CN221079967U - Feeding and discharging mechanism - Google Patents
Feeding and discharging mechanism Download PDFInfo
- Publication number
- CN221079967U CN221079967U CN202322793061.5U CN202322793061U CN221079967U CN 221079967 U CN221079967 U CN 221079967U CN 202322793061 U CN202322793061 U CN 202322793061U CN 221079967 U CN221079967 U CN 221079967U
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- Prior art keywords
- loading
- guide
- plate
- clamping
- unloading mechanism
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- 230000007246 mechanism Effects 0.000 title claims abstract description 28
- 238000007599 discharging Methods 0.000 title claims description 9
- 230000000712 assembly Effects 0.000 claims description 9
- 238000000429 assembly Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 27
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the field of automatic production, in particular to a loading and unloading mechanism. The embodiment of the utility model provides a loading and unloading mechanism, which comprises: the movable plate is provided with a plurality of placing stations; and one side of one placing station is provided with a correction component. After the slice basket is placed at the placing station, the movable end of the correcting component pushes the slice basket so as to enable the slice basket to be aligned. Through setting up the correction subassembly, after placing the slice basket, reciprocating motion is a duty cycle to placing the station, pushes away the slice basket that does not put the off-set to the pendulum to avoid the holder to press from both sides and take the collision when wafer.
Description
Technical Field
The utility model relates to the field of automatic production, in particular to a loading and unloading mechanism.
Background
In a loading and unloading mechanism of semiconductor process equipment, a device is often required to adapt to different process demands to convert wafers on different wafer baskets, and a common guide device often cannot place the wafer baskets due to the problem of a mechanism device, so that the wafer baskets are turned over when the guide is performed, the problem of wafer loss caused by irreversible breakage is caused, a top wafer holder collides when the wafer is clamped, and the wafer is contacted with the bottom of a groove in a point contact mode due to the fact that the bottom of the groove is in a plane step shape, so that acting force is concentrated, and unexpected impact can be generated on the wafer when the wafer is rocked or moved, and breakage is easy to cause. Therefore, it is necessary to design a loading and unloading mechanism.
Disclosure of utility model
The utility model aims to provide a loading and unloading mechanism so as to solve the problems.
In order to achieve the above object, an embodiment of the present utility model provides a feeding and discharging mechanism, including: the movable plate is provided with a plurality of placing stations; and
One side of one placing station is provided with a correction component; wherein the method comprises the steps of
After the slice basket is placed at the placing station, the movable end of the correcting component pushes the slice basket so as to enable the slice basket to be aligned.
Further, the correction component comprises a driving piece and a pushing plate, wherein the movable end of the driving piece is connected with the pushing plate, and the pushing plate corresponds to the placing station.
Further, the driving piece is a driving cylinder.
Further, a plurality of guide components are arranged on the movable plate, and one guide component corresponds to one placing station;
The guide assembly comprises a plurality of guide blocks which are circumferentially arranged along the placement station.
Further, the number of the guide blocks is four, and the four guide blocks are respectively arranged at four corners of the placing station.
Further, the guide block is L-shaped, and a first guide inclined plane and a second guide inclined plane are respectively formed on two inner side walls of the guide block facing the placing station.
Further, the feeding and discharging mechanism further comprises a supporting frame, two clamping assemblies are rotatably arranged on the supporting frame, a linkage assembly is further arranged on one side of the supporting frame, and movable ends of the linkage assembly are respectively in transmission connection with the two clamping assemblies; wherein the method comprises the steps of
The linkage assembly is suitable for driving the two clamping assemblies to synchronously rotate in opposite directions or in opposite directions.
Further, the linkage assembly comprises a linkage cylinder, a hinged plate, a connecting rod and a rotating plate, wherein the linkage cylinder is arranged on the support frame, and the center of the hinged plate is connected with the end part of any clamping assembly;
Two ends of the hinged plate are respectively connected with the movable end of the linkage cylinder and one end of the connecting rod;
One end of the rotating plate is connected with a clamping assembly far away from one end of the hinged plate, and the other end of the rotating plate is connected with one end of the connecting rod far away from the hinged plate.
Further, the clamping assembly comprises a rotating shaft and a plurality of clamping blocks arranged on the rotating shaft, and two ends of the rotating shaft are rotatably connected with the supporting frame.
Further, a plurality of clamping notches are uniformly formed in the side, facing the placing station, of the clamping block along the length direction.
Compared with the prior art, the embodiment of the utility model has the following beneficial effects: through setting up the correction subassembly, after placing the slice basket, reciprocating motion is a duty cycle to placing the station, pushes away the slice basket that does not put the off-set to the pendulum to avoid the holder to press from both sides and take the collision when wafer.
Drawings
The utility model will be further described with reference to the drawings and examples.
Fig. 1 shows a perspective view of the loading and unloading mechanism of the present utility model;
FIG. 2 shows an enlarged partial view of portion A of FIG. 1;
FIG. 3 shows a partial enlarged view of portion B of FIG. 1;
Fig. 4 shows a partial enlarged view of the portion C in fig. 1.
In the figure:
1. A movable plate; 11. A support frame;
2. A correction assembly; 21. A pushing plate; 22. A driving cylinder;
3. A guide block; 31. A first guide slope; 32. A second guide slope;
4. A clamping assembly; 41. a rotating shaft; 42. a clamping block; 421. a clamping notch;
5. a linkage assembly; 51. a linkage cylinder; 52. a hinged plate; 53. a connecting rod; 54. and rotating the plate.
Detailed Description
The utility model will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic representations which merely illustrate the basic structure of the utility model and therefore show only the structures which are relevant to the utility model.
Embodiment 1, as shown in fig. 1-4, the embodiment of the utility model provides a feeding and discharging mechanism, which comprises: the movable plate 1 is provided with a plurality of placing stations. And a correction component 2 is arranged on one side of a placement station; after the slice basket is placed in the placing station, the movable end of the correcting component 2 pushes the slice basket so as to enable the slice basket to be righted; the placing station is matched with the size of the slice basket, so that the slice basket can be stably placed. Placing the wafer in the slice basket, through setting up correction component 2, after placing the slice basket, to placing station reciprocating motion work cycle, with the slice basket top pushing that does not put off the balance to putting to avoid the holder to press from both sides and take the collision when the wafer, thereby reduced the breakage rate of wafer and reduced the damage cost.
The correction component 2 comprises a driving piece and a pushing plate 21, wherein the movable end of the driving piece is connected with the pushing plate 21, and the pushing plate 21 corresponds to the placing station. The movable end of the driving piece can push the pushing plate 21 when moving, and the pushing plate 21 can push and then align the non-aligned slice basket.
The driving member is preferably a driving cylinder 22. The driving cylinder 22 is stable in structure and quick in response, and after the slice basket is placed on the placing station, the piston rod of the driving cylinder 22 can rapidly push the pushing plate 21, so that the working efficiency is improved.
A plurality of guide components are further arranged on the movable plate 1, and one guide component corresponds to one placing station; the guide assembly can support four corners of the bottom of the slice basket, and the slice basket is guided to be placed at the correct position.
The guide assembly comprises a plurality of guide blocks 3, and the guide blocks 3 are circumferentially arranged along the placement station; the guide blocks 3 can guide the slice basket and support the four corners of the bottom of the slice basket, so that the slice basket is prevented from shaking.
The number of the guide blocks 3 is four, and the four guide blocks 3 are respectively arranged at four corners of the placing station; the positions of the guide blocks 3 correspond to the positions of the four corners of the slice basket.
The guide block 3 is L-shaped, and a first guide inclined surface 31 and a second guide inclined surface 32 are respectively arranged on two inner side walls of the guide block 3 facing the placing station; when the pushing plate 21 pushes the slice basket, the first guide surface and the second guide surface can guide the four corners of the slice basket to be attached to the inner wall of the bottom of the guide block 3, so that the slice basket is placed at the correct position.
The feeding and discharging mechanism further comprises a supporting frame 11, two clamping assemblies 4 are rotatably arranged on the supporting frame 11, a linkage assembly 5 is further arranged on one side of the supporting frame 11, and movable ends of the linkage assembly 5 are respectively in transmission connection with the two clamping assemblies 4; wherein the linkage assembly 5 is suitable for driving the two clamping assemblies 4 to synchronously rotate in opposite directions or in opposite directions; after the wafer basket for placing the wafer is placed at the placing station, a pushing device is arranged at the bottom of the placing station to push the wafer basket to rise; the linkage assembly 5 can clamp the wafer when driving the clamping assembly 4 to synchronously move in opposite directions; the linkage assembly 5 can loosen the wafer to be placed in the wafer basket when driving the clamping assembly 4 to synchronously move away from each other.
The linkage assembly 5 comprises a linkage cylinder 51, a hinged plate 52, a connecting rod 53 and a rotating plate 54, wherein the linkage cylinder 51 is arranged on the supporting frame 11, and the center of the hinged plate 52 is connected with the end part of any clamping assembly 4; two ends of the hinged plate 52 are respectively connected with the movable end of the linkage cylinder 51 and one end of the connecting rod 53; one end of the rotating plate 54 is connected with the clamping assembly 4 at the end far away from the hinge plate 52, and the other end is connected with the end of the connecting rod 53 far away from the hinge plate 52; the supporting frame 11 can firmly install the linkage air cylinder 51, when a wafer needs to be clamped, the movable end of the linkage air cylinder 51 contracts, and the hinged plate 52 rotates anticlockwise so as to drive the clamping assembly 4 to rotate anticlockwise; the hinge plate 52 rotates anticlockwise, and the connecting rod 53 drives the rotating plate 54 to rotate clockwise so as to drive the clamping assembly 4 far away from one end of the hinge plate 52 to rotate clockwise; the clamping assembly 4 moves in opposite directions so as to clamp the wafer; when the movable end of the linkage cylinder 51 pushes forward, the clamping assembly 4 is driven to move in a direction away from each other, so that the wafer is released.
The clamping assembly 4 comprises a rotating shaft 41 and a plurality of clamping blocks 42 arranged on the rotating shaft 41, and two ends of the rotating shaft 41 are rotatably connected with the supporting frame 11; the rotation shaft 41 drives the clamping block 42 to rotate when rotating.
A plurality of clamping notches 421 are uniformly formed in the side, facing the placement station, of the clamping block 42 along the length direction; the width of the clamping notch 421 is adapted to the thickness of the wafer, and when the clamping block 42 is close to the wafer, the clamping notch 421 can firmly clamp the wafer, so as to prevent the wafer from shaking.
It should be noted that technical features such as other components of the feeding and discharging mechanism related to the present utility model application should be regarded as the prior art, and specific structures, working principles, control modes and spatial arrangement modes possibly related to the technical features should be selected conventionally in the art, and should not be regarded as the utility model point of the present utility model patent, which is not further specifically expanded and detailed.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. Feeding and discharging mechanism, its characterized in that includes:
The movable plate (1) is provided with a plurality of placing stations; and
One side of a placing station is provided with a correction component (2); wherein the method comprises the steps of
After the slice basket is placed at the placing station, the movable end of the correcting component (2) pushes the slice basket so as to enable the slice basket to be righted.
2. The loading and unloading mechanism of claim 1, wherein,
The correction assembly (2) comprises a driving piece and a pushing plate (21), wherein the movable end of the driving piece is connected with the pushing plate (21), and the pushing plate (21) corresponds to the placing station.
3. The loading and unloading mechanism of claim 2, wherein,
The driving member is a driving cylinder (22).
4. The loading and unloading mechanism of claim 1, wherein,
A plurality of guide components are further arranged on the movable plate (1), and one guide component corresponds to one placing station;
The guide assembly comprises a plurality of guide blocks (3), and the guide blocks (3) are circumferentially arranged along the placement station.
5. The loading and unloading mechanism of claim 4, wherein,
The number of the guide blocks (3) is four, and the four guide blocks (3) are respectively arranged at four corners of the placing station.
6. The loading and unloading mechanism of claim 4, wherein,
The guide block (3) is L-shaped, and a first guide inclined plane (31) and a second guide inclined plane (32) are respectively arranged on two inner side walls of the guide block (3) facing the placing station.
7. The loading and unloading mechanism of claim 1, wherein,
The feeding and discharging mechanism further comprises a supporting frame (11), two clamping assemblies (4) are rotatably arranged on the supporting frame (11), a linkage assembly (5) is further arranged on one side of the supporting frame (11), and movable ends of the linkage assembly (5) are respectively in transmission connection with the two clamping assemblies (4); wherein the method comprises the steps of
The linkage assembly (5) is suitable for driving the two clamping assemblies (4) to synchronously rotate in opposite directions or in opposite directions.
8. The loading and unloading mechanism of claim 7, wherein,
The linkage assembly (5) comprises a linkage cylinder (51), a hinge plate (52), a connecting rod (53) and a rotating plate (54), wherein the linkage cylinder (51) is arranged on the support frame (11), and the center of the hinge plate (52) is connected with the end part of any clamping assembly (4);
Two ends of the hinged plate (52) are respectively connected with the movable end of the linkage cylinder (51) and one end of the connecting rod (53);
one end of the rotating plate (54) is connected with the clamping component (4) at one end far away from the hinge plate (52), and the other end of the rotating plate is connected with one end of the connecting rod (53) far away from the hinge plate (52).
9. The loading and unloading mechanism of claim 8, wherein,
The clamping assembly (4) comprises a rotating shaft (41) and a plurality of clamping blocks (42) arranged on the rotating shaft (41), and two ends of the rotating shaft (41) are rotatably connected with the supporting frame (11).
10. The loading and unloading mechanism of claim 9, wherein the loading and unloading mechanism comprises a plurality of loading and unloading mechanisms,
And a plurality of clamping notches (421) are uniformly formed in one side, facing the placing station, of the clamping block (42) along the length direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322793061.5U CN221079967U (en) | 2023-10-18 | 2023-10-18 | Feeding and discharging mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322793061.5U CN221079967U (en) | 2023-10-18 | 2023-10-18 | Feeding and discharging mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221079967U true CN221079967U (en) | 2024-06-04 |
Family
ID=91267315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322793061.5U Active CN221079967U (en) | 2023-10-18 | 2023-10-18 | Feeding and discharging mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221079967U (en) |
-
2023
- 2023-10-18 CN CN202322793061.5U patent/CN221079967U/en active Active
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