CN221026049U - Plane workpiece correction system - Google Patents

Abstract

The utility model provides a plane workpiece correction system which comprises a transfer device, at least two pose sensors and a control system, wherein the transfer device drives a plane workpiece to be transferred to a preset position along a preset path, the plane workpiece correction system comprises a workpiece fixing device and at least one adjusting shaft, and the workpiece fixing device is used for keeping the plane workpiece at a fixed position. The adjusting shaft is driven to drive the workpiece fixing device to translate and rotate in the plane where the standard pose of the planar workpiece is located. The plane workpiece passes through the detection range of the pose sensor simultaneously or sequentially in the transferring process. The control system is communicated with the adjusting shaft and the pose sensor and is configured to control the adjusting shaft to adjust the pose of the planar workpiece to the standard pose according to the pose of the planar workpiece acquired by the pose sensor. According to the embodiment of the utility model, the position and the posture of the planar workpiece can be adjusted in the transferring process, calibration by using a calibrator and other matching devices is not needed, the working efficiency is improved, and the pollution and damage risks are reduced.

Description

Plane workpiece correction system

Technical Field

The utility model relates to the technical field of precision machining, in particular to a plane workpiece correction system.

Background

In precision machining, workpieces are transported, for example, to a storage area after the process product is transported to another station for subsequent processing or after the product is produced. Whether it is for subsequent processing or storage stacking, it is necessary to ensure accurate alignment of the work pieces to prevent damage.

The planar workpiece represents a workpiece which is approximately sheet in whole, such as a panel, a chip, a wafer and the like, in the existing processing technology, the pose of the planar workpiece needs to be calibrated by utilizing a specific calibrator when the planar workpiece is transported, firstly, the planar workpiece is acquired from the current position of the planar workpiece, is transported to the calibrator for calibration, and is acquired again and transported to the target position after calibration is completed, the process is tedious and inefficient, and the risk of pollution or damage to the planar workpiece is increased in the process of calibrating at the calibrator and in the process of transporting for many times.

The matters in the background section are only those known to the inventors and do not, of course, represent prior art in the field.

Disclosure of utility model

In view of one or more of the drawbacks of the prior art, an object of the present utility model is to provide a planar workpiece correction system, comprising:

Transfer device, transfer device is configured to drive the planar work piece and to transport to the position of predetermineeing along predetermineeing the route, transfer device includes:

A workpiece fixture for holding the planar workpiece in a fixed relative position to the workpiece fixture;

The adjusting shaft is connected with the workpiece fixing device and driven to drive the workpiece fixing device to translate and rotate in a plane where the standard pose of the planar workpiece is located;

The planar workpiece passes through the detection ranges of the at least two pose sensors simultaneously or sequentially in the transferring process, and the pose of the planar workpiece is acquired by the at least two pose sensors; and

And the control system is communicated with the adjusting shafts and the pose sensors and is configured to control the at least one adjusting shaft to adjust the pose of the planar workpiece to a standard pose according to the pose of the planar workpiece acquired by the at least two pose sensors, and the standard pose is aligned with the preset position.

According to one aspect of the utility model, the positions of the at least two pose sensors correspond to the edge shape of the planar workpiece, the at least two pose sensors being configured to be able to determine one or more of at least one side, at least one apex angle and a shape center of the planar workpiece in a standard pose.

According to one aspect of the utility model, the pose sensor comprises a transmitting source and a receiver corresponding to the transmitting source, wherein the transmitting source continuously transmits a light beam and is received by the receiver; the plane workpiece passes through the space between the emitting source and the receiver in the moving process to block light beam transmission, and the receiver records and transmits the coordinates and/or the moment of the light beam blocking moment of the transfer device to the control system.

According to one aspect of the utility model, the pose sensor is a distance sensor, and the distance sensor is used for acquiring the distance between the side edge of the planar workpiece and the pose sensor during the movement process of the planar workpiece.

According to one aspect of the utility model, wherein the edge of the planar workpiece is rectangular in shape, the planar workpiece correction system comprises a first pose sensor, a second pose sensor and a third pose sensor, the relative positions of the first pose sensor, the second pose sensor and the third pose sensor are fixed and are not collinear, and the first pose sensor and the second pose sensor are arranged in such a way that a connecting line is parallel to one side edge of the standard pose of the planar workpiece.

According to one aspect of the utility model, at least part of the preset path of the planar workpiece moving driven by the transferring device is parallel or perpendicular to the connecting line of the first pose sensor and the second pose sensor.

According to one aspect of the utility model, wherein the edge shape of the planar workpiece is circular, the planar workpiece correction system comprises a first pose sensor, a second pose sensor and a third pose sensor, the relative positions of the first pose sensor, the second pose sensor and the third pose sensor are fixed and non-collinear, and the positions of the first pose sensor, the second pose sensor and the third pose sensor define a circle that is the same as the edge shape of the planar workpiece.

According to one aspect of the utility model, the planar workpiece correction system further comprises a fourth pose sensor, wherein a circle defined by the positions of the fourth pose sensor and any two of the first, second and third pose sensors is identical to the edge shape of the planar workpiece.

According to one aspect of the utility model, the transfer device further comprises a balance shaft, wherein the balance shaft is connected with the workpiece fixing device and driven to rotate.

According to one aspect of the present utility model, the planar workpiece correction system further includes a planar sensor configured to be able to acquire an angle of the planar workpiece relative to a plane in which a standard pose of the planar workpiece is located; the control system is communicated with the plane sensor and the balance shaft, and is configured to control the plane workpiece to be adjusted to the plane where the standard pose is located according to the data acquired by the plane sensor.

Compared with the prior art, the embodiment of the utility model provides a plane workpiece correction system, wherein the pose sensor is used for acquiring the pose of the plane workpiece, and the control system is used for adjusting the pose of the plane workpiece in the plane where the standard pose of the plane workpiece is positioned through the adjusting shaft, so that the pose adjustment of the plane workpiece is completed in the transferring process, the calibration is not required by using a calibrator and other matching devices, the working efficiency is improved, and the pollution and damage risks are reduced.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

FIGS. 1A-1C are schematic illustrations of a planar workpiece correction system in accordance with one embodiment of the utility model;

Fig. 2A-2C are schematic diagrams of a planar workpiece correction system in accordance with another embodiment of the utility model.

Detailed Description

Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in various different ways without departing from the spirit or scope of the present utility model. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, and may be mechanically connected, electrically connected, or may communicate with each other, for example; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the utility model. Furthermore, the present utility model may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.

The preferred embodiments of the present utility model will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustration and explanation of the present utility model only, and are not intended to limit the present utility model.

Fig. 1 shows a specific structure of a planar workpiece correction system 100 according to an embodiment of the present utility model, and the planar workpiece correction system 100 will be described below with reference to fig. 1.

The planar workpiece correction system 100 includes a transfer device 110, a pose sensor 120, and a control system (not shown in the figure), wherein the transfer device 110 is configured to drive the planar workpiece 2 to transfer to a preset position along a preset path, and the preset path is a preset motion path of the planar workpiece 2.

The transfer device 110 specifically includes a workpiece fixing device 111 and an adjusting shaft 112, where the workpiece fixing device 111 is used to hold a planar workpiece in a position fixed relative to the planar fixing device 111, and the specific fixing manner is not limited in the present utility model, and may be various manners such as adsorption, clamping, lifting, and the like. The pose of the planar workpiece at the previous position (or station) of the planar workpiece 2 may have deviated from the standard pose, and the manner in which the workpiece fixing device 111 acquires the planar workpiece 2 may be to grasp (suck, etc.) the planar workpiece 2 at a fixed position of the planar workpiece 2 after scanning the planar workpiece 2, for example, a visual sensor is provided in the transporting device 110 or the processing environment of the planar workpiece 2, or a positioning structure is provided in the planar workpiece 2 or the external environment, and the workpiece fixing device 111 can determine the position of grasping (suck, etc.) the planar workpiece 2 through the positioning structure. After the workpiece fixing device 111 acquires the planar workpiece 2, its position is fixed with respect to the workpiece fixing device 111, as shown in fig. 1A and 1B, for example, in which case the position of the planar workpiece 2 may be shifted with respect to the standard pose, the shift in fig. 1A and 1B is merely an example, and in general, the shift amount generated in the actual production of precision machining is small.

The transfer device 110 comprises at least one adjustment shaft 112, wherein the adjustment shaft 112 is connected to the workpiece fixture 111, for example by means of a link, a hinge or the like, to the workpiece fixture 111. The adjustment shaft 112 is configured to be able to be driven to translate and rotate the workpiece fixture 111 in a plane in which the standard pose of the planar workpiece 2 is located, and may specifically be configured such that the workpiece fixture 111 rotates about the adjustment shaft 112, or is extended or shortened relative to the adjustment shaft 112, for example, the adjustment shaft 112 is connected to the workpiece fixture 111 by driving a telescopic rod change. As shown in fig. 1A and 1B, a plurality of rotation shafts may be provided in the transfer device 110, and the rotation shafts may be simultaneously used to drive the workpiece fixing device 111 to drive the planar workpiece 2 to transfer to a preset position, and adjust the position of the workpiece fixing device 111 to adjust the planar workpiece 2 to a standard pose, that is, as the adjustment shaft 112. The extension dimension of the planar workpiece 2 on a certain plane is far greater than that of other planes, taking the case that the planar workpiece 2 is kept horizontal in the transferring process as an example, in actual production, the offset generated by the planar workpiece 2 relative to the standard pose is mainly superposition of the distance offset and the angle offset in the horizontal plane, so the adjusting shaft 112 in the embodiment drives the workpiece fixing device 111 to translate and rotate in the plane of the standard pose so as to adjust the planar workpiece 2 to the standard pose, and the offset of the planar workpiece 2 relative to the plane of the non-standard pose is negligible or is adjusted in other manners.

The planar workpiece correction system 100 includes at least two pose sensors 120, where the pose sensors 120 are fixedly disposed on a preset path for transferring the planar workpiece 2, and the pose sensors 120 are not limited to be coincident with the preset path, but the pose sensors 120 are fixed relative to the preset path, and a detection range of the pose sensors 120 covers at least part of the preset path, during transferring the planar workpiece 2, the detection ranges of the at least two pose sensors 120 are simultaneously or sequentially passed, and the pose of the planar workpiece 2 is acquired through the at least two pose sensors 120, for example, the pose sensors 120 are configured to be capable of acquiring information such as a position, a distance, an angle, etc. of the planar workpiece 2, and a specific form of the pose sensor 120 is described in a later embodiment.

A control system (not shown) in the planar workpiece correction system 100 communicates with the adjustment shaft 112 and the pose sensor 120, and may be integrated within the transfer device 110 or located elsewhere, such as in an industrial computer or the like. The control system controls the movement of the at least one adjustment shaft 112 according to the pose of the planar workpiece 2 acquired by the at least two pose sensors 120, so as to adjust the pose of the planar workpiece 2 to a standard pose, wherein the standard pose is aligned with a preset position to which the planar workpiece 2 is transferred. Further, the control system may be further configured to execute a program for controlling the transporting device 110 to transport the planar workpiece 2 to a preset position.

According to the embodiment, the actual pose of the planar workpiece 2 in the preset path can be acquired through the pose sensor 120, the adjusting shaft 112 is driven through the control system, the pose of the planar workpiece 2 is adjusted in the motion process of the planar workpiece 2, an additional correction device is not needed, the working efficiency is improved in the transfer process, and meanwhile the risk of damage or pollution to the planar workpiece 2 is reduced. In practical applications, when the transfer device 110 holds the planar workpiece 2 in the standard pose, no matter the transfer device 110 controls the planar workpiece 2 to translate or flip, the planar workpiece 2 has a corresponding standard pose at any position in the preset path. The pose sensor 120 can be used for acquiring the offset of the actual pose of the planar workpiece 2 at the position corresponding to the pose sensor 120 and the standard pose of the planar workpiece 2 at the position, and the pose of the planar workpiece 2 can be instantly adjusted according to the offset, or the planar workpiece 2 can be simultaneously modulated in the subsequent transferring process, and the adjusting process can be completed before the planar workpiece 2 is placed at the preset position.

In the embodiment of the present utility model, the positions of the at least two pose sensors 120 correspond to the edge shape of the planar workpiece 2, in this embodiment, the planar workpiece correction system 100 can be used to adjust the pose of the planar workpiece 2 in the plane where the standard pose of the planar workpiece 2 is located, so that the planar workpiece 2 can be simplified into a planar shape, where the edge shape of the planar workpiece 2 is a planar shape, such as a rectangle as shown in fig. 1A-1C, or a circle as shown in fig. 2A-2C, which is only a specific embodiment, such as a display screen, and the circle can be a wafer, and the planar workpiece 2 in the present utility model is not limited to a rectangle or a circle. The correspondence of the pose sensor 120 to the edge shape of the planar workpiece 2 means that the pose sensor 120 is capable of determining one or more of at least one side, at least one vertex angle, and a shape center of the planar workpiece 2 in a standard pose.

In this embodiment, the edge shape (planar shape) of the planar workpiece 2 is a preset shape, for example, in the present processing and transferring operation, the planar workpiece 2 is rectangular, and the shape and the size thereof are constant, and in this embodiment, the shape defect of the planar workpiece 2 due to other reasons such as processing is not considered, that is, the default planar workpiece 2 is a preset planar shape. On this basis, the offset of the current pose of the planar workpiece 2 with respect to the standard pose can be determined by one or more of at least one side edge, at least one vertex angle and a shape center of the planar workpiece 2. The following embodiment is specifically described with reference to the accompanying drawings, taking rectangles and circles as examples, and the pose sensor 120 is used to acquire the pose of the planar workpiece 2.

In one embodiment of the present utility model, the pose sensor 120 may be configured to include a transmitting source and a receiver corresponding to the transmitting source, for example, the transmitting source is a laser capable of transmitting laser light and being acquired by the receiver, and in this embodiment, the transmitting source continuously transmits a light beam and is received by the receiver, that is, the receiver is maintained in a state capable of receiving the light beam in a conventional case. The planar workpiece 2 passes through between the emitting source and the receiver during the process of moving along the preset path by the transferring device 110, and preferably, the direction of the light beam between the emitting source and the receiver is perpendicular to the plane where the planar workpiece 2 is located in the standard pose. The light beam emitted by the emitting source is blocked by the planar workpiece 2, resulting in the receiver not receiving the light beam, the signal being broken, the receiver being arranged to record and transmit to the control system the coordinates and/or the specific moment of the transfer device at the moment the light beam is blocked. That is, when the signal of the receiver is disconnected, the moment when the disconnection occurs can be determined, the coordinates of the transfer device, preferably the coordinates of the transfer device, when the signal disconnection occurs, confirm one position of the planar workpiece 2, and the pose of the planar workpiece 2 can be determined by at least two pose sensors 120, for example, the planar workpiece 2 is in a strip shape as a whole, the pose of the strip shape can be confirmed by two pose sensors 120, and the case that the planar workpiece 2 is in a rectangular shape or a circular shape is described in the following embodiments.

In another embodiment of the present utility model, the pose sensor 120 may also be a distance sensor, such as a laser ranging device, capable of acquiring the distance between the side edge of the planar workpiece 2 and the pose sensor 120 during the movement of the planar workpiece 2. For example, the distance sensor is arranged at a fixed position, the reading of the distance sensor changes in the process that the planar workpiece 2 passes through the distance sensor, the pose of the planar workpiece 2 can be determined, and the offset of the planar workpiece 2 can be obtained by comparing the pose with the pre-stored standard pose of the planar workpiece 2. In practical applications, at least two of the pose sensors 120 may be the same type of sensor, or multiple sensors may be used in combination.

As shown in fig. 1A to 1C, according to an embodiment of the present utility model, in which the edge shape of the planar workpiece 2 is rectangular, the planar workpiece correction system 100 in this embodiment includes a first pose sensor 121, a second pose sensor 122, and a third pose sensor 123, the relative positions of the first pose sensor 121, the second pose sensor 122, and the third pose sensor 123 are fixed and not collinear, and in which the first pose sensor 121 and the second pose sensor 122 are disposed such that the line of connection is parallel to one side of the standard pose of the planar workpiece 2. For example, the pose of the planar workpiece 2 in fig. 1C is a standard pose, in which the line connecting the first pose sensor 121 and the second pose sensor 122 is parallel to the left side (left side shown in fig. 1C) of the planar workpiece 2.

Specifically, the preset path of the planar workpiece 2 is set to be at least partially perpendicular to the connection line between the first pose sensor 121 and the second pose sensor 122, that is, in the left-right direction in fig. 1A-1C, when the planar workpiece 2 has an angle deviation, the first pose sensor 121 and the second pose sensor 122 are, for example, a structure that a transmitting source and a receiver are mutually matched, the time of signal disconnection in the first pose sensor 121 and the second pose sensor 122 and the coordinates of the transfer device 110 when the signal disconnection is performed are different, and the offset angle of the planar workpiece 2 and the offset distance in the left-right direction (in the left-right direction in fig. 1A-1C) can be calculated by using an inverse trigonometric function. The preset path of the planar workpiece 2 may be set at least partially parallel to the line connecting the first pose sensor 121 and the second pose sensor 122, i.e. in the up-down direction in fig. 1A-1C, and the time interval of signal disconnection in the first pose sensor 121 and the second pose sensor 122 indicates the structural dimension of the planar workpiece 2 in the direction, and the offset angle of the planar workpiece 2 and the offset distance in one direction can be calculated and obtained by using a trigonometric function as compared with the specification of the planar workpiece 2. The third pose sensor 123 may cooperate with the first pose sensor 121 and the second pose sensor 122 to obtain a plane offset distance of the planar workpiece 2 in another direction (up-down direction in fig. 1A-1C).

In this embodiment, the offset of the planar workpiece 2 in the plane where the standard pose is located may be decomposed into a distance offset and an angle offset in two directions perpendicular to each other, and the three offsets may be obtained by using three non-collinear pose sensors, and only the control system controls the adjustment shaft 112 to compensate reversely according to the offsets, so that the planar workpiece 2 is kept in the standard pose.

Fig. 2A to 2C show an embodiment in which the shape of the planar workpiece 2 is circular in accordance with another embodiment of the present utility model, in which the offset of the circular planar workpiece 2 from the standard pose is only the distance offset in two directions perpendicular to each other, so that the center of the circle of the planar workpiece 2, that is, the shape center position, can be determined by the pose sensor, and is obtained by comparing with the standard pose.

Specifically, as shown in fig. 2A to 2C, the planar workpiece correction system 100 includes a first pose sensor 121, a second pose sensor 122, and a third pose sensor 123, the relative positions of the first pose sensor 121, the second pose sensor 122, and the third pose sensor 123 are fixed and not collinear, and the positions of the first pose sensor 121, the second pose sensor 122, and the third pose sensor 123 define a circle having the same shape as the edge of the planar workpiece 2. The positions of the three pose sensors that are not collinear can define a circular range that is identical to the shape and size of the edge of the planar workpiece 2 in this embodiment, and when the planar workpiece 2 moves in a standard pose (shown in fig. 2C), it triggers the first pose sensor 121, the second pose sensor 122, and the third pose sensor 123 simultaneously, and when the planar workpiece 2 is offset in distance, the first pose sensor 121, the second pose sensor 122, and the third pose sensor 123 do not trigger simultaneously, and the distance offset of the planar workpiece 2 can be calculated according to the time and/or coordinate difference of the interval, and corrected by the control system.

Further, the planar workpiece 2 may be a wafer, a small notch is usually set for defining a direction when the wafer is processed, and in the process of correction, if the position of the notch corresponds to the position of any one of the pose sensors 120, an error may occur in the pose of the wafer acquired by the pose sensor 120, and finally, the wafer deviates from the preset position, for this case, the planar workpiece correction system 100 in this embodiment further includes a fourth pose sensor 124, where the shape of the wafer defined by the fourth pose sensor 134 and the positions of any two pose sensors of the first pose sensor 121, the second pose sensor 122 and the third pose sensor 123 is the same as the edge shape of the planar workpiece 2, that is, according to the above four pose sensors 120, four circular ranges may be obtained, and according to the actual detection result of the planar workpiece 2, the largest circular range is selected from the four circular ranges, so that the current pose of the planar workpiece 2 may be represented, and deviation due to the notch on the wafer is avoided.

According to a preferred embodiment of the present utility model, the transfer device 110 further includes a balance shaft (not shown in the figure), which is connected to the workpiece fixing device 111 and is driven to rotate the workpiece fixing device 111, and further, the planar workpiece correction system further includes a planar sensor (not shown in the figure) configured to be capable of acquiring an angle of the planar workpiece 2 relative to a plane in which the standard pose is located. The control system is communicated with the plane sensor and the balance shaft, and is configured to control the plane workpiece 2 to be adjusted to the plane where the standard pose is located according to the data acquired by the plane sensor. Taking the standard pose of the planar workpiece 2 as a horizontal plane as an example, the planar sensor can be specifically a device for setting a gyroscope and the like to determine the horizontal offset, and the device is used for acquiring the offset angle of the planar workpiece 2 relative to the horizontal plane and correcting the offset angle by a balance shaft through a control system. For the case where the standard pose is other plane, different types of sensors may be employed, such as lasers coplanar with the standard pose plane, etc.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (10)

1. A planar workpiece correction system, comprising:

Transfer device, transfer device is configured to drive the planar work piece and to transport to the position of predetermineeing along predetermineeing the route, transfer device includes:

A workpiece fixture for holding the planar workpiece in a fixed relative position to the workpiece fixture;

The adjusting shaft is connected with the workpiece fixing device and driven to drive the workpiece fixing device to translate and rotate in a plane where the standard pose of the planar workpiece is located;

The planar workpiece passes through the detection ranges of the at least two pose sensors simultaneously or sequentially in the transferring process, and the pose of the planar workpiece is acquired by the at least two pose sensors; and

And the control system is communicated with the adjusting shafts and the pose sensors and is configured to control the at least one adjusting shaft to adjust the pose of the planar workpiece to a standard pose according to the pose of the planar workpiece acquired by the at least two pose sensors, and the standard pose is aligned with the preset position.

2. The planar workpiece correction system according to claim 1, wherein the positions of the at least two pose sensors correspond to an edge shape of the planar workpiece, the at least two pose sensors being configured to enable determination of one or more of at least one side, at least one apex angle, and a shape center of the planar workpiece in a standard pose.

3. The planar workpiece correction system as recited in claim 1, wherein said pose sensor comprises an emission source and a receiver corresponding to said emission source, said emission source continuously emitting a beam of light and being received by said receiver; the plane workpiece passes through the space between the emitting source and the receiver in the moving process to block light beam transmission, and the receiver records and transmits the coordinates and/or the moment of the light beam blocking moment of the transfer device to the control system.

4. The planar workpiece correction system according to claim 1, wherein the pose sensor is a distance sensor for acquiring a distance between a side edge of the planar workpiece and the pose sensor during movement of the planar workpiece.

5. The planar workpiece correction system according to claim 1, wherein the edge of the planar workpiece is rectangular in shape, the planar workpiece correction system comprising a first pose sensor, a second pose sensor, and a third pose sensor, the relative positions of the first pose sensor, the second pose sensor, and the third pose sensor being fixed and non-collinear, wherein the first pose sensor and the second pose sensor are arranged with a line parallel to one side of a standard pose of the planar workpiece.

6. The planar workpiece correction system as recited in claim 5, wherein at least a portion of a predetermined path along which said transfer device moves said planar workpiece is parallel or perpendicular to a line connecting said first and second pose sensors.

7. The planar workpiece correction system according to claim 1, wherein the edge shape of the planar workpiece is circular, the planar workpiece correction system comprising a first pose sensor, a second pose sensor, and a third pose sensor, the relative positions of the first pose sensor, the second pose sensor, and the third pose sensor being fixed and non-collinear, and the positions of the first pose sensor, the second pose sensor, and the third pose sensor defining a circle that is the same as the edge shape of the planar workpiece.

8. The planar workpiece correction system according to claim 7, further comprising a fourth pose sensor, wherein the fourth pose sensor defines a circle with the position of any two of the first, second, and third pose sensors that is the same shape as an edge of the planar workpiece.

9. The planar workpiece correction system as recited in any one of claims 1-8, wherein said transfer device further comprises a balance shaft, said balance shaft being coupled to said workpiece fixture and being driven to rotate said workpiece fixture.

10. The planar workpiece correction system according to claim 9, further comprising a planar sensor configured to be able to acquire an angle of the planar workpiece relative to a plane in which a standard pose of the planar workpiece is located; the control system is communicated with the plane sensor and the balance shaft, and is configured to control the plane workpiece to be adjusted to the plane where the standard pose is located according to the data acquired by the plane sensor.