CN221028769U - Insulation structure and single crystal production device - Google Patents

Abstract

The application relates to a heat insulation structure and a single crystal production device. The heat preservation structure is applied to a single crystal furnace of the single crystal production device and comprises a heat preservation cylinder and a plurality of cylindrical heat preservation felts. According to the application, the inner diameter size of the cylindrical heat-insulating felt is matched with the outer diameter size of the heat-insulating cylinder, so that the heat-insulating felt can be directly sleeved on the outer peripheral wall of the heat-insulating cylinder, rapid disassembly is realized, metal fixing parts such as hoops are not required to be used for fastening the heat-insulating felt, and labor cost and material cost required in the disassembly and assembly process are reduced. Because two adjacent heat preservation felts are provided with first cooperation portion and second cooperation portion respectively, consequently can promote the joint effect, reduce the heat leak possibility, promote heat preservation effect. Meanwhile, the heat-insulating cylinder is formed by a plurality of splicing modules, so that when corrosion damage occurs at the local position of the heat-insulating cylinder, the splicing modules at the corresponding positions are directly replaced, the whole heat-insulating cylinder is not required to be replaced, and the maintenance cost of the heat-insulating structure is reduced.

Description

Insulation structure and single crystal production device

Technical Field

The application relates to the technical field of monocrystalline silicon production, in particular to a heat insulation structure and a monocrystalline production device.

Background

The single crystal furnace is a device for growing single crystal silicon by a Czochralski method in an inert gas (mainly argon, nitrogen and helium) environment, wherein a graphite heater is used for melting polycrystalline materials such as polycrystalline silicon and the like.

The single crystal furnace is provided with a heat preservation cylinder which is an important component of the internal thermal field of the single crystal furnace. The outer wall surface of the heat preservation cylinder is generally wrapped with a heat preservation felt with a certain thickness so as to preserve heat of a thermal field in the single crystal furnace.

In the related art, the cost for disassembling and maintaining the heat insulation structure is high, and the use experience of a user is affected.

Disclosure of utility model

Based on the above, it is necessary to provide a heat insulation structure aiming at the problem of high disassembly and maintenance costs of the existing heat insulation structure.

An insulation structure applied to a single crystal furnace, the insulation structure comprising:

The heat preservation cylinder comprises a plurality of splicing modules which are distributed along the circumferential direction of the heat preservation cylinder and are sequentially connected in a head-to-tail detachable mode;

The inner diameter of the thermal insulation felts is matched with the outer diameter of the thermal insulation cylinder; the heat preservation felts are sequentially connected along the gravity direction and are sleeved on the outer peripheral wall of the heat preservation cylinder;

Two adjacent heat preservation felts are provided with first cooperation portion respectively and are used for with the second cooperation portion of first cooperation portion block.

In one embodiment, the splicing module comprises a first splicing piece and a second splicing piece which are alternately arranged along the circumferential direction of the heat insulation felt; the first splicing piece is matched with the second splicing piece in a clamping mode.

In one embodiment, a first groove is formed in one end of the first splicing piece, which faces away from the heat insulation felt, along the radial direction of the heat insulation felt;

Along the radial of heat preservation section of thick bamboo, the second splice deviates from the one end construction of heat preservation felt has be used for with first recess joint complex first arch.

In one embodiment, the first grooves are formed in two ends of the first splicing piece along the circumferential direction of the heat-insulating felt;

Along the circumference of heat preservation felt, the both ends of second splice all are provided with first arch.

In one embodiment, one of the splice module and the insulation blanket is provided with a second protrusion, and the other is provided with a second groove for snap-fit engagement with the second protrusion.

In one embodiment, the contact surface between the second protrusion and the second recess comprises a planar or arcuate surface.

In one embodiment, one of the first mating portion and the second mating portion includes a third protrusion, and the other includes a third recess for snap-fit engagement with the third protrusion.

In one embodiment, a sealing element is connected between the third protrusion and the third groove, and the sealing element abuts against the outer peripheral wall of the heat preservation cylinder.

In one embodiment, the thermal insulation structure further comprises a bottom felt, and the bottom felt is provided with an exhaust hole along the gravity direction.

The single crystal production device comprises a single crystal furnace and the heat preservation structure, wherein the heat preservation structure is arranged in the single crystal furnace.

The heat preservation structure applied to the single crystal furnace comprises a heat preservation cylinder and a plurality of cylindrical heat preservation felts. Compared with the prior art that the insulating felt is manually cut and then wrapped on the outer wall surface of the insulating cylinder, and the inner diameter size of the cylindrical insulating felt is matched with the outer diameter size of the insulating cylinder in a fastening way through metal parts such as hoops, the insulating felt can be directly sleeved on the outer peripheral wall of the insulating cylinder, so that quick disassembly is realized, the insulating felt is not required to be fastened by using metal fixing parts such as hoops, and labor cost and material cost required in the disassembly and assembly process are reduced. Because be provided with first cooperation portion and second cooperation portion between two adjacent heat preservation felts respectively, consequently can promote the joint effect of two adjacent heat preservation felts through first cooperation portion and second cooperation portion, reduce the heat leak possibility, promote heat preservation effect. Meanwhile, the heat-insulating cylinder is formed by a plurality of splicing modules, so that when the local splicing modules are corroded and damaged, the splicing modules at the corresponding positions are directly replaced, the whole heat-insulating cylinder is not required to be replaced, and the maintenance cost of the heat-insulating structure is reduced.

Drawings

FIG. 1 is a schematic cross-sectional view of a single crystal production apparatus according to an embodiment of the present application.

Fig. 2 is a top view of a thermal insulation structure according to an embodiment of the application.

Fig. 3 is a partial schematic view of the insulation structure shown in fig. 2.

Fig. 4 is a schematic perspective view of a first splice in the insulation structure shown in fig. 3.

Fig. 5 is a schematic perspective view of a second splice in the insulation structure shown in fig. 3.

Fig. 6 is a partial top view of a thermal insulation structure according to another embodiment of the present application.

Reference numerals: 10. a single crystal production device; 100. a thermal insulation structure; 110. splicing modules; 111. a first splice; 1111. a first groove; 1112. a second protrusion; 112. a second splice; 1121. a first protrusion; 120. a thermal insulation felt; 121. a first mating portion; 1211. a third protrusion; 122. a second mating portion; 1221. a third groove; 123. a second groove; 124. a seal; 125. a base felt; 1251. an exhaust hole; 130. a top protection support ring; 200. a heat shield; 210. a thermal support ring; 300. a water cooling screen; 400. an oxygen-reducing ring; 500. a heater.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that, if any, these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., are used herein with respect to the orientation or positional relationship shown in the drawings, these terms refer to the orientation or positional relationship for convenience of description and simplicity of description only, and do not indicate or imply that the apparatus or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application.

Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.

In the present application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.

In the prior art, the used thermal insulation felt is generally graphite soft felt, and is wrapped on the outer wall surface of the thermal insulation cylinder after being cut by professionals, so that a plurality of problems exist in the form. Firstly, the package cutting needs professional personnel to operate, and threatens personnel safety; secondly, fixing the thermal insulation graphite soft felt by using a metal hoop; in addition, the graphite soft felt is easy to pulverize and lose efficacy, and the problem of heat leakage is easy to occur at the spliced part, so that the heat preservation effect is influenced; and the graphite soft felt is easy to generate different flying batting and felt fur to pollute the high-purity environment and influence crystallization. In addition, the graphite soft felt is easy to generate accidents such as spontaneous combustion and the like.

Based on this, an embodiment of the present application provides a thermal insulation structure, which can solve at least one technical problem described above. The following describes the insulation structure according to the embodiment of the present application in detail with reference to the accompanying drawings.

Fig. 1 is a schematic cross-sectional view of a single crystal production apparatus according to an embodiment of the present application, fig. 2 is a top view of a thermal insulation structure according to an embodiment of the present application, fig. 3 is a partial schematic view of the thermal insulation structure shown in fig. 2, and fig. 2 corresponds to the top view when fig. 1 is a front view. Referring to fig. 1 to 3, an insulation structure 100 applied to a single crystal furnace according to an embodiment of the present application includes an insulation cylinder, where the insulation cylinder includes a plurality of splicing modules 110 distributed along a circumferential direction of the insulation cylinder and detachably connected end to end in sequence. The insulation structure 100 further comprises a plurality of cylindrical insulation felts 120, wherein the inner diameter of the insulation felts 120 is matched with the outer diameter of the insulation cylinder; the plurality of heat preservation felts 120 are sequentially connected along the gravity direction and are sleeved on the outer peripheral wall of the heat preservation cylinder; the adjacent two insulation blankets 120 are respectively provided with a first fitting portion 121 and a second fitting portion 122 for engagement with the first fitting portion 121. As shown in fig. 1, the direction of gravity is indicated by arrow Z.

Compared with the prior art that the insulating felt is manually cut and then wrapped on the outer wall surface of the insulating cylinder and is fastened by metal parts such as hoops, the inner diameter size of the cylindrical insulating felt 120 is designed to be matched with the outer diameter size of the insulating cylinder, so that the insulating felt 120 can be directly sleeved on the outer peripheral wall of the insulating cylinder, quick disassembly is realized, the insulating felt 120 is not required to be fastened by metal fixing parts such as hoops, the labor cost and the material cost required in the disassembly and assembly process are reduced, the contact injury of personnel is not reduced by manually wrapping the felt any more, and the metal pollution is reduced. Because the adjacent two heat preservation felts 120 are respectively provided with the first matching part 121 and the second matching part 122, the joint effect of the adjacent two heat preservation felts 120 can be improved, and the possibility of heat leakage is reduced. Meanwhile, since the heat-insulating cylinder is composed of a plurality of splicing modules 110, when the local splicing modules 110 are corroded and damaged, the splicing modules 110 at the corresponding positions are directly replaced, the whole heat-insulating cylinder is not required to be replaced, and the maintenance cost of the heat-insulating structure 100 is reduced.

Wherein, the thermal insulation felt 120 can be formed by integrally forming graphite materials such as asphalt base or viscose base, and the like, and the surface of the solid felt is coated with the coating to have the effects of corrosion resistance and no slag drop, the density is more than 0.2g/cm ³, the ash content is less than 200ppmw, the heat conductivity coefficient is less than 0.15W/(m.K), and the thickness of the coating is more than 1mm. With this arrangement, the potential for pulverization of insulation blanket 120 and fly of the blanket is reduced. Further, the splicing module 110 adopts a high-purity carbon-carbon composite material and performs surface densification treatment to reduce the possibility of peeling, pulverization and other anomalies under the flushing of high-temperature inert gas.

As shown in fig. 1, 3 to 5, in one embodiment, the splice module 110 includes first and second splice members 111 and 112 alternately arranged in sequence in a circumferential direction; the first splicing element 111 and the second splicing element 112 are in clamping fit. That is, the splicing module 110 is formed by splicing a plurality of first splicing elements 111 and a plurality of second splicing elements 112 alternately in sequence. Because the heat-preserving cylinder is surrounded outside the heater 500, that is, the first splicing element 111 and the second splicing element 112 are closer to the heater 500, the interval is generally 30-50 mm, so when the first splicing element 111 or the second splicing element 112 is partially corroded and damaged, the first splicing element 111 or the second splicing element 112 at the corresponding position is directly replaced without replacing the whole heat-preserving cylinder, and the maintenance cost of the heat-preserving structure 100 is reduced. It will be appreciated that along the radial direction of the insulation blanket 120, the inner walls and outer walls of the first and second splice members 111 and 112 are arc-shaped to ensure that the insulation can spliced therefrom is generally cylindrical.

As shown in fig. 3 to 5, in one embodiment, an end of the first splice 111 facing away from the insulation blanket 120 is configured with a first groove 1111 in a radial direction of the insulation blanket 120; along the radial direction of the insulation cylinder, one end of the second splicing element 112, which faces away from the insulation blanket 120, is provided with a first protrusion 1121 for being in clamping fit with the first groove 1111. In this way, the connection between the adjacent first splicing member 111 and the second splicing member 112 can be achieved by the snap fit between the first protrusion 1121 and the first groove 1111. The thickness of the first splicing element 111 and the second splicing element 112 along the radial direction is not less than 5mm, and the overlap length of the first splicing element 111 and the second splicing element 112 is 8 mm-10 mm, that is, the length of the first protrusion 1121 along the circumferential direction may be 8 mm-10 mm. By controlling the overlap joint length of the first splicing piece 111 and the second splicing piece 112, the clamping effect of the first splicing piece and the second splicing piece is guaranteed, and the integral assembly effect and the usability of the heat preservation barrel are further guaranteed.

As shown in fig. 3 to 5, in one embodiment, first grooves 1111 are provided at both ends of the first splice 111 and first protrusions 1121 are provided at both ends of the second splice 112 in the circumferential direction of the insulation blanket 120. That is, the first splicing member 111 and the second splicing member 112 are different in shape and complementary in shape, the first splicing member 111 is protruded in a direction away from the insulation felt 120, and the second splicing member 112 is protruded in a direction close to the insulation felt 120, and the first splicing member 111 and the second splicing member are clamped with the first groove 1111 through the first protrusion 1121 to be assembled into the insulation cylinder.

As shown in fig. 6, in other embodiments, the first splicing element 111 and the second splicing element 112 have the same shape, and one end of the first splicing element 111 is provided with the first protrusion 1121 and the other end is provided with the first groove 1111 along the circumferential direction of the insulation blanket 120. In this way, when the assembly is performed, the first protrusion 1121 and the first groove 1111 are directly aligned and clamped without distinguishing the first splicing member 111 from the second splicing member 112, so that the assembly efficiency is improved.

As shown in fig. 3, in one embodiment, one of the splice module 110 and the insulation blanket 120 is provided with a second protrusion 1112, and the other is provided with a second groove 123 for snap-fit engagement with the second protrusion 1112. Specifically, be provided with second arch 1112 on the concatenation module 110, second recess 123 set up on heat preservation felt 120, through the unsmooth cooperation of second arch 1112 and second recess 123, realize the grafting of concatenation module 110 and heat preservation felt 120, further promote the connection effect of both, and then promote heat preservation performance. It will be appreciated that the positions of the second protrusions and the second grooves may be interchanged, i.e. the second protrusions are arranged on the insulation blanket and the second grooves are arranged on the splice module.

In one embodiment, as shown in FIG. 3, the interface between the second protrusions 1112 and the second grooves 123 comprises an arcuate surface. Specifically, the tip of the second protrusion 1112 may be arc-shaped, that is, the contact surface between the second protrusion 1112 and the second groove 123 is an arc-shaped surface, and the radius of curvature of the arc-shaped surface is greater than the outer diameter of the other positions of the second protrusion 1112, so that the second protrusion 1112 presents a structure with one large end and one small end, and is clamped with the second groove 123 through the large-diameter end, thereby improving the clamping effect of the two, reducing the possibility of detachment, and improving the connection stability of the insulation felt 120 and the splicing module 110.

In other embodiments, the contact surface between the second protrusion and the second groove may also be a plane, i.e. the second protrusion is rectangular in shape, so that the second protrusion and the second groove are easier to be engaged.

As shown in fig. 1, in one embodiment, a first mating portion 121 and a second mating portion 122 are provided between adjacent insulation blankets 120, one of the first mating portion 121 and the second mating portion 122 includes a third protrusion 1211, and the other includes a third groove 1221 for snap-fit engagement with the third protrusion 1211.

Specifically, as shown in fig. 1, the number of the insulation blankets 120 is three in the gravity direction, and a first insulation blanket 120, a second insulation blanket 120, and a third insulation blanket 120 are sequentially provided from top to bottom. Taking the second heat preservation felt 120 and the third heat preservation felt 120 as examples, the first matching part 121 is positioned at the lower end of the second heat preservation felt 120, and the first matching part 121 is a third protrusion 1211; the second mating portion 122 is located at an upper end of the third insulation felt 120, and the second mating portion 122 is a third groove 1221. The concave-convex matching of the second heat-insulating felt 120 and the third heat-insulating felt 120 is realized through the third protrusions 1211 and the third grooves 1221, so that the connection effect between the adjacent heat-insulating felts 120 is improved, and the sealing effect is further improved, the heat-insulating performance of the long-term operation of the thermal field of the single crystal furnace is effectively improved, the continuous heat-insulating effect of the thermal field is improved, and the energy consumption of the Czochralski single crystal is reduced.

It is understood that the manner of cooperation between the first insulation blanket 120 and the second insulation blanket 120 may refer to the second insulation blanket 120 and the third insulation blanket 120, and will not be described herein. Further, an upper support ring 130 is further disposed between the first insulation blanket 120 and the second insulation blanket 120, for supporting the first insulation blanket 120.

The concave-convex structures of the third protrusion 1211 and the third groove 1221 may be set according to the requirement, and are not particularly limited herein, as long as the third protrusion 1211 and the third groove 1221 can achieve engagement, and the height or depth of the concave-convex may be set according to the requirement.

In a specific embodiment, as shown in fig. 1, the contact surfaces of the third protrusion 1211 and the third recess 1221 are planar, more specifically, square surfaces. The square surface can be rectangular or square. Of course, the height of the square surfaces can be arbitrarily set, and the number of square surfaces can be arbitrarily set. For example, the contact surface includes a plurality of square surfaces that are rectangular waves and smoothly meet to ensure a tighter coupling of the third protrusion 1211 and the third recess 1221. It should be noted that the width and height of the square surface can be set according to the needs, and for the sake of beauty and convenience in processing, when two or more square surfaces are provided, the width and height of the square surfaces are generally kept uniform.

In other embodiments, the contact surface of the third protrusion and the third groove may be an arc surface, and of course, the arc of the arc surface may be set arbitrarily, and the number of times of bending the arc may be set arbitrarily. The aim of setting like this is that the combination of heat preservation felt at the contact surface of adjacent layer is more inseparable, and after heat preservation felt dismouting many times, the connection interface still can keep inseparable, effectively improves the thermal insulation performance of heat preservation felt.

As shown in fig. 1, in one embodiment, a seal 124 is connected between the third protrusion 1211 and the third groove 1221, and the seal 124 abuts against the outer peripheral wall of the thermal insulation cylinder. By providing the sealing member 124 between the joining positions of the adjacent insulation blankets 120, the sealing performance to the insulation cylinder is further improved, thereby improving the insulation performance of the insulation blankets 120 and improving the thermal field uniformity. The seal 124 may be specifically a soft felt.

As shown in fig. 1, in one embodiment, the thermal insulation structure 100 further includes a bottom felt 125, and the bottom felt 125 is provided with an exhaust hole 1251 along the gravity direction, so that the high-temperature air flow in the single crystal furnace can pass through the exhaust hole 1251 and is not in contact with the thermal insulation felt 120, thereby avoiding the corrosion of the thermal insulation felt 120 by high-temperature silicon steam, prolonging the service life and reducing the replacement cost.

As shown in fig. 1, the present application further provides a single crystal production apparatus 10, which includes a single crystal furnace and the above-mentioned thermal insulation structure 100, wherein the thermal insulation structure is disposed in the single crystal furnace. It will be appreciated that a vessel for holding the crystal material to be pulled and a heater 500 are also provided within the single crystal furnace, the heater 500 being configured to heat the vessel such that the crystal material to be pulled in the vessel is in an environment conducive to single crystal growth. The thermal insulation structure 100 surrounds the outer peripheral wall of the heater 500, and the thermal insulation structure 100 can perform a thermal insulation function on the single crystal growth environment, so that the thermal field stability is improved, and the growth of single crystals is facilitated. The container may be a quartz crucible, a graphite crucible, or the like. The heater 500 may be a radio frequency induction coil or the like.

As shown in fig. 1 and 2, the single crystal production device 10 has the heat insulation structure 100 of any embodiment, so that the heat insulation felt 120 can be directly sleeved on the outer peripheral wall of the heat insulation cylinder, rapid disassembly is realized, and metal fixing parts such as hoops and the like are not required to fasten the heat insulation felt 120, so that labor cost and material cost required in the disassembly process are reduced. Because the adjacent two heat preservation felts 120 are respectively provided with the first matching part 121 and the second matching part 122, the joint effect can be improved, the possibility of heat leakage is reduced, and the heat preservation effect is improved. Meanwhile, since the heat-insulating cylinder is composed of the plurality of splicing modules 110, when corrosion damage occurs at the local position of the heat-insulating cylinder, the splicing modules 110 at the corresponding positions can be directly replaced, the whole heat-insulating cylinder is not required to be replaced, and the maintenance cost of the heat-insulating structure 100 is reduced.

As shown in fig. 1, it can be understood that the single crystal production apparatus 10 further includes a heat shield 200 and a water-cooled shield 300, the heat shield 200 being disposed above the container, the heat shield 200 being for insulating heat. The water cooling screen 300 is arranged in the heat screen 200, and the water cooling screen 300 absorbs heat released by the monocrystalline silicon at the solid-liquid interface, so that the cooling of the monocrystalline silicon is accelerated. As shown in fig. 1, in some embodiments, a thermal support ring 210 is also provided inside the insulation blanket 120 for supporting the thermal shield 200. It will be appreciated that the heat support ring 210 is disposed coaxially with the insulation blanket 120 when the heat support ring 210 is installed so that the heat support ring 210 can be installed inside the insulation blanket 120 and at the top end of the insulation blanket 120.

As shown in fig. 1, in some embodiments, in order to reduce the heat radiation of the heater 500 to the lower middle part of the container, it is necessary to increase the oxygen reducing ring 400 at the lower edge of the heater 500 to reduce the radiation heating area of the heater 500 to the crucible, reduce the temperature of the lower middle part of the container, reduce the precipitation of oxygen element in the lower part of the container, and thus reduce the corrosion of liquid silicon to the container at high temperature, effectively reduce the oxygen content in the silicon crystal, and ensure the production quality of monocrystalline silicon.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (10)

1. The utility model provides a heat preservation structure, is applied to single crystal growing furnace, its characterized in that, heat preservation structure includes:

The heat preservation cylinder comprises a plurality of splicing modules (110) which are distributed along the circumferential direction of the heat preservation cylinder and are sequentially connected in a detachable mode from head to tail;

A plurality of tubular insulation felts (120), wherein the inner diameter of the insulation felts (120) is matched with the outer diameter of the insulation cylinder; the plurality of heat preservation felts (120) are sequentially connected along the gravity direction and are sleeved on the outer peripheral wall of the heat preservation cylinder;

Two adjacent heat preservation felts (120) are respectively provided with a first matching part (121) and a second matching part (122) used for being clamped with the first matching parts (121).

2. The insulation structure according to claim 1, wherein the splice module (110) includes first and second splice members (111, 112) alternately arranged in sequence along a circumferential direction of the insulation blanket (120); the first splicing piece (111) and the second splicing piece (112) are in clamping fit.

3. The insulation structure according to claim 2, characterized in that, in the radial direction of the insulation blanket (120), an end of the first splice (111) facing away from the insulation blanket (120) is configured with a first groove (1111);

Along the radial direction of the heat preservation cylinder, one end of the second splicing piece (112) facing away from the heat preservation felt (120) is provided with a first protrusion (1121) used for being in clamping fit with the first groove (1111).

4. A thermal insulation structure according to claim 3, wherein the first grooves (1111) are provided at both ends of the first splice (111) along the circumferential direction of the thermal insulation mat (120);

Along the circumference of the heat preservation felt (120), the two ends of the second splicing piece (112) are provided with the first protrusions (1121).

5. The insulation structure according to claim 1, characterized in that one of the splice module (110) and the insulation blanket (120) is provided with a second protrusion (1112), the other one is provided with a second groove (123) for snap-fit engagement with the second protrusion (1112).

6. The insulation structure of claim 5, wherein the interface between the second protrusions (1112) and the second grooves (123) comprises a planar or arcuate surface.

7. The insulation structure according to claim 1, wherein one of the first mating portion (121) and the second mating portion (122) comprises a third protrusion (1211), the other comprising a third groove (1221) for snap-fit engagement with the third protrusion (1211).

8. The insulation structure according to claim 7, wherein a seal (124) is connected between the third protrusion (1211) and the third groove (1221), and the seal (124) abuts against an outer peripheral wall of the insulation cylinder.

9. The insulation structure of claim 1, further comprising a base mat (125), the base mat (125) being vented (1251) along the direction of gravity.

10. A single crystal production apparatus comprising a thermal insulation structure (100) according to any one of claims 1-9, and further comprising a single crystal furnace, the thermal insulation structure (100) being disposed within the single crystal furnace.