CN221046416U

CN221046416U - Photoresist spitting device

Info

Publication number: CN221046416U
Application number: CN202322844682.1U
Authority: CN
Inventors: 陈晓光; 康小文; 于深
Original assignee: Zhujing New Materials Technology Yantai Co ltd
Current assignee: Zhujing New Materials Technology Yantai Co ltd
Priority date: 2023-10-24
Filing date: 2023-10-24
Publication date: 2024-05-31
Anticipated expiration: 2033-10-24

Abstract

The utility model discloses a photoresist discharge device, which belongs to the field of wafer gluing and comprises a connecting block, wherein a support is fixedly connected to the side wall of the connecting block close to the bottom surface, the support is in an L-shaped arrangement, a support plate is fixedly connected to the bottom surface of the support, a pump is fixedly arranged on the side wall of the support plate, a spraying pipe is fixedly connected to the output end of the pump, a cleaning mechanism is arranged on the side wall of the spraying pipe, a transverse plate is fixedly connected to the side wall of the support, and a clamping mechanism is arranged on the left side wall of the transverse plate.

Description

Photoresist spitting device

Technical Field

The utility model relates to the field of wafer gluing, in particular to a photoresist spitting device.

Background

The full-automatic spray type glue coater is adopted to spray the wafer, and compared with the traditional coating processes such as spin coating, dip coating and the like, the method has the advantages of high uniformity, good coating property on the microstructure, controllable coating area and the like; a novel coating mode following the traditional spin coating process.

After the spraying type glue spreader finishes spraying the wafer, the wafer is usually required to be taken down for replacement by stopping, and as the glue spraying pipe is started and stopped for many times, glue drops are easily collected at the pipe orifice, if the glue drops drop on the wafer, the coating process of the wafer is affected, the wafer is defective, and the yield of the wafer is affected.

Disclosure of utility model

1. Technical problem to be solved

Aiming at the problems in the prior art, the utility model aims to provide a photoresist spitting device which can realize that when a glue spraying pipe runs for a period of time, in the process of replacing a wafer, glue drops collected at a pipe orifice can be cleaned by utilizing a cleaning sponge, so that the glue drops are prevented from falling on the wafer, and the cleaning of the pipe orifice of the glue spraying pipe is improved.

2. Technical proposal

In order to solve the problems, the utility model adopts the following technical scheme.

The utility model provides a photoresist spitting device, includes the connecting block, connecting block lateral wall is close to bottom surface department fixedly connected with support, the support is L shape setting, support bottom surface fixedly connected with backup pad, backup pad lateral wall fixed mounting has the pump machine, pump machine output fixedly connected with spouts the rubber tube, it is provided with clearance mechanism on the rubber tube lateral wall to spout, support lateral wall fixedly connected with diaphragm, the diaphragm left side wall is provided with fixture.

Further, the cleaning mechanism comprises an annular plate, the annular plate is located outside the rubber spraying pipe, cleaning sponge is fixedly connected to the inner side wall of the annular plate, a vertical plate is fixedly connected to the side wall of the annular plate, a cylinder is fixedly mounted on the side wall of the supporting plate, and the output end of the cylinder is fixedly connected with the vertical plate.

Further, the fixture comprises a rectangular block, the rectangular block is movably connected with the transverse plate, a through groove is formed in the top surface of the rectangular block, an arc-shaped plate is arranged in the through groove, a bolt is connected with the left side wall of the rectangular block in a threaded manner, and the bolt is rotationally connected with the arc-shaped plate.

Further, the right side wall of the rectangular block is fixedly connected with a universal ball, the left side wall of the transverse plate is provided with a ball groove, and the universal ball is mutually matched with the ball groove.

Further, the side wall of the supporting plate is fixedly connected with a positioning rod, and the positioning rod penetrates through the vertical plate and is movably connected with the vertical plate.

3. Advantageous effects

Compared with the prior art, the utility model has the advantages that:

(1) This scheme is through support, backup pad, spout the mutual cooperation between rubber tube and the clearance mechanism etc. after spouting the rubber tube operation a period, at the in-process of changing the wafer, spouts the rubber tube and stops the operation, utilizes the clearance sponge can clear up the glue that the mouth of pipe was assembled, avoids falling on the wafer, influences the yield of wafer, and then promotes spouts the clean of rubber tube mouth.

(2) This scheme is through mutually supporting between support, diaphragm and the fixture etc. spouts gluey in-process to the wafer, if need observe or when debugging it, can fix the flashlight that throws light on logical inslot to remove along with spouting the rubber tube, throw light on the position that the wafer spouted gluey, make things convenient for the staff to observe spouts the gluey state.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic view of a clamping mechanism according to the present utility model;

Fig. 3 is an enlarged view of the utility model at a in fig. 1.

The reference numerals in the figures illustrate:

1. A connecting block; 2. a bracket; 3. a support plate; 4. a pump machine; 5. spraying a rubber tube; 6. an annular plate; 7. cleaning the sponge; 8. a riser; 9. a cylinder; 10. a cross plate; 11. rectangular blocks; 12. a through groove; 13. an arc-shaped plate; 14. a bolt; 15. a universal ball; 16. a spherical groove; 17. a positioning rod; 18. double faced adhesive tape.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model; it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present utility model are within the protection scope of the present utility model.

Example 1:

Referring to fig. 1-3, a photoresist spitting device comprises a connecting block 1, wherein a support 2 is fixedly connected to the side wall of the connecting block 1 near the bottom surface, the support 2 is in an L-shaped arrangement, a support plate 3 is fixedly connected to the bottom surface of the support 2, a pump 4 is fixedly mounted on the side wall of the support plate 3, a spraying pipe 5 is fixedly connected to the output end of the pump 4, a cleaning mechanism is arranged on the side wall of the spraying pipe 5, a transverse plate 10 is fixedly connected to the side wall of the support 2, and a clamping mechanism is arranged on the left side wall of the transverse plate 10.

Referring to fig. 1 and 3, clearance mechanism includes annular plate 6, annular plate 6 is located spouts the rubber tube 5 outside, annular plate 6 inside wall fixedly connected with clearance sponge 7, annular plate 6 inside wall fixedly connected with double faced adhesive tape 18, clearance sponge 7 bonds with double faced adhesive tape 18, can be convenient for clear up sponge 7 and dismantle the change through setting up double faced adhesive tape 18, annular plate 6 lateral wall fixedly connected with riser 8, backup pad 3 lateral wall fixed mounting has cylinder 9, cylinder 9 output and riser 8 fixed connection, backup pad 3 lateral wall fixedly connected with locating lever 17, locating lever 17 runs through riser 8 and rather than swing joint, can carry out spacingly to riser 8 through setting up locating lever 17, guarantee that the operation of annular plate 6 is stable.

Through mutually supporting between support 2, backup pad 3, spouting rubber tube 5 and the clearance mechanism etc., after spouting rubber tube 5 operation a period, at the in-process of changing the wafer, spout rubber tube 5 stop operation, utilize clearance sponge 7 can clear up the glue that the mouth of pipe was assembled, avoid falling on the wafer, influence the yield of wafer, and then promote spouting rubber tube 5 mouth of pipe clean.

Referring to fig. 1 and 2, fixture includes rectangle piece 11, rectangle piece 11 and diaphragm 10 swing joint, rectangle piece 11 right side wall fixedly connected with universal ball 15, ball groove 16 has been seted up to diaphragm 10 left side wall, universal ball 15 and ball groove 16 mutually match, utilize universal ball 15 and ball groove 16 can be convenient for adjust the angle of rectangle piece 11 for the torch can be according to the demand to spout the glue position and throw light on of glue pipe 5, logical groove 12 has been seted up to rectangle piece 11 top surface, be provided with arc 13 in the logical groove 12, rectangle piece 11 left side wall threaded connection has bolt 14, bolt 14 and arc 13 rotate and are connected.

Through mutually supporting between support 2, diaphragm 10 and the fixture etc. in spouting gluey in-process to the wafer, if need observe or when debugging it, can fix the flashlight that throws light on in logical inslot 12 to along with spouting rubber tube 5 removal, throw light on the position that the wafer spouted gluey, make things convenient for the staff to observe spouting the gluey state.

When in use: when the glue spraying pipe 5 runs for a set time, the glue spraying pipe 5 pauses to spray glue when a wafer is replaced, at the moment, the air cylinder 9 is started, the output end of the air cylinder 9 drives the annular plate 6 to move leftwards through the vertical plate 8, the annular plate 6 drives the cleaning sponge 7 to move leftwards, when the cleaning sponge 7 moves to the pipe orifice of the glue spraying pipe 5, the cleaning sponge 7 can adsorb and clean the residual glue at the pipe orifice, after the cleaning sponge 7 stops for a certain time, the cleaning sponge is reset through the air cylinder 9, the pipe orifice is prevented from collecting glue to drop on the wafer, when the glue spraying pipe 5 needs to be illuminated and observed, the flashlight can be inserted into the through groove 12, the arc plate 13 is driven to clamp the flashlight by tightening the bolt 14, the angle of the flashlight is adjusted by the universal ball 15, the glue spraying position of the wafer is illuminated, and the glue spraying state of the wafer is conveniently observed by workers.

The above description is only of the preferred embodiments of the present utility model; the scope of the utility model is not limited in this respect. Any person skilled in the art, within the technical scope of the present disclosure, may apply to the present utility model, and the technical solution and the improvement thereof are all covered by the protection scope of the present utility model.

Claims

1. The utility model provides a photoresist spitting device, includes connecting block (1), connecting block (1) lateral wall is close to bottom surface department fixedly connected with support (2), support (2) are L shape setting, support (2) bottom surface fixedly connected with backup pad (3), backup pad (3) lateral wall fixed mounting has pump machine (4), pump machine (4) output fixedly connected with spouts rubber tube (5), its characterized in that: the cleaning mechanism is arranged on the side wall of the rubber spraying pipe (5), the transverse plate (10) is fixedly connected with the side wall of the support (2), and the clamping mechanism is arranged on the left side wall of the transverse plate (10).

2. A resist discharge apparatus according to claim 1, wherein: the cleaning mechanism comprises an annular plate (6), the annular plate (6) is located outside the rubber spraying pipe (5), cleaning sponge (7) is fixedly connected to the inner side wall of the annular plate (6), a vertical plate (8) is fixedly connected to the side wall of the annular plate (6), an air cylinder (9) is fixedly mounted on the side wall of the supporting plate (3), and the output end of the air cylinder (9) is fixedly connected with the vertical plate (8).

3. A resist discharge apparatus according to claim 1, wherein: the clamping mechanism comprises a rectangular block (11), the rectangular block (11) is movably connected with a transverse plate (10), a through groove (12) is formed in the top surface of the rectangular block (11), an arc-shaped plate (13) is arranged in the through groove (12), a bolt (14) is connected with the left side wall of the rectangular block (11) in a threaded mode, and the bolt (14) is rotatably connected with the arc-shaped plate (13).

4. A resist discharge apparatus according to claim 3, wherein: the right side wall of the rectangular block (11) is fixedly connected with a universal ball (15), the left side wall of the transverse plate (10) is provided with a ball groove (16), and the universal ball (15) is matched with the ball groove (16).

5. A resist discharge apparatus according to claim 2, wherein: the side wall of the supporting plate (3) is fixedly connected with a positioning rod (17), and the positioning rod (17) penetrates through the vertical plate (8) and is movably connected with the vertical plate.

6. A resist discharge apparatus according to claim 2, wherein: the inner wall of the annular plate (6) is fixedly connected with a double faced adhesive tape (18), and the cleaning sponge (7) is adhered to the double faced adhesive tape (18).