CN221421276U - Thermal field structure of single crystal furnace - Google Patents
Thermal field structure of single crystal furnace Download PDFInfo
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- CN221421276U CN221421276U CN202323500786.7U CN202323500786U CN221421276U CN 221421276 U CN221421276 U CN 221421276U CN 202323500786 U CN202323500786 U CN 202323500786U CN 221421276 U CN221421276 U CN 221421276U
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- single crystal
- crystal furnace
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- furnace main
- thermal field
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- 239000013078 crystal Substances 0.000 title claims abstract description 71
- 238000009423 ventilation Methods 0.000 claims abstract description 36
- 238000007789 sealing Methods 0.000 claims abstract description 25
- 238000001816 cooling Methods 0.000 claims abstract description 10
- 238000004321 preservation Methods 0.000 claims description 23
- 230000017525 heat dissipation Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 5
- 235000017491 Bambusa tulda Nutrition 0.000 description 5
- 241001330002 Bambuseae Species 0.000 description 5
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 5
- 239000011425 bamboo Substances 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a thermal field structure of a single crystal furnace, which comprises a single crystal furnace main body, wherein two ventilation pipes are symmetrically arranged on the side wall of the single crystal furnace main body, two mounting plates are symmetrically arranged on the outer wall of the single crystal furnace main body, a motor is arranged at the lower end of the mounting plate at the lower side, a screw rod is rotatably arranged on the two mounting plates, the screw rod is connected with an output shaft of the motor, a connecting structure is arranged on the screw rod, the connecting structure consists of an arc plate and a mounting block, the mounting block is arranged on the inner wall of the arc plate, the ventilation pipes are arranged on the single crystal furnace main body, and the mounting plate, the motor, the screw rod, the connecting structure and the sealing ventilation structure are arranged on the single crystal furnace main body, so that the interior of the single crystal furnace main body can be communicated with the outside, the heat in the single crystal furnace main body can be rapidly dissipated, the effect of cooling the thermal field is further enhanced, the furnace stopping time is finally further reduced, and the service efficiency of the single crystal furnace and the thermal field is improved.
Description
Technical Field
The utility model relates to the field of single crystal furnaces, in particular to a thermal field structure of a single crystal furnace.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas (nitrogen and helium are mainly) environment, wherein a graphite heater is used for melting polycrystalline materials such as polycrystalline silicon and the like. It mainly comprises a lifting head, an auxiliary chamber, a furnace cover, a furnace cylinder, a base frame, a crucible lower transmission device and the like. The thermal field structure of the single crystal furnace mainly comprises a furnace body, a heat preservation layer, a heating element, a cooling system and the like. The utility model provides a quick cooling thermal field device of single crystal growing furnace blowing out and single crystal growing furnace of current application number CN202220398472.7, though it adopts separable upper heat preservation section of thick bamboo and well lower heat preservation section of thick bamboo structure, can upwards promote the upper heat preservation section of thick bamboo through the promotion structure after stopping the stove, form the clearance between upper heat preservation section of thick bamboo and the well lower heat preservation section of thick bamboo, can reach the refrigerated effect of enhancement thermal field, can effectively reduce the blowing out time, and promote single crystal growing furnace and thermal field availability factor, but owing to lack the subassembly that strengthens the circulation of air in the single crystal growing furnace on it, thereby make the heat in the single crystal growing furnace still be difficult to scatter fast, and then need improve it for further strengthen thermal field refrigerated effect, finally further reduce the blowing out time, promote single crystal growing furnace and thermal field availability factor.
Disclosure of utility model
The utility model mainly aims to provide a thermal field structure of a single crystal furnace, which can effectively solve the problems in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
The utility model provides a thermal field structure of single crystal growing furnace, includes the single crystal growing furnace main part, two ventilation pipes are installed to symmetry on the single crystal growing furnace main part lateral wall, two mounting panels are installed to symmetry on the outer wall of single crystal growing furnace main part, the downside the motor is installed to the lower extreme of mounting panel, two rotate on the mounting panel install the lead screw the output shaft of lead screw and motor, install connection structure on the lead screw, connection structure comprises arc and installation piece, the installation piece is installed on the inner wall of arc, install two sealed ventilation structures on the inner wall of arc and at the outer end of two ventilation pipes, sealed ventilation structure comprises L shape closing plate and radiator fan, radiator fan installs the lower extreme at L shape closing plate.
Preferably, a middle heat preservation cylinder and an upper heat preservation cylinder are arranged in the single crystal furnace main body, the upper heat preservation cylinder is arranged above the middle heat preservation cylinder and the lower heat preservation cylinder, two electric telescopic rods are symmetrically and fixedly arranged on the upper heat preservation cylinder, and the electric telescopic rods are simultaneously and fixedly arranged on the single crystal furnace main body.
Preferably, the ventilation pipe penetrates through the side wall of the single crystal furnace main body, and the ventilation pipe is fixedly connected with the single crystal furnace main body.
Preferably, the mounting plate is fixedly mounted on the outer wall of the single crystal furnace main body, a through hole is formed in the mounting plate, the motor is fixedly connected with the mounting plate at the lower side, the screw rod is rotatably mounted in the through hole formed in the mounting plate, and the screw rod is fixedly connected with the output shaft of the motor.
Preferably, the arc plate and the mounting block on the connecting structure are fixedly connected, a threaded hole is formed in the mounting block, and the mounting block is mounted on the screw rod through the threaded hole.
Preferably, the L-shaped sealing plate on the sealing ventilation structure is fixedly connected with the cooling fan, and the L-shaped sealing plate is simultaneously fixedly connected with the arc-shaped plate.
Compared with the prior art, the utility model has the following beneficial effects:
Through set up the ventilation pipe in the single crystal growing furnace main part to and set up mounting panel, motor, lead screw, connection structure, sealed ventilation structure in the single crystal growing furnace main part, can be with the inside and external intercommunication of single crystal growing furnace main part, thereby can be quick with the heat in the single crystal growing furnace main part dispelling, and then further strengthen the refrigerated effect of thermal field, finally further reduce the time of blowing out, promote single crystal growing furnace and thermal field availability factor.
Drawings
FIG. 1 is a cross-sectional view of a single crystal furnace body of the present utility model;
FIG. 2 is a schematic diagram of the overall structure of the present utility model;
Fig. 3 is a schematic structural view of the connection structure and the seal ventilation structure of the present utility model.
In the figure: 1. a single crystal furnace main body; 2. a ventilation pipe; 3. a mounting plate; 4. a motor; 5. a screw rod; 6. a connection structure; 7. sealing the ventilation structure; 8. a middle-lower heat-preserving cylinder; 9. an upper heat preservation cylinder; 10. an electric telescopic rod; 11. an arc-shaped plate; 12. a mounting block; 13. a threaded hole; 14. an L-shaped sealing plate; 15. a heat radiation fan.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
Referring to fig. 1, 2 and 3, the thermal field structure of the single crystal furnace comprises a single crystal furnace main body 1, a middle-lower heat preservation cylinder 8 and an upper heat preservation cylinder 9 are installed in the single crystal furnace main body 1, the upper heat preservation cylinder 9 is installed above the middle-lower heat preservation cylinder 8, two electric telescopic rods 10 are symmetrically and fixedly installed on the upper heat preservation cylinder 9, the electric telescopic rods 10 are simultaneously and fixedly installed on the single crystal furnace main body 1, two ventilation pipes 2 are symmetrically installed on the side wall of the single crystal furnace main body 1, the ventilation pipes 2 penetrate through the side wall of the single crystal furnace main body 1, the ventilation pipes 2 are fixedly connected with the single crystal furnace main body 1, two mounting plates 3 are symmetrically installed on the outer wall of the single crystal furnace main body 1, a motor 4 is installed at the lower end of the mounting plate 3 at the lower side, a screw 5 is rotatably installed on the two mounting plates 3, the screw 5 is connected with an output shaft of the motor 4, the mounting plate 3 is fixedly installed on the outer wall of the single crystal furnace main body 1, the mounting plate 3 is provided with a through hole, the motor 4 is fixedly connected with the mounting plate 3 at the lower side, the screw rod 5 is rotatably arranged in the through hole arranged on the mounting plate 3, the screw rod 5 is fixedly connected with the output shaft of the motor 4, the screw rod 5 is provided with a connecting structure 6, the connecting structure 6 consists of an arc-shaped plate 11 and a mounting block 12, the mounting block 12 is arranged on the inner wall of the arc-shaped plate 11, the arc-shaped plate 11 and the mounting block 12 on the connecting structure 6 are fixedly connected, the mounting block 12 is provided with a threaded hole 13, the mounting block 12 is arranged on the screw rod 5 through the threaded hole 13, two sealing ventilation structures 7 are arranged on the inner wall of the arc-shaped plate 11 and at the outer ends of the two ventilation pipes 2, the sealing ventilation structures 7 consist of an L-shaped sealing plate 14 and a cooling fan 15, the cooling fan 15 is arranged at the lower end of the L-shaped sealing plate 14, the L-shaped sealing plate 14 on the sealing ventilation structures 7 is fixedly connected with the cooling fan 15, the L-shaped sealing plate 14 is fixedly connected with the arc plate 11, the ventilation pipe 2 is arranged on the single crystal furnace main body 1, the mounting plate 3, the motor 4, the screw rod 5, the connecting structure 6 and the sealing ventilation structure 7 are arranged on the single crystal furnace main body 1, the interior of the single crystal furnace main body 1 can be communicated with the outside, so that heat in the single crystal furnace main body 1 can be rapidly dissipated, the cooling effect of a thermal field is further enhanced, the furnace stopping time is further reduced finally, and the service efficiency of the single crystal furnace and the thermal field is improved.
It should be noted that, the utility model is a thermal field structure of a single crystal furnace, when single crystal is normally produced, the upper thermal insulation cylinder 9 and the middle and lower thermal insulation cylinders 8 are attached together to serve as thermal field components to provide thermal insulation for production, when the furnace is stopped and the thermal field is required to be cooled, the electric telescopic rod 10 lifts the upper thermal insulation cylinder 9 upwards, so that gaps are formed between the upper thermal insulation cylinder 9 and the middle and lower thermal insulation cylinders 8, then the motor 4 can be started to drive the screw rod 5 to rotate, the connecting structure 6 moves upwards with the sealing ventilation structure 7 along with the rotation of the screw rod 5, the heat dissipation fan 15 moves to the outer end of the ventilation pipe 2, finally the heat dissipation fan 15 can be started, one of the heat dissipation fans 15 blows out of the single crystal furnace main body 1, and at this time, the heat in the thermal field can be dissipated outwards through the gaps, the ventilation pipe 2 and the heat dissipation fan 15, so that the cooling speed of the thermal field can be accelerated; when the monocrystal is normally produced, the motor 4, the screw rod 5 and the connecting structure 6 can be utilized to reset the sealing ventilation structure 7 downwards, and finally the L-shaped sealing plate 14 can be used for sealing the ventilation pipe 2.
The foregoing description is only a preferred embodiment of the present utility model, and is not intended to limit the present utility model, but although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the technical solutions described in the foregoing embodiments, or that equivalents may be substituted for part of the technical features thereof. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The thermal field structure of the single crystal furnace comprises a single crystal furnace main body (1), and is characterized in that: two ventilation pipes (2) are symmetrically installed on the side wall of the single crystal furnace main body (1), two mounting plates (3) are symmetrically installed on the outer wall of the single crystal furnace main body (1), motors (4) are installed at the lower ends of the mounting plates (3) at the lower side, two screw rods (5) are rotatably installed on the mounting plates (3), the screw rods (5) are connected with an output shaft of the motors (4), a connecting structure (6) is installed on the screw rods (5), the connecting structure (6) is composed of an arc-shaped plate (11) and a mounting block (12), the mounting block (12) is installed on the inner wall of the arc-shaped plate (11), two sealing ventilation structures (7) are installed on the inner wall of the arc-shaped plate (11) at the outer ends of the two ventilation pipes (2), each sealing ventilation structure (7) is composed of an L-shaped sealing plate (14) and a heat dissipation fan (15), and the heat dissipation fan (15) is installed at the lower end of the L-shaped sealing plate (14).
2. The thermal field structure of a single crystal furnace of claim 1, wherein: the single crystal furnace is characterized in that a middle heat preservation cylinder (8) and an upper heat preservation cylinder (9) are arranged in the single crystal furnace main body (1), the upper heat preservation cylinder (9) is arranged above the middle heat preservation cylinder (8), two electric telescopic rods (10) are symmetrically and fixedly arranged on the upper heat preservation cylinder (9), and the electric telescopic rods (10) are fixedly arranged on the single crystal furnace main body (1) at the same time.
3. The thermal field structure of a single crystal furnace of claim 2, wherein: the ventilation pipe (2) penetrates through the side wall of the single crystal furnace main body (1), and the ventilation pipe (2) is fixedly connected with the single crystal furnace main body (1).
4. A thermal field structure of a single crystal furnace according to claim 3, characterized in that: the mounting plate (3) is fixedly mounted on the outer wall of the single crystal furnace main body (1), a through hole is formed in the mounting plate (3), the motor (4) is fixedly connected with the mounting plate (3) at the lower side, the screw rod (5) is rotatably mounted in the through hole formed in the mounting plate (3), and the screw rod (5) is fixedly connected with the output shaft of the motor (4).
5. The thermal field structure of single crystal furnace according to claim 4, wherein: the arc-shaped plate (11) and the mounting block (12) on the connecting structure (6) are fixedly connected, a threaded hole (13) is formed in the mounting block (12), and the mounting block (12) is mounted on the screw rod (5) through the threaded hole (13).
6. The thermal field structure of single crystal furnace according to claim 5, wherein: the L-shaped sealing plate (14) on the sealing ventilation structure (7) is fixedly connected with the cooling fan (15), and the L-shaped sealing plate (14) is simultaneously fixedly connected with the arc-shaped plate (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323500786.7U CN221421276U (en) | 2023-12-21 | 2023-12-21 | Thermal field structure of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323500786.7U CN221421276U (en) | 2023-12-21 | 2023-12-21 | Thermal field structure of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221421276U true CN221421276U (en) | 2024-07-26 |
Family
ID=92012960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323500786.7U Active CN221421276U (en) | 2023-12-21 | 2023-12-21 | Thermal field structure of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221421276U (en) |
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2023
- 2023-12-21 CN CN202323500786.7U patent/CN221421276U/en active Active
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