CN220879727U - Ultrasonic cleaning equipment with chemical cleaning function - Google Patents

Abstract

The utility model discloses an ultrasonic cleaning device with chemical cleaning, which relates to the technical field of cleaning devices, and aims to solve the technical problem of providing an ultrasonic cleaning device with chemical cleaning, and adopts the following scheme: the top end of the first placing box is connected with a supporting plate through a bolt, the top end of the supporting plate is connected with a top plate through a bolt, the middle part of the top plate is connected with an electric sliding table through a bolt, the side end of the electric sliding table is connected with a sliding block in a sliding manner, the middle part of the sliding block is connected with the driving end of a hydraulic push rod through a bolt, the output end of the hydraulic push rod is connected with the second placing box through a fastener, the first cleaning box is connected with the transducer through the bolt at the bottom end, and the side end of the transducer is connected with the ultrasonic generator through a wire.

Description

Ultrasonic cleaning equipment with chemical cleaning function

Technical Field

The utility model relates to the technical field of cleaning equipment, in particular to ultrasonic cleaning equipment with chemical cleaning.

Background

In the semiconductor manufacturing process, in order to maintain the service life of the equipment, it is necessary to use a proper cleaning equipment to remove impurities on the surfaces of parts of the semiconductor manufacturing equipment and maintain the performance of the semiconductor manufacturing equipment. Through retrieving, chinese patent number CN 219187932U's patent, an ultrasonic cleaning equipment with chemical cleaning that relates to can promote the cleaning performance of device to object surface, is convenient for use the couple to hang the object that waits to wash in the bottom of conveyer belt for the object can be moved under the drive of conveyer belt, in order to replace the manual work to put into the device with the object and wash. The above patent replaces the manual work to put the object into the device for cleaning, but when the hook moves the parts, the parts with different sizes can be easily mistakenly touched on the edge of the cleaning tank, and the parts can be caused to fall off, so that the device is inconvenient and has the use limitation.

Disclosure of utility model

In order to solve the problems that the prior ultrasonic cleaning equipment for chemical cleaning replaces manual work to put an object into a device for cleaning, but when a hook moves a part, the part with different sizes can easily miss the edge of a cleaning tank and can cause the part to fall off, so that the ultrasonic cleaning equipment is inconvenient and has use limitation, the utility model is realized by the following technical scheme: the utility model provides an ultrasonic cleaning equipment with chemistry washs, includes first case of placing, first case and the second of placing the washing of incasement gomphosis connection are washed the case, first case top bolted connection extension board of placing, extension board top bolted connection roof, roof middle part bolted connection electronic slip table, electronic slip table side sliding connection slider, slider middle part bolted connection hydraulic push's drive end, hydraulic push's output is connected with the second of placing the case through the fastener, first case bottom bolted connection transducer of wasing, the transducer side is connected with supersonic generator through the wire, the case top is placed to the second is equipped with even board, even board side is connected with the curb plate through the pivot, even board opposite side is equipped with the buckle, buckle side joint connection curb plate.

Preferably, the side end of the first cleaning tank is provided with a first water filling port, the other side end of the first cleaning tank is provided with a first water outlet, the side ends of the first water filling port and the first water outlet are connected with a first water pump through a pipeline, and the side end of the first water pump is clamped and sleeved with a solution tank.

Preferably, a second water filling port is formed in the side end of the second cleaning box, and a second water draining port is formed in the other side end of the second cleaning box.

Preferably, the second water filling port and the second water outlet side end are connected with a second water pump through a pipeline, and the second water pump side end clamping sleeve is connected with a clean water tank.

Preferably, the side end of the second placing box is provided with a side plate in a rectangular distribution mode, the bottom end of the second placing box is provided with a bottom plate, and the middle parts of the connecting plate, the side plate and the bottom plate are provided with grids.

The utility model provides ultrasonic cleaning equipment with chemical cleaning. The beneficial effects are as follows:

(1) The utility model can place the parts by the placing box, and then translate and lift the placing box and the parts by the electric sliding table and the hydraulic push rod, so that the parts can be placed into the first cleaning box and the second cleaning box for chemical cleaning, and the cleaning efficiency is high.

(2) The placing box can be used for rapidly opening the top plate through the buckle, so that parts can be placed in the placing box conveniently, the parts can not touch the edge of the cleaning tank by mistake, and the placing box is convenient and practical.

Drawings

FIG. 1 is a schematic diagram of the overall utility model;

FIG. 2 is a schematic view of the connection structure of the first cleaning tank of the present utility model;

FIG. 3 is a schematic view of the connection structure of the ultrasonic generator of the present utility model;

FIG. 4 is a schematic view of the structure of the placement case of the present utility model;

Fig. 5 is a schematic view of a connection structure of the buckle of the present utility model.

In the figure, 1, a first placing box; 2. a first purge bin; 21. a first water filling port; 22. a first drain port; 23. a first water pump; 24. a solution tank; 3. a second purge bin; 31. a second water filling port; 32. a second drain port; 33. a second water pump; 34. a clean water tank; 4. a support plate; 5. a top plate; 6. an electric sliding table; 7. a slide block; 8. a hydraulic push rod; 9. a second placement box; 91. a connecting plate; 92. a side plate; 93. a buckle; 10. an ultrasonic generator; 11. a transducer.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-5, the embodiment of the present utility model provides a technical solution: the utility model provides an ultrasonic cleaning equipment with chemistry washs, includes first case 1 of placing, first case 2 and the second of placing the washing case 3 of gomphosis connection in the first case 1 of placing, first case 1 top bolted connection extension board 4 of placing, extension board 4 top bolted connection roof 5, roof 5 middle part bolted connection electronic slip table 6, electronic slip table 6 side sliding connection slider 7, the drive end of slider 7 middle part bolted connection hydraulic push rod 8, the output of hydraulic push rod 8 is connected with second place case 9 through the fastener, first case 2 bottom bolted connection transducer 11, transducer 11 side is connected with supersonic generator 10 through the wire, second place case 9 top and be equipped with link plate 91, link plate 91 side is connected with curb plate 92 through the pivot, link plate 91 opposite side end is equipped with buckle 93, at this moment 93 side block connection curb plate 92, like fig. 1, 4, 5, link plate 91 can block through buckle connection curb plate 92 through buckle 93, can place between link plate 91 and curb plate 92 then can place electronic slip table 6 through the fastener, and place the second and be washed 3 in the case 2 or the second is washed to be washed the case 3, and can be placed the second and is washed the case 3 is washed the second and is washed the case 3, and is placed the second and is washed the solution and is washed the position in the case 2 is washed 2, and is washed the second and is washed the case 3.

The side end of the first cleaning tank 2 is provided with a first water filling port 21, the other side end of the first cleaning tank 2 is provided with a first water draining port 22, the side ends of the first water filling port 21 and the first water draining port 22 are connected with a first water pump 23 through pipelines, the side end of the first water pump 23 is clamped and connected with a solution tank 24, as shown in fig. 2-3, the first water draining port 22 can drain the solution in the first cleaning tank 2 through the first water pump 23 and the solution tank 24, and the first water filling port 21 can inject the solution into the first cleaning tank 2 through the first water pump 23 and the solution tank 24, wherein the solution tank 24 can be an acidic or alkaline chemical solution.

The side end of the second cleaning box 3 is provided with a second water filling port 31, and the other side end of the second cleaning box 3 is provided with a second water discharging port 32.

The side ends of the second water filling port 31 and the second water discharging port 32 are connected with a second water pump 33 through pipelines, the side end clamping sleeve of the second water pump 33 is connected with a clean water tank 34, as shown in fig. 2-3, the second water discharging port 32 can discharge clean water in the second cleaning tank 3 through the second water pump 33 and the clean water tank 34, and the second water filling port 31 can fill clean water into the second cleaning tank 3 through the second water pump 33 and the clean water tank 34.

The side end of the second placing box 9 is provided with a side plate 92 in a rectangular distribution mode, the bottom end of the second placing box 9 is provided with a bottom plate, and the middle parts of the connecting plate 91, the side plate 92 and the bottom plate are provided with grids, as shown in fig. 4, the grids are convenient for water and solution to enter the second placing box 9, and parts are cleaned.

It should be noted that: when the utility model is used, firstly, the buckle 93 is opened, then the parts are placed in the second placing box 9, then the buckle 93 is clamped and connected with the side plate 92, then the electric sliding table 6 moves the sliding block 7, so that the second placing box 9 can be driven to move horizontally, then the second placing box 9 is lowered by the hydraulic push rod 8, the second placing box 9 is immersed in the first cleaning box 2, at the moment, the first water filling port 21 can be used for filling chemical solution into the first cleaning box 2 through the first water pump 23 and the solution box 24, the chemical solution can be used for cleaning the parts in the second placing box 9, meanwhile, the transducer 11 can be used for enabling the solution in the first cleaning box 2 and the parts to vibrate through the wire and the ultrasonic generator 10, so that the parts can be better cleaned by the solution, then the hydraulic push rod 8 is lifted up to the second placing box 9, then the second placing box 9 is moved into the second cleaning box 3, at the moment, the second water filling port 31 can be used for filling clean water into the second cleaning box 3 through the second water pump 33 and the solution box 34, and the clean the parts in the second placing box 9 can be cleaned.

While the fundamental and principal features of the utility model and advantages of the utility model have been shown and described, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims (5)

1. An ultrasonic cleaning apparatus having chemical cleaning, characterized in that: including first case (1) of placing, first case (2) and second case (3) of wasing are connected to the gomphosis in first case (1), first case (1) top bolted connection extension board (4) of placing, extension board (4) top bolted connection roof (5), electronic slip table (6) of roof (5) middle part bolted connection, electronic slip table (6) side sliding connection slider (7), the drive end of slider (7) middle part bolted connection hydraulic push rod (8), the output of hydraulic push rod (8) is connected with second case (9) of placing through the fastener, first case (2) bottom bolted connection transducer (11) are connected with supersonic generator (10) through the wire, second is placed case (9) top and is equipped with link board (91), link board (91) side end is connected with curb plate (92) through the pivot, link board (91) opposite side end is equipped with buckle (93), buckle (93) side card is connected with curb plate (92).

2. An ultrasonic cleaning apparatus with chemical cleaning according to claim 1, characterized in that: the side end of the first cleaning box (2) is provided with a first water filling port (21), the other side end of the first cleaning box (2) is provided with a first water outlet (22), the side ends of the first water filling port (21) and the first water outlet (22) are connected with a first water pump (23) through pipelines, and the side end of the first water pump (23) is sleeved with a solution tank (24).

3. An ultrasonic cleaning apparatus with chemical cleaning according to claim 1, characterized in that: the side end of the second cleaning box (3) is provided with a second water filling port (31), and the other side end of the second cleaning box (3) is provided with a second water discharging port (32).

4. An ultrasonic cleaning apparatus having chemical cleaning according to claim 3, wherein: the side ends of the second water filling port (31) and the second water discharging port (32) are connected with a second water pump (33) through pipelines, and the side ends of the second water pump (33) are connected with a clear water tank (34) in a clamping sleeve mode.

5. An ultrasonic cleaning apparatus with chemical cleaning according to claim 1, characterized in that: the side end of the second placing box (9) is provided with a side plate (92) in a rectangular distribution mode, the bottom end of the second placing box (9) is provided with a bottom plate, and the middle parts of the connecting plate (91), the side plate (92) and the bottom plate are provided with grids.