CN221111337U - Defect detection device and magnetorheological polishing equipment - Google Patents
Defect detection device and magnetorheological polishing equipment Download PDFInfo
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- CN221111337U CN221111337U CN202322800352.2U CN202322800352U CN221111337U CN 221111337 U CN221111337 U CN 221111337U CN 202322800352 U CN202322800352 U CN 202322800352U CN 221111337 U CN221111337 U CN 221111337U
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- 230000007547 defect Effects 0.000 title claims abstract description 57
- 238000001514 detection method Methods 0.000 title claims abstract description 56
- 238000005498 polishing Methods 0.000 title claims abstract description 12
- 230000007246 mechanism Effects 0.000 claims abstract description 112
- 230000000007 visual effect Effects 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims description 17
- 238000009434 installation Methods 0.000 claims description 7
- 238000011179 visual inspection Methods 0.000 claims 1
- 239000005304 optical glass Substances 0.000 abstract description 61
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008093 supporting effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Abstract
The utility model discloses a defect detection device and magnetorheological polishing equipment, and relates to the technical field of magnetorheological polishing. The utility model comprises a first translation mechanism, a second translation mechanism, a visual mechanism and a positioning tool, wherein the positioning tool is connected with the first translation mechanism, the visual mechanism is connected with the second translation mechanism, and the first translation mechanism is vertical to the second translation mechanism. According to the utility model, the visual mechanism and the positioning tool are respectively arranged on the first translation mechanism and the second translation mechanism, so that the stroke of the positioning tool for placing the optical glass in the defect detection process is shortened, the moving range of the optical glass is reduced, and the occupied area of the part missing detection device is reduced. And the stroke of location frock is shorter, can reset more fast, through improving reset efficiency to improve defect detection efficiency.
Description
Technical Field
The utility model belongs to the technical field of magnetorheological polishing, and particularly relates to a defect detection device and magnetorheological polishing equipment.
Background
The optical glass is a high-precision optical element, and when the high-precision element is processed, defect detection is required, and the defect position is polished according to the detection result, so that the defect is eliminated.
For optical glass, defects on the surface cannot be observed by naked eyes, and the defects on the surface of the optical glass need to be observed and detected by corresponding observation equipment, for example, the surface of the optical glass is photographed by adopting a camera visual detection mode, and a defect recognition system configured by a camera recognizes the photographed image, so that the defects on the surface of the optical glass are detected. The detection range of the camera is limited, so that the relative position of the camera and the optical glass needs to be adjusted in the detection process, and the camera scans the whole optical glass, thereby achieving the purpose of detecting the whole optical lens.
When the camera and the optical glass relatively move, the camera needs to shoot all positions on the surface of the optical glass, and the optical glass moves in a plane relative to the camera. However, in order to move the optical glass in a plane in a horizontal plane, a movement area of a certain size needs to be reserved for movement of the optical glass. The reserved moving area is generally four times that of the optical glass, so that the camera can fully shoot the optical glass. The large moving area of the optical glass may compress the installation space of other devices, such as a robot for gripping the optical glass, or a feeding end for positioning the optical glass, and the space of other devices may be severely compressed. Therefore, on the one hand, the problem of large moving area and squeezing the installation space of other devices in the defect detection of the optical glass is urgently needed to be solved. On the other hand, the moving area of the optical glass is large, and the stroke required for the next detection after the detection is completed is longer, so that the problem of low detection efficiency of the optical glass is caused.
Disclosure of utility model
The utility model aims to provide a defect detection device and magnetorheological polishing equipment, which are used for solving the problems of large moving area and extrusion of installation space of other equipment during optical glass defect detection and solving the problem of low optical glass detection efficiency.
In order to solve the technical problems, the utility model is realized by the following technical scheme:
The utility model provides a defect detection device and magneto rheological polishing equipment, includes first translation mechanism, second translation mechanism, vision mechanism and location frock, location frock is connected with first translation mechanism, vision mechanism is connected with second translation mechanism, first translation mechanism is mutually perpendicular with second translation mechanism.
In the scheme, the visual mechanism and the positioning tool for fixing the optical glass are respectively arranged on the first translation mechanism and the second translation mechanism, and when detection is carried out, the optical glass only needs to move along the direction of the first translation mechanism, so that the moving range of the optical glass is reduced, the space occupied by the whole device is reduced, and more space is reserved for other equipment. And the travel of the optical glass in the detection process is reduced by reducing the moving area, so that the travel required by returning the positioning tool to the original position is shorter, the detection period is shortened, and the detection efficiency is improved.
For further solving the problem of vision mechanism shooting angle, for this reason, defect detection device still includes the support frame, the support frame set up in first translation mechanism upside, the second translation mechanism with the support frame is connected.
In this scheme, second translation mechanism installation and support frame for second translation structure is located first translation mechanism upside, thereby makes vision mechanism be located the upside of location frock, can from the top down shoot perpendicularly, ensures the steady reliability of shooting the visual angle, thereby ensures the accuracy of shooting result.
For further solving the problem of support frame stability, for this reason, the support frame includes crossbeam and two stands, the both ends of crossbeam are connected with two stands respectively, the second translation mechanism with the crossbeam is connected.
In this scheme, set up two stands and support the crossbeam from both sides to ensure that both ends of crossbeam are all supported, make the position of crossbeam remain stable, thereby make the position of second translation mechanism remain stable.
In order to further solve the problem that the visual mechanism is not comprehensive in shooting range of the optical glass and poor in shooting precision, the first translation mechanism is located between the two upright posts.
In this scheme, two stands are located first translation mechanism both sides respectively, under first translation mechanism and second translation mechanism cooperation, can ensure that vision mechanism can remove to the optical glass optional position directly over, shoot mode from directly over down and shoot optical glass comprehensively to improve shooting accuracy.
For further solving the inaccurate problem of optical glass travel distance, for this reason, first translation mechanism includes servo motor and first lead screw, first lead screw is connected with servo motor transmission, first lead screw with location frock transmission is connected.
In this scheme, servo motor's rotational speed and rotation circle speed can accurate control, and the lead screw structure can ensure that the transmission is accurate, and servo motor and lead screw cooperation can ensure the mobile accuracy of location frock to ensure the precision that the optical glass on the location frock moved.
For further solving the inaccurate problem of vision mechanism travel distance, for this reason, second translation mechanism includes servo motor, slip table and second lead screw, second lead screw is connected with servo motor transmission, second lead screw is connected with the slip table transmission, vision mechanism is connected with the slip table.
In this scheme, servo motor's rotational speed and rotation circle speed can accurate control, and the lead screw structure can ensure that the transmission is accurate, and servo motor and lead screw cooperation can ensure the removal precision of slip table to ensure the precision that visual mechanism removed on the slip table.
In order to further solve the problem that the visual mechanism needs to be eccentrically arranged due to the fact that the visual mechanism needs to be shot right below, so that the gravity of the visual mechanism causes inaccurate shooting angles of the visual mechanism, the second translation mechanism comprises a second guide rail and a third guide rail, and the second guide rail and the third guide rail are respectively arranged on two intersected installation surfaces.
The two guide rails are arranged to support the sliding table from two directions, so that the angle of the sliding table is more accurate, and the angle of the visual mechanism on the sliding table is ensured to be accurate.
In order to further solve the problem that the second guide rail and the third guide rail have poor supporting effect on the sliding table, the two mounting surfaces are mutually perpendicular.
In this scheme, second guide rail and third guide rail support the slip table from two mutually perpendicular directions, have further improved the restriction effect of second guide rail and third guide rail to the slip table to improve the stability of slip table and vision mechanism, ensure that the shooting angle of vision mechanism remains stable.
In order to further solve the problem that the defects on the optical glass are difficult to accurately position, the defect detection device further comprises a controller, wherein the controller is electrically connected with the servo motor, and the controller is electrically connected with the vision mechanism.
In the scheme, the controller is arranged to control the servo motor and the visual mechanism, the controller converts the rotation quantity of the servo motor into the displacement quantity of the optical glass, and when the visual mechanism shoots the defect on the surface of the optical glass, the displacement quantity of the optical glass can be corresponding to the defect, so that the position of the defect is obtained, and the defect can be conveniently positioned and repaired subsequently.
The utility model also provides magnetorheological polishing equipment, which comprises the defect detection device and a frame, wherein the defect detection device is connected with the frame.
In the scheme, the defect detection device is used for detecting the optical glass, so that the space occupied by the defect detection device on the frame can be reduced, and other equipment can be conveniently installed on the frame. And because the stroke of optical glass is short, location frock can reset more fast to improve detection efficiency.
The utility model has the following beneficial effects:
According to the utility model, the visual mechanism and the positioning tool are respectively arranged on the first translation mechanism and the second translation mechanism, so that the stroke of the positioning tool for placing the optical glass in the defect detection process is shortened, the moving range of the optical glass is reduced, and the occupied area of the part missing detection device is reduced. And the stroke of location frock is shorter, can reset more fast, through improving reset efficiency to improve defect detection efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the present utility model, the drawings that are needed for the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a defect detection apparatus;
FIG. 2 is a front view of a defect detection apparatus;
Fig. 3 is a top view of the defect detection apparatus.
In the drawings, the list of components represented by the various numbers is as follows:
1. A first guide rail; 2. a servo motor; 3. a first lead screw; 4. positioning a tool; 5. a column; 6. a cross beam; 7. a sliding table; 8. a second lead screw; 9. a second guide rail; 10. a third guide rail; 11. visual means.
Detailed Description
The technical scheme of the utility model is clearly and completely described by a specific implementation mode of the embodiment of the utility model with the aid of the attached drawings.
Example 1
Referring to fig. 1, a defect detecting device is provided in the first embodiment, and the defect detecting device includes a first translation mechanism, a second translation mechanism, a positioning tool 4 and a vision mechanism 11, wherein the positioning tool 4 is connected with the first translation mechanism, the vision mechanism 11 is connected with the second translation mechanism, and the first translation mechanism is perpendicular to the second translation mechanism. The positioning tool 4 is provided with a positioning groove, the shape of the positioning groove is matched with the shape of a product to be detected, and the positioning groove is used for positioning the product to be detected.
The embodiment is provided with a support frame, and the second translation mechanism is connected with the support frame. The structure of the support frame is in a door shape and comprises two upright posts 5 and a cross beam 6. The first translation mechanism is located the support frame downside of door style of calligraphy structure, two stand 5 are located the both sides of first translation mechanism respectively, make the support frame of door style of calligraphy stride in first translation mechanism upside. The moving direction of the second translation mechanism is parallel to the longitudinal direction of the cross member 6, and therefore, the vision mechanism 11 can move along the longitudinal direction of the cross member 6. The movement of the vision mechanism 11 enables the shooting range of the vision mechanism 11 in the length direction of the cross beam 6 to cover the optical glass, and then the optical glass of the positioning tool 4 can be comprehensively shot by moving the positioning tool 4 in combination with the first translation mechanism.
As shown in fig. 3, the first translation mechanism comprises a first guide rail 1, a first lead screw 3 and a servo motor 2, wherein the first guide rail 1 and the first lead screw 3 are arranged in parallel, and the first lead screw 3 is in transmission connection with the servo motor 2. The bottom of the positioning tool 4 is provided with a first sliding block, and the first sliding block is in sliding connection with the first guide rail 1. The bottom of the positioning tool 4 is provided with a nut pair or a screw hole, and the first screw rod 3 is in transmission connection with the nut pair or the screw hole. When the servo motor 2 drives the first screw rod 3 to rotate, the positioning tool 4 can slide along the length direction of the first guide rail 1. The servo motor 2 is adopted to drive the screw rod, and the rotating speed of the servo motor 2 can be controlled more accurately, so that the moving distance and the moving speed of the positioning tool 4 are controlled more accurately, and the detection precision is improved.
As shown in fig. 2, the second translation mechanism includes a second lead screw 8, a sliding table 7, a second guide rail 9, a third guide rail 10 and a servo motor 2, where the second guide rail 9, the third guide rail 10 and the second lead screw 8 are arranged in parallel, the sliding table 7 is provided with at least two sliding blocks, each sliding block is respectively in sliding connection with the second guide rail 9 and the third guide rail 10, and the second lead screw 8 is in transmission connection with the servo motor 2. The second guide rail 9 and the third guide rail 10 are both connected with the cross beam 6, the second guide rail 9 is arranged on the top surface of the cross beam 6, the third guide rail 10 is arranged on the side surface of the cross beam 6, and the visual mechanism 11 is connected with the sliding table 7. The sliding table 7 is provided with a nut pair or a screw hole, so that the second lead screw 8 is in transmission connection with the sliding table 7. The second guide rail 9 and the third guide rail 10 are arranged to be connected with the sliding table 7, and the second guide rail 9 and the third guide rail 10 are respectively arranged on the two mounting surfaces of the top surface of the cross beam 6 and the side surface of the cross beam 6, so that the sliding table 7 can be supported in two directions, the angle of the sliding table 7 is prevented from deflecting, the change of the shooting angle of the visual mechanism 11 is avoided, and the shooting precision of the visual mechanism 11 is ensured to be accurate and reliable. The second screw rod 8 is driven by the servo motor 2, so that the moving speed and the moving distance of the vision mechanism 11 are accurately controlled.
And the visual mechanism comprises a visual mechanism 11, a servo motor 2 and a controller. The controller controls the rotation of the two servo motors 2, so that the rotation quantity of the two servo motors 2 is converted into coordinates on the optical glass, and when the vision mechanism 11 shoots a defect position, the controller can accurately obtain the position of the defect on the optical glass, so that the defect on the optical glass can be repaired conveniently.
The positioning tool 4 may be a tray provided with a positioning groove.
The vision mechanism 11 may be a camera.
The controller can be a singlechip, a PLC or a PC.
The first lead screw 3 and the second lead screw 8 are in transmission connection with the output shaft of the servo motor 2 through a coupler and also in transmission connection through a gear set. The shaft coupling makes the rotational speed of the first screw rod 3 and the second screw rod 8 the same as that of the servo motor 2, and the gear set can ensure transmission precision, so that the effect of precisely controlling the rotating ring speed and the rotating speed of the first screw rod 3 or the second screw rod 8 can be achieved.
When defect detection is performed, the servo motor 2 drives the first lead screw 3 to rotate, so that the positioning tool 4 moves along the first guide rail 1 for a fixed distance. After the first screw rod 3 stops rotating, the second screw rod 8 is driven to rotate by the other servo motor 2, so that the sliding table 7 provided with the vision mechanism 11 moves along the second guide rail 9 for a fixed distance, and the optical glass is photographed from the direction of the second guide rail 9. When the slide table 7 moves, the vision mechanism 11 moves from one side to the other side of the optical glass. Then the first lead screw 3 rotates again to enable the positioning tool 4 to move a fixed distance again, and after the rotation of the first lead screw 3 is stopped, the second lead screw 8 rotates reversely to enable the vision mechanism 11 to move again to shoot the optical glass. So reciprocating, can carry out comprehensive shooting to optical glass to detect on the defect on optical glass surface comprehensively. In the detection process, the optical glass only moves along the direction of the first guide rail 1, and the moving distance is the same as the dimension of the optical glass in the direction of the first guide rail 1, so that the visual mechanism 11 can comprehensively shoot the surface of the optical glass. Therefore, the optical glass only moves along one direction in the detection process, the moving area of the optical glass can comprehensively detect the surface defects of the optical glass, the moving range of the optical glass is small, the occupied space is small, and the installation of other matched equipment is facilitated.
In this embodiment, the first translation mechanism and the second translation mechanism are mounted independently, respectively, and the first translation mechanism and the second translation mechanism are prevented from being mounted in an overlapping manner to reduce the accuracy. For example, when the first translation mechanism is disposed on the sliding table 7, an error between the first translation mechanism and the second translation mechanism is enlarged, which results in a decrease in accuracy of the photographing angle of the vision mechanism 11, so that an actual defect position does not correspond to a detected defect position, and a repair position dislocation is caused, which results in a problem of incomplete repair or damage to the optical glass. While the embodiment has the first translation mechanism and the second translation mechanism separately provided, the detection accuracy of the vision mechanism 11 can be ensured, thereby solving the above-described problem.
Example two
The second embodiment provides a magnetorheological polishing device, which comprises the defect detection device of the first embodiment, wherein the defect detection device is used for detecting optical glass, and the magnetorheological polishing device further comprises a frame, and the defect detection device is connected with the frame.
The bottom of the upright post 5 is fixedly connected with the frame through a fastener.
The first guide rail 1 and the first screw rod 3 are both connected with the frame.
The optical glass in the first and second embodiments may be precision elements such as semiconductor wafers and aerospace packaging workpieces.
Claims (10)
1. A defect detection apparatus, characterized in that: the positioning tool (4) is connected with the first translation mechanism, the visual mechanism (11) is connected with the second translation mechanism, and the first translation mechanism is perpendicular to the second translation mechanism.
2. The defect detection apparatus of claim 1, wherein: still include the support frame, the support frame set up in first translation mechanism upside, the second translation mechanism with the support frame is connected.
3. A defect detection apparatus according to claim 2, wherein: the support frame comprises a cross beam (6) and two upright posts (5), two ends of the cross beam (6) are respectively connected with the two upright posts (5), and the second translation mechanism is connected with the cross beam (6).
4. A defect detection apparatus according to claim 3, wherein: the first translation mechanism is positioned between the two upright posts (5).
5. The defect detection apparatus of claim 1, wherein: the first translation mechanism comprises a servo motor (2) and a first lead screw (3), the first lead screw (3) is in transmission connection with the servo motor (2), and the first lead screw (3) is in transmission connection with the positioning tool (4).
6. The defect detection apparatus of claim 1, wherein: the second translation mechanism comprises a servo motor (2), a sliding table (7) and a second lead screw (8), wherein the second lead screw (8) is in transmission connection with the servo motor (2), the second lead screw (8) is in transmission connection with the sliding table (7), and the vision mechanism (11) is connected with the sliding table (7).
7. The defect detection apparatus of claim 1, wherein: the second translation mechanism comprises a second guide rail (9) and a third guide rail (10), and the second guide rail (9) and the third guide rail (10) are respectively arranged on two intersected installation surfaces.
8. The defect detection apparatus of claim 7, wherein: the two mounting surfaces are perpendicular to each other.
9. A defect detection apparatus according to claim 5 or 6, wherein: the visual inspection device also comprises a controller, wherein the controller is electrically connected with the servo motor (2), and the controller is electrically connected with the visual mechanism (11).
10. A magnetorheological polishing device, characterized in that: comprising a defect detection apparatus according to any of claims 1-9, further comprising a frame, said defect detection apparatus being connected to said frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322800352.2U CN221111337U (en) | 2023-10-17 | 2023-10-17 | Defect detection device and magnetorheological polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322800352.2U CN221111337U (en) | 2023-10-17 | 2023-10-17 | Defect detection device and magnetorheological polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221111337U true CN221111337U (en) | 2024-06-11 |
Family
ID=91362330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322800352.2U Active CN221111337U (en) | 2023-10-17 | 2023-10-17 | Defect detection device and magnetorheological polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221111337U (en) |
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2023
- 2023-10-17 CN CN202322800352.2U patent/CN221111337U/en active Active
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