CN204494089U - A kind of air feed switching device - Google Patents
A kind of air feed switching device Download PDFInfo
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- CN204494089U CN204494089U CN201520162666.7U CN201520162666U CN204494089U CN 204494089 U CN204494089 U CN 204494089U CN 201520162666 U CN201520162666 U CN 201520162666U CN 204494089 U CN204494089 U CN 204494089U
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Abstract
The utility model relates to gas conveying technology field, particularly relates to a kind of air feed switching device.Air feed switching device comprises at least two gas tanks in parallel, detects the pressure-detecting device of each gas tank pressure respectively, connect with pressure-detecting device signal and the first controller that each gas tank break-make switches can be controlled, also comprise and export the purity detecting device of the purity of gas for detecting each gas tank and can control the second controller of each gas tank break-make switching, purity detecting device and second controller signal are connected.To pressure and purity independent detection, carry out accordingly turning off and switch.A detected pressures in prior art, the purity of high-pressure gas is substantially qualified, and the factor such as temperature can build-up of pressure fluctuation, then detecting has error, improves pressure index with what ensure purity simultaneously and arranges waste acceptable gas.The utility model improves acceptable gas utilization ratio, reduces and use gas cost, improves acceptable gas supply accuracy.
Description
Technical field
The utility model relates to gas conveying technology field, particularly relates to a kind of air feed switching device.
Background technique
Along with the propelling of China's process of industrialization, various equipment is continued to optimize structure to adapt to the demand of the aspect such as energy-conservation.Wherein in gas transportation facilities, need to use air feed switching device.
In recent years, for in multichannel air supply system, carry out in the switching device between different passage according to source of the gas setting index, utilize to reach energy-conserving and environment-protective and cost-saving substantially to gas can be utilized, and provide acceptable gas more and more higher for the requirement of the aspects such as use exactly, therefore, according to gas performance index, acceptable gas is utilized substantially, cost-saving with provide acceptable gas etc. to become design object exactly.
In prior art, often utilize electronics special gas storage tank to carry out in parallel with many gas cylinders, in gas cylinder, store the stand-by gas with certain pressure and purity, stand-by gas can be certain special gas, so-called special gas, refers to that some has special purposes and price gas costly, such as germane.Purity is the content of special gas in certain volume, owing to there is a certain amount of impurity in gas tank, when air pressure reduces, export gas purity decline thereupon.Electronics special gas storage tank is monitored the air pressure in each gas cylinder, when the force value of certain the tank gas in just using is lower than setting value, electronics special gas storage tank carries out gas cylinder switching according to the atmospheric pressure value detected, another bottle of stand-by gas cylinder is connected to continue to provide special gas, and close the gas cylinder of last bottle air pressure lower than typical set value, this gas cylinder being convenient to this to finish using is changed, and has the stand-by state of new full bottle to maintain this pipeline access port.
And in the vibrational power flow of above-mentioned electronics special gas storage tank, each gas cylinder be connected with electronics special gas storage tank by electronics special gas storage tank the index of monitoring be only storage pressure, for the gas cylinder under air-tight state, its internal pressure variation with temperature and changing, for the temperature difference of different geographical, particularly the temperature contrast of Various Seasonal is remarkable, and whether this makes single special gas judged in gas cylinder with storage pressure fully be used this technique set-up mode to have narrow limitation.The first, according to production procedure user demand, supply the pressure of special gas must be in more than a certain force value can to ensure carrying out smoothly of subsequent production, therefore, the detection of storage pressure numerical value is necessary; The second, to affect in gas cylinder use gas whether to meet usage requirement another decisive indicator be purity, when purity does not reach usage requirement, also must stop using the gas in this gas cylinder.For above 2 points, because purity and this two indices of pressure exist certain relevance, when the pressure in gas cylinder is higher, the purity of the gas of the elevated pressures exported can meet the requirements, and when pressure obvious too low time, export gas purity to there is underproof probability larger.Why purity and this two indices of pressure can not be made corresponding relation utterly, produce with the change of above-mentioned pressure following temperature fluctuate relevant.In prior art, for obtaining more than required force value, the satisfactory gas of purity simultaneously, usually ensure in the minimum mode heightening Pressure testing, for germane, by standard configuration, canful pressure is 1235PIS (PIS is pressure unit made in Great Britain), net weight is 2.6 kilograms, and professional standard is in the setting value of weight left 10% as more scavenging air receiver, by this rower, germane tank should should give replacing when 123.5PSI pressure, and for semiconductor, the process requirements of photovoltaic industry, germane gas just can meet usage requirement more than 15PSI pressure, but can the germane gas taking lowpressure state into account meet the consideration of purity requirement, therefore in practical application, usually using the 123.5PSI pressure of rower as guidance standard, therefore, when more scavenging air receiver, the state that the germane gas that still can be utilized is wasted may be there is.Accordingly, if the pressure of gas meets examination criteria in tank, and the actual purity exporting gas does not reach usage requirement, then air feed switching device cannot meet the requirement of qualified air feed.Thus, only reduce efficiency that acceptable gas utilizes by the pressure data detected by manometer as this vibrational power flow of single index switching gas cylinder, improve and use gas cost in prior art, while cannot provide acceptable gas exactly.
The acceptable gas utilization ratio of above-mentioned air feed switching device of the prior art is low, high and to provide the accuracy of acceptable gas low be the current technical issues that need to address of those skilled in the art with gas cost.
Model utility content
The purpose of this utility model is to provide a kind of air feed switching device, by application of the present utility model, will significantly improve utilization ratio, the reduction gas cost of acceptable gas, improves the accuracy of acceptable gas supply simultaneously.
For solving the problems of the technologies described above, the utility model provides a kind of air feed switching device, comprise at least two gas tanks in parallel, detect the pressure-detecting device of gas tank pressure described in each respectively, connect with described pressure-detecting device signal and the first controller that gas tank break-make described in each switches can be controlled, also comprise and export the purity detecting device of the purity of gas for detecting gas tank described in each and can control the second controller of gas tank break-make switching described in each, described purity detecting device and described second controller signal are connected.
Preferably, described first controller and described second controller are structure as a whole controller, can control the described integrative-structure controller that gas tank break-make described in each switches and connect with described pressure-detecting device and described purity detecting device signal respectively.
Preferably, described integrative-structure controller is specially programmable logic controller (PLC).
Preferably, also comprise the suggestion device for sending break-make switch prompting information, described prompt facility and described programmable logic controller (PLC) signal are connected.
Preferably, described purity detecting device is specially purity analysis instrument.
Preferably, also comprise pressure regulator valve, described purity detecting device is communicated with described gas tank by described pressure regulator valve.
Preferably, also comprise flow control valve, described purity detecting device is communicated with described gas tank by described flow control valve.
In a preferred implementation about air feed switching device, at least two gas tank parallel connections, pressure-detecting device is used for the pressure detecting each gas tank respectively, pressure-detecting device and the first controller signals are connected simultaneously, and the first controller can control each gas tank according to pressure data and carry out break-make switching.Meanwhile, connect for the purity detecting device and second controller signal detecting the purity of each gas tank output gas, second controller can control each gas tank according to purity data and carry out break-make.By above vibrational power flow, when by pressure-detecting device, the gas exported in a certain gas tank is detected that pressure value surpasses bottom line, namely during hypotony, pressure signal is sent to the first controller by pressure-detecting device, first controller controls gas tank according to this pressure signal and switches, turn off the low gas tank of this pressure and open another spare gas tank, to ensure the lasting supply of qualified pressed gas; Abreast, when the gas tank of above-mentioned detected pressure is under the state of normal air feed, its gas exported is detected purity by purity detecting device simultaneously, when pressure data be detected as by pressure-detecting device qualified, and purity data is when being detected as defective by purity detecting device, purity data is switched to second controller, controls gas tank switch by second controller, gas tank by the underproof gas of output purity turns off, and opens another tracheae for subsequent use with lasting air feed.For the pressure-detecting device be equipped with above and the first controller, purity detecting device and second controller, its two groups is the different parallel control structure of Testing index item.Thus, pressure parameter is adjusted to the minimal pressure force value needed for subsequent production flow process, and the qualification of purity data need not be ensured with high pressure values, namely when the pressure exporting gas limits for reaching minimum use, when the purity figure simultaneously detected by purity detecting device is qualified, just can carry out fully the gas in gas tank, utilize with having quality assurance.
In prior art, for the purity data of the output gas avoiding lower pressure is defective, and need to arrange higher minimum pressure output bottom line, and these pressure settings are higher than the force value of subsequent production technique institute actual demand, then when gas pressure is qualified, just gas tank is changed under the detected whether qualified state of gas purity data simultaneously, this large probability ground there is the pressure of the gas tank be replaced and purity all qualified.The gas tank be so replaced has slatterned available gas, adds cost of production.Meanwhile, accordingly, the factors such as Yin Wendu cause the change of gas tank air pressure, and when air pressure is still qualified, and the gas that not detected purity data is defective state is transferred and uses the output by causing defective gas.Compared to prior art, the utility model arranges the device of detected pressures and purity simultaneously side by side, and this will significantly improve utilization ratio, the reduction gas cost of acceptable gas, improves the accuracy of acceptable gas supply simultaneously.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiment of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the accompanying drawing provided.
Fig. 1 is the utility model structural representation;
In Fig. 1: the first controller-1, pressure-detecting device-2, gas tank-3, purity detecting device-4, second controller-5.
Embodiment
Core of the present utility model is to provide a kind of air feed switching device, by application of the present utility model, will significantly improve utilization ratio, the reduction gas cost of acceptable gas, improves the accuracy of acceptable gas supply simultaneously.
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technological scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, Fig. 1 is the utility model structural representation.
According to Fig. 1, air feed switching device comprises at least two gas tanks 3 in parallel, detects the pressure-detecting device 2 of each gas tank 3 pressure respectively, connect with pressure-detecting device 2 signal and the first controller 1 that each gas tank 3 break-make switches can be controlled, also comprise and export the purity detecting device 4 of the purity of gas for detecting each gas tank 3 and can control the second controller 5 of each gas tank 3 break-make switching, purity detecting device 4 and second controller 5 signal are connected.In above vibrational power flow, air feed switching device detects its gas output pressure when a certain gas tank 3 exports gas to this gas tank 3, detect the purity exporting gas simultaneously, when pressure-detecting device 2 detects the pressure of gas tank 3 lower than setting value, the output gas of this gas tank 3 is used if now continue, the air pressure needed for follow-up flow process cannot be met, air pressure signal is passed to the first controller 1 by pressure-detecting device 2, first controller 1 is according to this signal and then control to turn off this low-pressure gas tank 3, to upgrade this gas tank 3, open another gas tank 3 to continue to supply the gas of qualified air pressure simultaneously.Meanwhile, the gas tank 3 of purity detecting device 4 pairs of gas transmissions carries out gas purity detection, when there is gas purity and being detected defective, purity detecting device 4 is by signal transmission to second controller 5, and the through and off being controlled to switch different gas tank 3 by second controller 5 provide to maintain the gas that purity is qualified continuously.Above pressure-detecting device 2 and purity detecting device 4 are the parallel devices independently detecting different index, the i.e. purity that detects of the air pressure that detects of pressure-detecting device 2 and purity detecting device 4, these two detected parameters have one defective, this air feed gas tank 3 is just turned off, under pressure and purity two parameters distinguish qualified state, the gas that gas tank 3 exports is just qualified.This air feed switching device is corresponding with follow-up air-flow journey, and follow-up gas requirements of process uses pressure and all qualified gas of purity.Therefore when the pressure-detecting device 2 in this air feed switching device and purity detecting device 4 detect a certain gas tank 3 and judge whether turn off this gas tank, there is a defective numerical value both it, just control to carry out gas tank 3 by the first controller 1 or second controller 5 and switch.
In prior art, only detect the force value that gas tank exports gas, the switching of gas tank is carried out when hypotony, and due to the interference because of factors such as ambient temperatures, gas tank pressure detection data is unstable, untrue, and detection architecture is not arranged to the purity of gas tank output gas, just purity data is depended on pressure data, it is qualified that purity index high probability ground when high pressure can ensure, in line with this principle, safety coefficient is improved more than the actual required force value used, this safety coefficient is then arranged for the purity that roughly associates with pressure, with this expect ensure to export the pressure of gas and purity all qualified.Therefore, in contrast to prior art, the air feed switching device that the utility model provides detects pressure and purity respectively, without the need to improving the minimum restriction of pressure, simultaneously under the state that pressure is qualified, also can detect exactly and turn off this gas tank when purity is defective if occur, therefore application of the present utility model will significantly improve utilization ratio, the reduction gas cost of acceptable gas, improve the accuracy of acceptable gas supply simultaneously.
On the basis of above-mentioned specific embodiment, first controller 1 and second controller 5 can also be set to integrative-structure controller, connected with pressure-detecting device 2 and purity detecting device 4 signal respectively by integrative-structure controller, and the break-make of each gas tank 3 switches the control by integrative-structure controller, thus, when the pressure data that pressure-detecting device 2 detects and/or the purity data that purity detecting device 4 detects defective time, carry out entirety by integrative-structure controller to control just to carry out control switching more accurately, which further improves the accuracy that acceptable gas is provided.
Common integrative-structure controller can use programmable logic controller (PLC), i.e. PLC.For PLC, it is all more convenient that its programming and line are arranged.The suggestion device for sending break-make switch prompting information can also be connected on PLC, can accurate control operation be convenient to thus.
For the purity detecting device 4 mentioned in above-mentioned specific embodiment, common purity detecting device 4 comprises purity analysis instrument.
For purity detecting device 4, it can be communicated with each gas tank 3 by pressure regulator valve and/or flow control valve, because gas pressure and flow need be arranged according to follow-up flow process demand, and the precise detection device that purity detecting device 4 detects as purity data, its detected state needing pressure, air-flow etc. more stable, therefore can improve the accuracy of detection further by the vibrational power flow that pressure regulator valve, flow control valve are communicated with each gas tank 3 by purity detecting device 4.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein when not departing from spirit or scope of the present utility model, can realize in other embodiments.Therefore, the utility model can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (7)
1. an air feed switching device, comprise at least two gas tanks (3) in parallel, detect the pressure-detecting device (2) of gas tank described in each (3) pressure respectively, connect with described pressure-detecting device (2) signal and the first controller (1) that gas tank described in each (3) break-make switches can be controlled, it is characterized in that, also comprise and export the purity detecting device (4) of the purity of gas for detecting gas tank described in each (3) and the second controller (5) of gas tank described in each (3) break-make switching can be controlled, described purity detecting device (4) and described second controller (5) signal are connected.
2. air feed switching device as claimed in claim 1, it is characterized in that, described first controller (1) and described second controller (5) are structure as a whole controller, can control the described integrative-structure controller that gas tank described in each (3) break-make switches and connect with described pressure-detecting device (2) and described purity detecting device (4) signal respectively.
3. air feed switching device as claimed in claim 2, it is characterized in that, described integrative-structure controller is specially programmable logic controller (PLC).
4. air feed switching device as claimed in claim 3, it is characterized in that, also comprising the suggestion device for sending break-make switch prompting information, described prompt facility and described programmable logic controller (PLC) signal are connected.
5. the air feed switching device as described in any one of Claims 1-4, is characterized in that, described purity detecting device (4) is specially purity analysis instrument.
6. air feed switching device as claimed in claim 5, it is characterized in that, also comprise pressure regulator valve, described purity detecting device (4) is communicated with described gas tank (3) by described pressure regulator valve.
7. air feed switching device as claimed in claim 6, it is characterized in that, also comprise flow control valve, described purity detecting device (4) is communicated with described gas tank (3) by described flow control valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520162666.7U CN204494089U (en) | 2015-03-23 | 2015-03-23 | A kind of air feed switching device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520162666.7U CN204494089U (en) | 2015-03-23 | 2015-03-23 | A kind of air feed switching device |
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| CN204494089U true CN204494089U (en) | 2015-07-22 |
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| CN201520162666.7U Active CN204494089U (en) | 2015-03-23 | 2015-03-23 | A kind of air feed switching device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106290652A (en) * | 2016-09-21 | 2017-01-04 | 国家电网公司 | A kind of detection equipment for oil-filled equipment is detected |
| CN114963003A (en) * | 2021-02-19 | 2022-08-30 | 中国科学院微电子研究所 | Gas supply system and gas supply method for semiconductor manufacturing |
-
2015
- 2015-03-23 CN CN201520162666.7U patent/CN204494089U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106290652A (en) * | 2016-09-21 | 2017-01-04 | 国家电网公司 | A kind of detection equipment for oil-filled equipment is detected |
| CN106290652B (en) * | 2016-09-21 | 2019-05-24 | 国家电网公司 | A kind of detection device for being detected to oil-filled equipment |
| CN114963003A (en) * | 2021-02-19 | 2022-08-30 | 中国科学院微电子研究所 | Gas supply system and gas supply method for semiconductor manufacturing |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190201 Address after: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee after: HANERGY PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address before: 570125 Fortune Plaza, 103 Binhai Avenue, Longhua District, Haikou City, Hainan Province, 20th floor Patentee before: HAINAN HANERGY FILM SOLAR ENERGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190307 Address after: Room 107, Building 2, Olympic Village Street Comprehensive Office District, Chaoyang District, Beijing Patentee after: HANERGY MOBILE ENERGY HOLDING GROUP Co.,Ltd. Address before: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee before: HANERGY PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221114 Granted publication date: 20150722 |
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