CN221282042U - Small defective product pickup equipment - Google Patents

Abstract

The utility model discloses small defective product pickup equipment in the technical field of chip detection, and aims to solve the problem of low defective product chip removal efficiency in the prior art. The device comprises a mounting box and a driving shaft, wherein a rotary driving mechanism and a linear driving mechanism are arranged in the mounting box, one end of the driving shaft extends into the mounting box and is respectively in transmission connection with the rotary driving mechanism and the linear driving mechanism, the other end of the driving shaft is provided with a rocker arm, the tail end of the rocker arm is provided with a sucker, a gas pipe is arranged on the rocker arm, one end of the gas pipe is communicated with the sucker, and the other end of the gas pipe is connected with peripheral negative pressure equipment; the utility model is suitable for the technical field of chip detection, can efficiently finish removing, saves time and labor, greatly improves removing efficiency, reduces labor cost, has high picking precision, is not easy to damage the surfaces of adjacent products, and has good practical application effect.

Description

Small defective product pickup equipment

Technical Field

The utility model relates to the technical field of chip detection, in particular to small-chip defective product pickup equipment.

Background

In the chip production and manufacturing process, the wafer is manufactured into a finished chip after the processes of scribing, cutting, spot measurement and the like, wherein the defective products are subjected to spot treatment in the spot measurement process so as to form black spot-shaped layers on the surface of the chip, and the black spot-shaped layers account for about 3% -5% of the whole chip.

In general, defective products are delivered together with the wafer when the wafer is delivered, which results in reduced yield; in a few cases, defective chips are removed manually.

But the manual mode needs to use tweezers to manually clamp the defective products under the desk lamp, and the tweezers scratch the surfaces of adjacent products easily, so that bad leakage is caused, the operation difficulty is high, time and labor are wasted, the efficiency is low, and the production cost is increased.

Disclosure of utility model

The utility model aims to overcome the defects in the prior art, provides small defective product pickup equipment, and solves the problem of low efficiency of rejecting defective product chips at present.

In order to solve the technical problems, the utility model is realized by adopting the following technical scheme:

The utility model provides a small defective product pickup device, which comprises: the device comprises a mounting box and a driving shaft, wherein a rotary driving mechanism and a linear driving mechanism are arranged in the mounting box, one end of the driving shaft extends into the mounting box and is respectively connected with the rotary driving mechanism and the linear driving mechanism in a transmission way, the rotary driving mechanism is used for driving the driving shaft to reciprocate around the central axis of the driving shaft, and the linear driving mechanism is used for driving the driving shaft to reciprocate in the axial direction of the driving shaft;

The other end of the driving shaft is provided with a rocker arm, the tail end of the rocker arm is provided with a sucker for absorbing small defective products, the rocker arm is provided with a gas pipe, one end of the gas pipe is communicated with the sucker, and the other end of the gas pipe is connected with peripheral negative pressure equipment.

Further, the mounting box comprises a box body and a box cover arranged at the top of the box body, a guide sleeve is arranged at the bottom of the box body in a penetrating mode, and the guide sleeve is movably sleeved on the driving shaft.

Further, the rotary driving mechanism comprises a motor and an inserting shaft, the motor is arranged on the inner top wall of the box cover, the inserting shaft is arranged at the driving end of the motor and is arranged along the axis direction, an inserting groove matched with the inserting shaft is formed in the top of the driving shaft, and the driving shaft and the inserting shaft are coaxially arranged.

Further, a first spring is supported between the end part of the inserting shaft and the inner bottom wall of the inserting groove, a buffer gasket is arranged at the driving end of the motor, and the buffer gasket is sleeved on the inserting shaft.

Further, the linear driving mechanism comprises an air cylinder, a supporting sleeve and a first supporting plate, the supporting sleeve is sleeved on the driving shaft and can rotate around the driving shaft, the air cylinder is arranged on the inner bottom wall of the box body and evenly arranged around the driving shaft, the driving end of the air cylinder is connected with the first supporting plate, and the first supporting plate is connected with the supporting sleeve.

Further, a first guide rod is arranged on the inner top wall of the box cover, and the first support plate is movably sleeved on the first guide rod; the inner bottom wall of the box body is provided with a second guide rod, the second guide rods are at least provided with two guide rods and are uniformly distributed around the supporting sleeve, the second guide rod is movably sleeved with a second support plate and a second spring, the second support plate is connected with the supporting sleeve, and the second spring is supported between the second support plate and the inner bottom wall of the box body.

Further, the supporting sleeve comprises a sleeve shell and a sleeve cover arranged on the top of the sleeve shell, a bearing is arranged in the sleeve shell, and the driving shaft is arranged in the sleeve shell through the bearing.

Further, the rocking arm includes shell body, stopper and lock bolt, in the shell body was located to the stopper, the spacing groove has been seted up at the top of stopper, the tip of drive shaft runs through to in the shell body back peg graft mutually with the spacing groove, the constant head tank has been seted up on the outer wall of drive shaft, the butt joint hole that is linked together with the spacing groove has been seted up on the lateral wall of stopper, lock bolt and shell body threaded connection just can stretch into to the spacing inslot through the butt joint hole and peg graft mutually with the constant head tank.

Compared with the prior art, the utility model has the following beneficial effects:

1. According to the utility model, the driving shaft is driven by the rotary driving mechanism and the linear driving mechanism to perform reciprocating rotation and reciprocating linear motion, so that the sucking disc at the tail end of the rocker arm is driven to adsorb defective chips, and the defective chips are removed efficiently, so that the time and labor are saved, the removing efficiency is greatly improved, the labor cost is reduced, the picking precision is high, the surfaces of adjacent products are not easy to damage, and the practical application effect is good;

2. According to the utility model, the servo motor drives the inserting shaft to rotate, so that the inserting shaft drives the driving shaft to synchronously rotate, and meanwhile, the axial linear displacement of the driving shaft is not interfered, the driving shaft can be stably and continuously driven to perform reciprocating rotation around the central shaft, and the movement of the linear driving mechanism is not interfered, so that the normal working and use of the equipment are ensured;

3. According to the utility model, the first support plate is driven to move by the air cylinder so as to synchronously drive the support sleeve to lift, the drive shaft is driven by the support sleeve to lift, the rocker arm is driven by the drive shaft to lift, stable linear movement can be realized, the stress is uniform, the driving is stable, and the use effect is good.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

Fig. 1 is a front sectional view of a pick-up device for defective chips according to an embodiment of the present utility model;

FIG. 2 is an enlarged schematic view of the die-defective pick-up apparatus shown in FIG. 1 at A;

FIG. 3 is a top cross-sectional view of a rocker arm in the die reject picking apparatus shown in FIG. 1;

FIG. 4 is a partial side cross-sectional view of the die reject pick-up apparatus shown in FIG. 1;

FIG. 5 is a top cross-sectional view of the support sleeve of the die-defective pick-up apparatus of FIG. 1;

in the figure: 1. a mounting box; 1a, a box body; 1b, a box cover; 2. a drive shaft; 21. a slot; 22. a positioning groove; 3. a rotary driving mechanism; 31. a servo motor; 32. inserting a shaft; 4. a linear driving mechanism; 41. a cylinder; 42. a support sleeve; 421. a casing; 422. a cover; 43. a first support plate; 5. a rocker arm; 51. an outer housing; 52. a limiting block; 521. a limit groove; 522. a butt joint hole; 53. a locking bolt; 6. a suction cup; 7. a gas pipe; 8. a guide sleeve; 9. a first spring; 10. a buffer pad; 11. a first guide bar; 12. a second guide bar; 13. a second support plate; 14. a second spring; 15. and (3) a bearing.

Detailed Description

The utility model is further described below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present utility model, and are not intended to limit the scope of the present utility model.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.

Embodiment one:

As shown in fig. 1, the present embodiment provides a die-defective product pickup apparatus, including: the device comprises a mounting box 1 and a driving shaft 2, wherein a rotary driving mechanism 3 and a linear driving mechanism 4 are arranged in the mounting box 1, one end of the driving shaft 2 extends into the mounting box 1 and is respectively connected with the rotary driving mechanism 3 and the linear driving mechanism 4 in a transmission way, the rotary driving mechanism 3 is used for driving the driving shaft 2 to reciprocate around the central axis of the driving shaft 2, and the linear driving mechanism 4 is used for driving the driving shaft 2 to reciprocate in the axial direction of the driving shaft; the other end of the driving shaft 2 is provided with a rocker arm 5, the tail end of the rocker arm 5 is provided with a sucker 6 for absorbing small defective products, the rocker arm 5 is provided with a gas pipe 7, one end of the gas pipe 7 is communicated with the sucker 6, and the other end is connected with peripheral negative pressure equipment.

When the device is used, the defective products are photographed and identified by the device camera, so that the positions of the defective product chips are obtained, the wafer subjected to the spot measurement is displaced by the horizontal displacement device, the defective product chips are moved to the specific positions, and finally the small defective product pickup device is started to pick up the defective product chips, and the defective product chips are placed in the specified scrapped positions after being picked up.

The specific working principle is as follows: firstly, starting a rotary driving mechanism 3, wherein the rotary driving mechanism 3 drives a driving shaft 2 to rotate around the center of the driving shaft, then the driving shaft 2 drives a rocker arm 5 to horizontally swing, and when the rocker arm 5 swings to enable a sucker 6 to be positioned right above a defective chip, the rotary driving mechanism 3 stops moving; then, starting the linear driving mechanism 4, and driving the driving shaft 2 to linearly move along the axial direction of the linear driving mechanism 4, so that the driving shaft 2 drives the rocker arm 5 to vertically descend until the sucking disc 6 is attached to the defective chip; then, starting external negative pressure equipment, wherein the negative pressure equipment sucks the suction disc 6 through the gas pipe 7, so that the suction disc 6 is used for completing the suction of defective chips; then, the linear driving mechanism 4 is started again, so that the rocker arm 5 is vertically lifted, and defective chips are picked up through the sucker 6; then, the rotary driving mechanism 3 is started again, so that the rocker arm 5 swings to a position right above the specified scrapped position of the sucker 6; finally, the external negative pressure equipment is turned off, and then the suction cup 6 stops the suction of the defective chips, and the defective chips fall into the designated discard positions.

Through the arrangement, defective chips can be removed rapidly and efficiently, time and labor are saved, the removing efficiency is greatly improved, the labor cost is reduced, the picking precision is high, the surfaces of adjacent products are not easy to damage, and the practical application effect is good.

In this embodiment, the installation box 1 includes a box body 1a and a box cover 1b disposed at the top of the box body 1a, a guide sleeve 8 is disposed at the bottom of the box body 1a in a penetrating manner, and the guide sleeve 8 is movably sleeved on the driving shaft 2.

Specifically, the case cover 1b is detachably connected with the case body 1a by a plurality of bolts arranged on the outer periphery, so that the case cover is convenient to disassemble and assemble, and the installation and maintenance of the internal parts are facilitated. The guide sleeve 8 can limit and guide the driving shaft 2, so that the smoothness and stability of the movement of the driving shaft 2 are improved.

In the present embodiment, the rotation driving mechanism 3 includes: the servo motor 31 and the inserting shaft 32, the servo motor 31 is arranged on the inner top wall of the box cover 1b, the inserting shaft 32 is arranged on the driving end of the servo motor 31 and is arranged along the axial direction, the inserting groove 21 matched with the inserting shaft 32 is formed in the top of the driving shaft 2, and the driving shaft 2 and the inserting shaft 32 are coaxially arranged.

It can be understood that the cross section of the insertion shaft 32 is in a non-circular structure, so that the effect of circumferential limitation can be achieved after the insertion with the insertion slot 21 is completed, and the driving shaft 2 can be driven to synchronously rotate. As shown in fig. 5, the insertion shaft 32 is preferably a prismatic structure, which is not limited in particular, and may be adjusted accordingly according to practical situations.

When the servo motor 31 works, the servo motor drives the inserting shaft 32 to rotate, and the inserting shaft 32 is inserted into the inserting groove 21 on the driving shaft 2, so that the driving shaft 2 can be driven to synchronously rotate, and meanwhile, the axial linear displacement of the driving shaft 2 is not interfered.

Through the arrangement, the driving shaft 2 can be stably and continuously driven to perform reciprocating rotary motion around the central shaft, the motion of the linear driving mechanism 4 cannot be interfered, and normal working and use of the equipment are ensured.

As shown in fig. 1 and 4, in this embodiment, a first spring 9 is supported between the end of the insertion shaft 32 and the inner bottom wall of the insertion slot 21, a buffer pad 10 is disposed on the driving end of the servo motor 31, and the buffer pad 10 is sleeved on the insertion shaft 32.

Specifically, when the linear driving mechanism 4 drives the driving shaft 2 to rise to the top end of the stroke, the driving shaft 2 contacts with the buffer gasket 10, so that buffer shock absorption is obtained, and hard collision of the driving shaft 2 and the buffer gasket is avoided; at the same time, the first spring 9 is gradually compressed by the interference of the insertion shaft 32, thereby decelerating by the repulsive force.

Through the arrangement, the linear motion of the driving shaft 2 can be buffered and damped, so that the impact and collision to the driving shaft 2 are reduced, and the working stability of the device is improved.

As shown in fig. 1, in the embodiment, the linear drive mechanism 4 includes: the cylinder 41, the support sleeve 42 and the first support plate 43, the support sleeve 42 is sleeved on the driving shaft 2 and can rotate around the driving shaft 2, the cylinder 41 is arranged on the inner bottom wall of the box body 1a and uniformly distributed around the driving shaft 2, the driving end of the cylinder 41 is connected with the first support plate 43, and the first support plate 43 is connected with the support sleeve 42.

When the rocker arm lifting device works, the air cylinders 41 drive the first support plates 43 to move, the first support plates 43 synchronously drive the support sleeves 42 to lift, and the support sleeves 42 drive the driving shafts 2 to lift, so that the rocker arms 5 are driven to lift through the driving shafts 2; in which the drive shaft 2 is able to rotate in the support sleeve 42, so that the normal operation of the rotary drive 3 is not disturbed.

Through the arrangement, the driving shaft 2 can be driven to perform stable linear motion, the stress is uniform, the driving is stable, and the using effect is good.

In this embodiment, the inner top wall of the case cover 1b is provided with a first guide rod 11, and the first support plate 43 is movably sleeved on the first guide rod 11; the inner bottom wall of the box body 1a is provided with second guide rods 12, at least two second guide rods 12 are uniformly arranged around a supporting sleeve 42, a second support plate 13 and a second spring 14 are movably sleeved on the second guide rods 12, the second support plate 13 is connected with the supporting sleeve 42, and the second spring 14 is supported between the second support plate 13 and the inner bottom wall of the box body 1 a.

Specifically, the first support plate 43 can vertically slide along the first guide rod 11; likewise, the second support plate 13 can slide vertically along the second guide bar 12, wherein the second spring 14 can elastically support the second support plate 13, thereby dampening the vertical lowering movement of the drive shaft 2.

Through the arrangement, the stability of the vertical linear motion of the driving shaft 2 is improved, so that the accuracy of the picking operation is improved, and the device is reasonable in structural layout and convenient to install and detach.

As shown in fig. 1 and 4, in the present embodiment, the support sleeve 42 includes a casing 421 and a cover 422 provided on top of the casing 421, the casing 421 has the bearing 15 mounted therein, and the driving shaft 2 is mounted in the casing 421 through the bearing 15.

Specifically, the outer circumferential wall of the driving shaft 2 is integrally formed with a convex ring, a chamber for installing the bearing 15 is formed in the casing 421, and the convex ring of the driving shaft 2 is in interference fit with the inner diameter of the bearing 15, so that the driving shaft 2 is assembled in the casing 421. The cover 422 is detachably connected with the casing 421 through bolts uniformly distributed on the top edge, so that the cover is convenient to disassemble and assemble; in addition, the periphery of the sleeve 421 is provided with a limiting ring groove, the periphery of the sleeve cover 422 is provided with an annular bulge, and the annular bulge and the limiting ring groove are clamped to play a role in positioning and locking.

Through the arrangement, the support sleeve 42 can be conveniently and stably assembled on the driving shaft 2, the production and the assembly are convenient, and the production efficiency is improved.

Embodiment two:

As shown in fig. 3, the present embodiment provides a pick-up device for defective chips, which is different from the first embodiment in that, in the present embodiment, the rocker arm 5 includes an outer housing 51, a limiting block 52 and a locking bolt 53, the limiting block 52 is disposed in the outer housing 51, a limiting groove 521 is provided at the top of the limiting block 52, the end of the driving shaft 2 penetrates into the outer housing 51 and then is plugged into the limiting groove 521, a positioning groove 22 is provided on the outer wall of the driving shaft 2, a docking hole 522 communicated with the limiting groove 521 is provided on the side wall of the limiting block 52, and the locking bolt 53 is in threaded connection with the outer housing 51 and can extend into the limiting groove 521 through the docking hole 522 to be plugged into the positioning groove 22.

In the mounting process, the end of the drive shaft 2 is inserted into the outer case 51 and then inserted into the limit groove 521, and then the rocker arm 5 is adjusted so that the abutting hole 522 and the limit groove 22 are kept in an aligned state. Subsequently, the locking bolt 53 is screwed, and the locking bolt 53 is gradually screwed into the abutting hole 522, so that the locking bolt 53 extends into the limiting groove 521 and is inserted into the positioning groove 22, and at this time, the rocker arm 5 and the driving shaft 2 are locked and fixed.

Through above-mentioned setting, the dismouting of completion rocking arm 5 that can convenient operation and drive shaft 2 is convenient for maintain when follow-up maintenance and is changed, and its facilitate the use, the effect is preferred.

Preferably, the rocker arm 5 is provided with a plurality of hollow structures, so that the overall weight of the part is reduced, and the accuracy of the device action is improved.

The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present utility model, and such modifications and variations should also be regarded as being within the scope of the utility model.

Claims (8)

1. A die reject pick-up apparatus, comprising: the device comprises a mounting box (1) and a driving shaft (2), wherein a rotary driving mechanism (3) and a linear driving mechanism (4) are arranged in the mounting box (1), one end of the driving shaft (2) stretches into the mounting box (1) and is respectively connected with the rotary driving mechanism (3) and the linear driving mechanism (4) in a transmission way, the rotary driving mechanism (3) is used for driving the driving shaft (2) to reciprocate around the central axis, and the linear driving mechanism (4) is used for driving the driving shaft (2) to reciprocate in the axial direction;

The novel vacuum cleaner is characterized in that a rocker arm (5) is arranged at the other end of the driving shaft (2), a sucker (6) used for adsorbing small defective products is arranged at the tail end of the rocker arm (5), a gas pipe (7) is arranged on the rocker arm (5), one end of the gas pipe (7) is communicated with the sucker (6), and the other end of the gas pipe is connected with peripheral negative pressure equipment.

2. The small defective product pickup apparatus according to claim 1, wherein the mounting box (1) comprises a box body (1 a) and a box cover (1 b) arranged at the top of the box body (1 a), a guide sleeve (8) is arranged at the bottom of the box body (1 a) in a penetrating manner, and the guide sleeve (8) is movably sleeved on the driving shaft (2).

3. The small defective product pickup apparatus according to claim 2, wherein the rotary driving mechanism (3) includes a servo motor (31) and an inserting shaft (32), the servo motor (31) is provided on an inner top wall of the case cover (1 b), the inserting shaft (32) is provided on a driving end of the servo motor (31) and is arranged along an axis direction, a slot (21) matched with the inserting shaft (32) is provided at a top of the driving shaft (2), and the driving shaft (2) and the inserting shaft (32) are coaxially arranged.

4. A pick-up device for defective chips according to claim 3, wherein a first spring (9) is supported between the end of the insertion shaft (32) and the inner bottom wall of the insertion slot (21), a buffer pad (10) is provided at the driving end of the servo motor (31), and the buffer pad (10) is sleeved on the insertion shaft (32).

5. The small defective product pickup apparatus according to claim 2, wherein the linear driving mechanism (4) includes a cylinder (41), a support sleeve (42) and a first support plate (43), the support sleeve (42) is sleeved on the driving shaft (2) and can rotate around the driving shaft (2), the cylinder (41) is provided on an inner bottom wall of the case body (1 a) and uniformly arranged around the driving shaft (2), a driving end of the cylinder (41) is connected with the first support plate (43), and the first support plate (43) is connected with the support sleeve (42).

6. The small defective product pickup apparatus according to claim 5, wherein a first guide rod (11) is provided on an inner top wall of the case cover (1 b), and the first support plate (43) is movably sleeved on the first guide rod (11); the novel box is characterized in that a second guide rod (12) is arranged on the inner bottom wall of the box body (1 a), the second guide rods (12) are at least provided with two guide rods and are uniformly arranged around a supporting sleeve (42), a second support plate (13) and a second spring (14) are movably sleeved on the second guide rods (12), the second support plate (13) is connected with the supporting sleeve (42), and the second spring (14) is supported between the second support plate (13) and the inner bottom wall of the box body (1 a).

7. The die reject pick-up apparatus according to claim 5, wherein the support sleeve (42) comprises a casing (421) and a sleeve cover (422) provided on top of the casing (421), a bearing (15) is installed in the casing (421), and the drive shaft (2) is installed in the casing (421) through the bearing (15).

8. The small defective product pickup device according to claim 1, wherein the rocker arm (5) comprises an outer shell (51), a limiting block (52) and a locking bolt (53), the limiting block (52) is arranged in the outer shell (51), a limiting groove (521) is formed in the top of the limiting block (52), the end portion of the driving shaft (2) penetrates into the outer shell (51) and then is spliced with the limiting groove (521), a positioning groove (22) is formed in the outer wall of the driving shaft (2), a butt joint hole (522) communicated with the limiting groove (521) is formed in the side wall of the limiting block (52), and the locking bolt (53) is in threaded connection with the outer shell (51) and can extend into the limiting groove (521) through the butt joint hole (522) to be spliced with the positioning groove (22).