CN220858439U

CN220858439U - Novel plate heater

Info

Publication number: CN220858439U
Application number: CN202322522714.6U
Authority: CN
Inventors: 师文亮; 黎静
Original assignee: Jiangsu Shiwei Semiconductor Technology Co ltd
Current assignee: Jiangsu Shiwei Semiconductor Technology Co ltd
Priority date: 2023-09-18
Filing date: 2023-09-18
Publication date: 2024-04-26
Anticipated expiration: 2033-09-18

Abstract

The utility model discloses a novel plate-type heater, which comprises an SUS304 bottom plate, wherein a mica bottom plate is arranged on the SUS304 bottom plate, a mounting groove is formed in the mica bottom plate, the mounting groove is formed by combining a plurality of rings, a heating wire is arranged in the mounting groove, the shape and the size of the heating wire are matched with those of the mounting groove, a plurality of mica upper pressing strips are transversely arranged on the mica bottom plate, the mica upper pressing strips are all arranged above the heating wire, and a mica double clamping sheet is arranged between each pair of rings of the heating wire positioned on the lower side. According to the utility model, iron-aluminum or nickel-chromium alloy can be selected as the heating wire, the heating wire is arranged on the mica bottom plate, the mounting groove matched with the heating wire is formed in the mica bottom plate, and the heating wire is fixed through tabletting and the like, so that the heating wire is ensured to be stable in use, the movement of the heating wire is limited, and meanwhile, the heating wire is convenient to maintain and replace.

Description

Novel plate heater

Technical Field

The utility model belongs to the technical field of semiconductors, and particularly relates to a novel plate heater.

Background

The heating devices used in the existing semiconductor and photovoltaic ALD thin film deposition devices are mostly armored heaters and infrared heating tubes.

The infrared heating pipe is easy to be influenced by environment in use, foreign matters are easy to adhere to the surface of the heating pipe, and the heating effect is influenced; moreover, the infrared heating pipe works at high temperature to easily generate coke and electric leakage faults, so that the service life is relatively short, and particularly faults are more likely to occur in high-power output equipment such as photovoltaic ALD thin film deposition equipment, the fault frequency is higher, and the maintenance cost is relatively higher; the infrared heating pipe has the problems of smaller heating range and easy breakage during transportation.

The armored heating pipe is easy to fatigue when the heating wire outer metal pipe is used for a long time, so that the heating pipe is broken; the armored heating pipe has the working procedures of powder filling, bending, welding and the like in the processing technology, the internal structure of the heating pipe is easy to cause problems in bending, the heating pipe is easy to break and break under high pressure during heating, the filling is uneven, the filling is not solid, the purity of the filled magnesium powder is lower, the dryness is not enough, the insulativity of the heating pipe is reduced, the metal shell is broken under high pressure during heating, and the insulativity and the service life of the heating wire are also influenced during welding failure; the armored heating pipe cannot be repaired when the internal heating wire is fused due to the structural specificity of the armored heating pipe, and can only be replaced integrally, so that the maintenance cost is high; and most of heaters used in the existing photovoltaic ALD thin film deposition equipment are armored heating wires coiled on an SUS304 bottom plate, the SUS304 bottom plate is fixed on the inner wall of a cavity, all connections are free of junction-edge interlayer, and the risk of electrifying the heating wires and the bottom plate is easily caused when the armored wires are fused and broken.

Accordingly, in view of the above-described problems, it is necessary to provide a novel plate heater.

Disclosure of utility model

The utility model aims to provide a novel plate heater so as to solve the problems.

In order to achieve the above object, an embodiment of the present utility model provides the following technical solution:

the utility model provides a novel plate heater, includes SUS304 bottom plate, be provided with the mica bottom plate on the SUS304 bottom plate, the mounting groove has been seted up on the mica bottom plate, the mounting groove sets up to be in the same place by a plurality of annular combination, install the heater strip in the mounting groove, shape and size that the heater strip set up with shape and size assorted that the mounting groove set up, transversely be provided with a plurality of mica upper battens on the mica bottom plate, a plurality of the mica upper battens all set up in the top of heater strip, the heater strip is located all set up mica double clip piece between every pair of annular of downside, the both ends of heater strip set up in the downside of mica bottom plate, the terminal is all installed at the both ends of heater strip.

As a further improvement of the utility model, the heating wire is one of iron-cauterized aluminum and nickel-chromium alloy.

As a further improvement of the utility model, the part of the heating wire, which is positioned at the lower side of the mica bottom plate, is transversely arranged, and a plurality of mica single clamping sheets are arranged on the transversely arranged part of the heating wire.

As a further improvement of the utility model, the mica double-clamping sheet and the mica single-clamping sheet are respectively provided with a flat head bolt, and the lower ends of the flat head bolts are connected to the mica bottom plate in a threaded manner.

As a further improvement of the utility model, a plurality of bending press pieces are integrally formed on the SUS304 base plate, through holes matched with the bending press pieces are formed on the mica base plate and the mica upper press bar, and the upper ends of the bending press pieces are arranged at the upper ends of the mica upper press bars through the through holes and are in press connection with the mica upper press bars.

As a further improvement of the utility model, a pair of groove bodies are arranged on the side wall plate below the mica bottom plate, and two ends of the heating wire are respectively arranged in the pair of groove bodies.

As a further improvement of the utility model, ceramic sleeves are arranged between the two ends of the heating wire and the binding posts, and high-temperature-resistant inorganic glue is arranged between the ceramic sleeves and the tank body.

As a further improvement of the utility model, a plurality of bolt holes are formed on the SUS304 base plate and the mica base plate.

Compared with the prior art, the utility model has the following advantages:

According to the utility model, iron-aluminum or nickel-chromium alloy can be selected as the heating wire, the heating wire is arranged on the mica bottom plate, the mounting groove matched with the heating wire is formed on the mica bottom plate, and the heating wire is fixed through a tabletting and the like, so that the heating wire is ensured to be stable in use, the movement of the heating wire is limited, meanwhile, the heating wire is convenient to maintain and replace, the use temperature in the atmosphere is high, the service life of the heating wire is prolonged, the surface load of the heating wire is high, the temperature rise is quick, the oxidation resistance performance is good, the resistivity is high, the manufacturing cost is low, the process is simple, and the practicality is good, so that the heating wire is convenient to popularize and use.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present utility model, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.

FIG. 1 is a schematic view of a novel plate heater according to an embodiment of the present utility model;

FIG. 2 is an enlarged view of the utility model at A in FIG. 1;

FIG. 3 is a right side view of a novel plate heater according to one embodiment of the present utility model;

FIG. 4 is a cross-sectional view of a novel plate heater according to one embodiment of the present utility model;

Fig. 5 is an enlarged view of B in fig. 4 according to an embodiment of the present utility model.

In the figure: SUS304 bottom plate, 2 mica bottom plate, 3 mounting groove, 4 heater strip, 5 upper layering of mica, 6 double-clamping mica piece, 7 single-clamping mica piece, 8 flat head bolt, 9 bending piece, 10 binding post, 11 ceramic sleeve, 12 high temperature resistant inorganic glue, 13 bolt hole.

Detailed Description

The present utility model will be described in detail below with reference to the embodiments shown in the drawings. The embodiments are not intended to limit the utility model, but structural, methodological, or functional modifications of the utility model from those skilled in the art are included within the scope of the utility model.

The embodiment of the utility model discloses a novel plate heater, which is shown in fig. 3 and 4, and comprises a SUS304 bottom plate 1, wherein heating equipment is needed in semiconductor and photovoltaic ALD thin film deposition equipment. The SUS304 bottom plate 1 is a bottom component of the heater, and is connected with the inner wall of the cavity when being installed.

Referring to fig. 3 to 5, a mica substrate 2 is provided on a SUS304 substrate 1, and since the heater used in the conventional photovoltaic ALD thin film deposition apparatus is mostly a coil-wound armored heater wire on the SUS304 substrate 1, the SUS304 substrate 1 is fixed on the inner wall of the cavity, and all the connections are free of a junction barrier layer, and the risk of energizing the heater wire and the substrate is easily caused when the armored wire is fused and broken, the mica substrate 2 is provided on the SUS304 substrate 1, thereby having an insulation effect between the heater wire and the SUS304 substrate 1. And the mica soleplate 2 has higher heat conductivity, and meanwhile, the mica soleplate 2 can also play a role of heat radiation, so that the heat transfer of the heating surface is more uniform. The mica base plate 2 also has good insulation and does not generate harmful gas at high temperature, thereby preventing pollution to the cavity, and the mica base plate 2 is inexpensive, thereby reducing the cost of the heater use.

Referring to fig. 1, a mounting groove 3 is formed in a mica base plate 2, the mounting groove 3 is formed by combining a plurality of rings, a heating wire 4 is mounted in the mounting groove 3, and the shape and the size of the heating wire 4 are matched with those of the mounting groove 3. The mica bottom plate 2 is used for installing the mounting groove 3, in order to be convenient for install the mounting groove 3, has seted up the mounting groove 3 on the mica bottom plate 2 to the shape of mounting groove 3 sets up to be in the same place by a plurality of annular, so that can install the heater strip 4 of sufficient quantity on the mica bottom plate 2, so that better realization heating effect. Meanwhile, in order to enable the heating wire 4 to be installed in the installation groove 3 stably, the shape and the size of the heating wire 4 are matched with those of the installation groove 3, so that the heating wire 4 is installed in the installation groove 3 stably.

Referring to fig. 1, a plurality of mica upper pressing strips 5 are transversely arranged on a mica base plate 2, and the plurality of mica upper pressing strips 5 are arranged above a heating wire 4. In order to ensure that the heating wire 4 is installed in the installation groove 3 and stable, the heating wire 4 is prevented from moving during use, a plurality of mica upper pressing strips 5 are transversely arranged on the mica bottom plate 2, and the mica upper pressing strips 5 are arranged above the heating wire 4 so as to limit the movement of the heating wire 4 in the installation groove 3 through the mica upper pressing strips 5, and the heating wire 4 is ensured to be stable during use.

Preferably, the heating wire 4 is one of iron-aluminum and nickel-chromium alloy, and iron-aluminum or nickel-chromium alloy is selected as the heating wire 4, so that the heating wire 4 has high use temperature in the atmosphere, the highest use temperature of iron-aluminum can reach 1400 ℃, and the iron-aluminum alloy heating wire also has the advantages of high surface load, quick temperature rise, good oxidation resistance, small iron-aluminum specific gravity, good vulcanization resistance, high resistivity and low price of the iron-aluminum heating wire.

Referring to fig. 1, 4 and 5, a plurality of bending press pieces 9 are integrally formed on the SUS304 base plate 1, through holes matched with the bending press pieces 9 are formed in the mica base plate 2 and the mica upper press bar 5, and the upper ends of the bending press pieces 9 are arranged at the upper ends of the mica upper press bars 5 through the through holes and are in pressure connection with the mica upper press bars 5. In order to be convenient for fix the mica upper pressing strip 5 on the mica bottom plate 2, through holes are formed in the mica bottom plate 2 and the mica upper pressing strip 5, the bending pressing sheet 9 penetrates through the through holes to be arranged at the upper end of the mica upper pressing strip 5, and then the upper end of the bending pressing sheet 9 is bent and pressed on the mica upper pressing strip 5, so that the mica upper pressing strip 5 is fixed. Meanwhile, the mica upper pressing strip 5 is installed in a bending and pressing mode by adopting the bending pressing piece 9, so that the mica upper pressing strip 5 is convenient to disassemble and assemble while the mica upper pressing strip 5 is fixed. And SUS304 bottom plate 1 and the preforming 9 integrated into one piece of bending, coefficient of expansion is the same when heating, can not appear heating and drop the phenomenon.

Referring to fig. 1 and 2, a mica double-clamping sheet 6 is arranged between each pair of rings of the lower side of the heating wire 4, the part of the lower side of the mica bottom plate 2 of the heating wire 4 is transversely arranged, and a plurality of mica single-clamping sheets 7 are arranged on the transversely arranged part of the heating wire 4. In order to further ensure the stability of the heating wire 4 after being installed, the heating wire 4 is prevented from moving during use, mica double-clamping sheets 6 are arranged between each ring at the lower side of the displacement of the heating wire 4, and the heating wire 4 is fixed through the mica double-clamping sheets 6, so that the stability of the heating wire 4 is ensured. Meanwhile, a mica single-clamping sheet 7 is arranged at the transversely arranged part of the heating wire 4 so as to fix the transversely arranged heating wire 4 through the mica single-clamping sheet 7.

Referring to fig. 1 and 2, the mica double-clamping sheet 6 and the mica single-clamping sheet 7 are respectively provided with a flat head bolt 8, and the lower ends of the flat head bolts 8 are connected to the mica bottom plate 2 in a threaded manner. In order to be convenient for fix mica double-clamping piece 6 and mica single-clamping piece 7, through all being provided with flat head bolt 8 on mica double-clamping piece 6 and mica single-clamping piece 7, through the lower extreme threaded connection of flat head bolt 8 on mica bottom plate 2 to be fixed in mica bottom plate 2 with mica double-clamping piece 6 and mica single-clamping piece 7, thereby realize the fixed to heater strip 4. Meanwhile, the mica double-clamping sheet 6 and the mica single-clamping sheet 7 are fixed through the flat head bolts 8, so that the mica double-clamping sheet 6 and the mica single-clamping sheet 7 are convenient to assemble and disassemble.

Preferably, because the upper mica pressing strip 5, the double mica clamping sheets 6 and the single mica clamping sheets 7 are convenient to assemble and disassemble, when the double mica clamping sheets are used, the heating wire 4 is required to be replaced after being fused due to the fact that the heating wire 4 is fused, and when the upper mica pressing strip 5, the double mica clamping sheets 6 and the single mica clamping sheets 7 are convenient to assemble and disassemble, the heating wire 4 is convenient to disassemble and assemble, and accordingly the heating wire 4 is convenient to replace.

Referring to fig. 2, two ends of the heating wire 4 are disposed at the lower side of the mica bottom plate 2, binding posts 10 are mounted at two ends of the heating wire 4, a pair of groove bodies are formed in the lower side wall plate of the mica bottom plate 2, two ends of the heating wire 4 are respectively disposed in the pair of groove bodies, ceramic sleeves 11 are arranged between two ends of the heating wire 4 and the binding posts 10, and high-temperature-resistant inorganic glue 12 is arranged between the ceramic sleeves 11 and the groove bodies. Binding posts 10 are installed at both ends of the heating wire 4, and the binding posts 10 are connected with an external power supply, so that the heating wire 4 is supplied with power for heating. In order to facilitate the stabilization of both ends of the heating wire 4, simultaneously, it is ensured that both ends of the heating wire 4 are not in contact with the SUS304 bottom plate 1, a pair of groove bodies are formed at the lower end of the mica bottom plate 2, both ends of the heating wire 4 are placed in the groove bodies, a ceramic sleeve 11 is arranged between the heating wire 4 and the binding post 10, the junction of the SUS304 bottom plate 1 and the binding post 10 is protected by the ceramic sleeve 11, and an insulating layer is formed between the end part of the heating wire 4 and the SUS304 bottom plate 1.

Further, in order to make the ceramic sleeve 11 stable after installation so as to ensure that the junction of the SUS304 bottom plate 1 and the binding post 10 is stable, the ceramic sleeve 11 can be fixed on the tank body through the high-temperature-resistant inorganic adhesive 12 by arranging the high-temperature-resistant inorganic adhesive 12 between the ceramic sleeve 11 and the tank body, and the movement of the ceramic sleeve 11 in the tank body is avoided. Meanwhile, the high-temperature-resistant inorganic adhesive 12 is high-temperature-resistant adhesive, so that the connection between the ceramic sleeve 11 and the tank body is not affected when the heating wire 4 heats.

Referring to fig. 1, a plurality of bolt holes 13 are formed in each of the SUS304 substrate 1 and the mica substrate 2. Through having seted up bolt hole 13 on SUS304 bottom plate 1 and mica bottom plate 2, through bolt hole 13 with SUS304 bottom plate 1 and mica bottom plate 2 and cavity inner wall connection.

When the mica plate is used, the heating wire 4 is installed in the installation groove 3 arranged on the mica bottom plate 2, the heating wire 4 is fixed through the mica upper pressing strip 5, meanwhile, the mica double-clamping sheet 6 is installed on the ring of the lower side heating wire 4, the mica single-clamping sheet 7 is arranged on the part of the heating wire 4 transversely arranged on the lower side, and the heating wire 4 is fixed through the mica upper pressing strip 5, the mica double-clamping sheet 6 and the mica single-clamping sheet 7, so that the stability of the heating wire 4 during use is ensured.

The technical scheme shows that the utility model has the following beneficial effects:

According to the utility model, iron-aluminum or nickel-chromium alloy can be selected as the heating wire, the heating wire is arranged on the mica bottom plate, the mounting groove matched with the heating wire is formed on the mica bottom plate, and the heating wire is fixed through a tabletting and the like, so that the heating wire is ensured to be stable in use, the movement of the heating wire is limited, meanwhile, the heating wire is convenient to maintain and replace, the use temperature in the atmosphere is high, the service life of the heating wire is prolonged, the surface load of the heating wire is high, the temperature rise is quick, the oxidation resistance performance is good, the resistivity is high, the manufacturing cost is low, the process is simple, and the practicality is good, so that the heating wire is convenient to popularize and use. .

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment contains only one independent technical solution, and that such description is provided for clarity only, and that the technical solutions of the embodiments may be appropriately combined to form other embodiments that will be understood by those skilled in the art.

Claims

1. The utility model provides a novel plate heater, includes SUS304 bottom plate, its characterized in that, be provided with the mica bottom plate on the SUS304 bottom plate, the mounting groove has been seted up on the mica bottom plate, the mounting groove sets up to be in the same place by a plurality of annular combination, install the heater strip in the mounting groove, shape and size that the heater strip set up with shape and size assorted that the mounting groove set up, transversely be provided with a plurality of mica upper battens on the mica bottom plate, a plurality of the mica upper battens all set up in the top of heater strip, the heater strip is located every to all setting up mica double clamping piece between the annular of downside, the both ends of heater strip set up in the downside of mica bottom plate, the terminal is all installed at the both ends of heater strip.

2. The novel plate heater according to claim 1, wherein the heating wire is one of iron-cauterized aluminum and nickel-chromium alloy.

3. The novel plate heater according to claim 2, wherein the heating wire is arranged transversely at the lower side of the mica base plate, and a plurality of mica single clamping sheets are arranged on the transversely arranged part of the heating wire.

4. A novel plate heater according to claim 3, wherein the mica double clamping piece and the mica single clamping piece are provided with flat head bolts, and the lower ends of the flat head bolts are connected to the mica base plate in a threaded manner.

5. The novel plate heater according to claim 1, wherein a plurality of bending press pieces are integrally formed on the SUS304 base plate, through holes matched with the bending press pieces are formed in the mica base plate and the mica upper press pieces, and the upper ends of the bending press pieces are arranged at the upper ends of the mica upper press pieces through the through holes and are in pressure connection with the mica upper press pieces.

6. The novel plate heater according to claim 1, wherein a pair of groove bodies are formed in the side wall plate below the mica bottom plate, and two ends of the heating wire are respectively arranged in the pair of groove bodies.

7. The novel plate heater according to claim 6, wherein ceramic sleeves are arranged between the two ends of the heating wire and the binding posts, and high-temperature-resistant inorganic glue is arranged between the ceramic sleeves and the groove body.

8. The novel plate heater according to claim 1, wherein a plurality of bolt holes are formed in both the SUS304 base plate and the mica base plate.