CN220304236U

CN220304236U - Vacuum annealing furnace

Info

Publication number: CN220304236U
Application number: CN202321867962.8U
Authority: CN
Inventors: 毛程凯; 陆毅超; 程毅
Original assignee: Sumon Industrial Jia Shan Co ltd
Current assignee: Sumon Industrial Jia Shan Co ltd
Priority date: 2023-07-17
Filing date: 2023-07-17
Publication date: 2024-01-05
Anticipated expiration: 2033-07-17

Abstract

The utility model discloses a vacuum annealing furnace, which comprises an annealing furnace body and a closed box, wherein the upper surface of the annealing furnace body is fixedly connected with an air inlet pipe, the upper surface of the annealing furnace body is fixedly connected with a vacuum exhaust pipe on the right side of the air inlet pipe, and the outer side surface of the annealing furnace body is fixedly connected with a fixing rod; the upper surface of closed case is connected with the case lid through fastening bolt, the inside of closed case is provided with heat dissipation mechanism, heat dissipation mechanism includes heat conduction piece and fan blade, the lateral surface fixedly connected with fin of heat conduction piece. Can utilize the heat conduction piece to derive the heat in the annealing stove and dispel through radiating fin, rethread fan blade blows the air current to radiating fin fast, can accelerate the speed of annealing stove cooling, improves work efficiency, utilizes the closed box simultaneously can protect the annealing stove, makes it can not receive external collision to take place to damage.

Description

Vacuum annealing furnace

Technical Field

The utility model relates to the technical field of vacuum annealing furnaces, in particular to a vacuum annealing furnace.

Background

The vacuum annealing furnace is a typical heat treatment device in semiconductor processing and is used for annealing, alloying, sintering and other processes in the integrated circuit, discrete devices and solar photovoltaic industries. The process can obviously improve the surface performance of the material, improve the surface purity of the material, improve the fatigue strength, plasticity, initial performance, corrosion resistance and other parameters of the material, is a high-precision, high-quality, energy-saving, clean and pollution-free processing and manufacturing technology in the aspect of material modification, and needs to cool the annealing furnace body after the vacuum annealing furnace is used.

At present, after the vacuum annealing furnace finishes the use, the inside in the furnace is very high, so that the temperature in the furnace needs to be reduced, but the natural temperature reduction efficiency is very low, and although some vacuum furnaces are provided with temperature reduction devices, most of the vacuum annealing furnaces adopt heat transfer of the self-material of the vacuum annealing furnace for temperature reduction, but the temperature reduction efficiency is low, so that the working efficiency is very easy to influence.

Disclosure of Invention

The utility model aims to at least solve one of the technical problems in the prior art, and provides a vacuum annealing furnace, which can lead out heat in the annealing furnace by utilizing a heat conducting block and diffuse the heat through radiating fins, and then air flow is quickly blown to the radiating fins by utilizing fan blades, so that the cooling rate of the annealing furnace can be increased, the working efficiency is improved, and meanwhile, the annealing furnace can be protected by utilizing a closed box, so that the annealing furnace cannot be damaged by external collision.

The utility model also provides the vacuum annealing furnace comprising the annealing furnace body and the closed box, wherein the upper surface of the annealing furnace body is fixedly connected with the air inlet pipe, the upper surface of the annealing furnace body is fixedly connected with the vacuum exhaust pipe on the right side of the air inlet pipe, and the outer side surface of the annealing furnace body is fixedly connected with the fixing rod;

the upper surface of the closed box is connected with a box cover through a fastening bolt, a heat dissipation mechanism is arranged in the closed box and comprises a heat conduction block and fan blades, and the outer side surface of the heat conduction block is fixedly connected with heat dissipation fins;

the lower surface of the closed box is provided with a closing mechanism, and the closing mechanism comprises a through groove and a closing plate. Can utilize the heat conduction piece to derive the heat in the annealing stove and dispel through radiating fin, rethread fan blade blows the air current to radiating fin fast, can accelerate the speed of annealing stove cooling, improves work efficiency, utilizes the closed box simultaneously can protect the annealing stove, makes it can not receive external collision to take place to damage.

According to the vacuum annealing furnace, the position of the annealing furnace body is in the closed box, and one end of the fixing rod, which is far away from the annealing furnace body, is connected with the inner side surface of the closed box. The annealing furnace can be fixed in the closed box, so that heat of the closed box cannot be emitted.

According to the vacuum annealing furnace, the shape of the box cover is the same as that of the sealing plate, and the box cover and the sealing plate are circular. The sealing box is convenient to seal, and the through groove can be sealed by utilizing the sealing plate.

According to the vacuum annealing furnace, the heat conducting block is arranged on the inner side surface of the annealing furnace body, and part of the volume of the radiating fins extends to the outside of the annealing furnace body and is positioned in the closed box. The heat in the annealing furnace can be led out of the annealing furnace.

According to the vacuum annealing furnace, the heat dissipation mechanism further comprises a motor and a diversion cone, the output end of the motor is connected with fan blades, and the fan blades are positioned in the closed box. The motor can be utilized to drive the fan blade to rotate so as to accelerate the heat dissipation of the radiating fins.

According to the vacuum annealing furnace, the motor is arranged on the lower surface of the closed box, the guide cone is arranged on the lower surface of the annealing furnace body, and the guide cone and the fan blades are in the same vertical direction. The air flow generated by the fan blades can be dispersed inside the closed box.

According to the vacuum annealing furnace, the sealing mechanism further comprises an electric push rod, the electric push rod is arranged in the inner bottom of the annealing furnace body, and the output end of the electric push rod is connected with the sealing plate. The position of the closing plate can be adjusted.

According to the vacuum annealing furnace, the through groove is formed in the lower surface of the closed box and is located at the outer side of the motor, the position of the closed plate is located below the closed box, and the supporting legs are fixedly connected to the lower surface of the closed plate and located at the outer side of the through groove.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described below with reference to the drawings and examples;

FIG. 1 is a view showing the whole structure of a closed box in a vacuum type annealing furnace according to the present utility model;

FIG. 2 is an internal structural view of a vacuum type annealing furnace according to the present utility model;

FIG. 3 is a front view of a closed box in a vacuum type annealing furnace according to the present utility model;

fig. 4 is an enlarged view at a in fig. 2.

Legend description:

1. an annealing furnace body; 11. a fixed rod; 2. an air inlet pipe; 3. a vacuum exhaust pipe; 4. a fastening bolt; 5. a closed box; 51. a support leg; 6. a case cover; 7. a heat dissipation mechanism; 8. a closing mechanism;

71. a heat conduction block; 72. a heat radiation fin; 73. a motor; 74. a fan blade; 75. a diversion cone;

81. a through groove; 82. an electric push rod; 83. and a closing plate.

Detailed Description

Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.

Referring to fig. 1-4, the vacuum annealing furnace of the embodiment of the utility model comprises an annealing furnace body 1 and a closed box 5, wherein materials adopted by the closed box 5 and a box cover 6 are heat-insulating materials, the position of the annealing furnace body 1 is positioned in the closed box 5, one end of a fixing rod 11, which is far away from the annealing furnace body 1, is connected with the inner side surface of the closed box 5, and can fix the annealing furnace in the closed box 5, so that heat of the closed box 5 cannot be emitted, the upper surface of the annealing furnace body 1 is fixedly connected with an air inlet pipe 2, the right side of the upper surface of the annealing furnace body 1 is fixedly connected with a vacuum exhaust pipe 3, and the outer side surface of the annealing furnace body 1 is fixedly connected with the fixing rod 11.

The upper surface of closed box 5 is connected with case lid 6 through fastening bolt 4, the shape of case lid 6 is the same with the shape of closure plate 83, and be the ring shape, conveniently seal closed box 5, simultaneously utilize closure plate 83 to seal logical groove 81, the inside of closed box 5 is provided with cooling mechanism 7, cooling mechanism 7 includes heat conduction piece 71 and fan blade 74, the lateral surface fixedly connected with fin 72 of heat conduction piece 71, heat conduction piece 71 installs in the medial surface of annealing stove body 1, the partial volume of fin 72 extends to the outside of annealing stove body 1, and be in the inside of closed box 5, can export the annealing stove with the heat in the annealing stove, cooling mechanism 7 still includes motor 73 and water conservancy diversion cone 75, motor 73 installs in the lower surface of closed box 5, the lower surface at annealing stove body 1 is installed to water conservancy diversion cone 75, water conservancy diversion cone 75 and fan blade 74 are in same vertical direction, can disperse the air current that fan blade 74 produced inside closed box 5, the output of motor 73 is connected with fan blade 74, fan blade 74 is in the inside of closed box 5, can utilize motor 73 to drive fan blade's heat dissipation fin 72.

The lower surface of seal box 5 is provided with seal mechanism 8, seal mechanism 8 includes logical groove 81 and closure plate 83, logical groove 81 sets up in the lower surface of seal box 5 and is in the outside of motor 73, the position of closure plate 83 is in the below of seal box 5, the lower surface of closure plate 83 and be in the outside fixedly connected with landing leg 51 of logical groove 81, seal mechanism 8 still includes electric putter 82, electric putter 82 installs in the inside of the interior bottom of annealing furnace body 1, electric putter 82's output is connected with closure plate 83, can adjust the position of closure plate 83.

Working principle: when the annealing furnace is used, the air in the annealing furnace can be pumped away through the vacuum pump by connecting with the vacuum exhaust pipe 3, so that the vacuum state in the annealing furnace body 1 is ensured, and then high-purity nitrogen or ammonia decomposition gas is introduced into the annealing furnace body 1 through the air inlet pipe 2 for protection heating, so that the purposes of less and no oxidation heating and no decarburization brightness are achieved;

when the annealing furnace body 1 needs to be cooled, a person can detach the fastening bolt 4, then detach the box cover 6, then start the motor 73 and the electric push rod 82 through an external power supply, the closing plate 83 can descend through the electric push rod 82, the ventilation of the closed box 5 is ensured through the through groove 81, the motor 73 drives the fan blades 74 to rotate, the air flow generated by the fan blades 74 is dispersed through the guide cone 75, the air flow flows into the radiating fins 72 and is discharged through the box opening of the closed box 5, and therefore the cooling efficiency of the annealing furnace can be improved through accelerating the cooling rate of the radiating fins 72.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.

Claims

1. The vacuum annealing furnace is characterized by comprising an annealing furnace body (1) and a closed box (5), wherein the upper surface of the annealing furnace body (1) is fixedly connected with an air inlet pipe (2), the right side of the upper surface of the annealing furnace body (1) which is positioned on the air inlet pipe (2) is fixedly connected with a vacuum exhaust pipe (3), and the outer side surface of the annealing furnace body (1) is fixedly connected with a fixing rod (11);

the upper surface of the closed box (5) is connected with a box cover (6) through a fastening bolt (4), a heat dissipation mechanism (7) is arranged in the closed box (5), the heat dissipation mechanism (7) comprises a heat conduction block (71) and fan blades (74), and the outer side surface of the heat conduction block (71) is fixedly connected with heat dissipation fins (72);

the lower surface of the closed box (5) is provided with a closing mechanism (8), and the closing mechanism (8) comprises a through groove (81) and a closing plate (83).

2. A vacuum type annealing furnace according to claim 1, wherein the position of said annealing furnace body (1) is in the interior of the closed box (5), and the end of said fixing rod (11) which is far from the annealing furnace body (1) is connected with the inner side surface of the closed box (5).

3. A vacuum annealing furnace according to claim 1, wherein said cover (6) has the same shape as the closing plate (83) and is circular.

4. A vacuum type annealing furnace according to claim 1, wherein said heat conducting block (71) is mounted on the inner side surface of the annealing furnace body (1), and a part of the volume of said heat radiating fins (72) extends to the outside of the annealing furnace body (1) and is located inside the closed box (5).

5. A vacuum annealing furnace according to claim 1, characterized in that said heat radiation mechanism (7) further comprises a motor (73) and a guide cone (75), the output end of said motor (73) is connected with a fan blade (74), said fan blade (74) is located inside the closed box (5).

6. The vacuum annealing furnace according to claim 5, wherein said motor (73) is mounted on the lower surface of the closed box (5), said guide cone (75) is mounted on the lower surface of the annealing furnace body (1), and said guide cone (75) and the fan blade (74) are in the same vertical direction.

7. The vacuum type annealing furnace according to claim 1, wherein the closing mechanism (8) further comprises an electric push rod (82), the electric push rod (82) is mounted inside the inner bottom of the annealing furnace body (1), and the output end of the electric push rod (82) is connected with the closing plate (83).

8. The vacuum annealing furnace according to claim 1, wherein the through groove (81) is arranged on the lower surface of the closed box (5) and is positioned on the outer side of the motor (73), the position of the closed plate (83) is positioned below the closed box (5), and the supporting leg (51) is fixedly connected on the lower surface of the closed plate (83) and is positioned on the outer side of the through groove (81).