CN220863572U

CN220863572U - Split type crystal grinding surface grooving device

Info

Publication number: CN220863572U
Application number: CN202322573340.0U
Authority: CN
Inventors: 倪艳艳; 吴福文; 姚志雯; 邹根根; 于盛辉
Original assignee: Wuxi Lianqiang Intelligent Equipment Co ltd
Current assignee: Wuxi Lianqiang Intelligent Equipment Co ltd
Priority date: 2023-09-21
Filing date: 2023-09-21
Publication date: 2024-04-30
Anticipated expiration: 2033-09-21

Abstract

The utility model relates to the field of machinery, in particular to a split crystal grinding surface grooving device, which comprises a stand column mechanism, wherein the side surface of the stand column mechanism is provided with a lifting slide plate, the lifting slide plate is matched with the stand column mechanism in a sliding way, a servo motor is arranged above the stand column mechanism, a ball screw is arranged in the stand column mechanism, the lifting slide plate is connected with the ball screw through a nut, the servo motor is connected with the ball screw through a coupler, the side surface of the lifting slide plate is connected with a driving device through a fixing device, the driving device comprises a driving motor, a mechanical spindle and an electric spindle which are arranged from top to bottom, the mechanical spindle is vertically arranged, the driving motor drives the mechanical spindle to rotate through a transmission device, the bottom end of the mechanical spindle is provided with a grooving grinding wheel, the electric spindle is horizontally arranged, one end of the electric spindle is provided with a grinding surface grinding wheel, and the grinding surface grinding wheel is arranged below the grooving grinding wheel at intervals.

Description

Split type crystal grinding surface grooving device

Technical Field

The utility model belongs to the technical field of machinery, and particularly relates to a split type crystal grinding surface grooving device.

Background

At present, after cut-off processing is carried out on semiconductor silicon, LN/LT, silicon carbide and other crystals, rounding is needed, OF surface grinding or V-Notch groove carving is carried out, the existing groove carving grinding surface lifting mechanism mainly uses an air cylinder to lift, groove carving and grinding surface processing OF crystals with various specifications cannot be met at the same time, the feeding speed OF the lifting mechanism using the air cylinder cannot be adjusted in real time, the precision OF the lifting mechanism cannot reach higher level, higher requirements are set for debugging and programs, the OF surface grinding and V-Notch groove carving cannot be integrated on a rolling machine bed in the traditional processing mode, the processing precision is influenced by repeated clamping, time and waste force are wasted, the efficiency is low, the existing grinding surface grinding wheel is mainly used, the precision requirement on the grinding wheel is higher, the assembly and debugging programs are all set up higher requirements, the processing precision cannot reach higher guarantee, and the rapid development OF the existing semiconductor industry cannot be met.

Disclosure of utility model

In order to solve the problems in the related art, the application provides a split type crystal grinding surface grooving device, which solves the problems of non-adjustable precision, non-adjustable speed and high maintenance cost and difficulty.

The technical proposal is as follows:

The split type crystal grinding surface grooving device comprises a stand column mechanism, wherein a lifting slide plate is arranged on the side face of the stand column mechanism, the lifting slide plate is in sliding fit with the stand column mechanism, a servo motor is arranged above the stand column mechanism, a ball screw is arranged in the stand column mechanism, a nut is connected to the ball screw in a threaded manner, the lifting slide plate is connected with the ball screw through the nut, the servo motor is connected with the ball screw through a coupling, and the servo motor is used for controlling the ball screw to rotate so that the lifting slide plate ascends and descends;

The side of lift slide is connected with drive arrangement through fixing device, drive arrangement includes driving motor, mechanical main shaft and the electricity main shaft that top-down set up, the vertical setting of mechanical main shaft, driving motor passes through transmission drive mechanical main shaft and rotates, the bottom of mechanical main shaft is provided with the notch wheel, the electricity main shaft level sets up, the one end of electricity main shaft is provided with the mill face emery wheel, and the mill face emery wheel interval sets up in the below of notch wheel.

According to the technical scheme, the servo motor is matched with the ball screw, so that the accuracy and the speed of the lifting slide plate during ascending and descending can be controlled more accurately, the accuracy and the speed of the independently arranged grooving grinding wheel and the independently arranged grinding surface grinding wheel can be respectively adjusted, and the grooving grinding wheel and the grinding surface grinding wheel can be respectively installed and replaced, so that the maintenance cost and the difficulty in assembling and debugging of each mechanism are reduced;

The driving motor is connected with the mechanical main shaft by using the synchronous belt, the synchronous belt is simple in structure and small in occupied space, so that the synchronous belt, the mechanical main shaft and the grooving grinding wheel are easy to install, disassemble and maintain, noise generated in the process of realizing transmission by the synchronous belt is small, acting force on the mechanical main shaft is small, and transmission efficiency is high;

Through set up the electricity main shaft on the lift slide of driving motor below, under the circumstances that satisfies the drive grinding face emery wheel, make full use of lift slide's space to use the electricity main shaft that has less volume makes the volume of whole device further reduce, make more can integrate on the barreling machine bed.

Further, v-shaped guide rails with identical structures are respectively arranged on two side surfaces of the upright post mechanism, and protective covers are arranged at the top and the bottom of the lifting slide plate.

Through above-mentioned technical scheme, V type guide rail on the stand mechanism is prescribe a limit to the direction that the lift slide moved, under the condition that the position of moving of lift slide satisfied the precision demand, can also save space and the cost that the lift slide moved.

Further, the fixing device comprises a first installation seat, a second installation seat and a third installation seat which are arranged at intervals, and the first installation seat, the second installation seat and the third installation seat are all installed on the side face of the lifting sliding plate through bolts.

Through above-mentioned technical scheme, through first mount pad, second mount pad and the third mount pad that independently set up, it is all more convenient in the time of making installation and dismantlement through bolted connection, still reduced maintenance cost and operation degree of difficulty to all set up on the lift slide, make the compact structure of each mechanism, more easily integrate on the barreling machine bed.

Further, the driving motor is fixedly installed at the top of the first installation seat through a bolt, a first hole is formed in the first installation seat, and an output shaft of the driving motor penetrates through the first hole;

The second mounting seat comprises a first fixing part, a reinforcing rib and a bearing sleeve, wherein the first fixing part, the reinforcing rib and the bearing sleeve are integrally arranged, the bearing sleeve is used for placing a mechanical main shaft, the first fixing part is fixedly arranged on the side surface of the lifting slide plate through a plurality of bolts, and the reinforcing rib is arranged between the first fixing part and the bearing sleeve; the transmission device comprises a synchronous belt pulley and a conveyor belt which are arranged above the mechanical main shaft, the synchronous belt pulley and the mechanical main shaft are coaxially and rotatably connected, and the synchronous belt pulley and an output shaft of the driving motor are positioned on the same horizontal line and realize transmission through the conveyor belt; the bottom of the mechanical main shaft is provided with a grinding wheel cover, and the grinding wheel cover is arranged at the bottom of the grooving grinding wheel.

According to the technical scheme, the transmission is realized through the output shaft of the driving motor and the mechanical main shaft through the synchronous belt, the precision and the rotation speed of the grooving grinding wheel can be independently and accurately adjusted, and the grooving grinding wheel can be independently maintained and replaced, so that the maintenance cost and the maintenance difficulty can be reduced; in addition, the second mount pad that integration set up can accelerate the efficiency when the device equipment to can provide higher stability.

Further, the third mounting seat comprises a second fixing part, a first shaft clamp and a second shaft clamp which are integrally arranged, the second fixing part is fixedly arranged on the side surface of the lifting slide plate through a plurality of bolts, the first shaft clamp and the second shaft clamp are symmetrically arranged on the side surface of the second fixing part, and the structures of the first shaft clamp and the second shaft clamp are consistent;

The other ends of the first shaft clamp and the second shaft clamp are bent to form connecting plates, second holes are correspondingly formed in the two connecting plates, the two connecting plates are connected through bolts arranged in the second holes, and gaps between the connected first shaft clamp and the connected second shaft clamp are used for setting the electric spindle and are suitable for the electric spindle.

Through above-mentioned technical scheme, can accomplish installation and dismantlement through the bolt on the control connecting plate, simple structure, the dismouting of more easily electric main shaft and the adjustment of grinding surface emery wheel have accelerated machining efficiency simultaneously, and then more are fit for the machining efficiency of present semiconductor trade.

In summary, the split crystal grinding surface grooving device has the beneficial effects that:

1. The driving motor, the mechanical main shaft and the electric main shaft which are independently and at intervals are arranged, so that the structure is simple, maintenance and control are more convenient, maintenance cost and operation difficulty are reduced, and the driving motor, the mechanical main shaft and the electric main shaft are arranged on the lifting slide plate, so that the structure of each mechanism is compact, the space of the lifting slide plate is fully utilized, and the driving motor is easier to integrate on a roller mill bed;

2. the servo motor is matched with the ball screw, so that the accuracy and the speed of the lifting slide plate during lifting and descending can be controlled more accurately;

3. The grooving grinding wheel and the grinding surface grinding wheel which are independently arranged can respectively adjust the precision and the speed of the grooving grinding wheel and the grinding surface grinding wheel, and the grooving grinding wheel and the grinding surface grinding wheel can also be respectively installed and replaced, so that the maintenance cost and the difficulty of assembling and debugging of each mechanism are reduced.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the utility model and together with the description, serve to explain the principles of the utility model.

FIG. 1 is a schematic structural view of a split crystal grinding surface grooving device;

FIG. 2 is a schematic diagram of a driving device in a split crystal grinding surface grooving device;

In the figure, 1, a column mechanism; 2. a lifting slide plate; 3. a servo motor; 4. a driving motor; 5. a mechanical spindle; 6. an electric spindle; 7. a transmission device; 701. a synchronous pulley; 702. a conveyor belt; 8. grooving grinding wheel; 9. grinding surface grinding wheel; 10. a protective cover; 11. a first mount; 12. a second mounting base; 121. a first fixing portion; 122. reinforcing ribs; 123. a bearing sleeve; 13. a third mount; 131. a second fixing portion; 132. a first shaft clamp; 133. a second shaft clamp; 14. a pulley cover; 15. and (5) connecting a plate.

Detailed Description

Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the utility model. Rather, they are merely examples of apparatus and methods consistent with aspects of the utility model as detailed in the accompanying claims.

In one possible embodiment, as shown in fig. 1-2, a split crystal grinding surface grooving device comprises a stand column mechanism 1, V-shaped guide rails with consistent structures are respectively arranged on two side surfaces of the stand column mechanism 1, a lifting slide plate 2 is arranged on the side surface of the stand column mechanism 1, the lifting slide plate 2 and the stand column mechanism 1 are in sliding fit, the V-shaped guide rails close to the two sides of the stand column mechanism 1 play a role in limiting directions, the top and the bottom of the lifting slide plate are respectively provided with a protective cover 10, the lifting slide plate 2 is arranged between the protective covers 10, a pressing strip is arranged in the lifting slide plate 2 close to the outer side, the pressing strip is propped against the V-shaped guide rails on the stand column 1 through screws on the lifting slide plate 2, and the gaps between the pressing strip and the V-shaped guide rails are adjusted through screws on the lifting slide plate 2, so that other limiting mechanisms are not needed to be additionally arranged, thereby saving the moving cost and also saving the space of the whole device, the upper side of the upright post mechanism 1 is provided with a servo motor 3, the upright post mechanism 1 is vertically provided with a ball screw, the servo motor 3 is connected with the ball screw through a coupler, the servo motor 3 is used for controlling the ball screw to rotate, the ball screw is fixed in a fixed mode, one end of the ball screw is free, the lifting slide plate 2 is lifted and lowered, one end of the ball screw is connected with an output shaft of the servo motor 3 through the coupler, the servo motor 3 is started, the ball screw is synchronously rotated under the driving of the output shaft of the servo motor 3, because a nut on the ball screw is in threaded connection with the lifting slide plate 2, the position of the nut on the ball screw can be changed in the process of rotating the ball screw, namely, the height value of the nut in the vertical direction is changed, because the nut is connected with the lifting slide plate 2, the lifting slide plate 2 is driven to ascend or descend, the protective cover 10 is fixed on the upper side and the lower side of the lifting slide plate 2, the direction of the lifting slide plate is limited, the ball screw and the V-shaped guide rail on the upright post 1 are protected, and the precision and the speed of the lifting slide plate 2 during ascending and descending can be controlled more accurately by controlling the rotation speed of the ball screw;

The side of the lifting slide plate 2 is connected with a driving device through a fixing device, the fixing device comprises a first installation seat 11, a second installation seat 12 and a third installation seat 13 which are arranged at intervals, the first installation seat 11, the second installation seat 12 and the third installation seat 13 are all installed on the side of the lifting slide plate 2 through bolts, the installation of the first installation seat 11, the second installation seat 12 and the third installation seat 13 are independent of each other and are all connected through bolts, the operation difficulty is low, the device is quite simple and convenient when being installed or disassembled, the assembly and disassembly difficulty is greatly reduced, the subsequent maintenance cost is further saved, and the devices are all arranged on the lifting slide plate 2 in a concentrated mode, so that the structure of each mechanism is compact and is easier to integrate on a rolling mill bed;

The driving device comprises a driving motor 4, a mechanical main shaft 5 and an electric main shaft 6 which are arranged from top to bottom, wherein the mechanical main shaft 5 is vertically arranged, the driving motor 4 drives the mechanical main shaft 5 to rotate through a transmission device 7, a grooving grinding wheel 8 is arranged at the bottom end of the mechanical main shaft 5, the grooving grinding wheel 8 is used for grooving the crystal, the electric main shaft 6 is horizontally arranged, a grinding surface grinding wheel 9 is arranged at one end of the electric main shaft 6, the electric main shaft 6 drives the grinding surface grinding wheel 9 to grind the crystal, the grinding surface grinding wheel 9 is arranged below the grooving grinding wheel 8 at intervals, the fixing device and the driving device are both arranged on the side end surfaces of the lifting device, so that the lifting slide plate 2 moves along when the lifting slide plate 2 moves, the driving motor 4 is fixedly arranged at the top of a first mounting seat 11 through bolts, a first hole is arranged on the first mounting seat 11, and an output shaft of the driving motor 4 penetrates through the first hole, the second mounting seat 12 comprises a first fixing part 121, a reinforcing rib 122 and a bearing sleeve 123 for placing the mechanical main shaft 5, wherein the first fixing part 121 is fixedly arranged on the side surface of the lifting slide plate 2 through a plurality of bolts, one side surface of the first fixing part 121 is attached to the side surface of the lifting slide plate 2, the reinforcing rib 122 is arranged between the first fixing part 121 and the bearing sleeve 123, the reinforcing rib 122 ensures that deformation is weakened when the bearing sleeve 123 and the first fixing part 121 are stressed, the grooving process is further protected, the mechanical main shaft 5 is arranged in the bearing sleeve 123, the transmission device 7 comprises a synchronous pulley 701 and a conveyor belt 702 which are arranged above the mechanical main shaft 5, the synchronous pulley 701 and the mechanical main shaft 5 are coaxially and rotatably connected, the synchronous pulley 701 and the output shaft of the driving motor 4 are positioned on the same horizontal line, the transmission is realized through the conveyor belt 702, the bottom end of the mechanical main shaft 5 is provided with a sand wheel cover 14, the grinding wheel cover 14 is arranged at the bottom of the grooving grinding wheel 8, the third mounting seat 13 comprises a second fixing part 131, a first shaft clamp 132 and a second shaft clamp 133 which are integrally arranged, the second fixing part 131 is fixedly arranged on the side surface of the lifting slide plate 2 through a plurality of bolts, the first shaft clamp 132 and the second shaft clamp 133 are symmetrically arranged on the side surface of the second fixing part 131, the structures of the first shaft clamp 132 and the second shaft clamp 133 are consistent, the other ends of the first shaft clamp 132 and the second shaft clamp 133 are bent to form a connecting plate 15, the two connecting plates 15 are correspondingly provided with second holes, the two connecting plates 15 are connected through bolts arranged in the second holes, a gap between the connected first shaft clamp 132 and second shaft clamp 133 is used for arranging an electric spindle 6, the gap is suitable for the electric spindle 6, the electric spindle 6 is horizontally arranged so that an output shaft of the electric spindle 6 is arranged below the mechanical spindle 5, the gap is matched with the electric spindle 6, the driving motor 4 is started, the output shaft of the driving motor 4 starts to rotate, and because the output shaft of the driving motor 4 is connected with the synchronous pulley 701 through the conveying belt 702, the synchronous pulley 701 starts to rotate under the transmission of the conveying belt 702, the synchronous pulley 701 and the mechanical spindle 5 are coaxially arranged, the mechanical spindle 5 starts to rotate, the grooving grinding wheel 8 arranged at the bottom end of the mechanical spindle 5 starts to rotate, the rotating speed of the grooving grinding wheel 8 can be controlled in the whole rotating process, in addition, the position of the grooving grinding wheel 8 can be adjusted, the grooving precision is controlled, when the grooving grinding wheel 8 or the mechanical spindle 5 breaks down, only a structure mechanism with a problem is needed to be independently replaced, the maintenance cost and the maintenance difficulty are reduced, the structure of the transmission device 7 is simple, the occupied space is small, thereby easily installation, dismantlement and maintenance of transmission 7, machinery main shaft 5 and grooving emery wheel 8, moreover realize the noise that produces through conveyer belt 702 and synchronous pulley 701 in-process of transmission less, the effort to machinery main shaft 5 is little, but transmission efficiency is high, the setting of grinding wheel lid 14 can guarantee the stability of grooving emery wheel 8 rotation in-process, and prevent grooving emery wheel 8 and fly out suddenly when high-speed rotation, can accomplish installation and dismantlement through the bolt on connecting plate 15, and a structure is simple, the adjustment to grinding face emery wheel 9 alone is easier, machining efficiency has been accelerated simultaneously, and then the grinding face emery wheel 9 of individual control carries out the work of polishing to the crystal, can satisfy precision and speed's control requirement, more be fit for the machining efficiency of present semiconductor trade, the space of make full use of lifting slide 2, and use the electric main shaft 6 that has less volume makes the volume of whole device further reduce, make more can integrate on the barreling machine.

Other embodiments of the utility model will be apparent to those skilled in the art from consideration of the specification and practice of the utility model disclosed herein. This utility model is intended to cover any variations, uses, or adaptations of the utility model following, in general, the principles of the utility model and including such departures from the present disclosure as come within known or customary practice within the art to which the utility model pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the utility model being indicated by the following claims.

It is to be understood that the utility model is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the utility model is limited only by the appended claims.

Claims

1. The split type crystal grinding surface grooving device is characterized by comprising a stand column mechanism, wherein the side surface of the stand column mechanism is provided with a lifting slide plate, the lifting slide plate is in sliding fit with the stand column mechanism, a servo motor is arranged above the stand column mechanism, a ball screw is arranged in the stand column mechanism, a nut is connected onto the ball screw in a threaded manner, the lifting slide plate is connected with the ball screw through the nut, the servo motor is connected with the ball screw through a coupling, and the servo motor is used for controlling the ball screw to rotate so that the lifting slide plate ascends and descends;

2. The split type crystal grinding surface grooving device according to claim 1, wherein v-shaped guide rails with identical structures are respectively arranged on two side surfaces of the upright post mechanism, and protective covers are arranged at the top and the bottom of the lifting slide plate.

3. The split crystal grinding surface grooving device according to claim 1, wherein the fixing device comprises a first mounting seat, a second mounting seat and a third mounting seat which are arranged at intervals, and the first mounting seat, the second mounting seat and the third mounting seat are all mounted on the side face of the lifting slide plate through bolts.

4. The split crystal grinding surface grooving device according to claim 3, wherein the driving motor is fixedly mounted on the top of the first mounting seat through bolts, a first hole is formed in the first mounting seat, and an output shaft of the driving motor penetrates through the first hole.

5. The split crystal grinding surface grooving device according to claim 4, wherein the second mounting seat comprises a first fixing part, a reinforcing rib and a bearing sleeve, wherein the first fixing part, the reinforcing rib and the bearing sleeve are integrally arranged, the first fixing part is fixedly arranged on the side surface of the lifting slide plate through a plurality of bolts, and the reinforcing rib is arranged between the first fixing part and the bearing sleeve;

The transmission device comprises a synchronous belt pulley and a conveyor belt which are arranged above the mechanical main shaft, the synchronous belt pulley and the mechanical main shaft are coaxially and rotatably connected, and the synchronous belt pulley and an output shaft of the driving motor are positioned on the same horizontal line and realize transmission through the conveyor belt;

the bottom of the mechanical main shaft is provided with a grinding wheel cover, and the grinding wheel cover is arranged at the bottom of the grooving grinding wheel.

6. The split type crystal grinding surface grooving device according to claim 4, wherein the third mounting seat comprises a second fixing part, a first shaft clamp and a second shaft clamp which are integrally arranged, the second fixing part is fixedly arranged on the side surface of the lifting slide plate through a plurality of bolts, the first shaft clamp and the second shaft clamp are symmetrically arranged on the side surface of the second fixing part, and the first shaft clamp and the second shaft clamp are identical in structure;