CN221166706U - Desktop type coating and film forming integrated machine - Google Patents
Desktop type coating and film forming integrated machine Download PDFInfo
- Publication number
- CN221166706U CN221166706U CN202322998064.2U CN202322998064U CN221166706U CN 221166706 U CN221166706 U CN 221166706U CN 202322998064 U CN202322998064 U CN 202322998064U CN 221166706 U CN221166706 U CN 221166706U
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- film forming
- machine
- coating
- box body
- forming machine
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- 238000000576 coating method Methods 0.000 title claims abstract description 53
- 239000011248 coating agent Substances 0.000 title claims abstract description 51
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 239000010408 film Substances 0.000 description 35
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Coating Apparatus (AREA)
Abstract
The utility model discloses a desktop type coating and film forming integrated machine which comprises a film forming machine, a vacuum pump for vacuumizing the film forming machine, a coating machine, a nitrogen interface for providing nitrogen for the coating machine, and a sealing mechanism for sealing the film forming machine and the coating machine together from the outer side so as to avoid external pollution during substrate transfer. The sealing mechanism seals the film forming machine and the coating machine, thus the sealing mechanism is operated internally and prevents external contact, thereby avoiding pollution. The coating machine and the film forming machine are optimized without influencing functions, so that the coating machine and the film forming machine can be placed in the same box body, most of the volume is reduced, meanwhile, the operation is optimized, the main box door of the box body is also provided with rubber gloves, and the coated substrate can be transferred onto the film forming machine from the platform of the coating machine without opening the door, so that the external pollution is avoided.
Description
Technical Field
The utility model relates to the field of coating and film forming integrated machines, in particular to a desktop type coating and film forming integrated machine.
Background
In the manufacturing process of thin film solar cells such as perovskite, the coating process is a vacuum film forming process after completion, if the glass substrate is polluted and the glass is polluted due to no reasonable transfer in the process of transferring to vacuum film forming equipment after completion of the coating process, and the two equipment can increase the occupied space and prolong the whole manufacturing time to a certain extent, so that the problem of avoiding the pollution in the substrate transferring process is an urgent need of a person skilled in the art.
Disclosure of utility model
The utility model aims to provide a desktop type coating and film forming integrated machine so as to solve the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the desktop type coating and film forming integrated machine comprises a film forming machine, a vacuum pump for vacuumizing the film forming machine, a coating machine, a nitrogen interface for providing nitrogen for the coating machine, and a sealing mechanism for sealing the film forming machine and the coating machine together from the outer side so as to prevent the film forming machine and the coating machine from being polluted by the outside during substrate transfer. The sealing mechanism seals the film forming machine and the coating machine, thus the sealing mechanism is operated internally and prevents external contact, thereby avoiding pollution.
Preferably, the sealing mechanism comprises a box body for accommodating the film forming machine and the coating machine, the front end of the box body is connected with a main box door, the main box door is convenient for feeding, the vacuum pump and the nitrogen interface are connected to the box body, and the sealing mechanism further comprises an operating mechanism which is arranged on the box body and used for transferring the substrate. The substrate is operated by an operating mechanism.
Preferably, the operating mechanism comprises rubber gloves arranged on the main box door and a perspective mechanism arranged on the box body. The substrate is transferred from the coater to the film former by a transfer operation of the rubber glove.
Preferably, the see-through mechanism comprises a main see-through plate mounted on the main door. The substrate is observed through the main perspective plate, so that the transfer operation is convenient.
Preferably, a side box door is arranged at the left end of the box body. The film forming machine and the coating machine are convenient to open at one side for maintenance.
Preferably, a side perspective plate is arranged on the side box door. The internal condition is convenient to observe.
Preferably, the main perspective plate and the side perspective plates are made of transparent acrylic plates. The weight is light, and the installation is convenient.
Preferably, the film forming machine and the coating machine are connected with a controller, and the controller is positioned at one side of the box body so as to be operated. The controller is provided with an operation button which can be fixed with the box body, thereby being convenient to operate.
Compared with the prior art, the utility model has the beneficial effects that:
1. The coating machine and the film forming machine are optimized without influencing functions, so that the coating machine and the film forming machine can be placed in the same box body, most of the volume is reduced, meanwhile, the operation is optimized, the main box door of the box body is also provided with rubber gloves, and the coated substrate can be transferred onto the film forming machine from the platform of the coating machine without opening the door, so that the external pollution is avoided;
2. The side box door is arranged, so that the side box door is convenient to open from one side, and the film forming machine and the coating machine on the inner side are convenient to maintain.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
Fig. 2 is a schematic view of the structure of the case of the present utility model after being opened.
In the figure: 1. a film forming machine; 2. a vacuum pump; 3. a coater; 4. a nitrogen interface; 5. a case; 6. a main door; 7. rubber gloves; 8. a main perspective plate; 9. a side door; 10. a side perspective plate; 11. and a controller.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1 to 2, the present utility model provides a technical solution of a desktop coating and film forming integrated machine: the desktop type coating and film forming integrated machine comprises a film forming machine 1, a vacuum pump 2 for vacuumizing the film forming machine 1, a coating machine 3, a nitrogen interface 4 for providing nitrogen for the coating machine 3, and a sealing mechanism for sealing the film forming machine 1 and the coating machine 3 together from the outer side so as to avoid external pollution during substrate transfer. The sealing mechanism seals the film forming machine 1 and the coating machine 3, thus the sealing mechanism is operated internally and prevents external contact, thereby avoiding pollution.
The sealing mechanism comprises a box body 5 for accommodating the film forming machine 1 and the coating machine 3, the front end of the box body 5 is connected with a main box door 6, the main box door 6 is convenient for feeding, the vacuum pump 2 and the nitrogen interface 4 are connected to the box body 5, and the sealing mechanism further comprises an operating mechanism which is arranged on the box body 5 and used for substrate transferring operation. The substrate is operated by an operating mechanism.
The operating mechanism comprises rubber gloves 7 arranged on the main box door 6 and also comprises a perspective mechanism arranged on the box body 5. The substrate is transferred from the coater 3 to the film former 1 by a transfer operation of the rubber glove 7. The see-through mechanism comprises a main see-through plate 8 mounted on the main door 6. The substrate is observed through the main perspective plate 8, so that the transfer operation is facilitated.
The left end of the box 5 is provided with a side box door 9. The film forming machine 1 and the coating machine 3 are convenient to open at one side for maintenance. A side perspective plate 10 is provided on the side door 9. The internal condition is convenient to observe. The main perspective plate 8 and the side perspective plate 10 are made of transparent acrylic plates. The weight is light, and the installation is convenient.
The film forming machine 1 and the coating machine 3 are connected with a controller 11, and the controller 11 is located at one side of the case 5 for operation. The controller 11 is provided with an operation button which can be fixed with the box 5, thereby facilitating the operation.
Working principle: the coating machine 3 and the film forming machine 1 are optimized without influencing functions, so that the coating machine 3 and the film forming machine 1 can be placed in the same box body 5, most of the volume is reduced, meanwhile, the operation is optimized, the main box door 6 of the box body 5 is also provided with rubber gloves 7, and the coated substrate can be transferred onto the film forming machine 1 from the platform of the coating machine 3 without opening the door, so that the external pollution is avoided. The side door 9 is also convenient to open from one side, and is convenient to maintain the film forming machine 1 and the coating machine 3 at the inner side.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a desktop formula coating film forming all-in-one, includes film forming machine (1), to vacuum pump (2) of film forming machine (1) evacuation, coating machine (3) and for nitrogen gas interface (4) that provide nitrogen gas of coating machine (3), its characterized in that: the device also comprises a sealing mechanism for sealing the film forming machine (1) and the coating machine (3) together from the outer side so as to avoid the pollution of the outside when the substrate is transferred;
The sealing mechanism comprises a box body (5) for accommodating the film forming machine (1) and the coating machine (3), a main box door (6) is connected to the front end of the box body (5), the vacuum pump (2) and the nitrogen interface (4) are connected to the box body (5), and the sealing mechanism further comprises an operating mechanism which is arranged on the box body (5) and used for substrate transferring operation.
2. The tabletop coating and film forming all-in-one machine according to claim 1, wherein: the operating mechanism comprises rubber gloves (7) arranged on the main box door (6) and also comprises a perspective mechanism arranged on the box body (5).
3. The tabletop coating and film forming all-in-one machine according to claim 2, wherein: the perspective mechanism comprises a main perspective plate (8) arranged on the main box door (6).
4. A desktop coating and film forming all-in-one machine as claimed in claim 3, wherein: the left end of the box body (5) is provided with a side box door (9).
5. The tabletop coating and film forming all-in-one machine according to claim 4, wherein: a side perspective plate (10) is arranged on the side box door (9).
6. The tabletop coating and film forming all-in-one machine according to claim 5, wherein: the main perspective plate (8) and the side perspective plates (10) are made of transparent acrylic plates.
7. The tabletop coating and film forming all-in-one machine according to claim 1, wherein: the film forming machine (1) and the coating machine (3) are connected with a controller (11), and the controller (11) is positioned on one side of the box body (5) so as to be convenient to operate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322998064.2U CN221166706U (en) | 2023-11-07 | 2023-11-07 | Desktop type coating and film forming integrated machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322998064.2U CN221166706U (en) | 2023-11-07 | 2023-11-07 | Desktop type coating and film forming integrated machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221166706U true CN221166706U (en) | 2024-06-18 |
Family
ID=91439332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322998064.2U Active CN221166706U (en) | 2023-11-07 | 2023-11-07 | Desktop type coating and film forming integrated machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221166706U (en) |
-
2023
- 2023-11-07 CN CN202322998064.2U patent/CN221166706U/en active Active
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