CN220999822U - Coating equipment for semiconductor production - Google Patents
Coating equipment for semiconductor production Download PDFInfo
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- CN220999822U CN220999822U CN202322594438.4U CN202322594438U CN220999822U CN 220999822 U CN220999822 U CN 220999822U CN 202322594438 U CN202322594438 U CN 202322594438U CN 220999822 U CN220999822 U CN 220999822U
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- fixedly connected
- blocks
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- fixed
- shell
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 41
- 239000011248 coating agent Substances 0.000 title claims abstract description 31
- 238000000576 coating method Methods 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 description 9
- 239000007921 spray Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- -1 etc. Chemical compound 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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- Spray Control Apparatus (AREA)
Abstract
The utility model belongs to the technical field of semiconductors, in particular to a semiconductor production coating device, which comprises a shell, wherein a placing table is fixedly connected inside the shell, a supporting block is fixedly connected inside the shell, a top plate is fixedly connected inside the shell, a first rotary cylinder is fixedly connected inside the supporting block, and a bottom plate is fixedly connected inside the shell.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a coating device for semiconductor production.
Background
Semiconductors refer to materials that have electrical conductivity properties at normal temperatures that are intermediate between conductors and insulators. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high power conversion, etc., and diodes are devices fabricated using semiconductors. The importance of semiconductors is enormous, both from a technological and an economic point of view. Most electronic products, such as computers, mobile phones or digital recorders, have a core unit that is very closely related to semiconductors. Common semiconductor materials are silicon, germanium, gallium arsenide, etc., silicon being one of the most influential applications of various semiconductor materials.
The prior art has the following problems:
At present, the existing semiconductor production coating equipment is usually fixed by a clamp in the using process, but the clamp can only clamp the semiconductor, the position of the semiconductor and the surface of the coating can not be adjusted, the coating efficiency is reduced, and the coating gun is usually fixed, so that the flexibility of the coating gun is reduced, and the adjustment can not be performed for the position of the semiconductor.
Disclosure of utility model
Aiming at the defects of the prior art, the utility model provides a semiconductor production coating device, which solves the problems that the existing clamp can only clamp a semiconductor generally and can not adjust the position of the semiconductor and the surface of the coating, the coating efficiency is reduced, and the coating gun is generally fixed, so that the flexibility of the coating gun is reduced and the adjustment can not be performed for the position of the semiconductor.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a semiconductor production coating equipment, includes the shell, the inside fixedly connected with of shell places the platform, the inside fixedly connected with supporting shoe of shell, the inside fixedly connected with roof of shell top, the inside fixedly connected with first revolving cylinder of supporting shoe, the inside fixedly connected with bottom plate of shell, the inside lead screw that is provided with of bottom plate, the inside fixedly connected with baffle of bottom plate, be provided with the movable block on the lead screw, movable block top fixedly connected with connecting block, connecting block one side fixedly connected with links up the piece, the inside fixedly connected with second revolving cylinder of linking up the piece, linking up piece one side is provided with the fixed plate, fixed plate one side is provided with splint, the inside fixedly connected with baffle of fixed plate, the inside fixedly connected with slider of fixed plate, be provided with spacing spring on the round bar, the inside fixedly connected with electric telescopic handle of roof, electric telescopic handle one side fixedly connected with fixed block, fixed block bottom fixedly connected with protection piece, protection piece inside fixedly connected with telescopic cylinder, protection piece bottom fixedly connected with connecting rod, connection of protection piece bottom fixedly connected with connecting rod.
As a preferable technical scheme of the utility model, the two supporting blocks are arranged in total, the supporting blocks are respectively and symmetrically fixed in the shell, the two first rotary cylinders are arranged in total, and the first rotary cylinders are respectively fixed in the supporting blocks.
As a preferable technical scheme of the utility model, the two screw rods are arranged in total, the screw rods are respectively and symmetrically arranged in the bottom plate, and the first rotary cylinder is connected with the screw rods through the rotary shaft.
As a preferable technical scheme of the utility model, the number of the moving blocks is two, the moving blocks are respectively arranged on the screw rods, the number of the connecting blocks is two, and the connecting blocks are respectively fixed at the tops of the moving blocks.
As a preferable technical scheme of the utility model, two connecting blocks are arranged, the connecting blocks are symmetrically fixed on one side of the connecting block respectively, two second rotary cylinders are arranged, the second rotary cylinders are fixed in the connecting blocks respectively, and the fixing plates are connected with the second rotary cylinders through rotating shafts.
As an optimized technical scheme of the utility model, a plurality of clamping plates are arranged, the clamping plates are symmetrically arranged on one side of the fixed plate respectively, two round rods are arranged, the round rods are symmetrically fixed in the fixed plate respectively, through holes are formed in the sliding blocks, and the sliding blocks are connected with the round rods in a sliding manner through the through holes.
As an optimal technical scheme of the utility model, two electric telescopic rods are arranged, the electric telescopic rods are symmetrically fixed in the top plate respectively, the fixing blocks are connected with the top plate in a sliding manner through limiting blocks, and the telescopic cylinders are connected with the connecting rods through rotating shafts.
Compared with the prior art, the utility model provides the semiconductor production coating equipment, which has the following beneficial effects:
This semiconductor production coating equipment, through being provided with adjusting device, at the in-process of using, carry out the centre gripping through splint to semiconductor, at the in-process of centre gripping, through starting first revolving cylinder, make the lead screw rotate, the lead screw can control the movable block and remove, thereby the control splint removes, be convenient for adjust the distance between two splint, through starting second revolving cylinder, the control fixed plate rotates, thereby splint rotate, be convenient for adjust the angle that splint inclines, because of splint pass through slider and round bar and fixed plate sliding connection, and, be provided with spacing spring on the round bar, carry out spacing to the slider, make splint can carry out the centre gripping to the semiconductor of equidimension not, the flexibility of splint has been improved, the coating film efficiency has been improved.
This semiconductor production coating film equipment through being provided with the injection head of being convenient for adjust, in the in-process of using, through starting two electric telescopic handle that set up inside the roof, makes electric telescopic handle promote the fixed block and removes, thereby control the protection piece and remove, the protection piece can drive the injection head and remove at the in-process of removing, the position of being convenient for adjust the injection head, through starting the flexible cylinder that sets up inside the protection piece, make flexible cylinder promote the connecting rod and remove, the connecting rod can drive the injection head at the in-process of removing, the height of being convenient for adjust the injection head, the flexibility of injection head has been improved.
Drawings
FIG. 1 is a schematic view of the inside of a housing structure of the present utility model;
FIG. 2 is an enlarged schematic view of FIG. 1A;
FIG. 3 is a schematic view of the structure of the fixing plate of the present utility model;
Fig. 4 is a schematic view of a fixing block structure according to the present utility model.
In the figure: 1. a housing; 2. a placement table; 3. a support block; 4. a top plate; 5. a first rotary cylinder; 6. a bottom plate; 7. a screw rod; 8. a partition plate; 9. a moving block; 10. a connecting block; 11. a joint block; 12. a second rotary cylinder; 13. a fixing plate; 14. a clamping plate; 15. a baffle; 16. a slide block; 17. a round bar; 18. a limit spring; 19. an electric telescopic rod; 20. a fixed block; 21. a protective block; 22. a telescopic cylinder; 23. a connecting rod; 24. an ejection head.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1 to 4, in the present embodiment: the semiconductor production coating equipment comprises a shell 1, a placing table 2 is fixedly connected inside the shell 1 and used for placing clamping equipment, a supporting block 3 is fixedly connected inside the shell 1 and used for supporting, a top plate 4 is fixedly connected at the top of the shell 1 and used for fixing an electric telescopic rod 19, a first rotary cylinder 5 is fixedly connected inside the supporting block 3 and used for controlling a screw rod 7 to move, a bottom plate 6 is fixedly connected inside the shell 1 and used for protecting the screw rod 7, the screw rod 7 is arranged inside the bottom plate 6 and used for enabling a moving block 9 to move, a partition plate 8 is fixedly connected inside the bottom plate 6 and used for separating, a moving block 9 is arranged on the screw rod 7 and used for enabling a clamping plate 14 to move, a connecting block 10 is fixedly connected at the top of the moving block 9 and used for connecting a connecting block 11, a connecting block 11 is fixedly connected at one side of the connecting block 10 and used for connecting a fixed plate 13, a second rotary cylinder 12 is fixedly connected inside the connecting block 11, for controlling the fixed plate 13 to rotate, the fixed plate 13 is arranged on one side of the connecting block 11, the connecting clamp plate 14 is connected, the clamp plate 14 is arranged on one side of the fixed plate 13, for clamping, the baffle 15 is fixedly connected inside the fixed plate 13, for separating, the slide block 16 is arranged inside the fixed plate 13, for enabling the clamp plate 14 to move, the round rod 17 is fixedly connected inside the fixed plate 13, for enabling the slide block 16 to move, the limit spring 18 is arranged on the round rod 17, for limiting the slide block 16, the electric telescopic rod 19 is fixedly connected inside the top plate 4, for controlling the fixed block 20 to move, the fixed block 20 is fixedly connected on one side of the electric telescopic rod 19, for fixedly connecting the protection block 21, the protection block 21 is fixedly connected at the bottom of the fixed block 20, for protecting, the telescopic cylinder 22 is fixedly connected inside the protection block 21, the device is used for controlling the movement of the spray head 24, the bottom of the protection block 21 is fixedly connected with a connecting rod 23 for connecting the spray head 24, and the bottom of the connecting rod 23 is fixedly connected with the spray head 24 for coating.
In this embodiment, two support blocks 3 are provided, the support blocks 3 are symmetrically fixed in the housing 1, two first rotary cylinders 5 are provided, the first rotary cylinders 5 are fixed in the support blocks 3, the first rotary cylinders 5 are used for fixing the first rotary cylinders 5, and the first rotary cylinders 5 are used for controlling the screw rod 7 to rotate; the two screw rods 7 are arranged, the screw rods 7 are symmetrically arranged in the bottom plate 6 respectively, and the first rotary air cylinder 5 is connected with the screw rods 7 through a rotating shaft and is used for controlling the movable block 9 to move so as to facilitate the adjustment of the position of the clamping plate 14; the two moving blocks 9 are arranged, the moving blocks 9 are respectively arranged on the screw rod 7, the two connecting blocks 10 are arranged, and the connecting blocks 10 are respectively fixed at the top of the moving blocks 9 and are used for enabling the clamping plates 14 to move so as to facilitate the adjustment of the positions of the clamping plates 14; the two connecting blocks 11 are arranged, the connecting blocks 11 are symmetrically fixed on one side of the connecting block 10 respectively, the two second rotary cylinders 12 are arranged, the second rotary cylinders 12 are fixed inside the connecting blocks 11 respectively, the fixed plates 13 are connected with the second rotary cylinders 12 through rotating shafts and are used for connecting the fixed plates 13, and the second rotary cylinders 12 are used for controlling the fixed plates 13 to rotate; the clamping plates 14 are arranged in a plurality, the clamping plates 14 are symmetrically arranged on one side of the fixed plate 13 respectively, the round rods 17 are arranged in two, the round rods 17 are symmetrically fixed in the fixed plate 13 respectively, through holes are formed in the sliding blocks 16, and the sliding blocks 16 are in sliding connection with the round rods 17 through the through holes and are used for clamping, so that semiconductors with different sizes can be clamped conveniently; the electric telescopic rods 19 are arranged in two, the electric telescopic rods 19 are symmetrically fixed in the top plate 4 respectively, the fixed blocks 20 are connected with the top plate 4 in a sliding mode through limiting blocks, the telescopic cylinders 22 are connected with the connecting rods 23 through rotating shafts, and the electric telescopic rods are used for controlling the fixed blocks 20 to move and facilitating adjustment of the jet heads 24 to move.
The working principle and the using flow of the utility model are as follows: the operator clamps the semiconductor through splint 14, make lead screw 7 rotate through starting first revolving cylinder 5, lead screw 7 can control movable block 9 and remove, thereby control splint 14 and remove, be convenient for adjust the distance between two splint 14, through starting second revolving cylinder 12, control fixed plate 13 and rotate, thereby make splint 14 rotate, be convenient for adjust the angle that splint 14 inclines and the surface of semiconductor coating, because splint 14 passes through slider 16 and round bar 17 and fixed plate 13 sliding connection, and be provided with spacing spring 18 on the round bar 17, limit slider 16, make splint 14 can carry out the centre gripping to the semiconductor of equidimension not, in the in-process of coating film, make electric telescopic handle 19 promote fixed block 20 and remove through starting two electric telescopic handle 19 that set up in roof 4, thereby control protective block 21 and remove, protective block 21 can drive the position of spray head 24 in the in-process of removing, be convenient for adjust the position of spray head 24, through starting setting up at protective block 21 inside telescopic cylinder 22, make telescopic cylinder 22 promote connecting rod 23 remove, connecting rod 23 can carry out the centre gripping to the semiconductor of equidimension, the spray head 24 can be convenient for adjust the height of semiconductor coating head 24 in the process of removing.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (7)
1. Semiconductor production coating equipment, its characterized in that: including shell (1), inside fixedly connected with of shell (1) places platform (2), inside fixedly connected with supporting shoe (3) of shell (1), inside fixedly connected with roof (4) of shell (1), inside fixedly connected with first revolving cylinder (5) of supporting shoe (3), inside fixedly connected with bottom plate (6) of shell (1), inside lead screw (7) that are provided with of bottom plate (6), inside fixedly connected with baffle (8) of bottom plate (6), be provided with movable block (9) on lead screw (7), movable block (9) top fixedly connected with connecting block (10), connecting block (10) one side fixedly connected with linking block (11), linking block (11) inside fixedly connected with second revolving cylinder (12), linking block (11) one side is provided with fixed plate (13), fixed plate (13) one side is provided with splint (14), fixed plate (13) inside fixedly connected with baffle (15), fixed plate (13) inside is provided with slider (16), fixed plate (13) top fixedly connected with connecting block (17) on one side, round connection round bar (17), the novel intelligent air conditioner is characterized in that an electric telescopic rod (19) is fixedly connected to the inside of the top plate (4), a fixed block (20) is fixedly connected to one side of the electric telescopic rod (19), a protection block (21) is fixedly connected to the bottom of the fixed block (20), a telescopic cylinder (22) is fixedly connected to the inside of the protection block (21), a connecting rod (23) is fixedly connected to the bottom of the protection block (21), and an injection head (24) is fixedly connected to the bottom of the connecting rod (23).
2. The semiconductor production coating apparatus according to claim 1, wherein: the support blocks (3) are arranged in two, the support blocks (3) are symmetrically fixed in the shell (1) respectively, the first rotary cylinders (5) are arranged in two in total, and the first rotary cylinders (5) are fixed in the support blocks (3) respectively.
3. The semiconductor production coating apparatus according to claim 1, wherein: the two screw rods (7) are arranged in total, the screw rods (7) are symmetrically arranged in the bottom plate (6) respectively, and the first rotary air cylinders (5) are connected with the screw rods (7) through rotating shafts.
4. The semiconductor production coating apparatus according to claim 1, wherein: the two moving blocks (9) are arranged in total, the moving blocks (9) are respectively arranged on the lead screw (7), the two connecting blocks (10) are arranged in total, and the connecting blocks (10) are respectively fixed at the tops of the moving blocks (9).
5. The semiconductor production coating apparatus according to claim 1, wherein: the connecting blocks (11) are arranged in two, the connecting blocks (11) are symmetrically fixed on one side of the connecting block (10) respectively, the second rotary cylinders (12) are arranged in two, the second rotary cylinders (12) are fixed inside the connecting blocks (11) respectively, and the fixing plates (13) are connected with the second rotary cylinders (12) through rotating shafts.
6. The semiconductor production coating apparatus according to claim 1, wherein: the clamping plates (14) are arranged in a plurality, the clamping plates (14) are symmetrically arranged on one side of the fixed plate (13) respectively, two round rods (17) are arranged in a total mode, the round rods (17) are symmetrically fixed inside the fixed plate (13) respectively, through holes are formed in the sliding blocks (16), and the sliding blocks (16) are connected with the round rods (17) in a sliding mode through the through holes.
7. The semiconductor production coating apparatus according to claim 1, wherein: the electric telescopic rods (19) are arranged in two, the electric telescopic rods (19) are symmetrically fixed in the top plate (4) respectively, the fixing blocks (20) are connected with the top plate (4) in a sliding mode through limiting blocks, and the telescopic cylinders (22) are connected with the connecting rods (23) through rotating shafts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322594438.4U CN220999822U (en) | 2023-09-22 | 2023-09-22 | Coating equipment for semiconductor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322594438.4U CN220999822U (en) | 2023-09-22 | 2023-09-22 | Coating equipment for semiconductor production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220999822U true CN220999822U (en) | 2024-05-24 |
Family
ID=91124603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322594438.4U Active CN220999822U (en) | 2023-09-22 | 2023-09-22 | Coating equipment for semiconductor production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220999822U (en) |
-
2023
- 2023-09-22 CN CN202322594438.4U patent/CN220999822U/en active Active
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