CN216560708U

CN216560708U - Probe card detection device

Info

Publication number: CN216560708U
Application number: CN202123051641.4U
Authority: CN
Inventors: 张敏
Original assignee: Shenghua Weina Technology Suzhou Co ltd
Current assignee: Shenghua Weina Technology Suzhou Co ltd
Priority date: 2021-12-07
Filing date: 2021-12-07
Publication date: 2022-05-17
Anticipated expiration: 2031-12-07

Abstract

The utility model discloses a probe card detection device, which comprises a workbench, wherein a first turntable is rotationally connected inside the workbench, a second turntable is symmetrically and fixedly connected to the top of the first turntable, a fixed plate is arranged at the top of the second turntable, a bidirectional lead screw is rotationally connected inside the fixed plate, a first sliding block is symmetrically and threadedly connected to the outer side of the bidirectional lead screw, a second movable plate is fixedly connected to the top of the first sliding block, a connecting block is fixedly connected to the outer side of the second movable plate, a limiting frame is fixedly connected to the outer side of the connecting block, a second sliding block is slidably connected inside the limiting frame, a clamping plate is fixedly connected to the outer side of the second sliding block, and a vertical plate is fixedly connected to the top of the workbench. The second movable plates can be moved according to the types of the probe cards, the distance between the second movable plates can be adjusted conveniently, the probe cards with different sizes can be adapted to be fixed, and the influence on the smooth detection is avoided.

Description

Probe card detection device

Technical Field

The utility model relates to the technical field of detection devices, in particular to a probe card detection device.

Background

In the existing life, a probe card is a test interface, mainly tests bare chips, tests chip parameters by connecting a test machine and a chip and transmitting signals, and the purpose of automatic measurement is achieved by directly contacting probes on the probe card with bonding pads or bumps on the chip, leading out chip signals and matching with peripheral test instruments and software control. The probe card is applied to the packaging engineering before IC packaging, and the probe is used for working performance test aiming at the bare crystal system, so as to screen out defective products and then carry out packaging. Therefore, the probe card is one of the important processes in IC manufacturing that significantly affects the manufacturing cost. The conventional probe card detection device can only fix a probe card with a specific model, is inconvenient to adjust and is not suitable for fixing probe cards with different sizes, so that the smooth detection is influenced.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a probe card inspection apparatus to solve the above problems.

In order to solve the technical problems, the utility model provides the following technical scheme:

the utility model relates to a probe card detection device which comprises a workbench, wherein a first rotary table is rotatably connected inside the workbench, a second rotary table is symmetrically and fixedly connected to the top of the first rotary table, a fixed plate is arranged on the top of the second rotary table, a bidirectional lead screw is rotatably connected inside the fixed plate, a first slider is symmetrically and threadedly connected to the outer side of the bidirectional lead screw, a second movable plate is fixedly connected to the top of the first slider, a connecting block is fixedly connected to the outer side of the second movable plate, a limiting frame is fixedly connected to the outer side of the connecting block, a second slider is slidably connected inside the limiting frame, a clamping plate is fixedly connected to the outer side of the second slider, a vertical plate is fixedly connected to the top of the workbench, a first movable plate is arranged on the outer side of the vertical plate, and a detection device main body is arranged inside the first movable plate.

As a preferable scheme of the present invention, a motor is disposed inside the workbench and on one side of the first rotary table, an output end of the motor is fixedly connected with a second rotary shaft, an outer side of the second rotary shaft is fixedly connected with a gear, an outer side of the first rotary table is fixedly connected with a gear ring, and the gear ring is in meshed connection with the gear.

As a preferable scheme of the present invention, a worm is rotatably connected inside the second turntable, a first rotating shaft is rotatably connected inside the second turntable and on one side of the worm, a worm wheel is fixedly connected to an outer side of the first rotating shaft, the worm wheel is engaged with the worm, and the first rotating shaft is fixedly connected to the fixing plate.

As a preferred scheme of the utility model, a limiting rod is fixedly connected inside the limiting frame, the limiting rod is connected with the second sliding block in a sliding manner, a telescopic spring is sleeved on one side of the outer side of the limiting rod, which is located on the second sliding block, a pull rod is connected inside the limiting frame in a sliding manner, and the pull rod is fixedly connected with the clamping plate.

As a preferable scheme of the utility model, the inside of the vertical plate is rotatably connected with a transmission screw rod, and the outer side of the transmission screw rod is in threaded connection with the first moving plate.

As a preferable scheme of the present invention, a controller is disposed outside the workbench, and the motor is electrically connected to the controller.

The utility model has the following beneficial effects: through the arrangement of the bidirectional screw rod, the first sliding block and the second moving plate, the second moving plate can be moved according to the type of the probe card, the distance between the second moving plates can be conveniently adjusted, the probe cards with different sizes can be adapted to be fixed through the arrangement of the clamping plate, the second sliding block and the telescopic spring, and the influence on the smooth detection is avoided.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model. In the drawings:

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of the internal structure of the present invention;

fig. 3 is an enlarged schematic view of a.

In the figure, 1, a workbench; 2. a first turntable; 3. a vertical plate; 4. a first moving plate; 5. a detection device main body; 6. a fixing plate; 7. a second turntable; 8. a second moving plate; 9. a limiting rod; 10. a transmission screw rod; 11. a worm; 12. a worm gear; 13. a bidirectional screw rod; 14. a first slider; 15. a first rotating shaft; 16. a splint; 17. a ring gear; 18. a motor; 19. a gear; 20. a second rotating shaft; 21. a pull rod; 22. connecting blocks; 23. a second slider; 24. a limiting frame; 25. a telescoping spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, the utility model provides a probe card detection device, which comprises a workbench 1, a first rotary disc 2 is rotatably connected inside the workbench 1, a second rotary disc 7 is symmetrically and fixedly connected to the top of the first rotary disc 2, a fixing plate 6 is arranged on the top of the second rotary disc 7, a bidirectional screw 13 is rotatably connected inside the fixing plate 6, a first slider 14 is symmetrically and threadedly connected to the outer side of the bidirectional screw 13, a second moving plate 8 is fixedly connected to the top of the first slider 14, the bidirectional screw 13 is rotated to drive the first slider 14 to move according to the type of a probe card, so as to drive the second moving plate 8 to move, a connecting block 22 is fixedly connected to the outer side of the second moving plate 8, a limit frame 24 is fixedly connected to the outer side of the connecting block 22, a second slider 23 is slidably connected to the inner side of the limit frame 24, a clamping plate 16 is fixedly connected to the outer side of the second slider 23, the clamping plate 16 is driven by pulling the pull rod 21 to move the clamping plate 16 upwards, the probe card stays in the limiting frame 24, the pull rod 21 is loosened, the clamping plate 16 extrudes the probe card under the elastic force action of the telescopic spring 25 to fix the probe card, the probe card can adapt to different sizes of probe cards to be fixed, the influence on the smooth detection is avoided, the vertical plate 3 is fixedly connected to the top of the workbench 1, the first moving plate 4 is arranged on the outer side of the vertical plate 3, and the detection device main body 5 is arranged in the first moving plate 4 to facilitate the detection.

Further, the inside of workstation 1 and the one side that is located first carousel 2 are equipped with motor 18, and the output end fixedly connected with second pivot 20 of motor 18, the outside fixedly connected with gear 19 of second pivot 20, the outside fixedly connected with ring gear 17 of first carousel 2, ring gear 17 and gear 19 meshing are connected, and starter motor 18 drives second pivot 20 and rotates, is connected with gear 19 meshing through ring gear 17 and drives first carousel 2 and rotate, conveniently removes the probe card.

Furthermore, a worm 11 is rotatably connected to the inside of the second turntable 7, a first rotating shaft 15 is rotatably connected to one side of the worm 11 inside the second turntable 7, a worm wheel 12 is fixedly connected to the outer side of the first rotating shaft 15, the worm wheel 12 is meshed with the worm 11, the first rotating shaft 15 is fixedly connected with the fixing plate 6, the worm 11 is rotated, and the worm wheel 12 is meshed with the worm 11 to drive the first rotating shaft 15 to rotate, so that the fixing plate 6 is driven to rotate, and the angle of the probe card is adjusted according to the detection requirement.

Further, the inside fixedly connected with gag lever post 9 of spacing frame 24, gag lever post 9 and second slider 23 sliding connection, the outside of gag lever post 9 and the one side cover that is located second slider 23 are equipped with expanding spring 25, the inside sliding connection of spacing frame 24 has pull rod 21, pull rod 21 and splint 16 fixed connection, pulling pull rod 21 drives splint 16 rebound, the probe card stops the inside of spacing frame 24, loosen pull rod 21, splint 16 extrudees the probe card under expanding spring 25's spring action, fix.

Furthermore, the inside of the vertical plate 3 is rotatably connected with a transmission screw rod 10, the outer side of the transmission screw rod 10 is in threaded connection with the first moving plate 4, the transmission screw rod 10 is rotated to drive the first moving plate 4 to move, the height of the detection device main body 5 is adjusted according to a probe card to be detected, and detection is convenient.

Further, a controller is arranged on the outer side of the workbench 1, and the motor 18 is electrically connected with the controller, so that the motor 18 can be conveniently controlled.

When the probe card fixing device is used, the bidirectional screw rod 13 is rotated according to the type of a probe card to drive the first sliding block 14 to move, so that the second moving plate 8 is driven to move, the pull rod 21 is pulled to drive the clamping plate 16 to move upwards, the probe card stays in the limiting frame 24, the pull rod 21 is loosened, the clamping plate 16 extrudes the probe card under the action of the elastic force of the telescopic spring 25 to fix the probe card, the probe card with different sizes can be fixed, the smooth detection is prevented from being influenced, the motor 18 is started to drive the second rotating shaft 20 to rotate, the first rotating disc 2 is driven to rotate through the matching use of the gear 19 and the gear ring 17, the transmission screw rod 10 is rotated to drive the first moving plate 4 to move, the height of the detection device main body 5 is adjusted according to the probe card to be detected, and the detection is convenient to carry out.

In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

Furthermore, the terms "first", "second", "third", "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, whereby the features defined as "first", "second", "third", "fourth" may explicitly or implicitly include at least one such feature.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A probe card inspection apparatus includes a stage (1), characterized in that: the inner part of the workbench (1) is rotatably connected with a first turntable (2), the top of the first turntable (2) is symmetrically and fixedly connected with a second turntable (7), the top of the second turntable (7) is provided with a fixed plate (6), the inner part of the fixed plate (6) is rotatably connected with a bidirectional screw rod (13), the outer side of the bidirectional screw rod (13) is symmetrically and threadedly connected with a first slider (14), the top of the first slider (14) is fixedly connected with a second movable plate (8), the outer side of the second movable plate (8) is fixedly connected with a connecting block (22), the outer side of the connecting block (22) is fixedly connected with a limiting frame (24), the inner part of the limiting frame (24) is slidably connected with a second slider (23), the outer side of the second slider (23) is fixedly connected with a clamping plate (16), and the top of the workbench (1) is fixedly connected with a vertical plate (3), the outer side of the vertical plate (3) is provided with a first moving plate (4), and a detection device main body (5) is arranged inside the first moving plate (4).

2. The probe card inspection apparatus of claim 1, wherein: the inside of workstation (1) and the one side that is located first carousel (2) are equipped with motor (18), the output fixedly connected with second pivot (20) of motor (18), the outside fixedly connected with gear (19) of second pivot (20), the outside fixedly connected with ring gear (17) of first carousel (2), ring gear (17) are connected with gear (19) meshing.

3. The probe card inspection apparatus of claim 1, wherein: the inside of second carousel (7) rotates and is connected with worm (11), the inside of second carousel (7) and the one side that is located worm (11) rotate and be connected with first pivot (15), the outside fixedly connected with worm wheel (12) of first pivot (15), worm wheel (12) are connected with worm (11) meshing, first pivot (15) and fixed plate (6) fixed connection.

4. The probe card inspection apparatus of claim 1, wherein: the inside fixedly connected with gag lever post (9) of spacing frame (24), gag lever post (9) and second slider (23) sliding connection, the outside of gag lever post (9) and the one side cover that is located second slider (23) are equipped with expanding spring (25), the inside sliding connection of spacing frame (24) has pull rod (21), pull rod (21) and splint (16) fixed connection.

5. The probe card inspection apparatus of claim 1, wherein: the inner part of the vertical plate (3) is rotatably connected with a transmission screw rod (10), and the outer side of the transmission screw rod (10) is in threaded connection with the first moving plate (4).

6. The probe card inspection apparatus of claim 2, wherein: the outer side of the workbench (1) is provided with a controller, and the motor (18) is electrically connected with the controller.