CN2306479Y - Composite target - Google Patents
Composite target Download PDFInfo
- Publication number
- CN2306479Y CN2306479Y CN 97244446 CN97244446U CN2306479Y CN 2306479 Y CN2306479 Y CN 2306479Y CN 97244446 CN97244446 CN 97244446 CN 97244446 U CN97244446 U CN 97244446U CN 2306479 Y CN2306479 Y CN 2306479Y
- Authority
- CN
- China
- Prior art keywords
- target
- oxide
- target body
- compound
- body according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002131 composite material Substances 0.000 title abstract 2
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000000956 alloy Substances 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract description 3
- 239000007769 metal material Substances 0.000 claims abstract description 3
- 150000001875 compounds Chemical class 0.000 claims description 13
- 239000002887 superconductor Substances 0.000 claims description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 claims 2
- 239000011162 core material Substances 0.000 abstract description 7
- 239000000919 ceramic Substances 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 2
- 239000013077 target material Substances 0.000 abstract 3
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 20
- 229910052742 iron Inorganic materials 0.000 description 9
- 238000002360 preparation method Methods 0.000 description 5
- 238000005245 sintering Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Images
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- Compositions Of Oxide Ceramics (AREA)
Abstract
The utility model relates to a composite target which is provided with a target core and target material that is coated on the surface of the target core, wherein the target core is made from high-temperature resistant rigid material, such as quartz glass, ceramic, metal and alloy material, and the target material is made from ceramic material with oxide function, such as ferroelectric material, oxide function high temperature superconductive material, oxide large reluctance material and oxide magneto-optical material. The utility model has the advantages of simple process without mould, material saving and easy target material replacement.
Description
The utility model relates to target body, relates in particular to compound target body.
When using magnetron sputtering and some other sputtering method to prepare high quality oxide high energy ceramic membrane, at first need to prepare oxide function ceramics target body with certain intensity.Concerning most of oxide function ceramics target bodys, preparation technology is complicated, and it need be through batching-first ball milling-pre-burning-pulverizing (secondary ball milling)-granulation-shaping-sintering.Simultaneously in order to have certain intensity, target body must have suitable thickness, and (3～10mm), so very big the feeding intake of need, this brings problem on the expense to using some expensive materials to prepare target body.Secondly, after a target body was made, with behind its preparation film hundreds of time, its consumption also had only about 20% usually.If want the target body material is made improvements this moment, and discarded target body remainder will cause very big waste.In addition, most of ceramic target bodys need under high like this temperature, be easy to generate the problem of chemical substance volatilization at the sintering temperature that is higher than 1000 ℃, make target be difficult for the stoichiometric proportion that keeps predetermined.Therefore in real work, need grope repeatedly, just can prepare comparatively desirable target body.
It is simple that the purpose of this utility model provides a kind of making, the compound target body that materials are saved.
The utility model is taked following measures in order to achieve the above object: compound target body has the target core, is coated with target at the target wicking surface.
The utility model has the advantages that: evenly (preparing burden with chemical solution) preparation method is simple, materials are saved (inventory only is the common target body about 10% of preparation), target is easy to change and (changes thick film composition or other parameter such as needs for the composition height, can remove the thick film on the carrier, again film forming on carrier).In addition, the preparation compound target body does not need mould, also sintering at high temperature, avoided because the problem that high temperature sintering brings (as the component volatilization problem etc.).
Be illustrated below in conjunction with drawings and Examples.
Accompanying drawing is the compound target body schematic diagram.
Compound target body has target core 1, is coated with target 2 at the target wicking surface. Target is the oxide function ceramics Material is such as ferroelectric material or oxide high-temperature superconductor or oxide magneto-optic memory technique. The target core material is anti-The high temperature rigid material is such as quartz glass or pottery or metal or alloy material. Target thickness is 0.1～1mm.
Embodiment
The making chemical constituent is Bi
2DyFe
5O
12Compound target body
1) get 90 millimeters of diameters, the iron plate that thickness is 1 millimeter is as the target core;
2) prepare colloidal sol according to the following steps: take by weighing 11.65 gram Bi
2O
3With 4.66 gram Dy
2O
3Be dissolved in the HNO of 40 milliliter of 6 mol
3In the solution, generate Bi
2(NO
3)
3And Dy (NO
3)
3Mixed solution.Fe (the NO that adds 125 milliliter of 1 mol then
3)
3Solution fully stirs, and forms Bi
3+, Dy
3+, Fe
3+Nitrate mixed solution.Be that 20% polyethylene glycol (PEG) aqueous solution is poured in the above-mentioned nitrate mixed solution again with 90 ml concns, fully stir, form colloidal sol at last.The colloidal sol for preparing is poured into the flat container;
3) with a little iron clamp iron plate is connected with stay cord on lifting support, the rope that lengthens then submerges in the colloidal sol of flat container by iron plate.Start buncher, with the speed lifting iron plate of 2cm/min, up to proposing liquid level.At this moment, one deck dissolved glue film has just been adhered on the iron plate surface.The iron plate that will adhere to dissolved glue film is placed on to toast under the infrared lamp and made its drying in 5 minutes, in the colloidal sol of the flat container that submerges again, repeats said process 50 times.Forming a layer thickness at last on iron plate is the thick film of 10 μ m;
4) iron plate is placed Muffle furnace, slowly be warming up to 600 ℃, be incubated 2 hours, cool to room temperature then with the furnace and take out.
Claims (6)
1. a compound target body is characterized in that it has target core [1], is coated with target [2] at the target wicking surface.
2. a kind of compound target body according to claim 1 is characterized in that said target is the oxide ceramic material,
3. a kind of compound target body according to claim 1 and 2 is characterized in that said oxide ceramic material is ferroelectric material or oxide high-temperature superconductor or oxide magneto-optic memory technique.
4. a kind of compound target body according to claim 1 is characterized in that said target is high temperature resistant rigidity material,
5. according to claim 1 or 4 described a kind of compound target bodies, it is characterized in that said high temperature resistant rigidity material is quartz glass or pottery or metal or alloy material.
6. a kind of compound target body according to claim 1 is characterized in that said target thickness is 0.1～1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97244446 CN2306479Y (en) | 1997-08-01 | 1997-08-01 | Composite target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97244446 CN2306479Y (en) | 1997-08-01 | 1997-08-01 | Composite target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2306479Y true CN2306479Y (en) | 1999-02-03 |
Family
ID=33953162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97244446 Expired - Fee Related CN2306479Y (en) | 1997-08-01 | 1997-08-01 | Composite target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2306479Y (en) |
-
1997
- 1997-08-01 CN CN 97244446 patent/CN2306479Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |