CN221149966U - Substrate moving system - Google Patents

Abstract

The application provides a substrate moving system, which comprises a front conveying mechanism, a middle conveying mechanism, a rear conveying mechanism, a left conveying mechanism and a right conveying mechanism; the middle conveying mechanism comprises a first machine seat, two wire body moving rods, two first wire body conveying belts, a plurality of wire body lifting push rods and a plurality of wire body driving push rods; the two wire body moving rods are arranged side by side, and the wire body moving rods are arranged on the first machine base in a sliding manner along the left-right direction; the two first wire body conveying belts are arranged on the two wire body moving rods in a one-to-one correspondence manner; the plurality of wire body lifting push rods are correspondingly arranged on the two wire body moving rods, and the wire body lifting push rods are arranged in a sliding manner along the up-down direction relative to the wire body moving rods; the plurality of wire body driving push rods are correspondingly arranged on the two wire body moving rods, and the wire body driving push rods are arranged in a sliding manner along the up-down direction relative to the wire body moving rods; the application can be compatible with substrates of different sizes.

Description

Substrate moving system

Technical Field

The application relates to the technical field of die bonding equipment, in particular to a substrate moving system suitable for a large-size substrate.

Background

Generally, the die bonding process of the substrate includes: printing solder paint on a substrate, performing AOI visual inspection on the substrate, fixing a wafer on the substrate, performing reflow soldering on the wafer which is fixed on the substrate and the like, wherein related equipment comprises a printer, an AOI detector, a die bonder, a reflow soldering machine and the like, which are arranged at intervals, and the substrate is required to be moved between the equipment through a conveying track and a substrate driving device, so that die bonding work can be smoothly performed; however, the existing substrate driving device and the conveying track can only be compatible with the small-size substrate, namely, can only drive and move the small-size substrate, and cannot drive and move the large-size substrate, because the existing substrate driving device and the conveying track thereof can cause uneven stress and large deformation of the large-size substrate when driving the large-size substrate, so that the positioning of the large-size substrate is inaccurate, and finally the die bonding precision is affected.

Disclosure of utility model

The application aims to provide a substrate moving system which can be compatible with substrates of different sizes, and can ensure the positioning accuracy of a large-size substrate so as to ensure the die bonding accuracy of the large-size substrate.

To this end, the present application provides a substrate moving system including a medium transport mechanism; the middle conveying mechanism comprises a first machine seat, two wire body moving rods, two first wire body conveying belts, a plurality of wire body lifting push rods and a plurality of wire body driving push rods; the two wire body moving rods are arranged side by side, and the wire body moving rods are arranged on the first base in a sliding manner along the left-right direction; the two first wire body conveying belts are arranged on the two wire body moving rods in a one-to-one correspondence manner, and the conveying direction of the first wire body conveying belts is the front-back direction; the wire body lifting push rods are correspondingly arranged on the two wire body moving rods, the wire body lifting push rods are arranged in a sliding mode relative to the wire body moving rods in the up-down direction, and the upper ends of the wire body lifting push rods are arranged on the abutting substrate; the wire body driving push rods are correspondingly arranged on the two wire body moving rods, the wire body driving push rods are arranged in a sliding mode relative to the wire body moving rods along the up-down direction, and the wire body driving push rods are arranged to drive the base plate to move.

Compared with the prior art, the application provides a substrate moving system, which has the beneficial effects that:

The two first wire body conveying belts of the middle conveying mechanism can receive the substrates conveyed from other conveying mechanisms and convey the substrates until the substrates are completely positioned on the middle conveying mechanism; then, a plurality of wire body lifting push rods rise together to drive the substrate to rise relative to the wire body moving rods; then, one of the wire moving rods moves to drive the wire to drive the push rod to move together with the substrate, so that the substrate reaches other conveying mechanisms and is conveyed to related equipment such as a printer, an AOI (automated optical inspection) machine, a die bonder or a reflow soldering machine; then, the substrate comes out of the equipment and is conveyed to the middle conveying mechanism through other conveying mechanisms again; then, the wire moving rod moves back to drive the wire driving push rod and the base plate to move back; then, the wire lifting push rod descends, so that the substrate falls on the two first wire conveying belts again and is conveyed out to a subsequent conveying mechanism through the two first wire conveying belts.

The application can control the distance between the two wire body moving rods to adapt to substrates with different sizes, thereby improving the compatibility of the device, ensuring the positioning accuracy of the large-size substrate and ensuring the die bonding accuracy of the large-size substrate.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art. In addition, in the drawings, like parts are designated with like reference numerals and the drawings are not drawn to actual scale.

FIG. 1 is a schematic diagram of a substrate movement system of the present application;

FIG. 2 is an exploded view of the substrate movement system shown in FIG. 1;

FIG. 3 is a schematic view of the middle conveyor mechanism of FIG. 1;

FIG. 4 is a schematic view of the middle conveyor shown in FIG. 3 with the substrate not lifted;

FIG. 5 is a schematic view of the middle conveyor shown in FIG. 3 after lifting the substrate;

FIG. 6 is a schematic view of the substrate moving to the left in the middle conveyor mechanism shown in FIG. 3;

FIG. 7 is a schematic view of a wire lifting pushrod according to an embodiment of the application;

FIG. 8 is a schematic view of a wire lifting pushrod according to another embodiment of the application;

FIG. 9 is a schematic view of a wire body drive ram according to one embodiment of the present application;

FIG. 10 is a schematic view of a blocking cylinder and baffle according to one embodiment of the present application;

FIG. 11 is a schematic view of a front conveyor mechanism according to an embodiment of the present application;

FIG. 12 is a schematic view of the substrate movement system of FIG. 1 in a die bonding operation;

Reference numerals illustrate:

1. A front connection wire body conveying mechanism; 11. a first conveying path; 2. a medium connection wire body conveying mechanism; 21. a first stand; 211. a first seat plate; 212. a first guide bar; 213. a drag chain; 22. a wire body moving rod; 221. a first motor; 222. a first screw rod; 223. a second motor; 224. a second screw rod; 225. a transmission belt; 23. a first wire body conveyor belt; 231. a conveyor belt driving motor; 24. a wire body lifting push rod; 25. the wire body drives the push rod; 26. a roller; 261. a limit part; 262. a receiving part; 27. a lifting cylinder; 28. a driving cylinder; 29. blocking the cylinder; 291. a baffle; 3. the rear connection wire body conveying mechanism; 4. a left connection wire body conveying mechanism; 5. a right connection wire body conveying mechanism; 6. a frame; 7. a substrate; 8. a position detection sensor; 9. a second stand; 91. a first support frame; 92. a second guide bar; 100. a substrate moving system; 200. a printing machine; 300. an AOI detector; 400. a die bonder; 500. and (5) a reflow soldering machine.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

As shown in fig. 1 to 12, an embodiment of the present application proposes a substrate moving system 100 including a front conveying mechanism 1, i.e., a front-connection-line-body conveying mechanism 1, a middle conveying mechanism 2, i.e., a middle-connection-line-body conveying mechanism 2, a rear conveying mechanism 3, i.e., a rear-connection-line-body conveying mechanism 3, a left conveying mechanism 4, i.e., a left-connection-line-body conveying mechanism 4, and a right conveying mechanism 5, i.e., a right-connection-line-body conveying mechanism 5; the front connection wire body conveying mechanism 1 is arranged on the front side of the middle connection wire body conveying mechanism 2, the rear connection wire body conveying mechanism 3 is arranged on the rear side of the middle connection wire body conveying mechanism 2, the left connection wire body conveying mechanism 4 is arranged on the left side of the middle connection wire body conveying mechanism 2, and the right connection wire body conveying mechanism 5 is arranged on the right side of the middle connection wire body conveying mechanism 2; the middle connection wire body conveying mechanism 2 comprises a first machine seat 21, two wire body moving rods 22, two first wire body conveying belts 23, a plurality of wire body lifting push rods 24 and a plurality of wire body driving push rods 25; the two wire body moving rods 22 are arranged side by side, and the wire body moving rods 22 are arranged on the first stand 21 in a sliding manner along the left-right direction; the two first wire body conveying belts 23 are arranged on the two wire body moving rods 22 in a one-to-one correspondence manner, and the conveying direction of the first wire body conveying belts 23 is the front-back direction; the plurality of wire lifting push rods 24 are correspondingly arranged on the two wire moving rods 22, the wire lifting push rods 24 are arranged in a sliding manner relative to the wire moving rods 22 along the up-down direction, and the upper ends of the wire lifting push rods 24 are arranged on the abutting substrate 7; the plurality of wire drive push rods 25 are provided on the two wire moving rods 22, and the wire drive push rods 25 are provided so as to slide in the up-down direction with respect to the wire moving rods 22, and the wire drive push rods 25 are arranged to move the drive board 7.

Based on the above technical solution, the front-connection wire body conveying mechanism 1 can convey the substrate 7 to the middle-connection wire body conveying mechanism 2, and the two first wire body conveying belts 23 of the middle-connection wire body conveying mechanism 2 can receive the substrate 7 conveyed from the front-connection wire body conveying mechanism 1 and convey the substrate 7 until the substrate 7 is completely positioned on the middle-connection wire body conveying mechanism 2; then, the wire lifting push rods 24 rise together to drive the substrate 7 to rise relative to the wire moving rods 22; then, one of the wire moving rods 22 moves to drive the push rod 25 to move together with the substrate 7, so that the substrate 7 reaches the left connection wire conveying mechanism 4 or the right connection wire conveying mechanism 5 and is conveyed to related equipment such as the printer 200, the AOI detector 300, the die bonder 400 or the reflow soldering machine 500 through the left connection wire conveying mechanism 4 or the right connection wire conveying mechanism 5, and in general, the left connection wire conveying mechanism 4 or the right connection wire conveying mechanism 5 can convey the substrate to the die bonder 400, and the printer 200 and the AOI detector 300 can convey the substrate 7 by themselves through conveying tracks; then, the substrate 7 comes out of the devices and is conveyed to the middle connection wire conveying mechanism 2 through the left connection wire conveying mechanism 4 or the right connection wire conveying mechanism 5; then, the wire moving rod 22 moves back to drive the wire driving push rod 25 to move back together with the substrate 7; after that, the wire lifting push rod 24 is lowered so that the substrate 7 falls again on the two first wire conveying belts 23 and is conveyed to the rear docking wire conveying mechanism 3 via the two first wire conveying belts 23.

The application can control the interval between the two wire body moving rods 22 to adapt to the substrates 7 with different sizes, thereby improving the compatibility of the device, ensuring the positioning accuracy of the large-size substrate 7 and ensuring the die bonding accuracy of the large-size substrate 7, and being compatible with substrates 7 with the length and the width of 600mm-900 mm.

In the present application, the two wire moving rods 22 are a first wire moving rod 22 and a second wire moving rod 22; the middle connection wire body conveying mechanism 2 further comprises a first motor 221, a first screw rod 222, a second motor 223 and a second screw rod 224; the first motor 221 is disposed on the first stand 21; the first screw rod 222 is rotatably disposed on the first stand 21, and the axial direction of the first screw rod 222 is a left-right direction; the power output end of the first motor 221 is connected with a first screw rod 222, and the first screw rod 222 is meshed with the first wire body moving rod 22; the second motor 223 is disposed on the first stand 21; the second screw rod 224 is rotatably arranged on the first stand 21, and the axial direction of the second screw rod 224 is the left-right direction; the power output end of the second motor 223 is connected with a second screw rod 224, and the second screw rod 224 is meshed with the second wire body moving rod 22.

Generally, the first wire moving rod 22 is located at the left side of the first stand 21, and the second wire moving rod 22 is located at the right side of the first stand 21; the first motor 221 drives the first screw rod 222 to rotate so as to drive the first wire moving rod 22 to move along the left-right direction, so as to drive the wire driving push rod 25 to move along with the substrate 7, and the substrate 7 can be close to the right connection wire conveying mechanism 5 or far from the right connection wire conveying mechanism 5; similarly, the second motor 223 drives the second screw 224 to rotate, so as to drive the second wire moving rod 22 to move along the left-right direction, so as to drive the wire driving push rod 25 to move along with the substrate 7, so that the substrate 7 can be close to the left connection wire conveying mechanism 4 or far from the left connection wire conveying mechanism 4.

As shown in fig. 12, when die bonding is performed, the die bonder 400 is disposed on both the left and right sides of the middle connection wire conveying mechanism 2, the left connection wire conveying mechanism 4 can convey the substrate 7 to the die bonder 400 on the left side for die bonding, and the die bonding time is long, at this time, the middle connection wire conveying mechanism 2 can convey the substrate 7 to the right connection wire conveying mechanism 5, and convey the substrate 7 to the die bonder 400 on the right side via the right connection wire conveying mechanism 5 for die bonding, so as to speed up the die bonding rate.

In practice, when die bonding is performed, a plurality of substrate moving systems may be placed, 2 die bonders 400 are disposed on two sides of the middle connection wire conveying mechanism 2 of each device, and the die bonders 400 on each side are disposed at intervals along the front-rear direction, while if the die bonders 400 on two sides of the middle connection wire conveying mechanism 2 in the previous device are already in die bonding, the middle connection wire conveying mechanism 2 may serve as a passageway, and the next substrate directly passes through the middle connection wire conveying mechanism 2 and goes to the next middle connection wire conveying mechanism 2.

The distance between the two wire body moving rods 22 is controlled through the motor and the screw rod, and the distance between the two wire body moving rods 22 can be correspondingly controlled according to the size of the substrate 7 which is actually operated, so that the size compatibility of the substrate 7 is greatly improved; and whether the wire moving rod 22 is moving or not, the application is that one wire moving rod 22 is moving and the other wire moving rod 22 is still, the upper end of the wire lifting push rod 24 is always abutting against the lower side surface of the substrate 7, thus, when the large-size substrate 7 is transferred, the situation of large deformation caused by uneven stress of the substrate 7 is avoided, thereby ensuring the accurate positioning of the large-size substrate 7 and finally ensuring the die bonding precision.

Specifically, the middle connection wire body conveying mechanism 2 includes a plurality of first screw rods 222 and a plurality of second screw rods 224; the first screw rods 222 are arranged side by side along the front-back direction, and the first screw rods 222 are driven by a driving belt 225; the plurality of second screw rods 224 are arranged side by side along the front-rear direction, and the plurality of second screw rods 224 are driven by a driving belt 225.

The first motor 221 drives one of the first screw rods 222 to rotate, and the first screw rods 222 synchronously rotate with other first screw rods 222 through a transmission belt 225 to drive the first wire moving rod 22 to move together, and the plurality of first screw rods 222 are arranged side by side along the front-back direction so as to ensure that the moving direction of the first wire moving rod 22 is accurate and prevent the position of the first wire moving rod 22 from shifting; meanwhile, the plurality of first screw rods 222 also have a supporting function, and support the first wire moving rod 22, the wire lifting push rod 24, the wire driving push rod 25 and the base plate 7 thereon.

Similarly, the second motor 223 drives one of the second screw rods 224 to rotate, and the second screw rods 224 rotate synchronously with the other second screw rods 224 through the transmission belt 225 to drive the second wire moving rod 22 to move together, and the plurality of second screw rods 224 are arranged side by side along the front-back direction so as to ensure the accurate moving direction of the second wire moving rod 22 and prevent the position deviation of the second wire moving rod 22; meanwhile, the plurality of second screw rods 224 also have supporting function, and support the second wire moving rod 22, the wire lifting push rod 24, the wire driving push rod 25 and the base plate 7 thereon.

The first frame 21 may be provided with a sliding rail, the first wire moving rod 22 and the second wire moving rod 22 are both slidably disposed on the sliding rail, and the first wire moving rod 22 and the second wire moving rod 22 are driven by a first screw rod 222 and a second screw rod 224, respectively.

Or the application can also adopt linear motors to replace screw rod driving, and two groups of linear motors can be arranged on the first stand 21, and the power output ends of the linear motors are directly connected with the moving rod 22 of the body.

Or the application can adopt a hydraulic cylinder to replace screw rod driving, two groups of hydraulic cylinders are arranged on the first machine seat 21, the power output end of each hydraulic cylinder is directly connected with the corresponding line body moving rod 22, and a sliding rail is arranged on the first machine seat 21, and the line body moving rod 22 is in sliding connection with the sliding rail.

In order to ensure that the substrate 7 is uniformly stressed and reduce the deformation amount of the substrate 7, the number of the wire lifting push rods 24 on the two wire moving rods 22 is the same, and the distance between the wire lifting push rods 24 on one wire moving rod 22 is equal.

In some embodiments, the number of the wire lifting push rods 24 on one wire moving rod 22 is 3, and the 3 wire lifting push rods 24 on one wire moving rod 22 are respectively abutted against the front end, the middle end and the rear end of the base plate 7.

In order to enable the substrate 7 to move better under the pushing of the wire body driving push rod 25, the application is provided with the roller 26 at the upper end of the wire body lifting push rod 24, and the roller 26 is connected with the lower side surface of the substrate 7, so that when the substrate 7 is pushed by the wire body driving push rod 25, the substrate 7 rolls on the surface of the roller 26, and the sliding friction force between the substrate 7 and the roller 26 is too small, so that the motion state of the substrate 7 is not influenced.

Specifically, the rollers 26 at the front and rear ends of the wire moving rod 22 include a receiving portion 262 and a limiting portion 261, the outer diameter of the receiving portion 262 is smaller than the outer diameter of the limiting portion 261, the receiving portion 262 receives the lower side surface of the substrate 7, the limiting portion 261 is abutted against the side wall of the substrate 7, and the limiting portions 261 on the two rollers 26 at the front and rear ends of the wire moving rod 22 are opposite and respectively abutted against the front and rear side walls of the substrate 7, so as to prevent the substrate 7 from moving in the front and rear directions, and ensure the accuracy of the position of the substrate 7 during movement.

The middle connection wire body conveying mechanism 2 also comprises a plurality of lifting cylinders 27 and a plurality of driving cylinders 28; the lifting cylinders 27 are correspondingly arranged on the two wire body moving rods 22, and the power output ends of the lifting cylinders 27 are correspondingly connected with the wire body lifting push rods 24 one by one; the driving cylinders 28 are correspondingly arranged on the two wire body moving rods 22, and the power output ends of the driving cylinders 28 are correspondingly connected to the wire body driving push rods 25 one by one.

The lifting cylinder 27 can drive the wire body lifting push rod 24 to lift and drive the roller 26 to lift so as to drive the substrate 7 to lift; the driving cylinder 28 can drive the wire body driving push rod 25 to lift, generally, a driving connection groove is formed on the substrate 7, and the wire body driving push rod 25 extends into the driving connection groove when lifting, so that when the wire body moving rod 22 moves along the left-right direction, the wire body driving push rod 25 is driven to move along the left-right direction together with the substrate 7, so that the substrate 7 can be close to or far away from the left-connection wire body conveying mechanism 4/right-connection wire body conveying mechanism 5.

The lifting cylinder 27 and the driving cylinder 28 of the present application may be replaced by linear motors. In other embodiments, the piston rod of the lifting cylinder 27 may be directly connected to the roller 26, and the piston rod of the driving cylinder 28 may be directly connected to an "L" shaped aluminum plate.

To improve the compatibility of the present application, the first housing 21 of the present application is designed to be adjustable in size; the first stand 21 includes two first seat plates 211 and two first guide rods 212; the two first seat boards 211 are arranged in parallel, and guide grooves are formed at two ends of the two first seat boards 211; the two first guide rods 212 are arranged in parallel, two ends of the first guide rods 212 are correspondingly connected in the guide grooves of the two first seat plates 211, and the first guide rods 212 and the first seat plates 211 are in reinforced connection through fasteners.

The fastening between the first guide bar 212 and the first seat plate 211 can be released by the fastening means, so that the first guide bar 212 can be manually moved relative to the first seat plate 211 to adjust the position of the first guide bar 212 relative to the first seat plate 211, i.e. to adjust the distance between the two first seat plates 211, and then the connection between the first guide bar 212 and the first seat plate 211 is fastened by the fastening means, so that the two first seat plates 211 are fixed, and the distance between the two first seat plates is not changed.

Both ends of the first screw rod 222 and the second screw rod 224 are rotatably connected to the two first seat plates 211, the first motor 221 is disposed on one of the first seat plates 211, and the second motor 223 is disposed on the other first seat plate 211.

Generally, the first motor 221 (the second motor 223) drives the first screw rod 222 (the second screw rod 224) to operate, so that one of the wire moving rods 22 moves relative to the first frame 21, and the other wire moving rod 22 is kept stationary, so that, if the substrate 7 is to be processed to enter the left/right connection wire conveying mechanism 4/5 from the connection wire conveying mechanism 2, the two wire moving rods 22 and the rollers 26 thereon are close to each other under the driving of the motor, and when the center distance between the rollers 26 at the same position on the two wire moving rods 22 is 1/4 of the width of the substrate 7, the motor stops operating, and then the left/right connection wire conveying mechanism 4/5 correspondingly operates to receive the substrate 7 conveyed from the connection wire conveying mechanism 2; if the substrate 7 is to be processed to enter the middle connection wire body conveying mechanism 2 from the left connection wire body conveying mechanism 4/right connection wire body conveying mechanism 5, the left connection wire body conveying mechanism 4/right connection wire body conveying mechanism 5 drives the substrate 7 to approach the middle connection wire body conveying mechanism 2, at this time, the center distance between the rollers 26 at the same positions on the two wire body moving rods 22 on the middle connection wire body conveying mechanism 2 is 1/4 of the width of the substrate 7, so that the substrate 7 conveyed from the left connection wire body conveying mechanism 4/right connection wire body conveying mechanism 5 can be well received, and accidents such as overturning of the substrate 7 during transfer can be prevented.

In some embodiments, in order to facilitate detection of the position of the substrate 7 on the present application, the present application is provided with a position detection sensor 8 on both the wire moving bars 22, the position detection sensor 8 being configured to detect the position of the substrate 7.

Position detection sensors 8 may be provided at both front and rear ends of the wire moving rod 22 for detecting whether the substrate 7 is to enter the wire moving rod 22 or whether the substrate 7 is to leave the wire moving rod 22; the position detection sensor 8 is electrically connected to the first motor 221, the second motor 223, the lift cylinder 27, and the driving cylinder 28, and the first motor 221 and the second motor 223 can be operated in response to the information transmitted from the position detection sensor 8, and the lift cylinder 27 and the driving cylinder 28 can be operated in response to the information transmitted from the position detection sensor 8.

The present application may employ an infrared sensor, a laser correlation sensor, a hall sensor, or the like to detect the position of the substrate 7.

In order to ensure that the position of the substrate 7 on the wire body moving rods 22 is accurate, blocking air cylinders 29 are arranged at the rear ends of the two wire body moving rods 22, a baffle 291 is connected to the power output end of each blocking air cylinder 29, each blocking air cylinder 29 is electrically connected with a position detection sensor 8, the position detection sensor 8 detects that the substrate 7 is about to reach the upper side of each blocking air cylinder 29, and each blocking air cylinder 29 correspondingly drives the corresponding baffle 291 to ascend so that the baffle 291 can block the rear side wall of the substrate 7 to prevent the substrate 7 from moving backwards; the two blocking cylinders 29 cooperate to prevent the position of the base plate 7 from being shifted left and right when the base plate 7 is blocked from moving backward.

Here, the first wire conveyor belt 23 is stopped accordingly when the position detection sensor 8 detects that the substrate 7 is about to reach above the blocking cylinder 29, that is, when the position detection sensor 8 detects that the substrate 7 is approaching or separating, and when the position detection sensor 8 detects that the substrate 7 is approaching for several seconds, the first wire conveyor belt 23 is stopped accordingly; in this way, the substrate 7 may continue to move backward due to inertia, and at this time, the blocking cylinder 29 drives the baffle 291 upward accordingly to block the substrate 7 from moving backward.

In the application, the two wire moving rods 22 are provided with the conveyer belt driving motor 231, the power output end of the conveyer belt driving motor 231 is connected with the first wire conveyer belt 23, the conveyer belt driving motor 231 is electrically connected with the position detection sensor 8, and the conveyer belt driving motor 231 can be correspondingly started and stopped according to the position information of the substrate 7 detected by the position detection sensor 8 so as to ensure that the substrate 7 can fall at a designated position.

A drag chain 213 is provided between the first housing 21 and the wire body moving lever 22 for mounting a wire including a wire connected to the first motor 221/the second motor 223, and the drag chain 213 can protect the wire from being crushed.

In the application, the front connection wire body conveying mechanism 1 is provided with a first conveying channel 11, and the conveying direction of the first conveying channel 11 is the front-back direction; the rear connection wire body conveying mechanism 3 is provided with a second conveying channel, and the conveying direction of the second conveying channel is the front-rear direction; the left connection line body conveying mechanism 4 is provided with a third conveying channel, and the conveying direction of the third conveying channel is the left-right direction; the right connection wire body conveying mechanism 5 has a fourth conveying passage, and the conveying direction of the fourth conveying passage is the left-right direction.

The front connection wire body conveying mechanism 1 comprises two wire body conveying belts, and the first conveying channel 11 is defined between the two wire body conveying belts; similarly, the rear-connection wire-body conveying mechanism 3, the left-connection wire-body conveying mechanism 4, and the right-connection wire-body conveying mechanism 5 each include two wire-body conveying belts, and these wire-body conveying belts are respectively defined as the above-described second conveying passage, third conveying passage, and fourth conveying passage. The application adopts the conveyer belt to convey the substrate 7, the conveyer belt is portable and easy to drive and easy to adjust, and can adaptively adjust the conveying speed as required, such as the width between two line body conveyer belts forming a conveying channel, and the like, so as to adapt to the substrates 7 with different sizes.

As shown in fig. 12, the front-connection wire body conveyance mechanism 1, the rear-connection wire body conveyance mechanism 3, the left-connection wire body conveyance mechanism 4, and the right-connection wire body conveyance mechanism 5 are similar in structure, and the drawings of the present application only show the front-connection wire body conveyance mechanism 1, but the structures of the rear-connection wire body conveyance mechanism 3, the left-connection wire body conveyance mechanism 4, and the right-connection wire body conveyance mechanism 5 can be learned directly from fig. 12; specifically, the front connection wire body conveying mechanism 1, the rear connection wire body conveying mechanism 3, the left connection wire body conveying mechanism 4 and the right connection wire body conveying mechanism 5 all comprise a second machine seat 9, the second machine seat 9 comprises two first supporting frames 91 and two second guide rods 92, the two first supporting frames 91 are arranged in parallel, two guide grooves are also formed in the two first supporting frames 91, two wire body conveying belts forming a conveying channel are arranged on the two first supporting frames 91 in a one-to-one correspondence manner, the two second guide rods 92 are arranged in parallel, two ends of the second guide rods 92 are correspondingly connected in the guide grooves in the same positions of the two first supporting frames 91, and the second guide rods 92 are fixedly connected with the first supporting frames 91 through fasteners, so that the positions between the two first supporting frames 91 can be mutually adjusted, namely, the width between the two wire body conveying belts forming the conveying channel is adjusted, and the substrates 7 with different sizes are adapted.

The fastening pieces of the application are all fixing clamps, handles are arranged on the fixing clamps, and the fixing clamps are used for clamping the guide rods by rotating the handles, or the clamping of the guide rods is released, so that the width between the two first supporting frames 91 is adjusted.

The front connection wire body conveying mechanism 1, the rear connection wire body conveying mechanism 3, the left connection wire body conveying mechanism 4 and the right connection wire body conveying mechanism 5 are respectively provided with a position detection sensor 8 for detecting the position of the substrate 7; typically, the position detection sensors 8 are provided on their respective first support frames 91.

Specifically, the middle connection wire body conveying mechanism 2, the front connection wire body conveying mechanism 1, the rear connection wire body conveying mechanism 3, the left connection wire body conveying mechanism 4 and the right connection wire body conveying mechanism 5 are all arranged on a frame 6, generally, the frame 6 is formed by splicing aluminum profiles and sheet metal parts, and the middle connection wire body conveying mechanism 2, the front connection wire body conveying mechanism 1, the rear connection wire body conveying mechanism 3, the left connection wire body conveying mechanism 4 and the right connection wire body conveying mechanism 5 are all formed by combining aluminum profiles, sheet metal parts and aluminum plates.

It should be noted that references in the specification to "one embodiment," "an example embodiment," "some embodiments," etc., indicate that the embodiment described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.

It should be readily understood that the terms "on … …", "above … …" and "above … …" in this disclosure should be interpreted in the broadest sense so that "on … …" means not only "directly on something" but also includes "on something" with intermediate features or layers therebetween, and "above … …" or "above … …" includes not only the meaning "on something" or "above" but also the meaning "above something" or "above" without intermediate features or layers therebetween (i.e., directly on something).

Further, spatially relative terms, such as "below," "beneath," "above," "over," and the like, may be used herein for ease of description to describe one element or feature's relationship to another element or feature as illustrated. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application.

Claims (10)

1. A substrate moving system comprising a medium transport mechanism;

The middle conveying mechanism comprises a first machine seat, two wire body moving rods, two first wire body conveying belts, a plurality of wire body lifting push rods and a plurality of wire body driving push rods;

the two wire body moving rods are arranged side by side, and the wire body moving rods are arranged on the first base in a sliding manner along the left-right direction;

The two first wire body conveying belts are arranged on the two wire body moving rods in a one-to-one correspondence manner, and the conveying direction of the first wire body conveying belts is the front-back direction;

The wire body lifting push rods are correspondingly arranged on the two wire body moving rods, the wire body lifting push rods are arranged in a sliding mode relative to the wire body moving rods in the up-down direction, and the upper ends of the wire body lifting push rods are arranged on the abutting substrate;

The wire body driving push rods are correspondingly arranged on the two wire body moving rods, the wire body driving push rods are arranged in a sliding mode relative to the wire body moving rods along the up-down direction, and the wire body driving push rods are arranged to drive the base plate to move.

2. The substrate moving system according to claim 1, wherein the two wire moving bars are a first wire moving bar and a second wire moving bar;

The middle conveying mechanism further comprises a first motor, a first screw rod, a second motor and a second screw rod;

the first motor is arranged on the first base;

The first screw rod is rotatably arranged on the first machine base, and the axial direction of the first screw rod is the left-right direction;

The power output end of the first motor is connected with the first screw rod, and the first screw rod is meshed with the first wire body moving rod;

The second motor is arranged on the first base;

the second screw rod is rotatably arranged on the first base, and the axial direction of the second screw rod is the left-right direction;

The power output end of the second motor is connected with the second screw rod, and the second screw rod is meshed and connected with the second wire body moving rod.

3. The substrate movement system of claim 2, wherein the middle conveyor mechanism comprises a plurality of the first lead screws and a plurality of the second lead screws;

The first screw rods are arranged side by side along the front-back direction, and the first screw rods are driven by a driving belt;

The second screw rods are arranged side by side along the front-back direction, and the second screw rods are driven by a driving belt.

4. The substrate moving system according to claim 1, wherein the number of the wire-lifting pushers on two of the wire-moving levers is the same, and the wire-lifting pushers on one of the wire-moving levers are equally spaced.

5. The substrate moving system according to claim 4, wherein the upper end of the wire lifting push rod is provided with a roller.

6. The substrate movement system of claim 1, wherein the middle conveyor mechanism further comprises a plurality of lift cylinders and a plurality of drive cylinders;

The lifting cylinders are correspondingly arranged on the two wire body moving rods, and the power output ends of the lifting cylinders are correspondingly connected with the wire body lifting push rods one by one;

The driving cylinders are correspondingly arranged on the two wire body moving rods, and the power output ends of the driving cylinders are correspondingly connected with the wire body driving push rods one by one.

7. The substrate movement system of claim 1, wherein the first frame comprises two first seat plates and two first guide rods;

the two first seat boards are arranged in parallel, and guide grooves are formed in two ends of each of the two first seat boards;

The two first guide rods are arranged in parallel, two ends of each first guide rod are correspondingly connected in the guide grooves of the two first seat boards, and the first guide rods are in reinforced connection with the first seat boards through fasteners.

8. The substrate moving system according to claim 1, wherein position detection sensors configured to detect a position of the substrate are provided on both the wire moving bars.

9. The substrate moving system according to claim 8, wherein rear ends of both the wire moving rods are provided with a blocking cylinder, a power output end of the blocking cylinder is connected with a baffle plate, and the blocking cylinder is electrically connected with the position detecting sensor.

10. The substrate movement system of claim 1, further comprising a front transport mechanism, a rear transport mechanism, a left transport mechanism, and a right transport mechanism;

The front conveying mechanism is arranged on the front side of the middle conveying mechanism, the rear conveying mechanism is arranged on the rear side of the middle conveying mechanism, the left conveying mechanism is arranged on the left side of the middle conveying mechanism, and the right conveying mechanism is arranged on the right side of the middle conveying mechanism;

The front conveying mechanism is provided with a first conveying channel, and the conveying direction of the first conveying channel is the front-rear direction;

the rear conveying mechanism is provided with a second conveying channel, and the conveying direction of the second conveying channel is the front-rear direction;

the left conveying mechanism is provided with a third conveying channel, and the conveying direction of the third conveying channel is the left-right direction;

the right conveying mechanism is provided with a fourth conveying channel, and the conveying direction of the fourth conveying channel is the left-right direction.