CN220952171U - Novel drawing equipment is examined to phosphorus - Google Patents
Novel drawing equipment is examined to phosphorus Download PDFInfo
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- CN220952171U CN220952171U CN202322315192.2U CN202322315192U CN220952171U CN 220952171 U CN220952171 U CN 220952171U CN 202322315192 U CN202322315192 U CN 202322315192U CN 220952171 U CN220952171 U CN 220952171U
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- furnace chamber
- cooling water
- upper shaft
- phosphorus
- lower shaft
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910052698 phosphorus Inorganic materials 0.000 title claims abstract description 36
- 239000011574 phosphorus Substances 0.000 title claims abstract description 36
- 238000007689 inspection Methods 0.000 claims abstract description 32
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 9
- 238000004857 zone melting Methods 0.000 claims abstract description 5
- 239000000498 cooling water Substances 0.000 claims description 52
- 239000013078 crystal Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 238000000605 extraction Methods 0.000 claims description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 230000003028 elevating effect Effects 0.000 claims description 6
- 239000010963 304 stainless steel Substances 0.000 claims description 5
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 230000008676 import Effects 0.000 claims 3
- 239000012535 impurity Substances 0.000 abstract description 6
- 239000002178 crystalline material Substances 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses novel phosphorus inspection drawing equipment, which belongs to the technical field of detection devices of impurity phosphorus content of crystalline materials and comprises an upper shaft lifting mechanism, a furnace chamber, a lower shaft lifting mechanism, a guide rail and a rack, wherein the upper shaft and the lower shaft of the upper shaft lifting mechanism are hollow water-cooled shafts, the upper shaft and the lower shaft are sealed by magnetic fluid corrugated pipes, an air inlet and an air outlet are arranged on the furnace chamber, the furnace chamber is connected with a high-vacuum gate valve through a connecting pipe and then connected with a molecular pump to form the crystalline material zone-melting phosphorus inspection drawing equipment, and the problem that the phosphorus inspection drawing equipment in the prior art cannot meet the product inspection standard of electronic grade is solved.
Description
Technical Field
The utility model belongs to the technical field of detection devices for impurity phosphorus content of crystal materials, and particularly relates to novel phosphorus inspection drawing equipment.
Background
Most of the phosphorus inspection equipment in the prior art is of a phosphorus inspection equipment structure of solar-grade products, a common framework oil seal and a lower shaft structure without water cooling are adopted, the vacuumizing vacuum degree can only meet the requirement of < 3Pa, along with continuous development of polysilicon and upgrading of products, according to the current tapping conditions of products of companies, parameters such as resistance, service life and carbon content of the products to be tapped are required to be prepared and analyzed, but the carbon content of analyzed data cannot meet the product inspection standard of electronic first-grade products at present.
The utility model discloses a crystalline material zone-melting phosphorus detection device, which comprises an upper lifting mechanism, a closed cavity, a lower lifting mechanism, a guide rail and a frame, wherein the closed cavity is arranged in the middle of the frame, the upper lifting mechanism corresponds to the closed cavity and is linked with a raw material rod in the closed cavity through an upper shaft, the upper part of the lower lifting mechanism is linked with a seed crystal in the closed cavity through a lower shaft, the upper lifting mechanism, the closed cavity and the lower lifting mechanism are concentrically arranged, the upper lifting mechanism and the lower lifting mechanism axially move through a lead screw and the guide rail, and the closed cavity is connected with a vacuum pump through a suction opening connecting pipe to form the crystalline material zone-melting phosphorus detection device.
Therefore, the existing phosphorus inspection furnace still needs to be modified or new equipment is designed to meet the electronic grade product inspection requirement.
Disclosure of utility model
The utility model provides novel phosphorus inspection drawing equipment, which is further optimized on the structure of the phosphorus inspection equipment for the original solar-grade product so as to adapt to the electronic-grade product inspection standard, and aims to solve the problem that the phosphorus inspection drawing equipment in the prior art cannot meet the electronic-grade product inspection standard.
In order to achieve the above object, the present utility model has the following technical scheme:
The utility model provides a novel drawing equipment is examined to phosphorus, includes upper shaft elevating system, furnace chamber, lower shaft elevating system, guide rail and frame, upper shaft among the upper shaft elevating system, lower shaft elevating system's lower shaft are hollow water-cooling axle, upper shaft, lower shaft adopt the magnetic fluid bellows seal, are equipped with air inlet and gas vent on the furnace chamber, and the furnace chamber passes through the connecting pipe and connects after the high vacuum push-pull valve again with the molecular pump connection formation crystal material district melt-based phosphorus examines drawing equipment.
Further, four guide rods are arranged above the furnace chamber, and the magnetic fluid corrugated pipe is guided by the four guide rods.
Further, a heating coil is arranged in the middle of the furnace chamber, and the heating coil is made of oxygen-free copper.
Furthermore, the air inlet and the air outlet of the furnace chamber are both argon air inlet and air outlet dual-purpose ports.
Further, an extraction opening is formed in the furnace chamber, the furnace chamber is connected with the high-vacuum gate valve and the molecular pump after being communicated with the connecting pipe through the extraction opening, and the inner diameter of the extraction opening is 100-150 mm.
Further, the furnace chamber is a cavity made of 304 stainless steel materials, and the inner wall of the furnace chamber is a polished 304 stainless steel material structure.
Further, a cooling water inlet I is formed in the upper shaft above the furnace chamber, the cooling water inlet I is communicated with a hollow cavity of the upper shaft, and the upper shaft is provided with a cooling water outlet I; the bottom of the lower shaft is provided with a cooling water inlet II, the lower shaft below the furnace chamber is provided with a cooling water outlet II, the cooling water outlet I and the cooling water outlet II are connected with a cooling water refrigerating unit through a circulating water pipeline, and the cooling water outlet of the cooling water refrigerating unit is respectively connected with the cooling water inlet I and the cooling water inlet II of the equipment.
Further, the seed crystal seat used for placing the lower shaft and the clamping seat used for placing the upper shaft in the furnace chamber are all fixed structures made of 316L.
The utility model has the beneficial effects that:
1. According to the utility model, the existing solar-grade product phosphorus inspection drawing equipment is optimized, so that the material, structure, vacuum and the like of the existing solar-grade product are all satisfied with the state of the electronic-grade product, drawn product data satisfy the electronic-grade or electronic special-grade product requirements, and the solar-grade phosphorus inspection furnace is enabled to inspect the function of the electronic-grade product.
2. According to the utility model, the magnetic fluid corrugated pipe is used for sealing the structures such as the upper shaft and the lower shaft, the structural mode of adopting a skeleton oil seal in traditional equipment is eliminated, an oil sealant is not used any more, and the problem that the purity of the drawing environment is not high enough due to pollution of the oil sealant to products during operation of the equipment is avoided.
3. In the utility model, the shafts of the existing upper shaft lifting mechanism and lower shaft lifting mechanism are replaced by hollow water-cooled shafts, and cooling medium is introduced into the hollow cavity in the middle of the hollow water-cooled shafts to cool the corresponding shafts, so that the temperature of the shafts can be cooled to be less than 100 ℃ generally, and the volatilization of impurities in the shafts is reduced.
4. In the utility model, a molecular pump is adopted to vacuumize the furnace chamber, and the molecular pump is matched with a corresponding high-vacuum gate valve, so that the vacuum degree in the furnace chamber can be reduced from-3 Pa to-3 x 10 -3 Pa correspondingly by replacing matched ionization gauge, resistance gauge, compound vacuum gauge and other parts, the vacuum degree is obviously improved, and the drawing vacuum environment is improved.
5. The electronic primary crystal material is characterized in that the carbon content of the crystal material is less than 0.25, the resistance is more than 1000 omega, the resistance reaches 1400-1500 omega, the impurity content is less, the boron content is less than or equal to 0.25, and the phosphorus content is less than or equal to 1.5.
6. In the utility model, the guide rods are connected to the upper surface of the furnace chamber and are used for guiding the upper shaft to move up and down, and four guide rods are arranged and installed.
7. In the utility model, a heating coil is positioned in the middle of a furnace chamber to heat the mother sample of an upper shaft, and the heating coil is circularly heated for melting in the drawing process to draw crystals.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a left side schematic view of fig. 1.
Fig. 3 is a schematic view of a partial structure in the present utility model.
Wherein, 1, upper shaft lifting mechanism; 2. a furnace chamber; 3. a lower shaft lifting mechanism; 4. a shield; 5. a frame; 6. magnetic fluid corrugated pipe; 7. an air inlet; 8. an exhaust port; 9. a connecting pipe; 10. a high vacuum gate valve; 11. a molecular pump; 12. a guide rod; 13. a heating coil; 14. an extraction opening; 15. a cooling water inlet I; 16. a cooling water outlet I; 17. a cooling water refrigerating unit; 18. a cooling water inlet II; 19. a cooling water outlet II; 1.1, upper shaft; 3.1, lower shaft.
Detailed Description
The present utility model will be described in further detail with reference to examples, but embodiments of the present utility model are not limited thereto.
Example 1
This embodiment further illustrates this embodiment by taking a novel phosphorus inspection drawing device currently used by this company as an example. The structure of the phosphor inspection drawing apparatus of this type is to facilitate the public understanding of the present utility model, and is not limited to the structure in the following embodiments.
Referring to fig. 1-2, the phosphorus inspection drawing device comprises an upper shaft lifting mechanism 1, a furnace chamber 2, a lower shaft lifting mechanism 3, a guide rail 4 and a frame 5, wherein the height of the frame 5 is about 2600mm. The phosphorus inspection drawing equipment in the scheme is continuously optimized on the structure of the existing phosphorus inspection equipment of the solar-grade product, and the part structure which is not described in detail can adopt structural parts in the prior art (such as the publication number is CN 202208777U). The upper shaft lifting mechanism 1 corresponds to the furnace chamber 2 and is linked with a raw material rod in the furnace chamber 2 through an upper shaft 1.1, the lower shaft lifting mechanism 3 is linked with seed crystals in the furnace chamber through a lower shaft 3.1, the upper shaft lifting mechanism 1, the furnace chamber 2 and the lower shaft lifting mechanism 3 are concentrically arranged, and the upper shaft lifting mechanism 1 and the lower shaft lifting mechanism 3 axially move through a lead screw and a guide rail.
The upper shaft 1.1 in the upper shaft lifting mechanism 1 and the lower shaft 3.1 in the lower shaft lifting mechanism 3 of the equipment are hollow water-cooled shafts, the upper shaft 1.1 and the lower shaft 3.1 are sealed by a magnetic fluid corrugated pipe 6, an air inlet 7 and an air outlet 8 are arranged on the furnace chamber 2, the air inlet 7 and the air outlet 8 are used for circulating argon, and the furnace chamber 2 is connected with a high-vacuum gate valve 10 through a connecting pipe 9 and then connected with a molecular pump 11 to form the crystal material zone-melting phosphorus inspection drawing equipment. Namely, the shaft seal of the lifting part of the phosphorus inspection drawing equipment (hereinafter referred to as 'original equipment') of the original solar-grade product is changed into the fluid bellows seal, and the upper shaft 1.1 in the upper shaft lifting mechanism 1 and the lower shaft 3.1 in the lower shaft lifting mechanism 3 are hollow water-cooled shafts, namely, the middle part of the shaft is hollow, cold source medium (generally cooling water) can be introduced, the shaft can be cooled to below 100 ℃, and the volatilization of impurities in the shaft can be effectively reduced. The rotary vane pump of the original equipment is replaced by the molecular pump 11, and the matched high-vacuum gate valve 10 and other structures are arranged, so that the vacuum degree can be improved from-3 Pa to-3 x 10 -3 Pa, and matched ionization gauge, resistance gauge, composite vacuum gauge and other components are required to be added for matching with the molecular pump 11.
In this embodiment, four guide rods 12 are disposed above the furnace chamber 2, and the magnetic fluid bellows 6 is guided by the four guide rods 12, where the guide rods 12 are a guide mechanism for moving the upper shaft 1.1 and the lower shaft 3.1 up and down.
In the embodiment, the middle part of the furnace chamber 2 is provided with the heating coil 13, the heating coil 13 is used for heating the mother sample of the upper shaft 1.1, the heating zone is circularly melted in the drawing process, the crystal is drawn, the heating coil 13 is made of oxygen-free copper, the heating coil 13 of red copper material of original equipment is replaced, and the volatilization of impurities is effectively reduced.
Preferably, the air inlet 7 and the air outlet 8 of the furnace chamber 2 are two-purpose ports for argon gas inlet and outlet, and can be alternatively used as an argon gas outlet or an air inlet.
Preferably, the furnace chamber 2 is provided with an extraction opening 14, the furnace chamber 2 is connected with the high vacuum gate valve 10 and the molecular pump 11 after being communicated with the connecting pipe 9 through the extraction opening 14, the inner diameter of the extraction opening 14 is 125mm, and the caliber of the extraction opening 14 is increased by about 1 time compared with that of the original equipment, mainly for meeting the high vacuum requirement. In practical design, the inner diameter of the air extraction opening 14 can be designed according to the field requirement, and is preferably set at 100-150 mm.
Preferably, the furnace chamber 2 is a cavity made of 304 stainless steel material, and in order to improve the cleanliness in the furnace chamber 2, the furnace door of the furnace chamber 2 needs to be lifted cleanly, and the furnace door needs to be polished further in a mirror surface, cleaned ultrasonically, tested in pressure and the like.
Preferably, referring to fig. 3, the upper shaft 1.1 above the furnace chamber 2 is provided with a cooling water inlet I15, the cooling water inlet I15 is communicated with a hollow cavity of the upper shaft 1.1, and the upper shaft 1.1 is provided with a cooling water outlet I16; the bottom of lower shaft 3.1 is equipped with cooling water inlet II 18, and lower shaft 3.1 below furnace chamber 2 is equipped with cooling water outlet II 19, and cooling water outlet I16, cooling water outlet II 19 pass through circulating water piping and connect cooling water refrigerating unit 17, and cooling water refrigerating unit 17's cold water outlet is the cooling water inlet I15, the cooling water inlet II 18 of connecting equipment respectively, and cooling water refrigerating unit 17 outside is equipped with guard shield 4. The cooling water of the cooling water refrigerating unit 17 enters the hollow cavity of the upper shaft 1.1 from the cooling water inlet I15, cools the upper shaft 1.1, the medium subjected to heat exchange is discharged from the cooling water outlet I16 at the top of the upper shaft 1.1 and then sent to the cooling water refrigerating unit 17 for refrigeration, and likewise, the cooling water of the cooling water refrigerating unit 17 enters the hollow cavity of the lower shaft 3.1 from the cooling water inlet II 18 at the bottom of the lower shaft 3.1, cools the lower shaft 3.1, and the medium subjected to heat exchange is discharged from the cooling water outlet II 19 below the furnace chamber 2 and then sent to the cooling water refrigerating unit 17 for refrigeration.
Preferably, the seed crystal seat for placing the lower shaft 3.1 and the clamping seat for placing the upper shaft 1.1 in the furnace chamber 2 are all fixed structures made of 316L.
Claims (8)
1. Novel drawing equipment is examined to phosphorus, including upper shaft elevating system (1), furnace chamber (2), lower shaft elevating system (3), guide rail and frame (5), its characterized in that: the upper shaft (1.1) in the upper shaft lifting mechanism (1) and the lower shaft (3.1) in the lower shaft lifting mechanism (3) are hollow water-cooled shafts, the upper shaft (1.1) and the lower shaft (3.1) are sealed by a magnetic fluid corrugated pipe (6), an air inlet (7) and an air outlet (8) are arranged on the furnace chamber (2), and the furnace chamber (2) is connected with a high vacuum gate valve (10) through a connecting pipe (9) and then connected with a molecular pump (11) to form crystal material zone-melting-based phosphorus inspection drawing equipment.
2. The novel phosphorus inspection and drawing device according to claim 1, wherein: four guide rods (12) are arranged above the furnace chamber (2), and the magnetic fluid corrugated pipe (6) is guided by the four guide rods (12).
3. The novel phosphorus inspection and drawing device according to claim 1, wherein: the middle part of the furnace chamber (2) is provided with a heating coil (13), and the heating coil (13) is a coil made of oxygen-free copper.
4. The novel phosphorus inspection and drawing device according to claim 1, wherein: the air inlet (7) and the air outlet (8) of the furnace chamber (2) are both argon inlet and outlet.
5. The novel phosphorus inspection and drawing device according to claim 1, wherein: the furnace chamber (2) is provided with an extraction opening (14), the furnace chamber (2) is connected with the high vacuum gate valve (10) and the molecular pump (11) after being communicated with the connecting pipe (9) through the extraction opening (14), and the inner diameter of the extraction opening (14) is 100-150 mm.
6. The novel phosphorus inspection and drawing device according to claim 1, wherein: the furnace chamber (2) is a cavity made of 304 stainless steel material, and the inner wall of the furnace chamber (2) is a polished 304 stainless steel material structure.
7. The novel phosphorus inspection and drawing device according to claim 1, wherein: the upper shaft (1.1) above the furnace chamber (2) is provided with a cooling water inlet I (15), the cooling water inlet I (15) is communicated with a hollow cavity of the upper shaft (1.1), and the upper shaft (1.1) is provided with a cooling water outlet I (16); the bottom of lower axle (3.1) is equipped with cooling water import II (18), and lower axle (3.1) below furnace chamber (2) are equipped with cooling water export II (19), and cooling water export I (16), cooling water export II (19) are through circulating water piping connection cooling water refrigerating unit (17), and cooling water import I (15), cooling water import II (18) of equipment are connected respectively to the cooling water export of cooling water refrigerating unit (17).
8. The novel phosphorus inspection and drawing device according to claim 1, wherein: seed crystal seats for placing the lower shaft (3.1) and clamping seats for placing the upper shaft (1.1) in the furnace chamber (2) are all fixed structures made of 316L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322315192.2U CN220952171U (en) | 2023-08-28 | 2023-08-28 | Novel drawing equipment is examined to phosphorus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322315192.2U CN220952171U (en) | 2023-08-28 | 2023-08-28 | Novel drawing equipment is examined to phosphorus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220952171U true CN220952171U (en) | 2024-05-14 |
Family
ID=91018836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322315192.2U Active CN220952171U (en) | 2023-08-28 | 2023-08-28 | Novel drawing equipment is examined to phosphorus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220952171U (en) |
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2023
- 2023-08-28 CN CN202322315192.2U patent/CN220952171U/en active Active
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