CN221201108U - Silicon wafer cleaning basket protection device - Google Patents
Silicon wafer cleaning basket protection device Download PDFInfo
- Publication number
- CN221201108U CN221201108U CN202323095231.9U CN202323095231U CN221201108U CN 221201108 U CN221201108 U CN 221201108U CN 202323095231 U CN202323095231 U CN 202323095231U CN 221201108 U CN221201108 U CN 221201108U
- Authority
- CN
- China
- Prior art keywords
- cleaning basket
- silicon wafer
- protection device
- cross beam
- wafer cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 24
- 239000010703 silicon Substances 0.000 title claims abstract description 24
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 16
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The silicon wafer cleaning basket protection device comprises a cross beam (1) and a limit switch (2), wherein a push rod (3) is arranged on the cross beam (1), a baffle (4) is arranged on the upper part of the push rod (3), the top of the push rod (3) is close to the limit switch (2), and the cross beam (1) and the push rod (3) can move up and down freely; the cross beam (1) is positioned at the lower part of the manipulator (5); the ejector rod (3) is screwed with a screw (6), and the screw (6) is arranged below the baffle plate (4). The silicon wafer cleaning machine can automatically alarm and stop when the cleaning basket is abnormal, such as the cleaning basket is not hung, the cleaning basket is inclined, and the like.
Description
Technical Field
The utility model relates to a cleaning basket protection device, in particular to a silicon wafer cleaning basket protection device.
Background
The silicon wafer cleaning machine is a full-automatic machine, and when in work, the ground silicon wafers are placed in silicon wafer flower baskets, and then the silicon wafer flower baskets are filled into the cleaning baskets (each cleaning basket can be used for placing 4-6 silicon wafer flower baskets); and then the cleaning basket is automatically lifted by the mechanical arm, and is cleaned by each cleaning tank according to a certain time interval, and finally the cleaning basket is placed at the outlet.
However, the cleaning basket is sometimes not hung in the process of mechanical hand-held cleaning basket, so that the cleaning basket is inclined, and silicon wafers in the cleaning basket are broken or run out of the silicon wafer flower basket. Because the silicon wafer cleaning machine runs fully automatically and works according to a fixed flow, the silicon wafer or the manipulator is easy to damage.
Disclosure of Invention
The utility model aims to solve the problems in the prior art and provide a silicon wafer cleaning basket protection device.
In order to achieve the above object, the technical solution of the present utility model is: the utility model provides a silicon chip washs basket protection device, includes crossbeam and limit switch, the crossbeam on install the ejector pin, ejector pin upper portion install the separation blade, ejector pin top is close limit switch, crossbeam and ejector pin can reciprocate freely.
The cross beam is positioned at the lower part of the manipulator.
The ejector rod is screwed with a screw, and the screw is arranged below the baffle plate.
The ejector rod passes through the transverse plate I and the transverse plate II.
Compared with the prior art, the utility model has the beneficial effects that:
1. The utility model can realize that when the cleaning basket is abnormal, such as the cleaning basket is not hung, the cleaning basket is inclined, and the like, the silicon wafer cleaning machine automatically alarms and stops, thereby protecting the silicon wafer cleaning from being damaged greatly and avoiding certain economic loss; and the mechanical arm is prevented from being seriously damaged.
2. And the automatic protection is realized, so that operators do not need to pay much attention to the running state of the machine, and the manpower is saved.
Drawings
Fig. 1 is a schematic diagram of the structure of the present utility model.
In the figure: the device comprises a cross beam 1, a limit switch 2, an ejector rod 3, a baffle 4, a manipulator 5, screws 6, a cross plate I7 and a cross plate II 8.
Detailed Description
The utility model is described in further detail below with reference to the accompanying drawings and detailed description.
Referring to fig. 1, a silicon wafer cleaning basket protection device is characterized in that: the novel lifting device comprises a beam 1 and a limit switch 2, wherein a push rod 3 is arranged on the beam 1, a baffle 4 is arranged on the upper portion of the push rod 3, the top of the push rod 3 is close to the limit switch 2, and the beam 1 and the push rod 3 can move up and down freely.
Referring to fig. 1, the beam 1 is located at the lower part of the manipulator 5.
Referring to fig. 1, the ejector rod 3 passes through the transverse plate i 7 and the transverse plate ii 8.
Referring to fig. 1, the ejector rod 3 is screwed with a screw 6, and the screw 6 is arranged below the baffle 4.
Referring to fig. 1, the present protection device is stationary and all works normally when the robot 5 is carrying the cleaning basket. When the cleaning basket is lifted by the mechanical arm 5 and is abnormal, if the cleaning basket is not hung, the cleaning basket is inclined, and the like, the beam 1 and the ejector rod 3 are triggered to move upwards, the limit switch 2 is collided by the ejector rod 3, the silicon wafer cleaning machine can automatically alarm and stop, an operator can check the problems, and the machine is restarted after processing.
The foregoing is a further detailed description of the utility model in connection with the preferred embodiments, and it is not intended that the utility model be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the utility model, and the above-described structure should be considered to be within the scope of the utility model.
Claims (4)
1. A silicon chip washs basket protection device which characterized in that: the novel movable lifting device comprises a cross beam (1) and a limit switch (2), wherein a top rod (3) is arranged on the cross beam (1), a baffle (4) is arranged on the upper portion of the top rod (3), the top of the top rod (3) is close to the limit switch (2), and the cross beam (1) and the top rod (3) can move up and down freely.
2. The silicon wafer cleaning basket protection device according to claim 1, wherein: the cross beam (1) is positioned at the lower part of the manipulator (5).
3. The silicon wafer cleaning basket protection device according to claim 1, wherein: the ejector rod (3) is screwed with a screw (6), and the screw (6) is arranged below the baffle plate (4).
4. The silicon wafer cleaning basket protection device according to claim 1, wherein: the ejector rod (3) passes through the transverse plate I (7) and the transverse plate II (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323095231.9U CN221201108U (en) | 2023-11-16 | 2023-11-16 | Silicon wafer cleaning basket protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323095231.9U CN221201108U (en) | 2023-11-16 | 2023-11-16 | Silicon wafer cleaning basket protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221201108U true CN221201108U (en) | 2024-06-21 |
Family
ID=91522657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323095231.9U Active CN221201108U (en) | 2023-11-16 | 2023-11-16 | Silicon wafer cleaning basket protection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221201108U (en) |
-
2023
- 2023-11-16 CN CN202323095231.9U patent/CN221201108U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |