CN221052045U - Heat exchange device and single crystal furnace - Google Patents

Abstract

The utility model discloses a heat exchange device and a single crystal furnace, which comprise a heat exchanger and a spiral water cooling pipe, wherein a heat exchange shell comprises an inner shell and an outer shell which are connected with each other and are arranged at intervals, a heat exchange cavity is formed by enclosing the inner shell and the outer shell, and a first lifting channel for growing a single crystal silicon rod is formed by enclosing the inner shell; the water inlet pipe and the water outlet pipe are respectively connected to the two opposite sides of the heat exchange shell and are respectively communicated with the heat exchange cavity; the spiral water cooling pipe is arranged above the heat exchange shell, and the spiral water cooling pipe is enclosed to form a second pulling channel for growing the monocrystalline silicon rod, and the second pulling channel is opposite to the first pulling channel; the spiral water cooling pipe is arranged between the water inlet pipe and the water outlet pipe, the spiral water cooling pipe is respectively connected with the water inlet pipe and the water outlet pipe, a cooling flow passage is arranged in the spiral water cooling pipe, and the cooling flow passage is respectively communicated with the water inlet pipe and the water outlet pipe. The spiral water cooling pipe is additionally arranged, so that heat exchange is realized through the two cooling paths, and the heat exchange capacity can be improved.

Description

Heat exchange device and single crystal furnace

Technical Field

The utility model belongs to the technical field of crystal pulling, and particularly relates to a heat exchange device and a single crystal furnace.

Background

At present, in the photovoltaic technology, a single crystal silicon rod is generally pulled by adopting a Czochralski method, when the single crystal silicon rod is grown, the longitudinal temperature gradient of a crystal and the longitudinal temperature gradient of a melt are used as variables, and the effect of pulling speed can be achieved by changing the temperature gradient of a solid-liquid interface from the adjustment direction of the longitudinal temperature gradient of the crystal and the melt.

In the prior art, a heat shield surrounding a single crystal silicon rod is arranged above a crystal growth interface, and working gas is utilized to enter a lifting channel of the single crystal silicon rod along the inner side of the heat shield to purge the interface. However, this approach has limited endothermic effects on the single crystal silicon rod, which is disadvantageous in providing an optimized longitudinal temperature gradient of the crystal, limiting further increases in crystal growth rate.

Disclosure of utility model

In view of the foregoing, embodiments of the present utility model have been developed to provide a heat exchange device and a single crystal furnace that overcome, or at least partially solve, the foregoing problems.

In order to solve the above technical problem, in a first aspect, an embodiment of the present utility model provides a heat exchange device, including: a heat exchanger and a helical water-cooled tube, the heat exchanger comprising: the water inlet pipe, the water outlet pipe and the heat exchange shell;

The heat exchange shell comprises an inner shell and an outer shell which are connected with each other and are arranged at intervals, a heat exchange cavity is formed by enclosing the inner shell and the outer shell, and a first lifting channel for growing a monocrystalline silicon rod is formed by enclosing one side of the inner shell away from the outer shell;

The water inlet pipe and the water outlet pipe are respectively connected to the two opposite sides of the heat exchange shell and are respectively communicated with the heat exchange cavity;

The spiral water-cooled tube is arranged above the heat exchange shell, and forms a second pulling channel for growing a monocrystalline silicon rod in a surrounding manner, and the second pulling channel is opposite to the first pulling channel;

The spiral water cooling pipe is arranged between the water inlet pipe and the water outlet pipe, a cooling flow passage is arranged in the spiral water cooling pipe, and the cooling flow passage is respectively communicated with the water inlet pipe and the water outlet pipe.

Optionally, a groove is arranged on the inner wall of the spiral water cooling pipe.

Optionally, the groove includes: at least one of polygonal grooves, elliptical grooves and circular grooves.

Optionally, the depth of the groove is 2-3 mm, and the length of the groove is 3-5 mm.

Optionally, a convex structure is arranged on the inner wall of the spiral water cooling pipe.

Optionally, the height of the protruding structures is 2-3 mm, and the length of the protruding structures is 3-5 mm.

Optionally, the bump structure includes: at least one of a polygonal protrusion, an elliptical protrusion, and a circular protrusion.

Optionally, the axis of the second pull channel coincides with the axis of the inner housing.

Optionally, the height of the spiral water-cooled tube along the axial direction of the second lifting channel is 200-400 mm.

In a second aspect, an embodiment of the present utility model provides a single crystal furnace, including: the heat exchange device.

In the embodiment of the utility model, after the cooling medium is introduced into the water inlet pipe, one part of the cooling medium can flow into the water outlet pipe through the heat exchange cavity in the heat exchange shell, and the other part of the cooling medium can flow into the water outlet pipe through the cooling flow channel in the spiral water cooling pipe.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic view of a heat exchange device according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a spiral water-cooled tube according to an embodiment of the present utility model.

Reference numerals:

1-heat exchanger, 11-inlet tube, 12-outlet pipe, 13-heat exchange shell, 21-spiral water cooling pipe, 22-first connecting pipe, 23-second connecting pipe.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The features of the utility model "first", "second" and the like in the description and in the claims may be used for the explicit or implicit inclusion of one or more such features. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The heat exchange device and the single crystal furnace according to the embodiments of the present utility model are described below with reference to fig. 1 to 2.

The heat exchange device in the embodiment of the utility model specifically comprises: heat exchanger 1 and spiral water-cooled tube 21, heat exchanger 1 may include: a water inlet pipe 11, a water outlet pipe 12 and a heat exchange shell 13; the heat exchange shell 13 may include an inner shell and an outer shell which are connected with each other and arranged at intervals, a heat exchange cavity may be formed by enclosing the inner shell and the outer shell, and a first pulling channel for growing a monocrystalline silicon rod may be formed by enclosing one side of the inner shell away from the outer shell; the water inlet pipe 11 and the water outlet pipe 12 can be respectively connected to two opposite sides of the heat exchange shell 13 and respectively communicated with the heat exchange cavity; the spiral water-cooled tube 21 is arranged above the heat exchange shell 13, and the spiral water-cooled tube 21 surrounds a second pulling channel for growing a monocrystalline silicon rod, and the second pulling channel is opposite to the first pulling channel; the spiral water cooling pipe 21 is arranged between the water inlet pipe 11 and the water outlet pipe 12, the spiral water cooling pipe 21 is respectively connected with the water inlet pipe 11 and the water outlet pipe 12, a cooling flow passage is arranged in the spiral water cooling pipe 21, and the cooling flow passage is respectively communicated with the water inlet pipe 11 and the water outlet pipe 12.

In the embodiment of the utility model, after the cooling medium is introduced into the water inlet pipe 11, a part of the cooling medium can flow into the water outlet pipe 12 through the heat exchange cavity in the heat exchange shell 13, and another part of the cooling medium can flow into the water outlet pipe 12 through the cooling flow passage in the spiral water cooling pipe 21.

The heat exchange device in the embodiment of the utility model is used for realizing a heat exchange function and can specifically comprise a heat exchanger 1 and a spiral water cooling pipe 21. The heat exchanger 1 can be a conventional heat exchanger in the prior art, is used in a single crystal furnace, and provides a heat exchange function in the process of drawing a single crystal silicon rod so as to increase the longitudinal temperature gradient of the crystal; the spiral water cooling pipe 21 is assembled with the heat exchanger 1 and can be used for adding a cooling path to further improve the heat exchange capacity of the heat exchange device.

Compared with the prior art, the embodiment of the utility model can achieve the effect of improving the heat exchange capacity by adding the spiral water cooling pipe 21 on the basis of the existing heat exchanger, and the heat exchange device in the embodiment of the utility model can have innovation and inclusion.

Specifically, the heat exchanger 1 may include a water inlet pipe 11, a water outlet pipe 12 and a heat exchange housing 13, the heat exchange housing 13 may include an inner housing and an outer housing, and the inner housing and the outer housing are connected with each other and are arranged at intervals, so that the inner housing and the outer housing may enclose to form a heat exchange cavity, and a cooling channel may be disposed in the heat exchange cavity so as to facilitate the realization of a heat exchange function through a cooling medium.

Specifically, the heat exchange housing 13 may be at least one of a cylinder and a tapered cylinder.

Specifically, a spiral heat exchange tube may be disposed in the heat exchange cavity, so that the cooling channel is formed in the heat exchange tube. Or the heat exchange cavity can be internally provided with a plurality of layers of partition plates arranged at intervals, the partition plates and the heat exchange shell 13 are enclosed to form the cooling channels, and the partition plates can be provided with through holes so as to enable the cooling channels to be communicated.

Specifically, the water inlet pipe 11 and the water outlet pipe 12 can be respectively arranged at two opposite sides of the heat exchange shell 13, the water inlet pipe 11 and the water outlet pipe 12 can be respectively arranged above the heat exchange shell 13, the water inlet pipe 11 can be used for injecting cooling medium into the heat exchange cavity, and the water outlet pipe 12 can be used for discharging the cooling medium in the heat exchange cavity.

Specifically, the inner shell of the heat exchange housing 13 may enclose a first pull channel for growing a single crystal silicon rod. Specifically, as shown in fig. 1, the spiral water-cooled tube 21 may be disposed above the heat exchange housing 13, the spiral water-cooled tube 21 may enclose to form a second pulling channel, and the second pulling channel and the first pulling channel may be disposed opposite to each other, and are both used for growing a single crystal silicon rod, so that the heat exchange device may exchange heat with a portion of the single crystal silicon rod in the first pulling channel and the second pulling channel, so as to reduce the temperatures of the portion of the single crystal silicon rod in the first pulling channel and the second pulling channel, so that the crystallization latent heat of the single crystal silicon rod is released, the temperature at the level of the silicon melt may also be relatively reduced, further increasing the longitudinal temperature gradient of the single crystal silicon rod along the growth direction thereof, and improving the growth speed of the single crystal silicon rod.

Specifically, the diameter of the second pulling channel may be smaller than that of the first pulling channel, the diameters of the second pulling channel and the first pulling channel may be both larger than that of the monocrystalline silicon rod, and the diameters of the second pulling channel and the first pulling channel may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present utility model.

Specifically, the spiral water cooling pipe 21 may be connected to the water inlet pipe 11 and the water outlet pipe 12 respectively, specifically, may be directly welded, or indirectly connected through a flange plate, or the like, and may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present utility model.

Specifically, as shown in fig. 1 and 2, the spiral water-cooled tube 21 is spirally wound, so that the spiral water-cooled tube 21 is conveniently surrounded to form a second pulling channel so as to pass through the grown monocrystalline silicon rod, and the inner surface area contacted with the cooling medium can be increased, so that the heat exchange area is increased, the heat exchange capacity is improved, and the absorption capacity of the surface heat of the monocrystalline silicon rod is increased.

Specifically, a cooling flow passage is arranged in the spiral water cooling pipe 21, and the cooling flow passage of the spiral water cooling pipe 21 is respectively communicated with the water inlet pipe 11 and the water outlet pipe 12, so that the water inlet pipe 11 can guide cooling medium into the spiral water cooling pipe 21, and the water outlet pipe 12 can guide the cooling medium in the spiral water cooling pipe 21.

Further, as shown in fig. 1, after the cooling medium is introduced into the water inlet pipe 11, a part of the cooling medium enters the cooling flow channel in the spiral water cooling pipe 21, and is discharged from the water outlet pipe 12 after heat exchange, that is, a part of the cooling medium exchanges heat through the first heat exchange path; the other part of the cooling medium enters the heat exchange cavity in the heat exchange shell 13 and is discharged from the water outlet pipe 12 after heat exchange, namely, the other part of the cooling medium exchanges heat through the second heat exchange path. In the embodiment of the utility model, the heat exchange shell 13 and the spiral water cooling pipe 21 can realize the heat exchange function through different heat exchange paths, so that the heat exchange area of the heat exchange device can be increased, the heat absorption efficiency of the heat exchange device is improved, and the heat exchange capacity of the heat exchange device is improved.

Specifically, the materials of the spiral water cooling pipe 21, the water inlet pipe 11 and the water outlet pipe 12 may be the same or different metal materials, and may be specifically set according to actual requirements, which is not particularly limited in the embodiment of the present utility model.

In some alternative embodiments of the present utility model, the upper end of the spiral-shaped water cooling pipe 21 may be connected with the water outlet pipe 12 through a first connection pipe 22; the lower end of the spiral-shaped water cooling pipe 21 may be connected to the water inlet pipe 11 through a second connection pipe 23.

In the embodiment of the utility model, the first connecting pipe 22 is respectively connected with the upper end of the spiral water cooling pipe 21 and the water outlet pipe 12, and the second connecting pipe 23 is respectively connected with the lower end of the spiral water cooling pipe 21 and the water inlet pipe 11, so that a cooling medium can enter the spiral water cooling pipe 21 from the bottom and can be discharged from the top, the cooling effect on the monocrystalline silicon rod can be further improved, the longitudinal temperature gradient of the monocrystalline silicon rod is increased, and the drawing speed of the monocrystalline silicon rod is improved.

Specifically, the spiral water-cooled tube 21 is connected to the first connection tube 22 and the second connection tube 23, respectively, a first cooling flow passage may be formed in the spiral water-cooled tube 21, a second cooling flow passage may be formed in the first connection tube 22, and a third cooling flow passage may be formed in the second connection tube 23, and the first cooling flow passage is respectively communicated with the second cooling flow passage and the third cooling flow passage to circulate a cooling medium.

Specifically, the pipe diameters of the spiral water-cooling pipe 21, the first connecting pipe 22 and the second connecting pipe 23 may be set according to actual requirements, which is not particularly limited in the embodiment of the present utility model.

Optionally, the upper end of the spiral water-cooled tube 21 may be welded to the first connection tube 22, or the spiral water-cooled tube 21 and the first connection tube 22 may be fixed by a flange, so as to improve the reliability and stability of the fit between the first connection tube 22 and the spiral water-cooled tube 21, and the tightness between the first connection tube 22 and the spiral water-cooled tube 21 may be increased, so as to prevent the leakage of the cooling medium at the junction of the first connection tube 22 and the spiral water-cooled tube 21.

Alternatively, the lower end of the spiral water-cooling tube 21 may be welded to the second connection tube 23, or the connection between the spiral water-cooling tube 21 and the second connection tube 23 may be fixed by a flange plate, so as to improve the reliability and stability of the fit between the second connection tube 23 and the spiral water-cooling tube 21, and the tightness between the second connection tube 23 and the spiral water-cooling tube 21 may be increased, so as to prevent the leakage of the cooling medium at the connection between the second connection tube 23 and the spiral water-cooling tube 21.

Optionally, the spiral water-cooling tube 21, the first connection tube 22 and the second connection tube 23 may be integrally formed, so as to further improve the structural stability of the spiral water-cooling tube 21.

Optionally, the first connecting pipe 22 may be welded to the water outlet pipe 12, or the first connecting pipe 22 and the water outlet pipe 12 may be fixed by a flange, so as to improve the reliability and stability of the fit between the first connecting pipe 22 and the water outlet pipe 12, and increase the tightness between the first connecting pipe 22 and the water outlet pipe 12, so as to prevent the leakage of the cooling medium at the junction of the first connecting pipe 22 and the water outlet pipe 12.

Alternatively, the second connection pipe 23 may be welded to the water inlet pipe 11, or the second connection pipe 23 and the water inlet pipe 11 may be fixed by a flange plate, so as to improve the reliability and stability of the fit between the second connection pipe 23 and the water inlet pipe 11, and the tightness between the second connection pipe 23 and the water inlet pipe 11 may be increased, so as to prevent the leakage of the cooling medium at the junction of the second connection pipe 23 and the water inlet pipe 11.

Alternatively, the axis of the second pull channel may coincide with the axis of the inner housing.

In the embodiment of the utility model, the axis of the second pulling channel coincides with the axis of the inner shell, so that the interference of the spiral water-cooled tube 21 on the growth of the single crystal silicon rod can be avoided, and the smooth passing through the first pulling channel and the second pulling channel in the growth process of the single crystal silicon rod can be ensured.

Specifically, the axis of the second pulling channel formed by encircling the spiral water-cooled tube 21 coincides with the axis of the inner shell, that is, the axis of the first pulling channel coincides with the axis of the second pulling channel, and in the process of pulling the single crystal silicon rod, the axis of the first pulling channel and the axis of the second pulling channel coincide with the axis of the single crystal silicon rod.

Alternatively, grooves may be provided on the inner wall of the spiral-shaped water-cooling tube 21.

Specifically, grooves may be formed on an inner wall of at least one of the spiral water-cooling tube 21, the first connecting tube 22 and the second connecting tube 23, so that an inner surface area of the spiral water-cooling tube 21 in contact with a cooling medium may be further increased, and a heat exchange area of the spiral water-cooling tube 21 may be further increased, so that in a growth process of the single crystal silicon rod, absorption of heat on the surface of the single crystal silicon rod may be accelerated, a dissipation rate of a temperature of the single crystal silicon rod may be increased, a longitudinal temperature gradient of the single crystal silicon rod may be increased, and a growth rate of the single crystal silicon rod may be accelerated.

Specifically, the specific number of the grooves may be set according to actual requirements, which is not specifically limited in the embodiment of the present utility model.

Specifically, grooves may be provided on the inner wall of any one of the spiral-shaped water-cooling pipe 21, the first connection pipe 22, and the second connection pipe 23, or grooves may be provided on the inner walls of two of the spiral-shaped water-cooling pipe 21, the first connection pipe 22, and the second connection pipe 23.

Optionally, the depth of the groove can be 2-3 mm, the length of the groove can be 3-5 mm, the heat exchange area of the spiral water-cooling tube 21 can be effectively increased, and meanwhile, the structural strength of the spiral water-cooling tube 21 can be effectively ensured.

Specifically, the depth of the groove is the depth of the groove recessed in the inner wall of the spiral water-cooling tube 21.

Alternatively, the groove may include: at least one of the polygonal groove, the elliptical groove and the circular groove can increase structural diversity of the groove.

Specifically, the groove may be any one of a polygonal groove, an elliptical groove and a circular groove, or the groove may be a combination of any two of the polygonal groove, the elliptical groove and the circular groove, or the groove may be a combination of the polygonal groove, the elliptical groove and the circular groove.

Specifically, the cross-sectional shape of the groove includes at least one of a polygonal shape, an elliptical shape, and a circular shape along the extending direction of the spiral-shaped water-cooling tube 21.

In alternative embodiments of the present utility model, the inner wall of the helical water-cooled tube 21 may be provided with a raised structure. Specifically, a convex structure may be provided on an inner wall of at least one of the spiral water-cooling tube 21, the first connection tube 22 and the second connection tube 23, so that an inner surface of the spiral water-cooling tube 21 in contact with the cooling medium may be further increased, thereby increasing a heat exchanging capacity of the spiral water-cooling tube 21 and accelerating absorption of heat to a surface of the silicon single crystal rod.

Specifically, the number of the protruding structures may be set according to actual requirements, which is not particularly limited in the embodiment of the present utility model.

Specifically, a convex structure may be provided on an inner wall of any one of the spiral-shaped water-cooling pipe 21, the first connection pipe 22, and the second connection pipe 23, or a convex structure may be provided on an inner wall of two of the spiral-shaped water-cooling pipe 21, the first connection pipe 22, and the second connection pipe 23, or a convex structure may be provided on an inner wall of each of the spiral-shaped water-cooling pipe 21, the first connection pipe 22, and the second connection pipe 23.

Alternatively, the height of the protruding structure may be 2-3 mm, and the length of the protruding structure may be 3-5 mm, so that the heat exchange area of the spiral water-cooled tube 21 may be effectively increased, and meanwhile, smooth circulation of the cooling medium may be effectively ensured.

Specifically, the height of the protruding structure is the height at which the protruding structure protrudes from the inner wall of the spiral water-cooling tube 21.

Alternatively, the bump structure may include: at least one of the polygonal protrusions, the elliptical protrusions and the circular protrusions may increase structural diversity of the protrusion structure.

Specifically, the bump structure may be any one of a polygonal bump, an elliptical bump, and a circular bump, or the bump structure may be a combination of two of a polygonal bump, an elliptical bump, and a circular bump, or the bump structure may be a combination of a polygonal bump, an elliptical bump, and a circular bump.

Specifically, the cross-sectional shape of the convex structure includes at least one of a polygonal shape, an elliptical shape, and a circular shape along the extending direction of the spiral-shaped water-cooling tube 21.

In still other alternative embodiments of the present utility model, the height of the spiral water-cooled tube 21 along the axial direction of the second pulling channel is 200-400 mm, so that the spiral water-cooled tube 21 can achieve better cooling effect, and the pulling speed of the single crystal silicon rod is significantly improved.

Specifically, the axial direction of the second pulling channel is the axial direction of the heat exchanger 1, i.e. the arrow direction shown in fig. 1.

Compared with the existing heat exchanger, the spiral water-cooled tube 21 is additionally arranged in the heat exchange device, and the pulling speed of the monocrystalline silicon rod can be improved by 10-20% under the action of the heat exchange device.

The heat exchange device provided by the embodiment of the utility model at least has the following advantages:

In the embodiment of the utility model, after the cooling medium is introduced into the water inlet pipe, one part of the cooling medium can flow into the water outlet pipe through the heat exchange cavity in the heat exchange shell, and the other part of the cooling medium can flow into the water outlet pipe through the cooling flow channel in the spiral water cooling pipe.

In a second aspect, the embodiment of the utility model also discloses a single crystal furnace, which specifically can comprise the heat exchange device.

In the embodiment of the utility model, the single crystal furnace can further comprise a crucible, a boiler side and a heater which are arranged in the single crystal furnace; the pot side can be wrapped on a crucible, and the crucible is used for containing silicon materials; the heater is used for heating the silicon material in the crucible.

Specifically, the heat exchange device can be arranged in the single crystal furnace and above the crucible and is used for exchanging heat of the grown single crystal silicon rod so as to improve the longitudinal temperature gradient of the single crystal silicon rod.

The single crystal furnace provided by the embodiment of the utility model at least can have the following advantages:

In the embodiment of the utility model, after the cooling medium is introduced into the water inlet pipe, one part of the cooling medium can flow into the water outlet pipe through the heat exchange cavity in the heat exchange shell, and the other part of the cooling medium can flow into the water outlet pipe through the cooling flow channel in the spiral water cooling pipe.

While preferred embodiments of the present utility model have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the embodiments of the utility model.

Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or terminal device that comprises the element.

The heat exchange device and the single crystal furnace provided by the utility model are described in detail, and specific examples are applied to illustrate the principle and the implementation mode of the utility model, and the description of the examples is only used for helping to understand the method and the core idea of the utility model; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present utility model, the present description should not be construed as limiting the present utility model in view of the above.

Claims (10)

1. A heat exchange device, comprising: a heat exchanger and a helical water-cooled tube, the heat exchanger comprising: the water inlet pipe, the water outlet pipe and the heat exchange shell;

The heat exchange shell comprises an inner shell and an outer shell which are connected with each other and are arranged at intervals, a heat exchange cavity is formed by enclosing the inner shell and the outer shell, and a first lifting channel for growing a monocrystalline silicon rod is formed by enclosing one side of the inner shell away from the outer shell;

The water inlet pipe and the water outlet pipe are respectively connected to the two opposite sides of the heat exchange shell and are respectively communicated with the heat exchange cavity;

The spiral water-cooled tube is arranged above the heat exchange shell, and forms a second pulling channel for growing a monocrystalline silicon rod in a surrounding manner, and the second pulling channel is opposite to the first pulling channel;

The spiral water cooling pipe is arranged between the water inlet pipe and the water outlet pipe, a cooling flow passage is arranged in the spiral water cooling pipe, and the cooling flow passage is respectively communicated with the water inlet pipe and the water outlet pipe.

2. The heat exchange device of claim 1, wherein the helical water-cooled tube is provided with grooves on its inner wall.

3. The heat exchange device of claim 2, wherein the recess comprises: at least one of polygonal grooves, elliptical grooves and circular grooves.

4. The heat exchange device of claim 2 wherein the grooves have a depth of 2-3 mm and a length of 3-5 mm.

5. The heat exchange device of claim 1, wherein the inner wall of the helical water-cooled tube is provided with a raised structure.

6. The heat exchange device of claim 5 wherein the height of the raised structures is 2-3 mm and the length of the raised structures is 3-5 mm.

7. The heat exchange device of claim 5 wherein the raised structure comprises: at least one of a polygonal protrusion, an elliptical protrusion, and a circular protrusion.

8. The heat exchange device of claim 1 wherein the axis of the second pull channel coincides with the axis of the inner shell.

9. The heat exchange device of claim 1, wherein the helical water-cooled tube has a height of 200-400 mm in the axial direction of the second pull channel.

10. A single crystal growing furnace, comprising: the heat exchange device of any one of claims 1-9.