CN221069485U - Automatic pressure maintaining device for pure water tank nitrogen - Google Patents
Automatic pressure maintaining device for pure water tank nitrogen Download PDFInfo
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- CN221069485U CN221069485U CN202322187534.7U CN202322187534U CN221069485U CN 221069485 U CN221069485 U CN 221069485U CN 202322187534 U CN202322187534 U CN 202322187534U CN 221069485 U CN221069485 U CN 221069485U
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- air
- pure water
- water tank
- nitrogen
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 105
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 52
- 239000007789 gas Substances 0.000 claims abstract description 67
- 238000012423 maintenance Methods 0.000 claims description 4
- 102100026205 1-phosphatidylinositol 4,5-bisphosphate phosphodiesterase gamma-1 Human genes 0.000 abstract description 4
- 101000691599 Homo sapiens 1-phosphatidylinositol 4,5-bisphosphate phosphodiesterase gamma-1 Proteins 0.000 abstract description 4
- 238000007599 discharging Methods 0.000 abstract description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- -1 and particularly Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The nitrogen automatic pressure maintaining device of the pure water tank comprises a PLC controller, a touch screen, an air pressure sensor, an air flow meter and an air circuit electromagnetic valve; the output of the air pressure sensor is connected with the input end of the PLC, the PLC is in touch screen, three paths of nitrogen input air paths are arranged and connected to the pure water tank, first to third air path electromagnetic valves are respectively arranged on the three paths of nitrogen input air paths, the output of the PLC1 is respectively connected with the first to third air path electromagnetic valves, the three paths of nitrogen input air paths are parallel classification flow air paths, and each path of classification flow air paths is connected with an air flowmeter in series to obtain positive pressure nitrogen in the pure water tank. The PL1C controller obtains positive pressure nitrogen in the pure water tank by controlling different first to third gas circuit solenoid valves. The PLC controls the gas circuit solenoid valve switch, the one-way valve plays a role in discharging the pressure in the tank by overpressure, and the gas flowmeter displays the gas flow in working.
Description
Technical Field
The utility model relates to the field of semiconductor manufacturing equipment, in particular to a control device for nitrogen pressure maintaining of a pure water tank.
Background
The nitrogen pressure maintaining system of the traditional pure water storage tank is automatically controlled by a machine, and has the problems of poor control accuracy, low reliability and serious nitrogen waste.
The utility model is suitable for a pure water tank nitrogen pressure maintaining system, adopts multiple paths of gases to be input into the pure water tank at different flow rates, inputs nitrogen at different flow rates according to the gas pressure requirement of the nitrogen tank, has small equipment investment and high reliability, and saves nitrogen.
The production of chips requires high purity of pure water, and particularly, air isolation is required during use and storage, and nitrogen with certain pressure is required for air isolation.
Disclosure of Invention
The utility model aims to provide a control system for nitrogen pressure maintaining of a pure water tank, which can provide safe and reliable positive pressure nitrogen for the pure water tank, prevent air from entering, pollute pure water, and has the advantages of small investment, safety and reliability, and especially saves the consumption of nitrogen.
The utility model aims at realizing the following technical scheme that the control system for the nitrogen pressure maintaining of the pure water tank comprises a PLC controller, a touch screen, a gas pressure sensor, a gas flowmeter and a gas circuit electromagnetic valve; the output of the air pressure sensor is connected with the input end of the PLC, the PLC is in touch screen, three nitrogen input air paths are connected to the pure water tank, the first to third air path electromagnetic valves 9, 10 and 11 are respectively arranged on the three nitrogen input air paths, the output of the PLC1 is respectively connected with the first to third air path electromagnetic valves 9, 10 and 11, the three nitrogen input air paths are parallel classified flow air paths, and each classified flow air path is connected with an air flowmeter in series to obtain positive pressure nitrogen in the pure water tank. The PLC controller obtains positive pressure nitrogen in the pure water tank by controlling different first to third air path electromagnetic valves 9, 10 and 11. The PLC controls the gas circuit solenoid valves with different flow rates through the pressure sensor to control the amount of nitrogen flowing into the pure water tank, and ensures that the pure water tank always keeps positive pressure of nitrogen.
The PLC controls the gas circuit electromagnetic valves with different flow through the pressure sensor to control the amount of nitrogen flowing into the pure water tank;
the gas flowmeter and the pure water tank are provided with a one-way valve and a pressure alarm.
The three paths of nitrogen gas input gas paths are respectively connected in series with the first to third gas flow meters, and the maximum measuring range of the first gas flow meter is larger than the maximum output pure water flow of the pure water tank. The second gas meter has a measurement range that is half the gas flow rate of the first gas meter and the third gas meter has a minimum maintenance flow rate.
The pressure sensor 3 measures the nitrogen pressure in the pure water tank and transmits an analog quantity or a digital signal to the PLC1.
The three nitrogen input gas paths are parallel classified flow gas paths, each classified flow gas path is connected with a gas flowmeter in series, and the pure water tank is provided with a gas pressure sensor and an exhaust one-way valve to obtain positive pressure nitrogen in the pure water tank.
A unidirectional exhaust valve and a pressure alarm are arranged on the pure water tank; the exhaust one-way valve is a safety valve, and can relieve pressure and ensure safety when in overpressure; the gas circuit solenoid valves 9, 10 and 11 are stop valves, and the flow control gas circuit solenoid valves are not adopted, so that the cost is reduced.
The beneficial effects are that: compared with the prior art, the PLC controls the gas circuit electromagnetic valve switch, the state display and the alarm, the air pressure sensor detects the pressure in the tank, the one-way valve plays a role in discharging the pressure in the tank by overpressure, and the air flowmeter displays the air flow during working. The consumption of nitrogen is small, and the pure water tank can always keep positive pressure. The utility model has the advantages that: the utility model has simple structure, self-adjusting pure water tank pressure in full-automatic working state, safety, reliability, small investment and nitrogen saving.
Drawings
FIG. 1 is a schematic diagram of the connection of the modules of the present utility model;
The reference numerals in the figures illustrate: 1. A PLC controller; 2. a touch screen; 3. a pressure sensor; 4. a pure water tank; 5. a one-way exhaust valve; 6. a first (large) gas flow meter; 7. A second (medium) gas flow meter; 8. A third (small) gas flow meter; 9. a gas circuit electromagnetic valve; 10. a gas circuit electromagnetic valve; 11. a gas circuit electromagnetic valve; 12. a nitrogen pressure reducing valve; 13. a nitrogen source; 14. a pressure alarm.
Detailed Description
The utility model will now be described in detail with reference to the drawings and the accompanying specific examples.
Embodiment 1 comprises a PLC controller 1, a touch screen 2, a pressure sensor 3, a pure water tank 4, a one-way exhaust valve 5, a large gas flow meter 6, a medium gas flow meter 7, small gas flow meters 8 and 9, first to third gas path electromagnetic valves 9, 10 and 11, a nitrogen pressure reducing valve 12, a nitrogen source 13 and a pressure alarm 14. The pressure sensor 03 is used as an input signal of the PLC controller 01, the air circuit solenoid valves 9, 10 and 11 of the flow meters 6, 7 and 8 are used as outputs, the PLC controls the action of the air circuit solenoid valves through the change of pressure, and the one-way exhaust valve 5 is used for exhausting outwards when the pressure is larger than a certain value under the condition that the water inflow of the pure water tank is larger than the water outflow. The software of the PLC is internally provided with high, medium and low pressure values, and when the pressure is higher than the upper limit value and lower than the lower limit value, the PLC can give an alarm. The pressure sensor adopts digital output integration, the measuring range is 0.5MPa, and the pressure sensor is directly output to the PLC digital input end.
The PLC divides the pressure in the pure water tank into three level limits of high, medium and low, the gas flowmeter also divides into three flow levels of large, medium and small, when the pressure in the pure water tank is higher than the upper limit value, the gas circuit electromagnetic valves 9, 10 and 11 of the three gas flowmeter are all closed, and when the pressure is higher than the upper limit value by 10%, the check valve safety valve is opened to discharge redundant nitrogen; when the pressure in the pure water tank is lower than the middle limit value, the signal of the pressure sensor 3 can be output to the analog or digital end of the PLC input end, and the gas circuit electromagnetic valve of the small gas flowmeter is opened; when the pressure of nitrogen in the pure water tank is lower than the low limit value, the gas circuit solenoid valves 9, 10 and 11 of the large, medium and small gas flow meters are all opened, and when the pressure is higher than the medium limit value, the gas circuit solenoid valves are all closed. When the pressure in the pure water tank is higher than the high limit value or lower than the low limit value, the pressure alarm gives an alarm.
The PLC controller adopts Siemens S7-200, the touch screen adopts Weilon 8 inch screen, the large gas flow meter adopts 100L/min, the medium gas flow meter adopts 50L/min, and the small gas flow meter adopts 10L/min. The three paths of nitrogen input gas paths are respectively connected in series with the first to third gas flow meters, and the maximum measuring range of the first gas flow meter is larger than the maximum output pure water flow of the pure water tank; the second gas flow meter has a range of half the gas flow rate of the first gas flow meter and the third gas flow meter has a range of minimum maintenance flow rate.
The pressure sensor 3 measures the nitrogen pressure in the pure water tank and transmits an analog quantity or a digital signal to the PLC1.
The pure water tank is provided with a unidirectional exhaust valve and a pressure alarm. The one-way exhaust valve 5 discharges the nitrogen into the air when the nitrogen pressure in the pure water tank is larger than the upper limit value.
The maximum range of the gas flow meter 6 is larger than the maximum output pure water flow rate of the pure water tank. The gas flow meter 7 is half the range of the gas flow 6 and the gas flow meter 8 is the minimum maintenance flow.
The pressure alarm 14 gives an alarm when the pressure in the pure water tank is lower than the minimum set value, and stops the pure water output.
The specific operating system process is as follows:
a. And (3) turning on a power supply and inputting the numerical values of high, medium and low pressures on the touch screen.
B. Clicking on the start button on the touch screen, the system begins uninterrupted operation.
The foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.
Claims (3)
1. The nitrogen automatic pressure maintaining device of the pure water tank is characterized by comprising a PLC controller, a touch screen, an air pressure sensor, an air flow meter and an air circuit electromagnetic valve; the output of the air pressure sensor is connected with the input end of the PLC, the PLC is in contact with the touch screen, three nitrogen input air paths are connected to the pure water tank, the first to third air path electromagnetic valves are respectively arranged on the three nitrogen input air paths, the output of the PLC is respectively connected with the first to third air path electromagnetic valves (9, 10 and 11), the three nitrogen input air paths are parallel graded flow air paths, and each graded flow air path is connected with an air flowmeter in series to obtain positive pressure nitrogen in the pure water tank; the PLC controller obtains positive pressure nitrogen in the pure water tank by controlling different first to third gas circuit solenoid valves.
2. The nitrogen automatic pressure maintaining device of a pure water tank according to claim 1, wherein the pure water tank is provided with a one-way exhaust valve and a pressure alarm.
3. The nitrogen automatic pressure maintaining device of a pure water tank according to claim 1, wherein: the three paths of nitrogen input gas paths are respectively connected in series with the first to third gas flow meters, and the maximum measuring range of the first gas flow meter is larger than the maximum output pure water flow of the pure water tank; the second gas flow meter has a range of half the gas flow rate of the first gas flow meter and the third gas flow meter has a range of minimum maintenance flow rate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322187534.7U CN221069485U (en) | 2023-08-15 | 2023-08-15 | Automatic pressure maintaining device for pure water tank nitrogen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322187534.7U CN221069485U (en) | 2023-08-15 | 2023-08-15 | Automatic pressure maintaining device for pure water tank nitrogen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221069485U true CN221069485U (en) | 2024-06-04 |
Family
ID=91260870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322187534.7U Active CN221069485U (en) | 2023-08-15 | 2023-08-15 | Automatic pressure maintaining device for pure water tank nitrogen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221069485U (en) |
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2023
- 2023-08-15 CN CN202322187534.7U patent/CN221069485U/en active Active
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