the top of vacuum specimen chamber (4), storing has upper strata leaded light glass window (8) and resistance heating wire's (10) teflon lid (11) to be tightly connected by screw thread and vacuum specimen chamber (4), passes insulating rigid foam cap (12) and has vent hole (13) and the additional liquid nitrogen hole (14) that is communicated with rustless steel container (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97246539 CN2314365Y (en) | 1997-12-27 | 1997-12-27 | Vacuum low temperature making apparatus for optic measure of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97246539 CN2314365Y (en) | 1997-12-27 | 1997-12-27 | Vacuum low temperature making apparatus for optic measure of semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2314365Y true CN2314365Y (en) | 1999-04-14 |
Family
ID=33954709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97246539 Expired - Fee Related CN2314365Y (en) | 1997-12-27 | 1997-12-27 | Vacuum low temperature making apparatus for optic measure of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2314365Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636256A (en) * | 2012-04-12 | 2012-08-15 | 南京大学 | Movable type low-temperature weak light detection system and detection method |
| CN105299439A (en) * | 2015-09-16 | 2016-02-03 | 浙江大学 | Detachable low-temperature fluid visualization window, device and container |
| EP3133384A3 (en) * | 2015-07-28 | 2017-05-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device and method for the thermo-optical examination of samples |
| CN107064004A (en) * | 2017-06-08 | 2017-08-18 | 东北石油大学 | Optical characteristic measurement optics cavity under a kind of liquid medium low temperature environment |
| CN108896495A (en) * | 2018-09-14 | 2018-11-27 | 贵州电网有限责任公司 | A kind of environmental protection insulating gas and metal phase capacitive experiment simulator and test method |
| CN110132925A (en) * | 2019-06-03 | 2019-08-16 | 河海大学 | A kind of pumping-detection time-resolved fluorescence system sample environment temperature regulating device |
| CN113884062A (en) * | 2021-09-24 | 2022-01-04 | 中国科学院电工研究所 | Large-temperature-difference temperature keeping device for liquid helium at temperature |
-
1997
- 1997-12-27 CN CN 97246539 patent/CN2314365Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636256A (en) * | 2012-04-12 | 2012-08-15 | 南京大学 | Movable type low-temperature weak light detection system and detection method |
| EP3133384A3 (en) * | 2015-07-28 | 2017-05-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device and method for the thermo-optical examination of samples |
| CN105299439A (en) * | 2015-09-16 | 2016-02-03 | 浙江大学 | Detachable low-temperature fluid visualization window, device and container |
| CN105299439B (en) * | 2015-09-16 | 2018-06-19 | 浙江大学 | Detachable low-temperature flow shear stress form, device and container |
| CN107064004A (en) * | 2017-06-08 | 2017-08-18 | 东北石油大学 | Optical characteristic measurement optics cavity under a kind of liquid medium low temperature environment |
| CN107064004B (en) * | 2017-06-08 | 2019-08-23 | 东北石油大学 | Optical characteristic measurement optics cavity under a kind of liquid medium low temperature environment |
| CN108896495A (en) * | 2018-09-14 | 2018-11-27 | 贵州电网有限责任公司 | A kind of environmental protection insulating gas and metal phase capacitive experiment simulator and test method |
| CN108896495B (en) * | 2018-09-14 | 2024-04-12 | 贵州电网有限责任公司 | Environment-friendly insulating gas and metal compatibility test simulation device and test method |
| CN110132925A (en) * | 2019-06-03 | 2019-08-16 | 河海大学 | A kind of pumping-detection time-resolved fluorescence system sample environment temperature regulating device |
| CN113884062A (en) * | 2021-09-24 | 2022-01-04 | 中国科学院电工研究所 | Large-temperature-difference temperature keeping device for liquid helium at temperature |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |