CN221147553U

CN221147553U - Axle center measuring equipment

Info

Publication number: CN221147553U
Application number: CN202323332121.XU
Authority: CN
Inventors: 李玉飞; 张慧; 单冬冬
Original assignee: Beijing Yisheng Precision Semiconductor Co ltd
Current assignee: Beijing Yisheng Precision Semiconductor Co ltd
Priority date: 2023-12-07
Filing date: 2023-12-07
Publication date: 2024-06-14
Anticipated expiration: 2033-12-07

Abstract

The utility model discloses an axle center measuring device, and relates to the technical field of axle center measurement. The axle center measuring apparatus includes: the measuring main board is inserted with an axle center marking needle in the middle part; one end of the side pull rod is fixedly connected with the middle part of the outer wall of the measurement main board, and a clamping block is arranged at the other end of the side pull rod; the spliced pole, the spliced pole sets up the both ends at measuring the mainboard, the one end of spliced pole is provided with the fastener, the spliced pole passes through the fastener to be connected with measuring the mainboard, the spliced pole other end is provided with the bottom plate, the lower surface of bottom plate is provided with the riser. The inner side wall of the clamping block and the two clamping plates are clamped on the outer wall of the tested shaft, the positions of the three points are determined, the axis marking needle can correspond to the axis position, the axis can be accurately and rapidly detected at this time, and the efficiency is high. The positions of the three points are fast clamped, so that the three points are fast positioned, and the axle center marking needle can accurately and fast indicate the axle center of the axle.

Description

Axle center measuring equipment

Technical Field

The utility model relates to the technical field of axle center measurement, in particular to axle center measuring equipment.

Background

In the field of semiconductors, silicon and quartz parts are batch consumables in a dry etching silicon process, and in the production process of brittle materials such as silicon, quartz and the like, grinding treatment is carried out according to the process requirements, wherein grinding equipment comprises a rotating shaft and a grinding disc arranged on the rotating shaft, the axle center of the rotating shaft and the axle center of the grinding disc are required to be detected regularly, and the flatness of the disc surface is ensured to meet the requirements of processed products; because, the surface flatness deviation problem occurs in the measurement of brittle materials such as silicon and quartz after grinding, the disc surface needs to be trimmed to avoid scrapping.

The existing axle center testing tool needs to adopt a plurality of square bars for multiple measurement and calculation to determine the axle center, and is low in efficiency.

Disclosure of utility model

(One) solving the technical problems

Aiming at the defects of the prior art, the utility model provides the axle center measuring equipment, which solves the problem of low measuring efficiency of an axle center testing tool.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme: a shaft center measuring apparatus comprising:

The measuring main board is inserted with an axle center marking needle in the middle part;

one end of the side pull rod is fixedly connected with the middle part of the outer wall of the measurement main board, and a clamping block is arranged at the other end of the side pull rod;

The connecting columns are arranged at two ends of the measuring main board, one end of each connecting column is provided with a fastening piece, each connecting column is connected with the measuring main board through the corresponding fastening piece, the other end of each connecting column is provided with a bottom plate, the lower surface of each bottom plate is provided with a vertical plate, and each vertical plate is connected with a clamping plate through a supporting rod;

When the clamping plates face the axis marking needle, the distance between the two clamping plates is twice the distance between the axis marking needle and the inner side wall of the clamping block.

Preferably, the outer wall of the connecting column is provided with external threads, and the fastener is a butterfly nut screwed on the outer wall of the connecting column.

Preferably, a limit stop is arranged at the edge of one side of the outer wall of the bottom plate, and when the bottom plate is parallel to the measuring main plate, the limit stop is attached to the side wall of the measuring main plate.

Preferably, when the two clamping plates deviate from each other, the distance between the two clamping plates is twice the distance between the axis marking needle and the outer side wall of the clamping block.

Preferably, the end of the axis marking needle is provided with a marking paint layer.

(III) beneficial effects

The utility model provides an axle center measuring device, which is at least provided with the following compared with the prior art

The beneficial effects are that:

1. When the axial center marking needle is used, the inner side wall of the clamping block and the two clamping plates are clamped on the outer wall of the tested shaft, the positions of the three points are determined, the axial center marking needle can correspond to the axial center position, the axial center can be accurately and rapidly detected, and the efficiency is high.

2. The positions of the three points are fast clamped, so that the three points are fast positioned, and the axle center marking needle can accurately and fast indicate the axle center of the axle.

3. The axle center measuring equipment is a preventive measuring tool, the disc surface is cleaned before the operation is started every day, the disc surface measurement is carried out by using the measuring tool, products can be processed within an error range, the disc surface trimming is needed when the products are out of the error range, and the product yield can be effectively controlled and the scrapping loss can be reduced by the method.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic diagram of the side pull rod and the clamping block according to the present utility model;

FIG. 3 is a schematic view of the structure of the connecting post, fastener, bottom plate, limit stop, riser, clamping plate of the present utility model;

FIG. 4 is a schematic view of the structure of the base plate rotated 180 degrees;

FIG. 5 is a schematic view of the measuring axis of the present utility model;

FIG. 6 is a schematic diagram of the measuring structure of the present utility model.

In the figure: 1. measuring a main board; 2. a side pull rod; 3. a clamping block; 4. a connecting column; 5. a fastener; 6. a bottom plate; 7. a limit stop; 8. a vertical plate; 9. a clamping plate; 10. the axis marks the needle.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Embodiment one:

Referring to fig. 1-6, the present utility model provides a technical solution: a shaft center measuring apparatus comprising: the measuring main board 1, the side pull rod 2 and the connecting column 4;

The middle part of measuring mainboard 1 is pegged graft and is had axle center mark needle 10, the one end of side pull rod 2 and the outer wall middle part fixed connection of measuring mainboard 1, the other end of side pull rod 2 is provided with fixture block 3, spliced pole 4 sets up the both ends at measuring mainboard 1, the one end of spliced pole 4 is provided with fastener 5, spliced pole 4 passes through fastener 5 and is connected with measuring mainboard 1, the spliced pole 4 other end is provided with bottom plate 6, the lower surface of bottom plate 6 is provided with riser 8, be connected with grip block 9 through branch on the riser 8, when grip block 9 orientation axle center mark needle 10, two distance between grip block 9 is the twice of the distance between axle center mark needle 10 and the fixture block 3 inside wall.

Analysis of the above: in use, the two clamping plates 9 are adjusted towards each other, and then the fastener 5 is fastened, so that the position between the main measurement plate 1 and the bottom plate 6 is fixed, and the two clamping plates 9 are kept towards each other during the measurement process.

Then the two clamping plates 9 and the inner side walls of the clamping blocks 3 are respectively contacted with the outer wall of the tested shaft (as shown in fig. 5), the two clamping plates 9 and the clamping blocks 3 clamp and fasten the tested shaft, and when the shaft center marking needle 10 is contacted with the tested shaft, the position of the shaft center is the shaft center (the shaft is a cylindrical shaft, and the shafts such as a square shaft directly measure the midpoint of the side and are connected to obtain the shaft center of the square shaft).

Embodiment two:

Referring to fig. 1-6, the present utility model provides a technical solution based on the first embodiment: the outer wall of the connecting column 4 is provided with external threads, and the fastening piece 5 is a butterfly nut screwed on the outer wall of the connecting column 4.

Analysis of the above: when the butterfly nut is screwed with the connecting column 4, the butterfly nut is tightly attached to the outer wall of the measurement main board 1, so that the bottom board 6 is tightly attached to the measurement main board 1, and therefore the bottom board 6 and the measurement main board 1 cannot move relatively (a friction layer can be arranged between the bottom board 6 and the opposite side wall of the measurement main board 1, and anti-skid friction force is increased).

Embodiment III:

Referring to fig. 1-6, the present utility model provides a technical solution based on the first embodiment: the limit stop 7 is disposed at the edge of one side of the outer wall of the bottom plate 6, and when the bottom plate 6 is parallel to the measurement motherboard 1 (as shown in fig. 5 and 6, the bottom plate 6 is disposed along the length direction of the measurement motherboard 1, that is, parallel to the measurement motherboard 1), the limit stop 7 is attached to the side wall of the measurement motherboard 1.

Analysis of the above: the two limit stops 7 are arranged, the two limit stops 7 are positioned at two ends of the edge of one side of the outer wall of the bottom plate 6, and when one limit stop 7 is attached to the side wall of the measurement main plate 1, the two clamping plates 9 are opposite; the bottom plate 6 rotates 180 degrees, and when the other limit stop 7 is attached to the other side wall of the measuring main plate 1, the two clamping plates 9 are opposite.

Embodiment four:

referring to fig. 1-6, the present utility model provides a technical solution based on the first embodiment: when the two clamping plates 9 deviate from each other, the distance between the two clamping plates 9 is twice the distance between the axis marking needle 10 and the outer side wall of the clamping block 3.

Analysis of the above: when the two clamping plates 9 are carried back to back, the inner diameter of the circular ring structure can be measured, as shown in fig. 6, the two clamping plates 9 are supported on the inner wall of the circular ring structure, and meanwhile, the outer side wall of the clamping block 3 is also supported with the inner wall of the circular ring structure, so that the position of the axis marking needle 10 is the axis of the circular ring structure.

Embodiment four:

Referring to fig. 1-6, the present utility model provides a technical solution based on the first embodiment: the end of the axial marker needle 10 is provided with a marker paint layer.

Analysis of the above: the axle center can be marked by the arrangement of the marking paint layer, so that the recording is convenient.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An axis measuring device, comprising:

The measuring main board (1), the middle part of the measuring main board (1) is inserted with an axle center marking needle (10);

The measuring device comprises a side pull rod (2), wherein one end of the side pull rod (2) is fixedly connected with the middle part of the outer wall of the measuring main board (1), and a clamping block (3) is arranged at the other end of the side pull rod (2);

The connecting column (4), connecting column (4) set up the both ends at measuring mainboard (1), the one end of connecting column (4) is provided with fastener (5), connecting column (4) are connected with measuring mainboard (1) through fastener (5), the other end of connecting column (4) is provided with bottom plate (6), the lower surface of bottom plate (6) is provided with riser (8), be connected with grip block (9) through branch on riser (8);

When the clamping plates (9) face the axle center marking needle (10), the distance between the two clamping plates (9) is twice the distance between the axle center marking needle (10) and the inner side wall of the clamping block (3).

2. The axis measurement device of claim 1, wherein: the outer wall of the connecting column (4) is provided with external threads, and the fastening piece (5) is a butterfly nut screwed on the outer wall of the connecting column (4).

3. The axis measurement device of claim 1, wherein: the limit stop (7) is arranged at the edge of one side of the outer wall of the bottom plate (6), and when the bottom plate (6) is parallel to the measurement main board (1), the limit stop (7) is attached to the side wall of the measurement main board (1).

4. The axis measurement device of claim 1, wherein: when the two clamping plates (9) deviate from each other, the distance between the two clamping plates (9) is twice the distance between the axis marking needle (10) and the outer side wall of the clamping block (3).

5. The axis measurement device of claim 1, wherein: the end part of the axle center marking needle (10) is provided with a marking paint layer.