CN220899600U - Liquid supply defoaming device of color photoresist developing machine - Google Patents
Liquid supply defoaming device of color photoresist developing machine Download PDFInfo
- Publication number
- CN220899600U CN220899600U CN202322435577.2U CN202322435577U CN220899600U CN 220899600 U CN220899600 U CN 220899600U CN 202322435577 U CN202322435577 U CN 202322435577U CN 220899600 U CN220899600 U CN 220899600U
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- China
- Prior art keywords
- defoaming
- liquid supply
- tank shell
- box
- color photoresist
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 23
- 239000007788 liquid Substances 0.000 title claims abstract description 21
- 238000001125 extrusion Methods 0.000 claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 239000002518 antifoaming agent Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 3
- 239000006260 foam Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
The utility model discloses a liquid supply defoaming device of a color photoresist developer, relates to the technical field of photoresist liquid supply defoaming, and aims to solve the problems that the existing developing liquid defoaming device mainly needs to add a certain amount of defoaming agent at intervals of one end time to inhibit foam generation, the defoaming mode has high cost, and the defoaming agent needs to be accurately controlled and proportioned according to the flow of developing liquid, so that the control difficulty is high. Comprising the following steps: the defoaming device comprises a defoaming tank shell, wherein a defoaming box is arranged below the defoaming tank shell, and a conveying pipe is arranged between the defoaming box and the defoaming tank shell; further comprises: the electric cylinder is installed above the defoaming box and is provided with two electric cylinders, each electric cylinder comprises a piston rod, one end of each piston rod extends to the inside of the defoaming box, an extrusion frame is installed at the lower end of each piston rod, the electric cylinders are in transmission connection with the extrusion frame through the piston rods, and a second through hole net is installed on the outer wall of each extrusion frame.
Description
Technical Field
The utility model relates to the technical field of photoresist liquid supply defoaming, in particular to a liquid supply defoaming device of a color photoresist developing machine.
Background
Photoresists, also known as photoresists, are etch-resist thin film materials whose solubility is changed by irradiation or radiation of ultraviolet light, electron beams, ion beams, X-rays, etc.; the developing solution is a chemical solvent for dissolving a soluble area of the photoresist caused by exposure, and generates a certain amount of foam in the cyclic spraying process of the system, so that the foam can influence the developing quality to a certain extent, and inconvenience is caused to production.
The existing developing solution defoaming device mainly needs to add a certain amount of defoaming agent at intervals of one end time to inhibit foam generation, the defoaming mode has high cost, and the defoaming agent needs to be accurately controlled and proportioned according to the flow of the developing solution, so that the control difficulty is high; therefore, the prior requirements are not met, and a liquid supply defoaming device of a color photoresist developer is provided.
Disclosure of utility model
The utility model aims to provide a liquid supply defoaming device of a color photoresist developing machine, which is used for solving the problems that the prior developing liquid defoaming device provided in the background art mainly needs to add a certain amount of defoaming agent at intervals of one end time to inhibit foam generation, the defoaming mode has high cost, and the defoaming agent needs to be accurately controlled and proportioned according to the flow of the developing liquid, so that the control difficulty is high.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a color photoresist developer liquid supply defoaming device, comprising: the defoaming device comprises a defoaming tank shell, wherein a defoaming box is arranged below the defoaming tank shell, and a conveying pipe is arranged between the defoaming box and the defoaming tank shell;
Further comprises:
The electric cylinder is installed above the defoaming box and is provided with two electric cylinders, each electric cylinder comprises a piston rod, one end of each piston rod extends to the inside of the defoaming box, an extrusion frame is installed at the lower end of each piston rod, the electric cylinders are in transmission connection with the extrusion frame through the piston rods, and a second through hole net is installed on the outer wall of each extrusion frame.
Preferably, a driving motor is installed at the middle position above the defoaming tank shell, a transmission rod is arranged at the output end of the driving motor, one end of the transmission rod extends to the inside of the defoaming tank shell, and an installation seat is installed below the transmission rod.
Preferably, the rotary disc is detachably mounted below the mounting seat through a screw, a first through hole net is mounted on the outer wall of the rotary disc, and the diameter of a through hole of the first through hole net is larger than that of a through hole of the second through hole net.
Preferably, a developing solution inlet pipe is arranged on one side of the driving motor, an extension pipe is arranged at one end of the developing solution inlet pipe through a flange, and one end of the extension pipe extends to the inside of the defoaming tank shell.
Preferably, the lower surface of defoaming jar casing is provided with the discharge gate, and the discharge gate passes through the flange to be connected with the one end of conveyer pipe, install the entry flange on the outer wall of defoaming case one side, and the other end of entry flange and conveyer pipe.
Preferably, the outer wall of the conveying pipe is provided with a first flow control valve through a flange.
Preferably, a discharge pipe is arranged on the outer wall of the other side of the defoaming box, and a second flow control valve is arranged on the outer wall of the discharge pipe through a flange.
Compared with the prior art, the utility model has the beneficial effects that:
1. According to the utility model, the defoaming tank shell and the defoaming box are arranged to perform defoaming operation on the developing solution twice; the two electric cylinders are used for driving the piston rod to stretch out and draw back, the extrusion frame is driven to reciprocate through the stretch out and draw back movement, the stability of the movement can be improved by the two electric cylinders, the extrusion frame can reciprocate to contact bubbles on the surface of the developing solution by the second through hole net on the outer wall of the extrusion frame in the process of moving up and down, the bubbles can reciprocate to enter and exit with a plurality of through holes on the second through hole net in the process of moving up and down, the bubbles are compressed and extruded in the reciprocation process due to the smaller diameter of the through holes on the second through hole net, the effect of secondary defoaming is achieved, the electric cylinders are installed outside, the overhaul difficulty is low, the whole equipment can be automatically carried out, the operation difficulty is small, the cost is low, the quality of the developing solution finished product is improved, and the photoresist production is more facilitated.
2. The driving motor is used for driving the transmission rod to rotate with the rotating disc, the developing solution enters the rotating disc, the developing solution is thrown onto the inner wall by utilizing the rotating disc rotating at a high speed, so that impact force is generated, the effect of smashing foam and eliminating the foam is achieved, the first through hole net is used for supplying the developing solution, the size of the through hole is smaller than that of the bubble, the bubble cannot pass through, the bubble breaking is more beneficial, and the defoaming effect is improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic view of a partial structure of a rotary disk according to the present utility model;
FIG. 3 is a schematic view of the internal structure of the defoaming box of the present utility model;
FIG. 4 is a schematic view of a partial structure of an extrusion frame according to the present utility model;
In the figure: 1. a defoaming tank housing; 2. a developer inlet tube; 3. an extension tube; 4. a driving motor; 5. a transmission rod; 6. a mounting base; 7. a rotating disc; 8. a first network of through holes; 9. a delivery tube; 10. a first flow control valve; 11. a defoaming box; 12. an inlet flange; 13. a discharge pipe; 14. a second flow control valve; 15. an electric cylinder; 16. a piston rod; 17. extruding the frame; 18. a second through-hole mesh; 19. and a discharge port.
Description of the embodiments
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Referring to fig. 1-4, an embodiment of the present utility model is provided: a color photoresist developer liquid supply defoaming device, comprising: the defoaming device comprises a defoaming tank shell 1, wherein a defoaming box 11 is arranged below the defoaming tank shell 1, and a conveying pipe 9 is arranged between the defoaming box 11 and the defoaming tank shell 1;
Further comprises:
The electric cylinders 15 are arranged above the defoaming box 11, two electric cylinders 15 are arranged, each electric cylinder 15 comprises a piston rod 16, one end of each piston rod 16 extends into the defoaming box 11, the lower end of each piston rod 16 is provided with an extrusion frame 17, the electric cylinders 15 are in transmission connection with the extrusion frames 17 through the piston rods 16, and the outer walls of the extrusion frames 17 are provided with second through hole meshes 18;
The defoaming tank shell 1 and the defoaming box 11 are arranged to perform defoaming operation on the developing solution twice; the two electric cylinders 15 are used for driving the piston rod 16 to stretch out and draw back, the extrusion frame 17 is driven to reciprocate up and down through the stretch out and draw back movement, the stability of movement can be improved by the two electric cylinders 15, the extrusion frame 17 moves up and down in-process, the second through hole net 18 of the outer wall of the extrusion frame can reciprocate to contact with bubbles on the surface of the developing solution, in-process of moving up and down, the bubbles can reciprocate to enter and exit with a plurality of through holes at the second through hole net 18, the bubbles are compressed and extruded in the reciprocation process due to the smaller diameter of the through holes at the second through hole net 18, the effect of secondary defoaming is achieved, the whole equipment can be automatically carried out, the operation difficulty is small, the cost is low, the quality of the developing solution finished product is improved, and photoresist production is facilitated.
Referring to the figure, a driving motor 4 is installed at the middle position above the defoaming tank shell 1, a transmission rod 5 is arranged at the output end of the driving motor 4, one end of the transmission rod 5 extends to the inside of the defoaming tank shell 1, and an installation seat 6 is installed below the transmission rod 5;
The driving motor 4 is used for driving the transmission rod 5 to rotate with the rotating disc 7, the developing solution enters the rotating disc 7, and the developing solution is thrown to the inner wall by utilizing the rotating disc 7 rotating at a high speed, so that impact force is generated, and the effect of breaking up and eliminating foam is achieved.
Referring to fig. 1 and 2, a rotary disc 7 is detachably mounted below the mounting seat 6 through screws, a first through hole net 8 is mounted on the outer wall of the rotary disc 7, and the diameter of a through hole of the first through hole net 8 is larger than that of a through hole of the second through hole net 18;
The first through hole net 8 is used for the developer to enter, and when the size of the through holes is smaller than that of the bubbles, the bubbles cannot pass through, so that the bubbles are broken more favorably.
Referring to fig. 1, a developer inlet pipe 2 is installed at one side of a driving motor 4, an extension pipe 3 is installed at one end of the developer inlet pipe 2 through a flange, and one end of the extension pipe 3 extends to the inside of a defoaming tank housing 1;
The extension tube 3 is used for guiding the developer to flow downwards to the rotating disc 7 directly, so that centrifugal defoaming operation is conveniently carried out on the position of the rotating disc 7.
Referring to fig. 1, a discharge port 19 is provided on the lower surface of the defoaming tank housing 1, and the discharge port 19 is connected with one end of the conveying pipe 9 through a flange, an inlet flange 12 is installed on the outer wall of one side of the defoaming tank 11, and the inlet flange 12 is connected with the other end of the conveying pipe 9;
The conveying pipe 9 is used for achieving the effect of connecting two defoaming devices, enabling the developing solution to enter the secondary defoaming device after primary defoaming, improving the defoaming effect and reducing the foam residual quantity.
Referring to fig. 1, a first flow control valve 10 is installed on the outer wall of a delivery pipe 9 through a flange;
The first flow control valve 10 is used to control the open and closed state of the delivery pipe 9 and to control the flow rate at the defoaming tank housing 1 into the defoaming tank 11.
Referring to fig. 1 and 3, a discharge pipe 13 is installed on the outer wall of the other side of the defoaming box 11, and a second flow control valve 14 is installed on the outer wall of the discharge pipe 13 through a flange;
The discharge pipe 13 is for discharging the defoamed developer, and the second flow rate control valve 14 is for detecting the discharge flow rate.
Working principle: the defoaming tank shell 1 and the defoaming box 11 are arranged to perform defoaming operation on the developing solution twice; the two electric cylinders 15 are used for driving the piston rod 16 to perform telescopic movement, the extrusion frame 17 is driven to perform reciprocating up-and-down movement through the telescopic movement, the two electric cylinders 15 can improve the moving stability, in the process of the up-and-down movement of the extrusion frame 17, the second through hole net 18 on the outer wall of the extrusion frame can be in reciprocating contact with bubbles on the surface of the developing solution, in the process of the up-and-down movement, the bubbles can reciprocate to enter and exit with a plurality of through holes at the second through hole net 18, and as the diameter of the through holes at the second through hole net 18 is smaller, the bubbles are compressed and extruded in the reciprocating process, the effect of secondary defoaming is achieved, the whole equipment can be automatically performed, the operation difficulty is small, the cost is lower, the quality of a finished developing solution is improved, and photoresist production is more facilitated;
The driving motor 4 is used for driving the transmission rod 5 and the rotating disc 7 to rotate, the developing solution enters the rotating disc 7, the developing solution is thrown onto the inner wall of the rotating disc 7 by utilizing the rotating disc 7 rotating at a high speed, so that impact force is generated, the foam is broken and eliminated, the first through hole net 8 is used for allowing the developing solution to enter, the size of a through hole is smaller than that of the air bubble, the air bubble cannot pass through, the foam breaking is more beneficial, and the defoaming effect is improved;
The conveying pipe 9 is used for achieving the effect of connecting two defoaming devices, enabling the developing solution to enter the secondary defoaming device after primary defoaming, improving the defoaming effect, enabling the foam residual quantity to be reduced, and the first flow control valve 10 is used for controlling the opening and closing states of the conveying pipe 9 and controlling the flow rate of the defoaming tank shell 1 flowing into the defoaming box 11.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (7)
1. The liquid supply defoaming device of the color photoresist developing machine comprises a defoaming tank shell (1), wherein a defoaming box (11) is arranged below the defoaming tank shell (1), and a conveying pipe (9) is arranged between the defoaming box (11) and the defoaming tank shell (1);
The method is characterized in that: further comprises:
The electric cylinder (15) is installed above the defoaming box (11), two electric cylinders (15) are installed, each electric cylinder comprises a piston rod (16), one end of each piston rod (16) extends to the inside of the defoaming box (11), an extrusion frame (17) is installed at the lower end of each piston rod (16), the electric cylinders (15) are in transmission connection with the extrusion frame (17) through the corresponding piston rods (16), and a second through hole net (18) is installed on the outer wall of each extrusion frame (17).
2. The apparatus for defoaming a liquid supply of a color photoresist developer according to claim 1, wherein: the anti-foam tank is characterized in that a driving motor (4) is installed at the middle position above the anti-foam tank shell (1), a transmission rod (5) is arranged at the output end of the driving motor (4), one end of the transmission rod (5) extends to the inside of the anti-foam tank shell (1), and an installation seat (6) is installed below the transmission rod (5).
3. The apparatus for defoaming a liquid supply of a color photoresist developer according to claim 2, wherein: the rotary disc (7) is detachably mounted below the mounting seat (6) through screws, a first through hole net (8) is mounted on the outer wall of the rotary disc (7), and the diameter of a through hole of the first through hole net (8) is larger than that of a second through hole net (18).
4. The apparatus for defoaming a liquid supply of a color photoresist developer according to claim 2, wherein: one side of the driving motor (4) is provided with a developing solution inlet pipe (2), one end of the developing solution inlet pipe (2) is provided with an extension pipe (3) through a flange, and one end of the extension pipe (3) extends to the inside of the defoaming tank shell (1).
5. The apparatus for defoaming a liquid supply of a color photoresist developer according to claim 1, wherein: the lower surface of defoaming jar casing (1) is provided with discharge gate (19), and discharge gate (19) are connected with the one end of conveyer pipe (9) through the flange, install entry flange (12) on the outer wall of defoaming case (11) one side, and the other end of entry flange (12) and conveyer pipe (9).
6. The apparatus for defoaming a liquid supply of a color photoresist developer according to claim 1, wherein: the outer wall of the conveying pipe (9) is provided with a first flow control valve (10) through a flange.
7. The apparatus for defoaming a liquid supply of a color photoresist developer according to claim 1, wherein: the outer wall of the other side of the defoaming box (11) is provided with a discharge pipe (13), and the outer wall of the discharge pipe (13) is provided with a second flow control valve (14) through a flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322435577.2U CN220899600U (en) | 2023-09-08 | 2023-09-08 | Liquid supply defoaming device of color photoresist developing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322435577.2U CN220899600U (en) | 2023-09-08 | 2023-09-08 | Liquid supply defoaming device of color photoresist developing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220899600U true CN220899600U (en) | 2024-05-07 |
Family
ID=90905675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322435577.2U Active CN220899600U (en) | 2023-09-08 | 2023-09-08 | Liquid supply defoaming device of color photoresist developing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220899600U (en) |
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2023
- 2023-09-08 CN CN202322435577.2U patent/CN220899600U/en active Active
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