CN221506995U

CN221506995U - Cantilever type probe card's placement tool

Info

Publication number: CN221506995U
Application number: CN202420192800.7U
Authority: CN
Inventors: 孙波波
Original assignee: Jiangsu Pengli Zhidane Semiconductor Co ltd
Current assignee: Jiangsu Pengli Zhidane Semiconductor Co ltd
Priority date: 2024-01-26
Filing date: 2024-01-26
Publication date: 2024-08-09
Anticipated expiration: 2034-01-26

Abstract

The utility model discloses a cantilever type probe card placing jig, which relates to the technical field of probe cards and comprises a base, wherein the bottom end of the base is fixedly connected with a sucker, the top end of the base is fixedly connected with an operating platform, the top end of the operating platform is fixedly connected with a mounting cylinder, the inside of the mounting cylinder is movably connected with a clamping mechanism, the outer wall of the mounting cylinder is provided with a group of sliding grooves which are symmetrical front and back, the inside of the sliding grooves is slidably connected with an ejection mechanism, and one side of the operating platform far away from the mounting cylinder is fixedly connected with a control button. According to the utility model, the motor is controlled to rotate, when the motor drives the cam to rotate, the protruding parts of the cam can prop against the two sides of the bottom end of the transmission rod, so that the top ends of the transmission rod are close to each other, the clamping plates are driven to be close to each other by the connecting rod, so that the probe card is clamped and fixed, and at the moment, a person can test and examine the probe.

Description

Cantilever type probe card's placement tool

Technical Field

The utility model relates to the technical field of probe cards, in particular to a placement jig for a cantilever type probe card.

Background

The probe card is an interface between a tested chip and a tester in wafer test, is mainly applied to the preliminary measurement of the electrical property of the chip before chip slicing and packaging, and after screening out bad chips, the packaging engineering is carried out later, the use principle of the probe card is that probes on the probe card are directly contacted with welding pads or bumps on the chip, the chip signal is led out and then matched with the peripheral test instrument and software control to automatically measure the wafer, which is very important for the development of the early test and the yield guarantee of the later mass production test, and is an important process with considerable influence on the manufacturing cost in the wafer manufacturing process.

The stability of the existing equipment is poor in the use process, so that great inconvenience is brought to personnel when the probe is checked, and meanwhile, the existing equipment is inconvenient for the personnel to take. Therefore, we provide a placement jig for cantilever probe cards to solve the above problems.

Disclosure of utility model

Technical problem to be solved

The utility model aims to make up the defects of the prior art and provides a cantilever type probe card placing jig.

Technical proposal

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a tool is placed to cantilever type probe card, includes the base, the bottom fixedly connected with sucking disc of base, the top fixed operation panel of base, and the top fixedly connected with installation section of thick bamboo of operation panel, the inside swing joint of installation section of thick bamboo has fixture, a set of spout of fore-and-aft symmetry has been seted up to the outer wall of installation section of thick bamboo, and the inside sliding connection of spout has ejection mechanism, one side fixedly connected with control button of installation section of thick bamboo is kept away from to the operation panel.

Above-mentioned, fixture includes motor, cam, transfer line, spring one, connecting rod and splint, the output fixed connection of motor is in the axle center department of cam, the transfer line is provided with bilateral symmetry's two, and the both ends of spring one are fixed connection in bottom one side of transfer line respectively, cam swing joint is in the bottom opposite side of transfer line, the one end of connecting rod articulates in the top of transfer line, and the other end of connecting rod articulates in the outer wall of splint.

Above-mentioned, splint swing joint is inside the top of installation section of thick bamboo, connecting rod swing joint is on the top of installation section of thick bamboo, the transfer line sets up to be L shape.

Above, the fixed end of motor fixed connection is in the inside opposite side of base and operation panel, the cam is located the spring one directly over, motor and control button electric connection.

Above-mentioned, ejection mechanism includes cylinder, spring two and lifting plate, the output fixed connection of cylinder is in the bottom of lifting plate, spring two is provided with bilateral symmetry's two, and the one end fixed connection of spring two in the bottom of lifting plate.

Above-mentioned, the cylinder is located the opposite side of spring two, the equal sliding connection of lifting board is in the inside of spout, and the one end of lifting board runs through the spout and extends to the inside of installation section of thick bamboo.

The fixed end of the air cylinder is fixedly connected to the top end of the operating platform, and the air cylinder is electrically connected with the controller.

The beneficial effects are that:

compared with the prior art, the placement jig for the cantilever type probe card has the following beneficial effects:

1. According to the utility model, through the clamping mechanism, the motor is controlled to rotate, when the motor drives the cam to rotate, the protruding parts of the cam can prop against the two sides of the bottom end of the transmission rod, so that the top ends of the cam are close to each other, the clamping plates are driven to be close to each other through the connecting rods, so that the probe card is clamped and fixed, at the moment, a person can test and test the probe, and when the protruding parts of the control cam are far away, the spring at the bottom end drives the clamping mechanism to reset, so that the stability of the probe card in the use process can be ensured, the applicability of equipment is effectively improved, and inconvenience brought by replacement of equipment parts by the person is reduced.

2. According to the utility model, through the ejection mechanism, when a person needs to replace equipment, the operation of the air cylinder can be controlled, and the air cylinder can jack up the lifting plate, so that the lifting plate slides in the sliding groove, and the probe card on the clamping plate is ejected out of the mounting cylinder, thereby preventing the damage of the probe card caused by the person in the process of taking, and simultaneously being more convenient for the person to take and replace.

Additional advantages, objects, and features of the utility model will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the utility model.

Drawings

FIG. 1 is a schematic perspective view of the present utility model;

FIG. 2 is a schematic diagram of an explosive structure according to the present utility model;

FIG. 3 is a schematic view of a clamping mechanism and a connector thereof according to the present utility model;

fig. 4 is an enlarged schematic view of the structure of fig. 2a according to the present utility model.

In the figure: 1. a base; 2. a suction cup; 3. an operation table; 4. a mounting cylinder; 5. a clamping mechanism; 501. a motor; 502. a cam; 503. a transmission rod; 504. a first spring; 505. a connecting rod; 506. a clamping plate; 6. a chute; 7. an ejection mechanism; 701. a cylinder; 702. a second spring; 703. a lifting plate; 8. a control button.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1-4, the present utility model provides a technical solution: the utility model provides a tool is placed to cantilever type probe card, includes base 1, the bottom fixedly connected with sucking disc 2 of base 1, the top fixed operation panel 3 of base 1, and the top fixedly connected with installation section of thick bamboo 4 of operation panel 3, the inside swing joint of installation section of thick bamboo 4 has fixture 5, a set of spout 6 of fore-and-aft symmetry has been seted up to the outer wall of installation section of thick bamboo 4, and the inside sliding connection of spout 6 has ejection mechanism 7, one side fixedly connected with control button 8 of installation section of thick bamboo 4 is kept away from to operation panel 3.

When the probe card is used, personnel select a proper probe card at first, then prevent to rotate at the top of splint 506, only need control motor 501 at this moment, when motor 501 drives cam 502 and rotates, the bottom both sides of transfer line 503 can be withstood to the protruding department of cam 502, thereby make its top be close to each other, thereby come to drive between splint 506 through connecting rod 505 and be close to each other, thereby centre gripping is fixed to the probe card, personnel can test the inspection to the probe at this moment, when the protruding department of control cam 502 keeps away from, the first 504 of spring of bottom can drive fixture 5 and reset, can guarantee the stability of probe card in the use through this device, the suitability of equipment is still effectively improved, the inconvenience that personnel changed equipment parts and bring is reduced, in addition, controllable cylinder 701 function when personnel need change equipment, cylinder 701 can jack-up lifting plate 703, thereby make lifting plate 703 slide in the inside of spout 6, make it push out the inside of mounting cylinder 4 with the probe card on the splint 506, thereby prevent that personnel from leading to the probe card damage in the process of taking, simultaneously also more convenient personnel to take.

As shown in the figure, fixture 5 includes motor 501, cam 502, transfer line 503, first 504 of spring, connecting rod 505 and splint 506, the output fixed connection of motor 501 is in the axle center department of cam 502, transfer line 503 is provided with bilateral symmetry's two, and the both ends of first 504 of spring are fixed connection in bottom one side of transfer line 503 respectively, cam 502 swing joint is in the opposite side of bottom of transfer line 503, the one end of connecting rod 505 articulates in the top of transfer line 503, and the other end of connecting rod 505 articulates in the outer wall of splint 506, splint 506 swing joint is in the top inside of installation section of thick bamboo 4, connecting rod 505 swing joint is in the top of installation section of thick bamboo 4, the transfer line 503 sets up to be L shape, the stiff end fixed connection of motor 501 is in the inside opposite side of base 1 and operation panel 3, cam 502 is located the first 504 of spring, motor 501 and control button 8 electric connection.

Through the control motor 501 rotates, when the motor 501 drives cam 502 and rotates, the bottom both sides of transfer line 503 can be withstood in the protruding department of cam 502 to make its top be close to each other, so that drive between splint 506 through connecting rod 505 and be close to each other, thereby carry out the centre gripping to the probe card and fix, the personnel can test the inspection to the probe this moment, when the protruding department of control cam 502 kept away from, the first spring 504 of bottom can drive fixture 5 and reset, can guarantee the probe card stability in the use through this device, still effectively improve the suitability of equipment, reduce the inconvenience that personnel change equipment parts and bring.

As shown in the figure, the ejection mechanism 7 comprises a cylinder 701, a second spring 702 and a lifting plate 703, wherein the output end of the cylinder 701 is fixedly connected to the bottom end of the lifting plate 703, the second spring 702 is provided with two symmetrical springs, one end of the second spring 702 is fixedly connected to the bottom end of the lifting plate 703, the cylinder 701 is positioned on the opposite side of the second spring 702, the lifting plate 703 is slidably connected to the inside of the sliding groove 6, one end of the lifting plate 703 penetrates through the sliding groove 6 and extends to the inside of the mounting cylinder 4, the fixed end of the cylinder 701 is fixedly connected to the top end of the operating platform 3, and the cylinder 701 is electrically connected with the controller.

When personnel need change equipment, the controllable cylinder 701 operates, and the cylinder 701 can jack up the lifting plate 703 to make the lifting plate 703 slide in the interior of the chute 6, make it push out the probe card on the clamping plate 506 from the interior of the mounting cylinder 4, thereby prevent personnel from leading to the condition of probe card damage in the process of taking, also make things convenient for personnel to take the change simultaneously.

Working principle: personnel select suitable probe card at first, then prevent to rotate at the top of splint 506, only need control motor 501 this moment, when motor 501 drives cam 502 and rotates, the bottom both sides of transfer line 503 can be withstood in the protruding department of cam 502, thereby make its top be close to each other, thereby come to drive each other between splint 506 through connecting rod 505, thereby carry out the centre gripping to the probe card fixedly, personnel can test the inspection to the probe this moment, when the protruding department of control cam 502 keeps away from, the first spring 504 of bottom can drive fixture 5 and reset, can guarantee the probe card stability in the use through this device, but also effectively improve the suitability of equipment, controllable cylinder 701 function when personnel need change equipment, cylinder 701 can jack up lifting plate 703, thereby make lifting plate 703 slide in the inside of spout 6, make it push out the inside of mounting cylinder 4 with the probe card on the splint 506, thereby prevent personnel from leading to the condition that the probe card damages in the taking process, also make things convenient for personnel to take simultaneously and change.

It should be noted that, in this document, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless explicitly specified and limited otherwise, the terms "fixedly attached," "mounted," "connected," and "coupled" are to be construed broadly, e.g., as a fixed connection, as a removable connection, or as an integral connection; "coupled" may be either mechanical or electrical; the "connection" may be direct, indirect via an intermediary, or communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a tool is placed to cantilever type probe card, includes base (1), its characterized in that: the novel automatic lifting device is characterized in that the bottom end of the base (1) is fixedly connected with the sucker (2), the top end of the base (1) is fixedly connected with the operation table (3), the top end of the operation table (3) is fixedly connected with the installation cylinder (4), the clamping mechanism (5) is movably connected inside the installation cylinder (4), a group of sliding grooves (6) which are symmetrical from front to back are formed in the outer wall of the installation cylinder (4), the ejection mechanism (7) is connected inside the sliding grooves (6) in a sliding mode, and one side, away from the installation cylinder (4), of the operation table (3) is fixedly connected with the control button (8).

2. The placement jig for a cantilever probe card according to claim 1, wherein: the clamping mechanism (5) comprises a motor (501), a cam (502), a transmission rod (503), a first spring (504), a connecting rod (505) and a clamping plate (506), wherein the output end of the motor (501) is fixedly connected to the axis of the cam (502), the transmission rod (503) is provided with two symmetrical parts, the two ends of the first spring (504) are respectively and fixedly connected to one side of the bottom end of the transmission rod (503), the cam (502) is movably connected to the opposite side of the bottom end of the transmission rod (503), one end of the connecting rod (505) is hinged to the top end of the transmission rod (503), and the other end of the connecting rod (505) is hinged to the outer wall of the clamping plate (506).

3. The placement jig for a cantilever probe card according to claim 2, wherein: the clamping plate (506) is movably connected to the inside of the top end of the mounting cylinder (4), the connecting rod (505) is movably connected to the top end of the mounting cylinder (4), and the transmission rod (503) is L-shaped.

4. The placement jig for a cantilever probe card according to claim 2, wherein: the fixed end of the motor (501) is fixedly connected to the opposite sides of the base (1) and the inside of the operation table (3), the cam (502) is located right above the first spring (504), and the motor (501) is electrically connected with the control button (8).

5. The placement jig for a cantilever probe card according to claim 1, wherein: the ejection mechanism (7) comprises a cylinder (701), a second spring (702) and a lifting plate (703), wherein the output end of the cylinder (701) is fixedly connected to the bottom end of the lifting plate (703), the second spring (702) is provided with two symmetrical springs, and one end of the second spring (702) is fixedly connected to the bottom end of the lifting plate (703).

6. The placement jig for a cantilever probe card according to claim 5, wherein: the cylinder (701) is located on the opposite side of the second spring (702), the lifting plates (703) are all connected to the inside of the sliding groove (6) in a sliding mode, and one ends of the lifting plates (703) penetrate through the sliding groove (6) and extend to the inside of the mounting cylinder (4).

7. The placement jig for a cantilever probe card according to claim 5, wherein: the fixed end of the air cylinder (701) is fixedly connected to the top end of the operation table (3), and the air cylinder (701) is electrically connected with the controller.