CN220919786U

CN220919786U - Tool bit precision lifting rotary structure for high-precision coating machine

Info

Publication number: CN220919786U
Application number: CN202322278880.6U
Authority: CN
Inventors: 孙杭州; 尚博; 孙斌; 李晓刚; 梁舰
Original assignee: Jiangyin Jize Wanjia Technology Co ltd
Current assignee: Jiangyin Jize Wanjia Technology Co ltd
Priority date: 2023-08-23
Filing date: 2023-08-23
Publication date: 2024-05-10
Anticipated expiration: 2033-08-23

Abstract

The utility model relates to the technical field of coating of semiconductors and photovoltaic industries, and particularly discloses a precise lifting and rotating structure of a tool bit for a high-precision coating machine, wherein the whole structure consists of a fixed supporting component, a lifting supporting component, a turnover driving component and a tool apron component; in the utility model, the guide sliding blocks at two sides of the lifting sliding seat move along the sliding guide grooves in the lifting process, so that the stability of lifting transmission is improved, and the lifting screw is in threaded connection transmission with the lifting sliding seat through the ball screw, so that the precision of lifting transmission is improved; the main shaft of the turnover driving motor drives the turnover shaft and the turnover arms to turn over, and the two ends of the turnover shaft are sleeved with the middle parts of the two sides of the turnover supporting seat through bearings, so that the stability of corner transmission is improved; the blade is in the knife groove body, and is tightly pressed through the spring roller at the lower end of the pressing plate, so that the blade is prevented from being rigidly broken by the elastic pressing mode, and the replacement and maintenance of the blade are facilitated.

Description

Tool bit precision lifting rotary structure for high-precision coating machine

Technical Field

The utility model relates to the technical field of coating films in semiconductor and photovoltaic industries, in particular to a precise lifting and rotating structure of a tool bit for a high-precision coating machine.

Background

The high-precision coater is a liquid film which is uniform by the linear motion of a coating cutter head and the thrust of a blade and the tension of the liquid film. The device is widely applied to the industries of semiconductor photoetching front working procedures, solar battery and lithium battery manufacturing, display panels and the like, and a coating tool bit driving mechanism in the prior art can meet general use requirements, but has the following defects in the actual use process:

1. In the prior art, a cutter head of a high-precision coating machine is generally arranged on a fixed cutter seat and driven by a linear or rotary mechanism, and in the running process, the cutter head generates deviation from the relative position of a substrate due to the movement of a movement mechanism, so that the thickness uniformity of a liquid film is influenced, and the final finished product effect is poor;

2. In the prior art, a cutter head of a high-precision coating machine is generally arranged on a fixed cutter seat and driven by a linear or rotary mechanism, and in the operation process, the cutter head can generate deviation with the relative position of a substrate due to insufficient positioning precision, so that the thickness uniformity of a liquid film is influenced, and the final finished product effect is poor.

Disclosure of utility model

The utility model aims to provide a precise lifting and rotating structure of a cutter head for a high-precision coating machine, which aims to solve the problems in the prior art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a high-precision coating machine tool bit precision lifting rotating structure, includes fixed support subassembly, fixed support subassembly includes the fixed mounting board, and at the perpendicular fixedly connected with of fixed mounting board upper right end support roof, fixed mounting board is equipped with the support curb plate with the side of support roof is fixed, the centre of support roof and at the side fixed mounting who supports the curb plate has lifting support subassembly, lifting support subassembly's side fixedly connected with upset supporting subassembly, and be equipped with upset drive assembly in upset supporting subassembly's side, the fixed blade holder subassembly that wears to be equipped with in upset drive assembly's side.

Preferably, the mounting groove has been seted up in the middle of supporting the roof, the lift supporting component includes at mounting groove lower port department and installs the lift supporting side board at supporting the curb plate side, and at the side of lift supporting side board and in the centre fixed mounting of supporting the curb plate have the lift supporting seat of cell body structure, be equipped with the lift screw through the bearing housing in the middle of the upper and lower both ends face of lift supporting seat cell body, the axle head of lift screw and at the upper end fixed mounting of lift supporting seat have the motor mount pad, the upper end fixed mounting of motor mount pad has lift driving motor, the main shaft of lift driving motor and the axle head of lift supporting seat are through shaft coupling looks fixed connection in the centre of motor mount pad.

Preferably, a lifting sliding seat is arranged between the upper end surface and the lower end surface of the lifting supporting seat, the lifting sliding seat is in threaded connection with the lifting screw rod, sliding guide grooves are symmetrically formed in the inner sides of the front end and the rear end of the groove body of the lifting supporting seat, guide sliding blocks which are matched with the sliding guide grooves in a sliding mode are arranged on the outer sides of the front end and the rear end of the lifting sliding seat, the left end of the lifting sliding seat is fixedly connected with a side connecting seat, and the overturning supporting component is fixedly connected with the side connecting seat.

Preferably, the overturning supporting component comprises an overturning supporting seat of a C-shaped groove body plate-shaped structure, a fixed connecting plate is fixedly connected to the side face of the overturning supporting seat, the fixed connecting plate is fixedly connected with the left end of the side connecting seat through a bolt, and an overturning motor mounting seat is fixedly arranged at the front end of the overturning supporting seat.

Preferably, the turnover driving assembly comprises a turnover shaft, the front end and the rear end of the turnover shaft are respectively sleeved with the front end wall body and the rear end wall body of the turnover supporting seat through bearings, the front end of the turnover motor mounting seat is fixedly provided with a turnover driving motor, and a main shaft of the turnover driving motor is fixedly connected with the terminal of the turnover shaft in the middle of the turnover motor mounting seat through a coupler.

Preferably, the tool apron assembly comprises a turnover arm fixedly sleeved with the turnover shaft in the middle of the turnover supporting seat, a tool apron is fixedly connected to the lower end of the turnover arm outwards, a tool slot is formed in the upper end of the tool apron towards the left end of the tool apron, a blade is buckled in the tool slot, a pressing plate is buckled in the upper end of the tool apron, a pressing slot is formed in the lower end of the pressing plate, a spring roller is embedded in the pressing slot, the lower end of the spring roller is pressed with the upper end of the blade, a limit screw is connected to the upper end of the pressing plate in a threaded mode, and a pressure regulating screw is connected to the upper end of the pressing plate in a threaded mode on the side face of the limit screw.

Compared with the prior art, the utility model has the beneficial effects that: the utility model has reasonable structure and strong functionality and has the following advantages:

1. According to the utility model, the lifting sliding seat is in threaded connection with the lifting screw rod in the middle of the lifting supporting seat groove body, the guide sliding blocks at two sides of the lifting sliding seat move along the sliding guide groove in the lifting process, so that the stability of lifting transmission is improved, and the lifting screw rod and the lifting sliding seat are in threaded connection with the ball screw rod for transmission, so that the precision of lifting transmission is improved;

2. According to the utility model, the turnover shaft and the turnover arm are driven to turn by the main shaft of the turnover driving motor, the turnover driving motor is a numerical control motor, the rotation angle of the turnover shaft can be accurately controlled, the multi-angle blade coating process requirement of the blade at the lower end of the turnover arm can be further met, and the two ends of the turnover shaft are sleeved with the two sides of the turnover supporting seat through bearings, so that the stability of rotation angle transmission is improved;

3. According to the utility model, the blade is pressed in the cutter groove body through the spring roller at the lower end of the pressing plate, and the pressing degree of the spring roller relative to the upper end of the blade is regulated through the pressure regulating screw.

Drawings

FIG. 1 is an upper left isometric view of the overall structure of the present utility model;

FIG. 2 is an upper right isometric view of the overall structure of the present utility model;

FIG. 3 is a front view of the overall structure of the present utility model;

FIG. 4 is an isometric view of the cross-sectional structure of FIG. 3, section A-A;

FIG. 5 is an enlarged schematic view of the partial structure at F in FIG. 4;

FIG. 6 is an enlarged schematic view of a part of the structure at G in FIG. 4;

FIG. 7 is an isometric view of the cross-sectional structure B-B of FIG. 3;

FIG. 8 is an isometric view of the E-E cross-sectional structure of FIG. 3;

FIG. 9 is an enlarged schematic view of the partial structure at H in FIG. 8;

FIG. 10 is a left side elevational view of the overall structure of the present utility model;

FIG. 11 is an isometric view of the C-C cross-sectional structure of FIG. 10;

Fig. 12 is an isometric view of the D-D cross-sectional structure of fig. 10.

In the figure: 1. a fixed support assembly; 2. lifting the supporting component; 3. overturning the supporting component; 4. a flip drive assembly; 5. a tool holder assembly; 101. a fixed mounting plate; 102. a supporting top plate; 103. supporting the side plates; 201. lifting and supporting the side plate; 202. lifting the supporting seat; 203. a motor mounting seat; 204. a lifting driving motor; 205. lifting screw rods; 206. a lifting sliding seat; 207. a sliding guide groove; 208. a guide slide block; 209. a side connecting seat; 301. fixing the connecting plate; 302. overturning the supporting seat; 303. overturning a motor mounting seat; 401. a turnover shaft; 402. a turnover driving motor; 501. a flip arm; 502. a tool apron; 503. a knife slot; 504. a blade; 505. a pressing plate; 506. pressing a groove; 507. a spring roller; 508. a limit screw; 509. pressure regulating screw.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1 to 12, the present utility model provides a technical solution: the utility model provides a high-precision coating machine tool bit precision lifting rotating structure, whole structure comprises fixed support subassembly 1, lift support subassembly 2, upset support subassembly 3, upset drive subassembly 4 and blade holder subassembly 5, wherein, fixed support subassembly 1 plays a fixed support effect relative lift support subassembly 2, lift support subassembly 2 plays a lift direction and drive effect relative upset support subassembly 3, upset drive subassembly 4 plays a supporting effect relative upset drive subassembly 4, upset drive subassembly 4 plays a upset drive effect relative blade holder subassembly 5, blade holder subassembly 5 then plays a blade fixing effect.

The fixed support assembly 1 comprises a fixed mounting plate 101, a support top plate 102 is vertically and fixedly connected to the right upper end of the fixed mounting plate 101, a support side plate 103 is fixedly arranged on the side surface of the fixed mounting plate 101 and the side surface of the support top plate 102, wherein the fixed mounting plate 101 plays a side surface fixed support role relative to the support top plate 102 and the support side plate 103, the support top plate 102 plays a protective role relative to the lifting support assembly 2, the overturning support assembly 3, the overturning drive assembly 4 and the tool apron assembly 5, and the support side plate 103 plays a fixed support role relative to the lifting support assembly 2.

The lifting support component 2 is composed of a lifting support side plate 201, a lifting support seat 202, a motor mounting seat 203, a lifting driving motor 204, a lifting screw 205 and a lifting sliding seat 206, wherein the lifting support side plate 201 is of an L-shaped plate structure, a mounting groove is formed in the middle of the support top plate 102, the lifting support side plate 201 is fixedly arranged on the side surface of the support side plate 103 and is positioned on the side surface of the lower port of the mounting groove, the lifting supporting seat 202 is fixedly arranged on the side surface of the lifting support side plate 201 and is positioned at the lower port of the mounting groove, the upper end and the lower end of the lifting screw 205 are respectively sleeved with the middle of the upper end and the lower end surfaces of the groove body of the lifting support seat 202 through bearings, the motor mounting seat 203 is fixedly arranged at the upper end of the lifting support seat 202, the lifting driving motor 204 is fixedly arranged at the upper end of the motor mounting seat 203, the main shaft of the lifting driving motor 204 is fixedly connected with the shaft end of the lifting supporting seat 202 through a coupler in the middle of the motor mounting seat 203, the lifting sliding seat 206 is fixedly connected with the lifting screw 205 between the upper end surface and the lower end surface of the lifting supporting seat 202, the lifting sliding seat 206 is in screw connection with the lifting screw 205 through balls, the transmission precision of the lifting sliding seat 206 between the upper end surface and the lower end surface of the groove body of the lifting supporting seat 202 is improved, sliding guide grooves 207 are symmetrically arranged on the inner sides of the front end and the rear end surface of the groove body of the lifting supporting seat 202, guide sliding blocks 208 which are in sliding fit with the sliding guide grooves 207 are arranged on the outer sides of the front end and the rear end surface of the lifting sliding seat 206, the left end of the lifting sliding seat 206 is fixedly connected with a side connecting seat 209, the overturning supporting component 3 is fixedly connected with the side connecting seat 209, and the main shaft of the lifting driving motor 204 drives the lifting screw 205 to be in screw connection with the lifting sliding seat 206 during operation, the guide sliding blocks 208 on the two sides of the lifting sliding seat 206 move up and down along the sliding guide grooves 207 on the inner walls on the two sides of the groove body of the lifting supporting seat 202, so that the transmission stability of the lifting sliding seat 206 on the upper end surface and the lower end surface of the lifting supporting seat 202 is improved.

The overturning supporting assembly 3 comprises an overturning supporting seat 302 and an overturning motor installing seat 303, wherein the overturning supporting seat 302 is of a C-shaped groove body plate-shaped structure, a fixed connecting plate 301 is fixedly connected to the side face of the overturning supporting seat 302, the fixed connecting plate 301 is fixedly connected with the left end of the side connecting seat 209 through bolts, the overturning motor installing seat 303 is fixedly installed at the front end of the overturning supporting seat 302, and the fixed connecting plate 301 plays a fixed supporting role on the side face of the side connecting seat 209 relative to the overturning supporting seat 302.

The turnover driving assembly 4 comprises a turnover shaft 401 and a turnover driving motor 402, wherein the front end and the rear end of the turnover shaft 401 are respectively sleeved with the front end wall body and the rear end wall body of the turnover supporting seat 302 through bearings, the two ends of the turnover supporting seat 302, which are opposite to the turnover shaft 401, play a role in rotating and supporting, stability of the turnover action of the turnover shaft 401 is improved, the turnover driving motor 402 is fixedly arranged at the front end of the turnover motor mounting seat 303, a main shaft of the turnover driving motor 402 and the terminal of the turnover shaft 401 are fixedly connected with each other through a coupler in the middle of the turnover motor mounting seat 303, the turnover motor mounting seat 303 plays a role in fixing and supporting the turnover driving motor 402, and during operation, the turnover driving motor 402 drives the turnover shaft 401 to perform turnover action in the middle of the two sides of the turnover supporting seat 302, and the turnover driving motor 402 is a numerical control motor, so that accuracy of the turnover angle of the turnover shaft 401 is improved.

The tool apron component 5 is composed of a tool apron 502, a blade 504, a pressing plate 505, a spring roller 507, a limit screw 508 and a pressure regulating screw 509, wherein the upper right end of the tool apron 502 is fixedly connected with a turnover arm 501, the turnover arm 501 is penetrated with a turnover shaft 401, the side surface of the turnover arm 501 is provided with a spring screw, the outer circle of the turnover shaft 401 is tightly pressed in the middle of the turnover arm 501 by the spring screw, the structure is convenient for the disassembly and the fixation of the turnover shaft 401 and the turnover arm 501, the upper end of the tool apron 502 is provided with a tool slot 503 towards the left end of the tool apron 502, the blade 504 is buckled in the slot body of the tool slot 503, the pressing plate 505 is pressed at the upper end of the tool apron 502, the lower end of the pressing plate 505 is provided with a pressing slot 506, the spring roller 507 is embedded in the pressing slot 506, the lower end of the spring roller 507 is pressed with the upper end of the blade 504, the elastic pressing structure is formed by pressing, the blade 504 is prevented from being cracked when being impacted rigidly, the service life of the blade 504 is prolonged, the limit screw 508 is penetrated and matched with the pressing plate 505, the lower end of the limit screw 508 is fixed with the upper end of the tool holder 502 in a threaded manner, the limit screw 508 plays a role in limiting the upper end relative to the pressing plate 505, the pressure regulating screw 509 is penetrated and matched with the pressing plate 505 in a threaded manner, the lower end of the pressure regulating screw 509 is tightly propped against the upper end of the tool holder 502 by rotating the pressure regulating screw 509 during installation, the interval distance between the pressing plate 505 and the upper end of the cutter slot 503 is regulated, the pressing force of the spring roller 507 relative to the upper end of the blade 504 is regulated, the blades 504 with different materials can be clamped between the cutter slot 503 and the pressing plate 505, and the technological application range of the whole structure is prolonged.

In the utility model, during lifting action, the lifting driving motor 204 drives the lifting screw 205 to be in threaded connection with the lifting sliding seat 206 to drive the lifting sliding seat 206 to move up and down along the guide of the sliding guide groove 207 in the middle of the lifting supporting seat 202, wherein the lifting driving motor 204 is a servo motor, the lifting screw 205 and the lifting sliding seat 206 are in threaded connection with ball screws to be in transmission, so that the lifting precision and stability of the lifting sliding seat 206 are improved, during rotation action, the turning shaft 401 and the turning arm 501 are driven to turn over in the middle of two side surfaces of the turning supporting seat 302 through the turning driving motor 402, wherein the two ends of the turning shaft 401 are matched with the middle of two side wall bodies of the turning supporting seat 302 through bearings, so that the stability of the turning shaft 401 during turning action is improved, the turning shaft 401 is a servo motor, the precise turning angle of the turning arm 501 is improved, and the spring roller 507 at the lower end of the pressing plate 505 plays a role of pressing upper end relative to the blade 504 in the groove 503, the elastic pressing is realized, rigid cracking is avoided when the blade 504 is impacted, the service life of the blade 504 is improved, and the thickness of the pressing plate 505 is regulated to be opposite to the thickness of the blade 503, the pressing plate 505 is regulated through the regulating the thickness of the pressing plate 505, and the blade 503 is matched with the pressing structure of the blade 503, and the material quality of the blade 503 is improved.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a high-accuracy cutter head precision lifting rotary structure for coating machine, includes fixed support subassembly (1), its characterized in that: fixed support subassembly (1) is including fixed mounting board (101), and at fixed mounting board (101) upper right end vertical fixedly connected with support roof (102), fixed mounting board (101) are fixed with support curb plate (103) with the side of supporting roof (102), the centre of supporting roof (102) and in the side fixed mounting of support curb plate (103) have lift supporting component (2), the side fixedly connected with upset supporting component (3) of lift supporting component (2), and be equipped with upset drive assembly (4) in the side of upset supporting component (3), the side of upset drive assembly (4) is fixed to be worn to be furnished with blade holder assembly (5).

2. The precise lifting and rotating structure of a tool bit for a high-precision coating machine according to claim 1, wherein: the middle of supporting roof (102) has seted up the mounting groove, lift supporting component (2) include at mounting groove lower port department and install lift supporting side board (201) in supporting side board (103) side, and in the side of lift supporting side board (201) and in the centre fixed mounting of supporting side board (103) have lift supporting seat (202) of cell body structure, be furnished with lift screw (205) through the bearing housing in the middle of the upper and lower both ends face of lift supporting seat (202) cell body, the axle head of lift screw (205) and at the upper end fixed mounting of lift supporting seat (202) have motor mount pad (203), the upper end fixed mounting of motor mount pad (203) has lift driving motor (204), the main shaft of lift driving motor (204) and the axle head of lift supporting seat (202) are fixed connection through the shaft coupling in the centre of motor mount pad (203).

3. The precision lifting and rotating structure of a tool bit for a high-precision coating machine according to claim 2, wherein: lifting sliding seats (206) are arranged between the upper end face and the lower end face of the lifting supporting seat (202), the lifting sliding seats (206) are in threaded connection with lifting screws (205), sliding guide grooves (207) are symmetrically formed in the inner sides of the front end and the rear end of a groove body of the lifting supporting seat (202), guide sliding blocks (208) which are matched with the sliding guide grooves (207) in a sliding mode are arranged on the outer sides of the front end and the rear end of the lifting sliding seats (206), side connecting seats (209) are fixedly connected to the left end of the lifting sliding seats (206), and the overturning supporting assembly (3) is fixedly connected with the side connecting seats (209).

4. A precision lifting and rotating structure of a tool bit for a high-precision coating machine according to claim 3, characterized in that: the turnover supporting assembly (3) comprises a turnover supporting seat (302) of a C-shaped groove body plate-shaped structure, a fixed connecting plate (301) is fixedly connected to the side face of the turnover supporting seat (302), the fixed connecting plate (301) is fixedly connected with the left end of the side connecting seat (209) through bolts, and a turnover motor mounting seat (303) is fixedly arranged at the front end of the turnover supporting seat (302).

5. The precise lifting and rotating structure of the tool bit for the high-precision coating machine according to claim 4, wherein: the turnover driving assembly (4) comprises a turnover shaft (401), the front end and the rear end of the turnover shaft (401) are respectively sleeved with the front end wall and the rear end wall of the turnover supporting seat (302) through bearings, a turnover driving motor (402) is fixedly arranged at the front end of the turnover motor mounting seat (303), and a main shaft of the turnover driving motor (402) is fixedly connected with the terminal of the turnover shaft (401) in the middle of the turnover motor mounting seat (303) through a coupler.

6. The precise lifting and rotating structure of the tool bit for the high-precision coating machine according to claim 5, wherein: the utility model provides a knife holder assembly (5) is including in the centre of upset supporting seat (302) and upset arm (501) of fixed cover mutually with upset axle (401), and outwards fixedly connected with blade holder (502) in the lower extreme of upset arm (501), knife slot (503) have been seted up to the left end of blade holder (502) to the upper end of blade holder (502), and detain in knife slot (503) and be equipped with blade (504), the upper end knot of blade holder (502) is equipped with clamp plate (505), and has seted up indent (506) at the lower extreme of clamp plate (505), indent (506) are embedded to be furnished with spring roller (507), the lower extreme of spring roller (507) presss from both sides with the upper end of blade (504), the upper end of clamp plate (505) has stop screw (508) to the upper end spiro union of blade holder (502), the upper end of clamp plate (505) and at the side spiro union of stop screw (508) pressure regulating screw (509).