CN220952013U - Filling device - Google Patents

Abstract

The utility model relates to the technical field of display preparation, in particular to a filling device. Comprises a filling chamber, a buffer chamber, a crucible carrying platform and a guide rail for the crucible to move between each chamber and the carrying platform; the buffer chamber and the crucible carrier are separated by a first movable door, and the filling chamber and the buffer chamber are separated by a second movable door; the filling chamber is provided with a vacuum pumping device and a vacuum breaking device, and is provided with at least one heating boat for pre-melting and filling materials. The device can improve the single filling quantity of the melting type material in the crucible, prolong the single evaporation production time of the crucible material, improve the production efficiency and increase the equipment utilization rate. In addition, the vacuum environment of the cavity is maintained, and the problem of water and oxygen pollution of the cavity environment caused by frequent vacuum breaking is avoided.

Description

Filling device

Technical Field

The utility model relates to the technical field of display preparation, in particular to a filling device.

Background

An OLED (organic light-emitting diode) is a new generation of display following an LCD, and mainly adopts vapor deposition in a high vacuum environment to form a film, and an organic material in a crucible is heated and vaporized and then deposited on a glass substrate to form an organic film, so as to realize the light emission of an OLED device.

In the existing evaporation equipment, the single filler amount of a crucible is limited, particularly a melting type organic material is in a powder shape, when the melting point of the melting type organic material is exceeded by heating temperature, the melting point is liquefied, the volume of the melting type organic material is reduced by at least more than about 1/3 as compared with that of the melting point of the melting type organic material, and when the melting type organic material is produced, the crucible needs to be stopped after the melting point of the melting type organic material is used for a certain amount, so that the utilization rate and the production efficiency of the equipment are greatly reduced, in addition, the cavity to be fed needs to be frequently placed in an atmosphere for a long time, parts such as an inner plate and the like are easy to absorb water vapor, so that the water-oxygen environment in the cavity is poor, the evaporation material is easy to crack when heated, and the thickness of a film layer is uneven.

Disclosure of Invention

The utility model aims to solve the technical problems of low production efficiency and potential water and oxygen pollution of an evaporation cavity caused by frequent shutdown of material addition due to limited single filling amount of molten organic materials in a crucible at present.

The utility model is realized in the following way:

A filling device comprises a filling chamber, a buffer chamber, a crucible carrier and a guide rail for a crucible to move between the chambers and the carrier; the buffer chamber and the crucible carrier are separated by a first movable door, and the filling chamber and the buffer chamber are separated by a second movable door; the filling chamber is provided with a vacuum pumping device and a vacuum breaking device, and is provided with at least one heating boat for pre-melting and filling materials.

Further, the first moving door and the second moving door are electric opening and closing doors.

Further, the first moving door and the second moving door are respectively connected with a first valve and a second valve.

Further, the packing chamber and the buffer chamber are provided with vacuum gauges.

Further, the vacuumizing device comprises a vacuumizing pipeline for connecting the filling chamber and the buffer chamber and a vacuum pump arranged on the vacuumizing pipeline.

Further, the vacuumizing pipeline comprises a filling chamber vacuumizing branch pipe, a buffer chamber vacuumizing branch pipe and a combined vacuumizing main pipe which are connected in series, and the vacuumizing main pipe is connected with the vacuum pump.

Furthermore, valves are arranged on the filling chamber vacuumizing branch pipes and the buffer chamber vacuumizing branch pipes.

Further, the vacuum breaking device comprises an air inlet pipeline and a valve on the air inlet pipeline, wherein the air inlet pipeline and the valve are respectively connected with the inside of each cavity.

Further, an openable top window positioned above the heating boat is arranged at the top of the packing chamber.

Further, all valves connecting the chambers are connected to a control system.

The utility model has the advantages that: the device can improve the single filling quantity of the melting type material in the crucible, prolong the single evaporation production time of the crucible material, improve the production efficiency and increase the equipment utilization rate. In addition, the vacuum environment of the cavity is maintained, and the problem of water and oxygen pollution of the cavity environment caused by frequent vacuum breaking is avoided.

Drawings

The utility model will be further described with reference to examples of embodiments with reference to the accompanying drawings.

FIG. 1 is a flow of the packing of the present utility model.

Fig. 2 is a schematic structural view of the present utility model.

FIG. 3 is a schematic view of a crucible entering a buffer chamber from a carrier.

FIG. 4 is a schematic drawing of buffer chamber evacuation.

FIG. 5 is a schematic diagram of the return buffer chamber after crucible packing.

FIG. 6 is a schematic diagram of a return stage with crucible cooling completed.

FIG. 7 is a schematic illustration of the filling chamber being filled with air and the upper cover being opened to feed the heated boat.

The reference numerals in the figures are: the packing chamber 1, the top window 11, the buffer chamber 2, the first moving door 21, the first valve 211, the second moving door 22, the second valve 221, the crucible carrier 3, the guide rail 4, the evacuating device 5, the vacuum pump 51, the packing chamber evacuating branch pipe 52, the third valve 521, the buffer chamber evacuating branch pipe 53, the fourth valve 531, the evacuating main pipe 54, the evacuating device 6, the first air intake pipe 61, the fifth valve 621, the second air intake pipe 62, the sixth valve 621, the heating boat 7, the boat body 71, the liquid outlet pipe 72, the seventh valve 721, the vacuum gauge 8, and the crucible 100, wherein the valve filling means being in a closed state.

Detailed Description

In the description of the present utility model, it should be understood that the description of indicating the orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description and to simplify the description, rather than to indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The technical scheme of the utility model is as follows:

referring to fig. 2, a packing apparatus of the present utility model includes a packing chamber 1, a buffer chamber 2, a crucible carrier 3, and a guide rail 4 for moving a crucible 100 between the chambers and the carrier; the buffer chamber 2 and the crucible carrier 3 are separated by a first moving door 21, and the filling chamber 1 and the buffer chamber 2 are separated by a second moving door 22; the filling chamber 1 and the buffer chamber 2 are provided with a vacuumizing device 5 and a vacuum breaking device 6, and the filling chamber 1 is provided with at least one heating boat 7 for pre-melting and filling materials.

Specifically, the first movable door 21 is connected to a first valve 211 for controlling the opening and closing of the first movable door 21.

Specifically, the second movable door 22 is connected to a second valve 221 for controlling the opening and closing of the second movable door 22.

More specifically, the first moving door 21 and the second moving door 22 are electric lifting doors.

Specifically, the packing chamber 1 and the buffer chamber 2 are provided with vacuum gauges 8 for detecting the degree of vacuum in each chamber.

Specifically, the vacuum pumping device 5 includes a vacuum pumping pipe connecting the packing chamber 1 and the buffer chamber 2, and a vacuum pump 51 disposed on the vacuum pumping pipe, for evacuating each chamber.

Specifically, the vacuumizing pipeline comprises a filling chamber vacuumizing branch pipe 52, a buffer chamber vacuumizing branch pipe 53 and a combined vacuumizing main pipe 54 which are connected in series, wherein the vacuumizing main pipe is connected with the vacuum pump 51. And a third valve 521 and a fourth valve 531 are respectively arranged on the filler chamber vacuumizing branch pipe 52 and the buffer chamber vacuumizing branch pipe 53.

Specifically, the vacuum breaking device 6 includes a first air inlet pipe 61 connected to the inside of the packing chamber 1, a fifth valve 621 on the first air inlet pipe 61, a second air inlet pipe 62 connected to the inside of the buffer chamber 2, and a sixth valve 621 on the second air inlet pipe 62.

Specifically, the top of the packing chamber 1 is provided with an openable top window 11 above the heating boat 7. When the device is used for feeding, the device is started, the heating boat 7 is replenished with powdery melting organic materials, and then the melting organic materials are heated and liquefied in the heating boat 7.

More specifically, the heating boat 7 includes a boat body 71, a heating tank is disposed on the boat body 71, a plurality of heating elements are connected to a side wall of the heating tank, a liquid outlet pipe 72 is connected to a bottom of the tank, and a seventh valve 721 is disposed on the liquid outlet pipe 72. The heating boat 7 is fixed to the side wall of the packing chamber 1.

Specifically, all valves connecting the chambers are connected to a control system. The control system here is generally computer controlled.

As shown in figure 1, the method for filling by adopting the device comprises the steps of pre-melting a molten organic material in a vacuum environment, pouring the molten organic material into a crucible for filling treatment, placing the crucible in a protective gas environment for cooling after filling, and finishing filling after cooling. As shown in fig. 3 to 7, the specific steps are as follows:

1. Before filling, the second valve 121 is closed, and at this time, the third valve 521 is opened and the fourth valve 531 is closed; the vacuum degree of the packing chamber 1 is lower than 9.9E-4Pa, the heating materials can be premelted, the materials in the heating boat 7 are continuously heated, the temperature is higher than the melting point of the corresponding materials, preferably the melting point of the materials, the materials in the heating boat are enabled to be liquid, and then crucible packing is carried out.

2. The empty crucible body 100 is provided with the carrying platform 3, the buffer chamber 2 is consistent with the atmospheric vacuum, the first valve 111 between the buffer chamber 2 and the carrying platform 3 is opened, the crucible body 100 is conveyed to the buffer chamber 2 through the guide rail 4, the fourth valve 531 is opened after the first valve 111 is closed, and the buffer chamber 2 starts to be vacuumized.

3. When the vacuum of the buffer chamber 2 is reduced to be below 9.9E-4Pa, the second valves 121 of the packing chamber 1 and the buffer chamber 2 are opened, and the crucible body 100 enters the lower part of the heating boat 7 of the packing chamber 1 through the guide rail 4;

4. The seventh valve 721 below the heating boat 7 is opened, and the liquid material flows into the crucible, and the filling amount is 4/5 lower than the crucible volume, and the material filling is completed.

5. The crucible is returned to the buffer chamber 2 via the guide rail 4 and the second valve 121 is closed.

6. The sixth valve 621 is opened and the buffer chamber 2 is filled with a shielding gas, which is an inert gas or nitrogen, preferably nitrogen, to accelerate the cooling of the material in the crucible. When the material is reduced to a safe temperature, the first valve 111 is opened, the crucible enters the carrying platform 3 through the guide rail 4, and the filling process of the single crucible is completed. The safe temperature is defined as that the material is in the atmosphere and is not affected by water and oxygen, and the operators have no risk of scalding.

7. When the heating boat 7 is used for feeding, the heating boat 7 is cooled to normal temperature, the fifth valve 611 is opened, the air is introduced into the filling chamber 1 to break vacuum, and the top of the filling chamber can be opened to feed the heating boat 7 when the vacuum is consistent with the atmospheric pressure; the crucible filling can be carried out only after the material is fed by the heating boat 7, and the minimum heating time is set according to the feeding amount of the heating boat, so that the material is required to be completely melted.

While specific embodiments of the utility model have been described above, it will be appreciated by those skilled in the art that the specific embodiments described are illustrative only and not intended to limit the scope of the utility model, and that equivalent modifications and variations of the utility model in light of the spirit of the utility model will be covered by the claims of the present utility model.

Claims (10)

1. A packing device, characterized in that: comprises a filling chamber, a buffer chamber, a crucible carrying platform and a guide rail for the crucible to move between each chamber and the carrying platform; the buffer chamber and the crucible carrier are separated by a first movable door, and the filling chamber and the buffer chamber are separated by a second movable door; the filling chamber is provided with a vacuum pumping device and a vacuum breaking device, and is provided with at least one heating boat for pre-melting and filling materials.

2. The packing apparatus of claim 1, wherein: the first moving door and the second moving door are electric opening and closing doors.

3. The packing apparatus of claim 1, wherein: the first movable door and the second movable door are respectively connected with a first valve and a second valve.

4. The packing apparatus of claim 1, wherein: the packing chamber and the buffer chamber are provided with vacuum gauges.

5. The packing apparatus of claim 1, wherein: the vacuumizing device comprises a vacuumizing pipeline connected with the filling chamber and the buffer chamber and a vacuum pump arranged on the vacuumizing pipeline.

6. The packing apparatus of claim 5, wherein: the vacuumizing pipeline comprises a filling chamber vacuumizing branch pipe, a buffer chamber vacuumizing branch pipe and a combined vacuumizing main pipe which are connected in series, wherein the vacuumizing main pipe is connected with the vacuum pump.

7. The packing apparatus of claim 6, wherein: and valves are arranged on the filler chamber vacuumizing branch pipe and the buffer chamber vacuumizing branch pipe.

8. The packing apparatus of claim 1, wherein: the vacuum breaking device comprises air inlet pipelines respectively connected with the inside of each cavity and valves on the air inlet pipelines.

9. The packing apparatus of claim 1, wherein: the top of the packing chamber is provided with an openable top window positioned above the heating boat.

10. The packing apparatus of claim 1, wherein: all valves connecting the chambers are connected with a control system.