CN220892967U - Bearing device - Google Patents

Abstract

The utility model provides a bearing device for bearing a plurality of product carriers in an oven, comprising: the first bearing seat comprises a first carrier plate, a first fastening piece, a first clamping piece and a second clamping piece, wherein the first carrier plate is used for bearing a product carrier, the first fastening piece is arranged on the bottom surface of the first carrier plate, the first clamping piece and the second clamping piece are arranged on the top surface of the first carrier plate, and the first clamping piece and the second clamping piece are respectively used for clamping the product carrier. The bearing device provided by the embodiment of the utility model is matched with the oven to use, and is provided with the first clamping piece and the second clamping piece for clamping the product carriers so as to bear a plurality of product carriers, so that a large-size oven can be matched with a small-size product carrier, and the utilization rate of the oven is improved.

Description

Bearing device

Technical Field

Embodiments of the present utility model relate to a carrier device.

Background

The forming step of the panel-level package (PANEL LEVEL PACKAGE) includes: referring to fig. 1, a carrier 2 and an adhesive tape 3 laminated thereon are provided; referring to fig. 2, die 1 (illustrated as one die 1) is taken and placed PICK AND PLACE for reconstitution (recon) on carrier 2 and tape 3; referring to fig. 3, a pre-bake (pre-bak) process 4 is performed; referring to fig. 4, a molding 5 is formed; referring to fig. 5, the carrier 2 is removed; referring to fig. 6, the adhesive tape 3 is removed; referring to fig. 7, a back side lamination process is performed to form a layer 6; referring to fig. 8, a post mold cure (post mold cure) process 7 is performed. Wherein the steps shown in fig. 3 and 8 require the use of an oven for baking.

The current popularity of thinned rectangular panels with small panel-level packaging (e.g., 300 x 300 mm), large dimensions (e.g., 600 x 600mm, 625 x 61mm) is a new size for the semiconductor industry, and its corresponding reconstituted large-size oven and in-oven adapter-oven grill 202 is only suitable for metal cases (METAL CASSETTE) 210 (e.g., 703mm width D, 740mm depth D, 387mm height) of the large-size panels, but not for other-size (e.g., 300 x 300 mm) panels, with low utilization, fig. 9 shows a side view of oven grill 202 and its carrying metal cases 210, and fig. 10 shows a perspective view of oven grill 202. That is, no matter the manufacturing machine or the material size is required to be customized and developed, the use universality and the utilization rate are low, the sharing property and the popularity are not possessed, and the use cost is high. In addition, only the first metal box 210 of the single-layer carrying panel can be placed in the existing oven, so that the utilization rate of the machine is poor, and the equipment cost is required to be increased additionally.

Disclosure of utility model

In view of the problems in the related art, an object of the present utility model is to provide a carrying device to at least achieve an improvement in the utilization rate of an oven.

To achieve the above object, the present utility model provides a carrying device for carrying a plurality of product carriers in an oven, comprising: the first bearing seat comprises a first carrier plate, a first fastening piece, a first clamping piece and a second clamping piece, wherein the first carrier plate is used for bearing a product carrier, the first fastening piece is arranged on the bottom surface of the first carrier plate, the first clamping piece and the second clamping piece are arranged on the top surface of the first carrier plate, and the first clamping piece and the second clamping piece are respectively used for clamping the product carrier.

In some embodiments, the carrier further comprises: the second bearing seat is overlapped on the first bearing seat and is used for bearing the product carrier.

In some embodiments, the second carrier comprises: the second carrier plate is used for carrying the product carrier; and the fifth clamping piece is arranged on the top surface of the second carrier plate.

In some embodiments, the second carrier further comprises: the sixth clamping piece and the fifth clamping piece are arranged on the top surface of the second carrier plate at intervals.

In some embodiments, the first fastening member includes a plurality of first grooves recessed from a bottom surface of the first carrier, the fifth fastening member includes a plurality of fifth bumps protruding from a top surface of the second carrier, the sixth fastening member includes a plurality of sixth bumps protruding from the top surface of the second carrier, and a pitch between the first grooves is different from a pitch between the fifth bumps and a pitch between the sixth bumps.

In some embodiments, the pitch between the first grooves is greater than the pitch between the fifth bumps, the pitch between the sixth bumps.

In some embodiments, the pitch between the fifth bumps is equal to the pitch between the sixth bumps.

In some embodiments, the first engaging member includes a plurality of first bumps protruding from a top surface of the first carrier, and a pitch between the first bumps is the same as a pitch between the fifth bumps and a pitch between the sixth bumps.

In some embodiments, the second carrier further comprises a support disposed on a bottom surface of the second carrier, the support being supported on the first carrier and separating the first carrier of the first carrier from the second carrier of the second carrier.

In some embodiments, the second carrier further includes a support member disposed on a bottom surface of the second carrier, the support member is a support column and the top surface of the first carrier includes a second fastening member engaged with the support column.

The beneficial technical effects of the utility model are as follows:

The bearing device provided by the embodiment of the application is matched with the oven to use, and is provided with the first clamping piece and the second clamping piece for clamping the product carriers so as to bear a plurality of product carriers, so that a large-size oven can be matched with a small-size product carrier, and the utilization rate of the oven is improved.

Drawings

Fig. 1 shows the provision of a carrier and an adhesive tape thereon.

Fig. 2 shows the die being placed on a carrier and tape for reconstitution.

Fig. 3 illustrates performing a pre-bake process.

Fig. 4 illustrates the formation of a molding.

Figure 5 shows removal of the carrier.

Figure 6 shows the removal of the tape.

Fig. 7 illustrates performing a backside lamination process.

Fig. 8 illustrates performing a post-mold curing process.

Figure 9 shows a side view of an oven grill and its carrying metal box.

Fig. 10 shows a perspective view of an oven grill.

Fig. 11 shows a conceptual side view of a carrier device placed on an oven grill and carrying a square product carrier.

Fig. 12 shows a perspective view of the carrier device carrying a product carrier.

Fig. 13 shows a bottom view of the carrier.

Fig. 14 shows a perspective view of the carrier.

Fig. 15 shows a conceptual side view of a carrier placed on an oven grill and carrying a product carrier, wherein the carrier further comprises a second carrier seat.

Fig. 16 shows a perspective view of the carrier.

Fig. 17 shows the further upward stacking of the carrier on the basis of the structure shown in fig. 15.

Detailed Description

For a better understanding of the spirit of embodiments of the present application, a further description of some preferred embodiments of the application is provided below.

Embodiments of the present application will be described in detail below. Throughout the present specification, the same or similar components and components having the same or similar functions are denoted by similar reference numerals. The embodiments described herein with respect to the drawings are of illustrative nature, of diagrammatic nature and are provided for the basic understanding of the present application. The embodiments of the present application should not be construed as limiting the application.

As used herein, the terms "substantially," "substantially," and "about" are used to describe and illustrate minor variations. When used in connection with an event or circumstance, the terms can refer to instances where the event or circumstance occurs precisely and instances where it occurs to the close approximation.

In this specification, unless specified or limited otherwise, relative terms such as: the terms "central," "longitudinal," "lateral," "front," "rear," "right," "left," "interior," "exterior," "lower," "upper," "horizontal," "vertical," "above," "below," "upper," "lower," "top," "bottom," and derivatives thereof (e.g., "horizontally," "downwardly," "upwardly," etc.) should be construed to refer to the directions as described in the discussion or as illustrated in the drawings. These relative terms are for convenience of description only and do not require that the application be constructed or operated in a particular orientation.

For ease of description, "first," "second," "third," etc. may be used herein to distinguish between different components of a figure or series of figures. The terms "first," "second," "third," and the like are not intended to describe corresponding components.

Fig. 11 shows a conceptual side view of the carrier 100 being placed on the oven grill 202 and carrying a square product carrier 200, in fact the product carrier 200 is not arranged in a row, but is distributed along rows and columns as shown in fig. 12, fig. 12 shows a perspective view of the carrier 100 carrying the product carrier 200 (dimensions such as 336mm in width D along the X-axis, 316mm in depth D along the Y-axis, 313mm in height H along the Z-axis), fig. 13 shows a bottom view of the carrier 100, and fig. 14 shows a perspective view of the carrier 100. The embodiment of the application provides a carrying device 100 for carrying a plurality of product carriers 200 in an oven, which comprises a first carrying seat 11, wherein the first carrying seat 11 comprises a first carrying plate 21, a first fastening piece 31, a first clamping piece 41 and a second clamping piece 42, the first carrying plate 21 is used for carrying the product carriers 200, the first fastening piece 31 is arranged on the bottom surface of the first carrying plate 21, the first clamping piece 41 and the second clamping piece 42 are arranged on the top surface of the first carrying plate 21, and the first clamping piece 41 and the second clamping piece 42 are respectively used for clamping the product carriers 200. The carrying device 100 of the embodiment of the application is used with an oven and provided with the first clamping piece 41 and the second clamping piece 42 for clamping the product carrier 200 so as to carry a plurality of product carriers 200, so that a large-size oven can be stably matched with a small-size product carrier 200, and the utilization rate of the oven is improved.

Referring to fig. 14, the first carrier 11 further includes: the third engaging member 43 is disposed on the top surface of the first carrier 21, the first engaging member 41 and the second engaging member 42 are disposed side by side along the first direction (X-axis direction), the second engaging member 42 and the third engaging member 43 are disposed side by side along the second direction (Y-axis direction), and the first direction and the second direction are different. The first bearing seat 11 further includes a fourth engaging member 44 disposed along the first direction and side by side with the third engaging member 43. The first engaging member 41, the second engaging member 42, the third engaging member 43 and the fourth engaging member 44 are arranged in a matrix of 2×2, and space utilization of the oven is improved.

Referring to fig. 13, the first fastening member 31 is located on the bottom surface of the first carrier plate 21 of the first carrier seat 11, and includes a plurality of first grooves 51 recessed from the bottom surface of the first carrier plate 21, where the first grooves 51 may be completely matched with the ninth bumps 69 (see fig. 11), or may be completely matched with the ninth bumps 69 (see fig. 11) as shown in fig. 13, and only the first grooves 51 may be ensured to accommodate the ninth bumps 69 (see fig. 11), and the lateral dimension of the first grooves 51 is larger than that of the ninth bumps 69 (see fig. 11) so as to make the allowable value of the first grooves 51 larger.

Referring to fig. 14, the first engaging member 41 includes a plurality of first protrusions 61 protruding from the top surface of the first carrier 21, and the second engaging member 42 includes a plurality of second protrusions 62 protruding from the top surface of the first carrier 21, and the spacing between the first grooves 51 (see fig. 13) is different from the spacing between the first protrusions 61 and the spacing between the second protrusions 62. For example, the pitch between the first grooves 51 (see fig. 13) is larger than the pitch between the first bumps 61 and the pitch between the second bumps 62. In some embodiments, the spacing between the first bumps 61 is equal to the spacing between the second bumps 62. The third engagement piece 43 and the fourth engagement piece 44 are also arranged in the same manner as the first engagement piece 41 and the second engagement piece 42.

Referring to fig. 10 and 13, the toaster grill 202 of the toaster has a plurality of ninth protrusions 69 on the top surface, and the first recesses 51 are adapted to be engaged with the ninth protrusions 69 one by one. Similar to the configuration of the first fastening member 31, the bottom surface of the product carrier 200 also has grooves similar to the first grooves 51 for engaging with the protrusions of the first to fourth fastening members 41 to 44, for example, the bottom surface of the product carrier abutting against the first fastening member 41 also has three grooves, which are engaged with the three first protrusions 61 in a one-to-one correspondence. The first fastening member 31 includes three first grooves 51, the first engaging member 41 includes three first protrusions 61, the second engaging member 42 includes three second protrusions 62, the three first grooves 51, the three first protrusions 61, and the three second protrusions 62 are all disposed along three corners of a triangle, and due to the stability of the triangle, the first grooves 51, the first protrusions 61, and the second protrusions 62 do not need to be disposed in a larger number, so that the first carrier 21 can be firmly engaged with the oven grill 202, and the product carrier 200 can be firmly engaged with the first engaging member 41 and the second engaging member 42. The first bearing seat 11 is made of a material with high temperature resistance and high rigidity, for example, stainless steel or aluminum alloy, so as to sufficiently bear the weight of the product carrier 200 in the oven, and the material of the product carrier 200 can be metal.

Fig. 15 shows a conceptual side view of the carrier 100 placed on the oven grill 202 and carrying the product carrier 200, wherein the carrier 100 further comprises the second carrier 12, in fact the two layers of product carriers 200 are not arranged in a line, but the two layers of product carriers 200 are each distributed along the row and column as shown in fig. 12, fig. 16 shows a perspective view of the carrier 100, the second carrier 12 is stacked on the first carrier 11, and the second carrier 12 is also used for carrying the product carriers 200. The second carrier 12 includes: a second carrier 22 for carrying the product carrier 200; a fifth engaging member 45 disposed on the top surface of the second carrier 22; the sixth engaging member 46 is disposed on the top surface of the second carrier 22 at a distance from the fifth engaging member 45. Referring to fig. 13, the first fastening member 31 includes a plurality of first grooves 51 recessed from the bottom surface of the first carrier 21. Referring to fig. 16, the fifth engaging member 45 includes a plurality of fifth protrusions 65 protruding from the top surface of the second carrier 22, and the sixth engaging member 46 includes a plurality of sixth protrusions 66 protruding from the top surface of the second carrier 22, and the spacing between the first grooves 51 (see fig. 13) is different from the spacing between the fifth protrusions 65 and the spacing between the sixth protrusions 66. For example, the pitch between the first grooves 51 (see fig. 13) is larger than the pitch between the fifth bumps 65 and the pitch between the sixth bumps 66. In some embodiments, the spacing between fifth bumps 65 is equal to the spacing between sixth bumps 66. In some embodiments, the first engaging member 41 includes a plurality of first bumps 61 protruding from the top surface of the first carrier 21, where the spacing between the first bumps 61 is the same as the spacing between the fifth bumps 65 and the spacing between the sixth bumps 66. The second carrier 12 further comprises: the seventh engaging member 47 is disposed on the top surface of the second carrier 22, the fifth engaging member 45 and the sixth engaging member 46 are disposed side by side along the first direction (X-axis direction), the sixth engaging member 46 and the seventh engaging member 47 are disposed side by side along the second direction (Y-axis direction), and the first direction and the second direction are different. The second carrier 12 further includes an eighth engaging member 48 disposed along the first direction and side by side with the seventh engaging member 47. The second carrier 12 further comprises: the support 70 is disposed on the bottom surface of the second carrier plate 22. The support 70 is supported on the first carrier 11 and separates the first carrier plate 21 of the first carrier 11 from the second carrier plate 22 of the second carrier 12. The support member 70 is a support column extending along the Z-axis direction, and the top surface of the first carrier plate 21 of the first carrier 11 includes a second fastening member (e.g. three grooves that are engaged with three support columns) that is engaged with the support column. The second bearing seat 12 is made of the same material as the first supporting seat 11, for example, stainless steel or aluminum alloy. In use, the first layer product carrier 200 is placed on the first carrier 11, then the second carrier 12 is placed on the first carrier 11, and finally the second layer product carrier 200 is placed on the second carrier 12.

In the embodiment of the present application, the first engaging member 41, the second engaging member 42, the third engaging member 43 and the fourth engaging member 44 are integrally formed with the first carrier 21, and the fifth protruding block 65, the sixth protruding block 66, the seventh engaging member 47, the eighth engaging member 48, the supporting member 70 and the second carrier 22 are integrally formed.

Embodiments of the present application provide a novel design for a turntable (first 11 or second 12) of an oven, wherein the snap-fit on the first 11 and second 12 carriers can interface with metal carriers (product carrier 200) for various sizes of products (e.g., panels 300 to 600mm in length, width; or wafers 300 to 600mm in diameter). The Fan out (Fan out) panel large-size products in the future will gradually develop, and the transfer structure (bearing device 100) suitable for the product carrier 200 with other sizes provided by the application is arranged between the oven base (oven baking rack 202) and the product carrier 200, so that the oven corresponding to the large-size panel is also suitable for the small-size panel, the application rate of the machine equipment is improved, the machine purchasing cost is reduced, and the method has more advantages for the product development investment case.

The embodiment of the application uses male-female convex-concave matching, the clamping piece on the bearing seat is a convex block/pin (pin), and meanwhile, grooves corresponding to each other are arranged on the bottom surface of the product carrier 200, so that the two are in butt joint.

The embodiment of the present application also provides a design of a multi-layered turntable stack as shown in fig. 15 and 16, which increases the space utilization by 50% compared to the embodiment of fig. 11 to 14, and further allows the stacking of the carriers upwards as shown in fig. 17, depending on the requirements, as well as the height of the space within the oven.

The carrier 100 of the embodiment of the present application relates to Fan-out advanced square technology (Fan-out advance square technology, FAST), and the carrier 100 can carry the product carrier 200 for panel, wafer, fan-out (Fan-out) or Fan-in (Fan-in) panel level package (PANEL LEVEL PACKAGE, PLP).

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (10)

1. A carrier for carrying a plurality of product carriers in an oven, comprising:

The first bearing seat comprises a first carrier plate, a first buckling piece, a first clamping piece and a second clamping piece, wherein the first carrier plate is used for bearing the product carrier, the first buckling piece is arranged on the bottom surface of the first carrier plate, the first clamping piece and the second clamping piece are arranged on the top surface of the first carrier plate, and the first clamping piece and the second clamping piece are respectively used for clamping the product carrier.

2. The carrier as recited in claim 1, further comprising:

The second bearing seat is superposed on the first bearing seat and is used for bearing the product carrier.

3. The carrier of claim 2, wherein the second carrier comprises:

The second carrier plate is used for carrying the product carrier;

and the fifth clamping piece is arranged on the top surface of the second carrier plate.

4. A carrier as in claim 3 wherein the second carrier further comprises:

and the sixth clamping piece and the fifth clamping piece are arranged on the top surface of the second carrier plate at intervals.

5. The carrier of claim 4, wherein the first fastening member includes a plurality of first grooves recessed from the bottom surface of the first carrier, the fifth fastening member includes a plurality of fifth bumps protruding from the top surface of the second carrier, the sixth fastening member includes a plurality of sixth bumps protruding from the top surface of the second carrier, and a pitch between the first grooves is different from a pitch between the fifth bumps and a pitch between the sixth bumps.

6. The carrier of claim 5, wherein the first grooves have a pitch greater than the fifth bumps and the sixth bumps.

7. The carrier of claim 6, wherein the spacing between the fifth bumps is equal to the spacing between the sixth bumps.

8. The carrier of claim 5, wherein the first engaging member comprises a plurality of first bumps protruding from the top surface of the first carrier, and a pitch between the first bumps is the same as a pitch between the fifth bumps and a pitch between the sixth bumps.

9. A carrier as claimed in claim 3, wherein the second carrier further comprises a support member disposed on a bottom surface of the second carrier plate, the support member being supported on the first carrier plate and separating the first carrier plate of the first carrier plate from the second carrier plate of the second carrier plate.

10. The carrier of claim 3, wherein the second carrier further comprises a support member disposed on a bottom surface of the second carrier plate, the support member being a support post and the top surface of the first carrier plate of the first carrier comprises a second snap-fit member engaged with the support post.