CN221051987U

CN221051987U - Source bottle

Info

Publication number: CN221051987U
Application number: CN202322455596.1U
Authority: CN
Inventors: 魏晓庆
Original assignee: Optics Semiconductor Technology Shanghai Co ltd
Current assignee: Optics Semiconductor Technology Shanghai Co ltd
Priority date: 2023-09-11
Filing date: 2023-09-11
Publication date: 2024-05-31
Anticipated expiration: 2033-09-11

Abstract

The utility model belongs to the technical field of film preparation, and discloses a source bottle, which comprises a bottle body, an inlet pipe and an outlet pipe, wherein a containing cavity is arranged in the bottle body for storing chemical precursors; the inlet pipe and the outlet pipe are arranged on the bottle body and are communicated with the accommodating cavity, so that the chemical precursors can be conveniently collected and output; the end of the inlet pipe and the outlet pipe, which are far away from the accommodating cavity, are respectively provided with an inlet and an outlet, and are detachably provided with a plugging piece; when the device is separated from the preparation equipment, the outlet is blocked by the blocking piece, so that impurities are prevented from entering the source bottle, and the tightness of the source bottle is improved; removing the closure while the source bottle is connected to the preparation device; the outlet pipe is also provided with an output valve, and when the outlet is connected with the preparation equipment, the preparation equipment is selectively controlled to be connected with or disconnected from the accommodating cavity, so that the output state of the source bottle is conveniently controlled; the source bottle further comprises a detection component, can detect various parameters of the chemical precursors in the accommodating cavity, is convenient to observe the collection state of the source bottle, has perfect functions and is wide in application range.

Description

Source bottle

Technical Field

The utility model relates to the technical field of film preparation, in particular to a source bottle.

Background

The chemical precursor is a core manufacturing material of a semiconductor film deposition process, is applied to the semiconductor production and manufacturing process, carries target elements, is in a gaseous state or a volatile liquid state, has chemical heat stability, and simultaneously has corresponding substances with reactivity or physical properties. The precursor is mainly applied to vapor deposition to form various thin film layers meeting the manufacturing requirements of semiconductors. In addition, the precursor can also be used for semiconductor epitaxial growth, etching, ion implantation doping, cleaning and the like, and is one of core materials for semiconductor manufacture.

In atomic layer deposition coating equipment, some chemical precursors are inflammable, toxic and even explosive, and relate to dangerous chemicals with micro-positive pressure, normal pressure and medium-low pressure, and strict requirements are placed on the safety and cleanliness of a container for storing the chemical precursors, namely a source bottle.

In the prior art, the source bottle has single function and complex sealing structure, so that the utilization efficiency is low during use; there is also a risk of poor sealing properties and leakage during storage.

Disclosure of utility model

The utility model aims to provide a source bottle which has perfect functions, simple sealing structure and good sealing performance, is more convenient for an operator to control the output state of the source bottle and has wider application range.

To achieve the purpose, the utility model adopts the following technical scheme:

a source bottle comprising:

the bottle body is internally provided with a containing cavity for storing chemical precursors;

The inlet pipe and the outlet pipe are arranged on the bottle body and are communicated with the accommodating cavity in a sealing way, an inlet is formed in one end, far away from the accommodating cavity, of the inlet pipe, and an outlet is formed in one end, far away from the accommodating cavity, of the outlet pipe;

The plugging piece is detachably arranged at the inlet and the outlet and is respectively used for plugging the inlet when the inlet pipe is separated from the filling equipment and plugging the outlet when the outlet pipe is separated from the preparation equipment;

The output valve is arranged in the outlet pipe and is used for selectively enabling the preparation equipment to be communicated with or disconnected from the accommodating cavity when the outlet is connected with the preparation equipment and the plugging piece of the outlet is detached;

a detection assembly configured to detect a parameter of the chemical precursor within the containment chamber.

Preferably, the detection assembly comprises a liquid level detection device and a temperature detection device, which are both arranged on the bottle body, and the liquid level detection device is used for detecting the liquid level of the chemical precursor in the accommodating cavity; the temperature detection device is used for detecting the temperature of the chemical precursor in the accommodating cavity.

Preferably, the liquid level detection device comprises a plurality of detection probes, and the detection probes are arranged in the accommodating cavity and are arranged at intervals along the vertical direction.

Preferably, the bottom of the accommodating cavity is provided with an arc shape, and the bottom of the arc-shaped accommodating cavity is also provided with the detection probe.

Preferably, the temperature detecting device comprises a fixed pipe and a temperature detector, the top wall of the bottle body is provided with a temperature detecting mounting opening, the opening end of the fixed pipe is connected with the temperature detecting mounting opening and extends out of the bottle body, the sealing end of the fixed pipe extends to the bottom of the accommodating cavity, and the temperature detector is arranged in the fixed pipe through the opening end.

Preferably, the source bottle further comprises a connector lock, and the connector lock is arranged between the plugging piece and the inlet pipe and/or between the plugging piece and the outlet pipe and/or between the output valve and the outlet pipe.

Preferably, the source bottle further comprises an input valve provided to the inlet pipe to selectively connect or disconnect the preparation apparatus to or from the receiving chamber when the inlet is connected to the preparation apparatus and the blocking member of the inlet is detached.

Preferably, the thicknesses of the various parts of the bottle body are the same, the bottom of the bottle body is provided with a supporting seat, and the supporting seat is matched with the bottom of the bottle body and is hollow and cylindrical; the supporting seat is welded with the bottle body.

Preferably, the inner wall of the bottle body, the inside of the inlet pipe and the inside of the outlet pipe are all subjected to electrolytic polishing treatment, and the outer wall of the bottle body is subjected to mirror polishing treatment.

Preferably, the source bottle includes one or more handles disposed on top of the bottle body.

The utility model has the beneficial effects that:

The utility model provides a source bottle, which comprises a bottle body, an inlet pipe and an outlet pipe, wherein a containing cavity is arranged in the bottle body and used for storing chemical precursors; the inlet pipe and the outlet pipe are arranged on the bottle body and can be communicated with the accommodating cavity, so that the chemical precursors can be conveniently collected and output; the inlet pipe is arranged at one end far away from the accommodating cavity and is arranged at the other end far away from the accommodating cavity, the source bottle further comprises a plugging piece, the inlet and the outlet are detachably provided with the plugging piece, and when the inlet pipe is separated from the filling equipment, the inlet is plugged by the plugging piece; when the outlet pipe is separated from the preparation equipment, the output valve does not work, the outlet is sealed by the plugging piece only to simply and effectively plug the source bottle, so that impurities are prevented from entering the source bottle, and meanwhile, the source bottle is protected from being damaged by external force due to the sealing effect in the storage process of the preparation equipment; when the source bottle is connected with the preparation equipment, the blocking piece is removed firstly, and meanwhile, the output valve is arranged on the outlet pipe so as to selectively control the connection or disconnection between the preparation equipment and the accommodating cavity, thereby being convenient for operators to control the output state of the source bottle; the source bottle further comprises a detection component which is configured to detect various parameters of the chemical precursors in the accommodating cavity, so that the collection state of the source bottle can be observed conveniently and constantly, the function of the source bottle is perfect, and the application range is wider.

Drawings

FIG. 1 is a schematic view of a source bottle according to a first embodiment of the present utility model;

FIG. 2 is a cross-sectional view of a source bottle provided in a first embodiment of the utility model;

FIG. 3 is a schematic view of a source bottle according to a second embodiment of the present utility model;

Fig. 4 is a cross-sectional view of a source bottle provided in a second embodiment of the present utility model.

In the figure:

1. a bottle body; 11. a receiving chamber; 2. feeding a pipe; 21. an inlet; 3. a pipe outlet; 31. an outlet;

4. A blocking member; 5. an input valve; 6. an output valve; 7. a fixed tube; 8. a liquid level detection mounting port; 9. a connector lock; 10. a support base; 101. a handle.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

Example 1

As shown in fig. 1 to 2, the present embodiment discloses a source bottle, which comprises a bottle body 1, an inlet pipe 2 and an outlet pipe 3, wherein a containing cavity 11 is arranged in the bottle body 1 for storing chemical precursors; the inlet pipe 2 and the outlet pipe 3 are arranged on the bottle body 1 and can be communicated with the accommodating cavity 11, so that chemical precursors can be conveniently collected and output; the end of the inlet pipe 2 far away from the accommodating cavity 11 is provided with an inlet 21, the end of the outlet pipe 3 far away from the accommodating cavity 11 is provided with an outlet 31, the source bottle further comprises a plugging piece 4, the inlet 21 and the outlet 31 are both detachably provided with the plugging piece 4, and when the inlet pipe 2 of the source bottle is separated from filling equipment, the inlet 21 is plugged by the plugging piece 4; when the outlet pipe 3 of the source bottle is separated from the preparation equipment, the output valve 6 does not work, the outlet 31 is sealed by the plugging piece 4, so that the source bottle is simply and effectively plugged, impurities are prevented from entering the source bottle, and meanwhile, the source bottle is protected from being damaged by external force due to the sealing effect in the storage process of the preparation equipment; when the source bottle is connected with the preparation equipment, the blocking piece 4 is removed firstly, and meanwhile, the outlet pipe 3 is provided with the output valve 6 for selectively blocking the outlet pipe 3, so that the connection or disconnection between the preparation equipment and the accommodating cavity 11 can be controlled, and an operator can conveniently control the output state of the source bottle; the plugging piece 4 and the output valve 6 are arranged on the outlet pipe 3, the plugging piece 4 is removed when the outlet 31 is connected with preparation equipment, and the pressure in the bottle is ensured to be within a safe range by controlling the output valve 6 to exhaust during preparation; the source bottle further comprises a detection component which is configured to detect various parameters of the chemical precursors in the accommodating cavity 11, including temperature, pressure, volume and the like, so that the collection state of the source bottle can be conveniently observed from time to time, the function of the source bottle is perfect, and the application range is wider.

It should be noted that, the output valve 6 may be a manual valve or a pneumatic valve, and is configured according to actual situations.

Specifically, the detection assembly comprises a liquid level detection device and a temperature detection device, which are both arranged on the bottle body 1, wherein the liquid level detection device is used for detecting the liquid level of the chemical precursor in the accommodating cavity 11; the temperature detection device is used for detecting the temperature of the chemical precursor in the accommodating cavity 11, so that an operator can observe the state in the source bottle conveniently, corresponding adjustment can be made correspondingly, and the multifunctional application of the source bottle can be realized.

In this embodiment, the liquid level detection device is installed at liquid level detection installing port 8, and the liquid level detection device is including a plurality of detection probes, and a plurality of detection probes all set up in holding chamber 11 to set up along vertical direction interval, can learn the liquid level height variation in the source bottle more conveniently and accurately, thereby calculate the volume of chemical precursor, and can remind operating personnel source bottle's residual capacity and whether need renew the source bottle.

Preferably, the bottom of the accommodating cavity 11 is provided with an arc shape, so that chemical precursors can be conveniently output, and particularly, the bottom is prevented from being remained; the bottom of the arc-shaped accommodating cavity 11 is also provided with a detection probe, and when the chemical precursors collected in the source bottle are less, the liquid level height can be accurately known.

In other embodiments, or adopt radar detector etc. as liquid level detection device, the purpose is that can detect liquid level height in real time, and need not to contact with the chemical precursor who gathers in the source bottle, and the chemical precursor who gathers in the source bottle is purer, and the volumetric error that the calculation obtained is littleer.

As shown in fig. 2 in particular, the temperature detecting device includes a fixed tube 7 and a temperature detector, and one end of the fixed tube 7 is opened and one end is closed. In order to realize the installation of the fixed pipe 7, a temperature detection installation port is arranged on the top wall of the bottle body 1, and the opening end of the fixed pipe 7 is connected with the temperature detection installation port, in particular to be in sealing connection, so that leakage of chemical precursors at the temperature detection installation port is prevented. Meanwhile, the opening of the fixed pipe 7 extends out of the bottle body 1, so that the installation is convenient; the sealed end of the fixed tube 7 extends to the bottom of the accommodating cavity 11, and the temperature detector is arranged in the fixed tube 7 through the open end, so that the temperature detector can measure the temperature of chemical precursors at each height in the accommodating cavity 11. The temperature detection device is arranged to ensure that the bottle body 1 is sealed, and meanwhile, the temperature detection device is prevented from being in direct contact with a chemical precursor, so that the storage safety is ensured, an operator can conveniently use the temperature detector to check the temperature, and the problem that the chemical precursor possibly has corrosiveness to damage and fail the temperature monitor is avoided; in addition, the extension of the fixed tube 7 to the bottom ensures that the temperature detector can accurately measure the corresponding temperature even when there is a small amount of chemical precursor in the source bottle.

Furthermore, the inner wall of the bottle body 1, the inside of the inlet pipe 2 and the inside of the outlet pipe 3 are subjected to electrolytic polishing treatment, so that the inside is smooth and is not easy to cause adhesion or blockage of chemical precursors, and meanwhile, the cleaning is convenient; the outer wall of the bottle body 1 is subjected to mirror polishing treatment, so that the structural rigidity of the bottle body 1 is enhanced, and the attractive and clean appearance is maintained.

Optionally, the source bottle further comprises a handle 101 arranged on the outer surface of the bottle body 1, so that an operator can conveniently move the source bottle, and the source bottle can be used more labor-saving and more flexible; and the handle 101 can be provided with one or more, and the relation between docking and placement is specifically set according to practical situations.

In this embodiment, the handle 101 sets up at the top of bottle 1 to be provided with two handles 101 at the outer fringe symmetry at top, be "冂" font setting, and the both ends of handle 101 all are connected with bottle 1, more make things convenient for both hands to the removal of source bottle to get and put.

Preferably, the bottom thickness of the bottle body 1 is greater than the upper thickness, and the lower surface of the bottle body 1 is provided as a horizontal placement surface so that the source bottle can be stably placed.

Example two

As shown in fig. 3 to 4, the present embodiment discloses a source bottle, which differs from the source bottle disclosed in the first embodiment in the following ways:

Specifically, the source bottle further comprises an input valve 5 which is arranged on the inlet pipe 2, when the inlet 21 is separated from the filling equipment, the input valve 5 does not work, and the plugging of the inlet pipe 2 is completed only by the plugging piece 4 of the inlet 21, so that the source bottle is sealed; when the inlet 21 is connected with filling equipment and the plugging piece 4 is removed, the input valve 5 is controlled to selectively plug the inlet pipe 2, so that the filling equipment and the accommodating cavity 11 can be controlled to be connected or disconnected, and an operator can conveniently control the input state of the source bottle; the plugging piece 4 and the input valve 5 are arranged on the inlet pipe 2, the plugging piece 4 is removed when the inlet 21 is connected with filling equipment, the inlet pipe 2 is plugged by controlling the input valve 5 when filling is finished, and the sealing performance of the source bottle is ensured when the inlet 21 is separated from the filling equipment under the condition that the source bottle needs to be replaced.

Alternatively, the input valve 5 in this embodiment may be a manual valve or a pneumatic valve, and is configured according to actual needs.

Further, the source bottle further comprises a plurality of connector locks 9 which are arranged according to specific practical conditions and are used for being fixed between the connectors to prevent looseness from being generated between the connectors and influence the sealing effect.

In this embodiment, all be provided with joint lock 9 between shutoff piece 4 and advance between pipe 2, shutoff piece 4 and the exit tube 3, between output valve 6 and exit tube 3 and between input valve 5 and exit tube 3, prevent that the joint department from becoming flexible gas leakage or weeping, chemical precursor volatilizes or extravagant, causes the potential safety hazard, influences the cost.

Preferably, the thicknesses of the positions where the bottle bodies 1 are arranged are the same, and in order to ensure that the source bottles can be stably placed, the bottom of the bottle bodies 1 is provided with a supporting seat 10, and the supporting seat 10 is matched with the bottom of the bottle bodies 1, so that the source bottles can be stably placed, and potential safety hazards caused by dumping, smashing and injuring operators or knocking and damaging the bottle bodies 1 are prevented; the support base 10 is hollow and cylindrical, so that compared with the first embodiment, the quality of the source bottle can be reduced, and the source bottle can be moved more labor-saving; the supporting seat 10 is welded with the bottle body 1, the welding line is smooth, the appearance is attractive, the mechanical property and the mechanical property of the welding line are good, meanwhile, the welding line is not easy to change color, and the product qualification rate is greatly improved. The support base 10 may further be provided with a lightening hole, so that the weight of the source bottle is further reduced while the support strength is ensured.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. A source bottle, comprising:

the bottle body (1) is internally provided with a containing cavity (11) for storing chemical precursors;

The inlet pipe (2) and the outlet pipe (3) are arranged on the bottle body (1) and are communicated with the accommodating cavity (11) in a sealing way, an inlet (21) is formed in one end, far away from the accommodating cavity (11), of the inlet pipe (2), and an outlet (31) is formed in one end, far away from the accommodating cavity (11), of the outlet pipe (3);

The plugging piece (4) is detachably arranged at the inlet (21) and the outlet (31), and is used for plugging the inlet (21) when the inlet pipe (2) is separated from filling equipment and plugging the outlet (31) when the outlet pipe (3) is separated from preparation equipment;

An output valve (6) arranged on the outlet pipe (3) and used for selectively enabling the preparation equipment to be communicated with or disconnected from the accommodating cavity (11) when the outlet (31) is connected with the preparation equipment and the plugging piece (4) of the outlet (31) is detached;

a detection assembly configured to detect a parameter of the chemical precursor within the containment chamber (11).

2. The source bottle according to claim 1, wherein the detection assembly comprises a liquid level detection device and a temperature detection device, both arranged on the bottle body (1), the liquid level detection device being used for detecting the liquid level of the chemical precursor in the accommodating cavity (11); the temperature detection device is used for detecting the temperature of the chemical precursor in the accommodating cavity (11).

3. Source bottle according to claim 2, characterized in that the liquid level detection device comprises a plurality of detection probes, which are all arranged in the accommodating cavity (11) and are arranged at intervals along the vertical direction.

4. A source bottle according to claim 3, characterized in that the bottom of the accommodation chamber (11) is provided in an arc shape, the bottom of the arc-shaped accommodation chamber (11) being also provided with the detection probe.

5. Source bottle according to claim 2, characterized in that the temperature detection device comprises a fixed tube (7) and a temperature detector, the top wall of the bottle body (1) is provided with a temperature detection mounting opening, the open end of the fixed tube (7) is connected with the temperature detection mounting opening and extends out of the bottle body (1), the sealed end of the fixed tube (7) extends to the bottom of the accommodating cavity (11), and the temperature detector is placed in the fixed tube (7) through the open end.

6. Source bottle according to claim 1, characterized in that it further comprises a joint lock (9), said joint lock (9) being provided between said closure member (4) and said inlet tube (2), and/or between said closure member (4) and said outlet tube (3), and/or between said outlet valve (6) and said outlet tube (3).

7. Source bottle according to claim 1, characterized in that it further comprises an input valve (5), said input valve (5) being provided to said inlet tube (2) to selectively connect or disconnect said preparation device from the housing chamber (11) when said inlet (21) is connected to said preparation device and said closure (4) of said inlet (21) is detached.

8. Source bottle according to claim 1, characterized in that the thickness of the bottle body (1) is the same everywhere, and the bottom of the bottle body (1) is provided with a supporting seat (10), the supporting seat (10) is adapted to the bottom of the bottle body (1) and is hollow cylindrical; the supporting seat (10) is welded with the bottle body (1).

9. The source bottle according to claim 1, wherein the inner wall of the bottle body (1), the inside of the inlet pipe (2) and the inside of the outlet pipe (3) are all subjected to electrolytic polishing treatment, and the outer wall of the bottle body (1) is subjected to mirror polishing treatment.

10. Source bottle according to claim 1, characterized in that it comprises one or more handles (101), said handles (101) being arranged on top of the bottle body (1).