CN220893625U - Single-hole sealed force sensor - Google Patents

Single-hole sealed force sensor Download PDF

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Publication number
CN220893625U
CN220893625U CN202322716584.XU CN202322716584U CN220893625U CN 220893625 U CN220893625 U CN 220893625U CN 202322716584 U CN202322716584 U CN 202322716584U CN 220893625 U CN220893625 U CN 220893625U
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China
Prior art keywords
sealing
ring
boss
seat
hole
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CN202322716584.XU
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Chinese (zh)
Inventor
熊万里
柳俊文
史晓晶
朱彤童
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Nanjing Yuangan Microelectronic Co ltd
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Nanjing Yuangan Microelectronic Co ltd
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Abstract

The utility model relates to the technical field of force sensors, and discloses a single-hole sealed force sensor which comprises a sealing seat, a sealing boss, a sealing film, a sealing pressing ring, a stress piece, a pressure chip, an insulating seat and a conductive piece. The single-hole sealed force sensor disclosed by the utility model has good tightness, is suitable for environments with larger vibration and impact, and can be installed on a small device.

Description

Single-hole sealed force sensor
Technical Field
The utility model relates to the technical field of force sensors, in particular to a single-hole sealed force sensor.
Background
The force sensor for measuring the pressure between solids, which is disclosed in the application number 201910454627.7, can accurately measure the pressure of solids in real time by measuring the pressure of liquid, and the force sensor with the structure has better sealing performance, but has larger diameter and cannot be installed on a device with smaller size. In addition, the force sensor with the structure is limited by the structure, and cannot be applied to environments with large vibration and impact.
Disclosure of utility model
Based on the above, the present utility model aims to provide a single-hole sealed force sensor, which has good sealing performance, is suitable for environments with relatively large vibration and impact, and can be mounted on a small device.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
The utility model provides a single-hole sealed force transducer, includes seal holder, seal boss, sealing membrane, sealing clamping ring, atress spare, pressure chip, insulating seat and electrically conductive piece, the seal boss sets up just both enclose into first hydraulic pressure groove on the seal holder, the sealing membrane sets up on the seal boss and with first hydraulic pressure groove forms first hydraulic pressure chamber, sealing clamping ring cover is established on the seal holder just sealing clamping ring with the sealing membrane laminating, the sealing membrane sealing clamping ring sealing boss with the seal holder encloses into second hydraulic pressure chamber, be equipped with the intercommunication on the sealing boss first hydraulic pressure chamber with the intercommunicating pore in second hydraulic pressure chamber, the atress spare is fixed just to first hydraulic pressure chamber sealing membrane on just the atress spare with seal interval sets up, the insulating seat sets up on the seal holder, pressure chip sets up just can detect the pressure of the liquid in the first hydraulic pressure chamber, electrically conductive piece sets up in the insulating seat, the electrically conductive piece the other end electrically connects with electrically conductive chip stretches out the insulating seat.
As a preferred scheme of single hole sealed force sensor, the sealing seat is the sealing ring seat, the sealing membrane is the sealing ring membrane, sealed boss includes sealed interior boss and sealed outer boss, sealed outer boss is located sealed outside of interior boss, sealed interior boss sealed outer boss with the sealing seat encloses into first hydraulic groove, sealed clamping ring includes sealed interior clamping ring and sealed outer clamping ring, sealed interior clamping ring with sealed interior boss corresponds, sealed interior clamping ring sealed interior boss with the sealing seat encloses into inner ring hydraulic chamber, sealed outer clamping ring with sealed outer boss corresponds, sealed outer clamping ring sealed outer boss with sealed seat encloses into outer ring hydraulic chamber, inner ring hydraulic chamber with outer ring hydraulic chamber constitutes the second hydraulic chamber.
As a preferable scheme of the single-hole sealed force sensor, the communication hole comprises a first communication sub-hole and a second communication sub-hole, the first communication sub-hole is arranged on the sealed inner boss and is communicated with the inner ring hydraulic cavity and the first hydraulic cavity, and the second communication sub-hole is arranged on the sealed outer boss and is communicated with the outer ring hydraulic cavity and the first hydraulic cavity.
As a preferable scheme of single-hole sealed force sensor, the sealed internal pressure ring is including the butt internal pressure ring, spacing internal pressure ring and the inner skleeve that connect gradually, the butt internal pressure ring spacing internal pressure ring reaches the internal diameter of inner skleeve reduces in proper order, the lower terminal surface butt of butt internal pressure ring is in the inner race on the sealing ring membrane, the lower terminal surface of spacing internal pressure ring is just right the up end setting of seal seat, the seal seat cover is established on the inner skleeve.
As a single-hole sealed force sensor's preferred scheme, sealed external pressure ring is including the butt external pressure ring that connects gradually, spacing external pressure ring and outer sleeve, the butt external pressure ring spacing external pressure ring reaches the internal diameter of outer sleeve reduces in proper order, the lower terminal surface butt of butt external pressure ring is in the outer lane on the sealing ring membrane, the lower terminal surface of spacing external pressure ring is just right the up end setting of seal seat, the outer sleeve cover is established on the seal seat.
As a preferable scheme of the single-hole sealed force sensor, the stress piece is arranged at intervals with the sealed inner pressure ring and the sealed outer pressure ring at the same time.
As a preferable scheme of the single-hole sealed force sensor, a liquid filling hole communicated with the first hydraulic cavity is formed in the sealing seat, and a plug is arranged in the liquid filling hole.
As a preferable scheme of the single-hole sealed force sensor, the sealing boss and the sealing seat are integrally formed.
As a preferable scheme of the single-hole sealed force sensor, the sealing seat is provided with a fixed hole communicated with the first hydraulic cavity, the diameter of the fixed hole is gradually reduced along the direction deviating from the first hydraulic cavity, and the insulating seat comprises an insulating fixed seat which is arranged in the fixed hole.
As a preferable scheme of the single-hole sealed force sensor, the insulating base further comprises an insulating connecting column, and the diameter of the insulating connecting column is smaller than that of the small end of the insulating fixing base.
The beneficial effects of the utility model are as follows:
The single-hole sealed force sensor disclosed by the utility model has a small size, can be installed on a small device, when the stress piece is subjected to the pressure of an external environment, the stress piece pushes the sealing film to slightly sink downwards, the liquid in the first hydraulic cavity is forced to flow to the second hydraulic cavity through the communication hole, the liquid in the second hydraulic cavity presses the sealing film, the pressure of the liquid on the sealing film is increased, the sealing film is tightly attached to the sealing compression ring, a self-locking effect is formed, the tightness between the sealing film and the sealing compression ring is increased, and as the pressure chip is installed on the insulating seat, the pressure signal detected by the pressure chip is outwards output through the conductive piece arranged in the insulating seat, and the conductive piece is not easy to damage, so that the single-hole sealed force sensor is suitable for being installed in environments with larger vibration and impact.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic illustration of a single-hole sealed force sensor provided in an embodiment of the present utility model;
FIG. 2 is a cross-sectional view of a single-hole sealed force sensor provided in an embodiment of the present utility model;
FIG. 3 is a cross-sectional view of a seal receptacle and seal boss of a single bore sealed force sensor provided in accordance with an embodiment of the present utility model.
In the figure:
101. A first hydraulic tank; 102. a first hydraulic chamber; 1031. an inner ring hydraulic chamber; 1032. an outer ring hydraulic chamber; 11. a sealing seat; 1101. a liquid filling hole; 1102. a fixing hole; 12. sealing the boss; 120. a communication hole; 121. sealing the inner boss; 1210. a first communicating sub-hole; 122. sealing the outer boss; 1220. a second communicating sub-hole;
2. A sealing film;
31. sealing the inner compression ring; 311. abutting the inner compression ring; 312. limiting inner compression rings; 313. an inner sleeve; 32. sealing the outer pressure ring; 321. abutting the outer pressing ring; 322. limiting outer compression rings; 323. an outer sleeve;
4. a force-bearing member;
5. a pressure chip;
6. an insulating base; 61. an insulating fixing seat; 62. an insulating connection column;
7. and a conductive member.
Detailed Description
In order to make the technical problems solved by the present utility model, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present utility model will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to fall within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The embodiment provides a single-hole sealed force sensor, as shown in fig. 1 to 3, including a sealing seat 11, a sealing boss 12, a sealing membrane 2, a sealing pressure ring, a stress piece 4, a pressure chip 5, an insulation seat 6 and a conductive piece 7, wherein the sealing boss 12 is arranged on the sealing seat 11 and encloses a first hydraulic groove 101, the sealing membrane 2 is arranged on the sealing boss 12 and forms a first hydraulic cavity 102 with the first hydraulic groove 101, the sealing pressure ring is sleeved on the sealing seat 11 and is attached to the sealing membrane 2, the sealing pressure ring, the sealing boss 12 and the sealing seat 11 enclose a second hydraulic cavity, a communication hole 120 for communicating the first hydraulic cavity 102 and the second hydraulic cavity is arranged on the sealing boss 12, the stress piece 4 is fixed on the sealing membrane 2 opposite to the first hydraulic cavity 102 and is arranged at intervals with the sealing pressure ring, the insulation seat 6 is arranged on the sealing seat 11, the pressure chip 5 is arranged on the insulation seat 6 and can detect the pressure of liquid in the first hydraulic cavity 102, the conductive piece 7 is arranged in the insulation seat 6, one end of the conductive piece 7 is electrically connected with the other end of the pressure chip 5, and the conductive piece 7 extends out of the insulation seat 6.
Specifically, the sealing boss 12 and the sealing seat 11 of the embodiment are both made of metal, and the sealing compression ring and the stress element 4 are also made of metal, so that the sealing boss 12 and the sealing seat 11 are integrally formed, and the finally formed single-hole sealing force sensor can be applied in a high-temperature environment.
The force receiving member 4 and the sealing ring in this embodiment are disposed at a distance from each other. Although the liquid in the first hydraulic chamber 102 and the second hydraulic chamber is incompressible, when the stress element 4 receives the pressure of the external environment, the stress element 4 pushes the sealing film 2 to generate slight depression downwards, if a friction force exists between the stress element 4 and the sealing compression ring, when the stress element 4 moves downwards, the stress element 4 needs to overcome the friction force, so that the pressure received by the sealing film 2 is smaller than the pressure received by the stress element 4, and finally, the pressure measured by the pressure chip 5 is inaccurate.
The single-hole sealed force sensor provided by the embodiment is small in size and can be installed on a small device, when the force-bearing piece 4 receives the pressure of the external environment, the force-bearing piece 4 pushes the sealing film 2 to slightly sink downwards, the liquid in the first hydraulic cavity 102 is forced to have a trend of flowing to the second hydraulic cavity through the communication hole 120, the liquid in the second hydraulic cavity extrudes the sealing film 2, the pressure of the liquid on the sealing film 2 is increased, the sealing film 2 is tightly attached to the sealing compression ring to form a self-locking effect, the tightness between the sealing film 2 and the sealing compression ring is increased, as the pressure chip 5 is installed on the insulating seat 6, and the pressure signal detected by the pressure chip 5 is output outwards through the conducting piece 7 arranged in the insulating seat 6, and the conducting piece 7 is not easy to damage, so the single-hole sealed force sensor is suitable for being installed in the environment with relatively large vibration and impact.
The sealing seat 11 of this embodiment is a sealing ring seat, the sealing membrane 2 is a sealing ring membrane, as shown in fig. 2 and 3, the sealing boss 12 includes a sealing inner boss 121 and a sealing outer boss 122, the sealing outer boss 122 is located at the outer side of the sealing inner boss 121, the sealing outer boss 122 and the sealing seat 11 enclose a first hydraulic groove 101, the sealing pressing ring includes a sealing inner pressing ring 31 and a sealing outer pressing ring 32, and the sealing inner pressing ring 31 and the sealing outer pressing ring 32 are all arranged at intervals with the stressed piece 4. The sealing inner pressing ring 31 corresponds to the sealing inner boss 121 to ensure that the sealing film 2 of the inner ring is in sealing connection with the sealing inner pressing ring 31, the sealing inner boss 121 and the sealing seat 11 enclose an inner ring hydraulic cavity 1031, the sealing outer pressing ring 32 corresponds to the sealing outer boss 122 to ensure that the sealing film 2 of the outer ring is in sealing connection with the sealing outer pressing ring 32, the sealing outer boss 122 and the sealing seat 11 enclose an outer ring hydraulic cavity 1032, and the inner ring hydraulic cavity 1031 and the outer ring hydraulic cavity 1032 form a second hydraulic cavity. In other embodiments, the sealing seat 11 may also be a sealing column seat, where the seal is a circular film, the sealing boss 12 only has the sealing outer boss 122, and the sealing compression ring also has only one sealing outer compression ring 32 corresponding to the sealing outer boss 122, which is specifically set according to actual needs.
Specifically, as shown in fig. 3, the communication hole 120 of the present embodiment includes a first communication sub-hole 1210 and a second communication sub-hole 1220, the first communication sub-hole 1210 being provided on the seal inner boss 121 and communicating the inner ring hydraulic chamber 1031 and the first hydraulic chamber 102, and the second communication sub-hole 1220 being provided on the seal outer boss 122 and communicating the outer ring hydraulic chamber 1032 and the first hydraulic chamber 102. When the force receiving member 4 is pressurized, the sealing membrane 2 is depressed inward, while the liquid in the first hydraulic chamber 102 is forced to flow to the inner ring hydraulic chamber 1031 through the first communication sub-holes 1210, while the liquid in the first hydraulic chamber 102 also has a tendency to flow to the outer ring hydraulic chamber 1032, so that the sealing membrane 2 is in sealing connection with the sealing inner pressure ring 31 and the sealing outer pressure ring 32, respectively.
Further, as shown in fig. 2, the sealing inner pressure ring 31 of the present embodiment includes an abutting inner pressure ring 311, a limiting inner pressure ring 312 and an inner sleeve 313 which are sequentially connected, the inner diameters of the abutting inner pressure ring 311, the limiting inner pressure ring 312 and the inner sleeve 313 are sequentially reduced, the lower end surface of the abutting inner pressure ring 311 abuts against the sealing ring membrane of the inner ring, so that the sealing ring membrane of the inner ring is primarily sealed with the sealing inner pressure ring 31, the lower end surface of the limiting inner pressure ring 312 is opposite to the upper end surface of the sealing seat 11, and the sealing seat 11 is sleeved on the inner sleeve 313, so that the sealing seat 11 is in sealing connection with the sealing inner pressure ring 31. The height of the limiting inner compression ring 312 along the axial direction is the same as that of the sealing inner boss 121 along the axial direction, and the arrangement is convenient for assembling the sealing inner compression ring 31 and the sealing seat 11.
Similarly, as shown in fig. 2, the sealing outer pressure ring 32 includes an abutting outer pressure ring 321, a limiting outer pressure ring 322 and an outer sleeve 323 which are sequentially connected, the inner diameters of the abutting outer pressure ring 321, the limiting outer pressure ring 322 and the outer sleeve 323 are sequentially reduced, the lower end face of the abutting outer pressure ring 321 abuts against the sealing ring membrane of the outer ring, so that the sealing ring membrane of the outer ring and the sealing outer pressure ring 32 are sealed in a preliminary way, the lower end face of the limiting outer pressure ring 322 is opposite to the upper end face of the sealing seat 11, and the outer sleeve 323 is sleeved on the sealing seat 11, so that the sealing seat 11 is in sealing connection with the sealing outer pressure ring 32. The height of the limiting outer compression ring 322 along the axial direction is the same as that of the sealing outer boss 122 along the axial direction, and the arrangement is convenient for assembling the sealing outer compression ring 32 and the sealing seat 11.
As shown in fig. 3, the sealing seat 11 of the present embodiment is provided with a filling hole 1101 and a fixing hole 1102 which are communicated with the first hydraulic chamber 102, a plug for sealing the filling hole 1101 is disposed in the filling hole 1101, the diameter of the fixing hole 1102 gradually decreases along the direction deviating from the first hydraulic chamber 102, the insulating seat 6 includes an insulating fixing seat 61, the insulating fixing seat 61 is disposed in the fixing hole 1102, and the fixing hole 1102 and the insulating fixing seat 61 with such a shape can enable the outer wall of the fixing seat 6 to be attached to the inner wall of the fixing hole 1102, so as to ensure the tightness of the connection between the insulating fixing seat 61 and the sealing seat 11. Further, the insulating base 6 further includes an insulating connecting post 62, the diameter of the insulating connecting post 62 is smaller than the diameter of the small end of the insulating fixing base 61, and the conductive member 7 can transmit the pressure signal detected by the pressure chip 5 outwards.
It should be noted that, the insulating base 6 of this embodiment is made of plastic with relatively high strength and hardness, the conductive member 7 is located inside the insulating base 6, the insulating base 6 is injection molded outside the conductive member 7, that is, the insulating base 6 is directly molded outside the conductive member 7, and the insulating base 6 and the conductive member 7 with such a structure are not easy to damage and can be mounted on devices with relatively high vibration and impact.
Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.

Claims (10)

1. The utility model provides a single-hole sealed force transducer, its characterized in that includes seal holder, seal boss, sealing membrane, seal clamping ring, atress spare, pressure chip, insulating seat and electrically conductive piece, the seal boss sets up just both enclose into first hydraulic pressure groove on the seal holder, the sealing membrane sets up on the seal boss and with first hydraulic pressure groove forms first hydraulic pressure chamber, seal clamping ring cover is established on the seal holder just the seal clamping ring with the sealing membrane laminating, the sealing membrane the seal clamping ring the seal boss with the seal holder encloses into second hydraulic pressure chamber, be equipped with on the seal boss and communicate first hydraulic pressure chamber with the intercommunicating pore in second hydraulic pressure chamber, the atress spare is fixed just to first hydraulic pressure chamber on the sealing membrane just the atress spare with seal interval sets up, the insulating seat sets up on the seal holder, the pressure chip sets up just can detect the pressure of the liquid in the first hydraulic pressure chamber, electrically conductive piece sets up in the insulating seat one end, electrically conductive piece stretches out the pressure chip.
2. The single-hole sealed force sensor of claim 1, wherein the sealing seat is a sealing ring seat, the sealing membrane is a sealing ring membrane, the sealing boss comprises a sealing inner boss and a sealing outer boss, the sealing outer boss is located at the outer side of the sealing inner boss, the sealing outer boss and the sealing seat enclose the first hydraulic groove, the sealing pressing ring comprises a sealing inner pressing ring and a sealing outer pressing ring, the sealing inner pressing ring corresponds to the sealing inner boss, the sealing inner pressing ring, the sealing inner boss and the sealing seat enclose an inner ring hydraulic cavity, the sealing outer pressing ring corresponds to the sealing outer boss, the sealing outer pressing ring, the sealing outer boss and the sealing seat enclose an outer ring hydraulic cavity, and the inner ring hydraulic cavity and the outer ring hydraulic cavity form the second hydraulic cavity.
3. The single-hole sealed force sensor of claim 2, wherein the communication hole includes a first communication sub-hole and a second communication sub-hole, the first communication sub-hole being provided on the sealed inner boss and communicating the inner ring hydraulic chamber and the first hydraulic chamber, the second communication sub-hole being provided on the sealed outer boss and communicating the outer ring hydraulic chamber and the first hydraulic chamber.
4. The single-hole sealed force sensor of claim 2, wherein the sealed inner pressure ring comprises an abutting inner pressure ring, a limiting inner pressure ring and an inner sleeve which are sequentially connected, the inner diameters of the abutting inner pressure ring, the limiting inner pressure ring and the inner sleeve are sequentially reduced, the lower end face of the abutting inner pressure ring abuts against the sealing ring membrane of the inner ring, the lower end face of the limiting inner pressure ring is opposite to the upper end face of the sealing seat, and the sealing seat is sleeved on the inner sleeve.
5. The single-hole sealed force sensor of claim 2, wherein the sealed outer pressure ring comprises an abutting outer pressure ring, a limiting outer pressure ring and an outer sleeve which are sequentially connected, the inner diameters of the abutting outer pressure ring, the limiting outer pressure ring and the outer sleeve are sequentially reduced, the lower end face of the abutting outer pressure ring abuts against the sealing ring membrane of the outer ring, the lower end face of the limiting outer pressure ring is opposite to the upper end face of the sealing seat, and the outer sleeve is sleeved on the sealing seat.
6. The single hole sealed force sensor of claim 2, wherein the force receiving member is spaced apart from both the sealed inner pressure ring and the sealed outer pressure ring.
7. The single-hole sealed force sensor of claim 1, wherein the sealing seat is provided with a filling hole communicated with the first hydraulic cavity, and a plug is arranged in the filling hole.
8. The single hole sealed force sensor of claim 1, wherein the sealing boss is integrally formed with the sealing seat.
9. The single-hole sealed force sensor of claim 1, wherein the sealing seat is provided with a fixing hole communicated with the first hydraulic cavity, the diameter of the fixing hole gradually decreases along the direction away from the first hydraulic cavity, and the insulating seat comprises an insulating fixing seat which is arranged in the fixing hole.
10. The single hole sealed force sensor of claim 9, wherein the insulating mount further comprises an insulating connecting post having a diameter less than a diameter of the small end of the insulating mount.
CN202322716584.XU 2023-10-10 2023-10-10 Single-hole sealed force sensor Active CN220893625U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322716584.XU CN220893625U (en) 2023-10-10 2023-10-10 Single-hole sealed force sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322716584.XU CN220893625U (en) 2023-10-10 2023-10-10 Single-hole sealed force sensor

Publications (1)

Publication Number Publication Date
CN220893625U true CN220893625U (en) 2024-05-03

Family

ID=90871845

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322716584.XU Active CN220893625U (en) 2023-10-10 2023-10-10 Single-hole sealed force sensor

Country Status (1)

Country Link
CN (1) CN220893625U (en)

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