CN220834824U - Gas-liquid separation system for chlorosilane and hydrogen - Google Patents
Gas-liquid separation system for chlorosilane and hydrogen Download PDFInfo
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- CN220834824U CN220834824U CN202322579708.4U CN202322579708U CN220834824U CN 220834824 U CN220834824 U CN 220834824U CN 202322579708 U CN202322579708 U CN 202322579708U CN 220834824 U CN220834824 U CN 220834824U
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- chlorosilane
- gas
- liquid separation
- hydrogen
- outlet
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- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 84
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 84
- 238000000926 separation method Methods 0.000 title claims abstract description 72
- 239000007788 liquid Substances 0.000 title claims abstract description 65
- 239000001257 hydrogen Substances 0.000 title claims abstract description 57
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 57
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 239000007789 gas Substances 0.000 claims abstract description 39
- 238000001179 sorption measurement Methods 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 4
- 230000002708 enhancing effect Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229920005591 polysilicon Polymers 0.000 abstract description 3
- 239000012071 phase Substances 0.000 description 7
- 150000002431 hydrogen Chemical class 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Separation By Low-Temperature Treatments (AREA)
Abstract
The utility model relates to the technical field of tail gas treatment in polysilicon production, in particular to a gas-liquid separation system for chlorosilane and hydrogen: the gas phase of the separating tower enters a heat exchanger, the vortex cooler comprises a low-temperature section and a high-temperature section, chlorosilane is in the low-temperature section, hydrogen for separating the chlorosilane is in the high-temperature section, the chlorosilane enters a gas-liquid separation device, and the gas-liquid separation device changes the chlorosilane into liquid chlorosilane; the hydrogen containing partial chlorosilane in the high temperature section enters an adsorption tower from a second outlet, and the adsorption tower adsorbs redundant chlorosilane, so that pure hydrogen is obtained, and separation of chlorosilane and hydrogen is realized; the chlorosilane gas in the gas-liquid separation tower enters the heat exchanger and is used as a cold source to perform gas-gas heat exchange on the gas phase of the separation tower, so that the temperature of the feed inlet of the vortex cooler is reduced, the consumption of condensing medium is reduced, the adsorption efficiency of chlorosilane is improved by flow circulation, the purity of hydrogen is ensured, the loss of public medium is reduced, and the purposes of reducing cost and enhancing efficiency are realized.
Description
Technical Field
The utility model relates to the technical field of tail gas treatment in polysilicon production, in particular to a gas-liquid separation system for chlorosilane and hydrogen.
Background
In the production of polycrystalline silicon, since chemical reactions of a trichlorosilane synthesis process, a trichlorosilane reduction reaction process, and a silicon tetrachloride hydrogenation process are incomplete, a large amount of unreacted tail gas including a chlorosilane mixture, hydrogen chloride, and hydrogen is generated. The direct exhaust of the tail gas not only pollutes the environment, but also is unfavorable for saving the cost, so that the tail gas is required to be recycled. The tail gas recycling is to separate, purify and recycle each component in the tail gas.
At present, the tail gas recovery after the electronic grade polysilicon vapor deposition reaction mainly ensures the separation effect of chlorosilane in the reduction tail gas and various gases such as hydrogen, hydrogen chloride and the like through multistage heat exchange condensation, wherein the deep condensing medium carbon dioxide is adopted for separating the hydrogen and the chlorosilane to meet the separation index requirement, so that the cost is high, and the heat exchange effect is extremely reduced once the load of a refrigerator is overlarge, so that part of chlorosilane can be entrained in the hydrogen, the compressor cannot normally run, and even the compressor is damaged.
The information disclosed in this background section is only for enhancement of understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of utility model
The utility model provides a gas-liquid separation system for chlorosilane and hydrogen, which is used for effectively solving the problems in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: a chlorosilane and hydrogen gas-liquid separation system, comprising:
The device comprises a separation tower, a heat exchanger, a vortex cooler, a gas-liquid separation device, an adsorption tower and a pipeline;
the discharge port of the separation tower is connected with the feed port of the heat exchanger;
The discharge port of the heat exchanger is connected with the feed port of the vortex cooler;
the vortex cooler comprises a high temperature section and a low temperature section; the chlorosilane is in a low-temperature section, the hydrogen and part of the chlorosilane are in a high-temperature section, the low-temperature section is provided with a first outlet, and the high-temperature section is provided with a second outlet;
The first outlet is connected with a feed inlet of the gas-liquid separation device to liquefy the chlorosilane, the gas-liquid separation device is provided with a third outlet and a fourth outlet, the third outlet is a liquid-phase chlorosilane collecting port, the fourth outlet is connected with the heat exchanger, and chlorosilane gas in the gas-liquid separation tower enters the heat exchanger to be used as a cold source of the heat exchanger;
The second outlet is connected with the adsorption tower, and the adsorption tower adsorbs part of chlorosilane in the hydrogen to obtain pure hydrogen;
the pipeline is used for connecting the components.
Further, a heating section cold source is arranged at the second outlet and is used for heating the hydrogen containing part of chlorosilane in the heating section.
Further, the heat exchanger is connected with the second outlet, and the cold end material after heat exchange is used as a heating section cold source.
Further, the heating section cold source is liquid nitrogen.
Further, the gas-liquid separation device is a spiral gas-liquid separator.
Further, the system also comprises a circulating water system, wherein the circulating water system provides a cold source for the gas-liquid separation device.
Further, the circulating water system comprises a cooling water tank, a cooling water pump and a cooler which are sequentially connected in series and connected on the gas-liquid separation device in parallel.
Further, the first outlet and the second outlet are provided with flow meters.
Further, control valves are arranged at the first outlet and the second outlet.
Further, the pipeline is provided with an insulation layer.
The beneficial effects of the utility model are as follows: the utility model is provided with a separation tower, a heat exchanger, a vortex cooler, a gas-liquid separation device, an adsorption tower and a pipeline; the gas phase at the top end of the separation tower enters a heat exchanger, the vortex cooler comprises a low-temperature section and a high-temperature section, chlorosilane is positioned in the low-temperature section, hydrogen for separating the chlorosilane is positioned in the high-temperature section, the chlorosilane enters a gas-liquid separation device from a first outlet of the low-temperature section, and the gas-liquid separation device is used for collecting the chlorosilane which is changed into liquid chlorosilane into a collecting device; the hydrogen containing partial chlorosilane in the high-temperature section enters an adsorption tower from a second outlet, and the adsorption tower adsorbs redundant chlorosilane in the hydrogen, so that pure hydrogen is obtained, and separation of the chlorosilane and the hydrogen is realized; the chlorosilane gas in the gas-liquid separation tower enters the heat exchanger and is used as a cold source to perform gas-gas heat exchange on the gas phase of the separation tower, so that the temperature of the feed inlet of the vortex cooler is reduced, the consumption of condensing medium is reduced, the adsorption efficiency of chlorosilane is improved by flow circulation, the purity of hydrogen is ensured, the stable operation of the compressor is facilitated, the loss of a public medium is reduced, and the purposes of reducing cost and enhancing efficiency are realized.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present utility model, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.
FIG. 1 is a schematic flow diagram of a chlorosilane and hydrogen gas-liquid separation system;
FIG. 2 is a schematic flow chart of a chlorosilane and hydrogen gas-liquid separation system (one embodiment of a heating section cold source);
fig. 3 is a schematic flow chart of a gas-liquid separation system of chlorosilane and hydrogen (another embodiment of a heat sink of a heating section).
Reference numerals: 1. a separation tower; 2. a heat exchanger; 3. a vortex cooler; 4. a gas-liquid separation device; 5. an adsorption tower; 6. a heating section cold source; 7. a compressor.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
In the description of the present invention, it should be noted that the directions or positional relationships indicated as being "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are directions or positional relationships based on the drawings are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, or may be internal communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1 to 3: a chlorosilane and hydrogen gas-liquid separation system, comprising:
The device comprises a separation tower 1, a heat exchanger 2, a vortex cooler 3, a gas-liquid separation device 4, an adsorption tower 5 and a pipeline;
the discharge port of the separation tower 1 is connected with the feed port of the heat exchanger 2;
The discharge port of the heat exchanger 2 is connected with the feed port of the vortex cooler 3;
The vortex cooler 3 comprises a high temperature section and a low temperature section; the chlorosilane is in a low-temperature section, the hydrogen and part of the chlorosilane are in a high-temperature section, the low-temperature section is provided with a first outlet, and the high-temperature section is provided with a second outlet;
The first outlet is connected with a feed inlet of the gas-liquid separation device 4, chlorosilane is liquefied, the gas-liquid separation device 4 is provided with a third outlet and a fourth outlet, the third outlet is a liquid-phase chlorosilane collecting port, the fourth outlet is connected with the heat exchanger 2, and chlorosilane gas in the gas-liquid separation device 4 enters the heat exchanger 2 to be used as a cold source of the heat exchanger 2;
The second outlet is connected with an adsorption tower 5, and the adsorption tower 5 adsorbs part of chlorosilane in the hydrogen to obtain pure hydrogen; the outlet of the adsorption tower 5 is connected with a compressor 7;
the pipeline is used for connecting the components.
Specifically, the gas phase at the top end of the separation tower 1 enters the heat exchanger 2, the gas phase enters the vortex cooler 3 from the heat exchanger 2, the gas phase is divided into chlorosilane and hydrogen containing part of chlorosilane in the vortex cooler 3, the vortex cooler 3 comprises a low-temperature section and a high-temperature section, the chlorosilane is positioned in the low-temperature section, the hydrogen containing part of chlorosilane is positioned in the high-temperature section, the chlorosilane enters the gas-liquid separation device 4 from a first outlet of the low-temperature section, and the gas-liquid separation device 4 changes the chlorosilane into liquid-phase chlorosilane to be collected in the collecting device; the hydrogen containing partial chlorosilane in the high temperature section enters the adsorption tower 5 from the second outlet, and the adsorption tower 5 adsorbs redundant chlorosilane in the hydrogen, so that pure hydrogen is obtained, separation of the chlorosilane and the hydrogen is realized, the pure hydrogen is introduced into the compressor 7, and stable operation of the compressor 7 is ensured. The chlorosilane gas in the gas-liquid separation device 4 enters the heat exchanger 2 and is used as a cold source to perform gas-gas heat exchange on the gas phase at the top end of the separation tower 1, so that the temperature at the feed inlet of the vortex cooler 3 is further reduced, the consumption of condensing medium is reduced, the cost is reduced, the temperature of tail gas entering the vortex cooler 3 is further reduced through flow circulation, the adsorption efficiency of chlorosilane is improved, the purity of hydrogen is ensured, the stable operation of the compressor 7 is facilitated, the loss of a public medium is reduced, and the purposes of reducing cost and enhancing efficiency are realized.
The above-mentioned vortex cooler is an apparatus for cooling gas, which divides high-temperature gas into a high-temperature section and a low-temperature section using the principle of vortex flow. In a vortex cooler, gas enters the apparatus by way of rotation. The high-temperature gas is acted by centrifugal force in the rotating process, so that the high-temperature gas moves to the outer wall surface to form a high-temperature section. Simultaneously, the pressure generated in the gas is reduced due to the action of centrifugal force, so that the temperature of the gas is reduced.
As a preferable example of the above embodiment, a heating stage heat sink 6 is provided at the second outlet, and the heating stage heat sink 6 heats the hydrogen gas containing part of chlorosilane in the heating stage. Thereby playing a role in adjusting the inlet air temperature of the adsorption tower 5.
As shown in fig. 2, in one embodiment of the heating section cold source, as a preference of the foregoing embodiment, the heat exchanger 2 is connected to the second outlet, and the cold end material after heat exchange is used as the heating section cold source 6. The cold end material after heat exchange is mixed with the hot end material at the second outlet of the vortex cooler 3, so that the function of adjusting the air inlet temperature of the adsorption tower 5 can be achieved, the adsorption of part of chlorosilane in hydrogen is facilitated, the purity of the hydrogen is improved, and the cost is reduced.
As shown in fig. 3, another embodiment of the heating stage heat sink is preferable as the above example, and the heating stage heat sink 6 is liquid nitrogen.
Liquid nitrogen is an extremely low temperature liquid with a boiling point of-196 ℃. The liquid nitrogen is introduced into the high-temperature section, so that the heat of the high-temperature gas can be quickly absorbed, and the cooling effect is realized.
In the present embodiment, the gas-liquid separation device 4 is a spiral gas-liquid separator. The fine liquid in the gas phase collides to the wall of the spiral tube, the kinetic energy is lost after collision and the turning gas is separated, the pressure in the spiral tube is locally lifted synchronously, and the gas-liquid phase separation is more thorough.
The device also comprises a circulating water system, wherein the circulating water system provides a cold source for the gas-liquid separation device 4.
As a preferable example of the above embodiment, the circulating water system includes a cooling water tank, a cooling water pump, and a cooler connected in series in this order, and connected in parallel to the gas-liquid separation device 4. After the heat absorbed by the circulating water, the circulating water is cooled by a cooler and is circularly supplied again, so that a continuous cooling effect is realized.
In this embodiment, the first outlet and the second outlet are provided with flow meters.
The flow meter is arranged between the vortex cooler 3 and the chlorosilane adsorption tower 5, the vortex cooler 3 and the gas-liquid separation device 4, and is used for measuring the flow rate of the flowing medium passing through the pipeline. It provides real-time flow information to help monitor and control the flow of media in the system. The flowmeter can measure the flow of the medium in real time and provide accurate flow data.
By monitoring the flow, the flow conditions of the medium and between the vortex cooler and the chlorosilane adsorption tower can be known, so that abnormal conditions or faults can be detected in time.
Wherein, first export and second exit are equipped with the control valve.
Control valves are respectively arranged at the first outlet and the second outlet of the low-temperature section and the high-temperature section of the vortex cooler 3, so that the flow and the pressure of the medium at the outlets of the high-temperature section and the low-temperature section can be controlled. By adjusting the opening of the control valve, the flow rate of the outlet medium of the high temperature section can be controlled, thereby influencing the cooling effect or other process parameters. The function of the control valve is to ensure that the flow of the high temperature section and low temperature section outlet media meets set requirements, such as controlling the cooling rate, maintaining a certain temperature differential, or achieving a specific process reaction, etc.
Preferably, the pipeline is provided with an insulating layer. The heat preservation layer reduces the loss of energy and the temperature change of the medium, saves energy and reduces cost. The low temperature section and the high temperature section correspond to different temperature areas respectively. The arrangement of the heat preservation layer can reduce the temperature of the surface of the pipeline and avoid the influence of heat radiation on the surrounding environment. This helps to protect the working environment and the safety of the operator.
Utilize vortex cooler 3 and gas-liquid separation 4, enrich and get rid of chlorosilane, can realize hydrogen behind the separator 1 and chlorosilane carry out gas-gas heat transfer, reduce condensing medium's consumption, realize the purpose of reducing the cost and increasing efficiency, and through the flow circulation, further reduced the temperature that tail gas got into in the vortex cooler 3, help improving chlorosilane's adsorption efficiency, and cold junction material and hot junction material after the heat transfer mix, can play the function of adjusting adsorption tower 5 air inlet temperature, be favorable to adsorbing remaining chlorosilane, guarantee the purity of hydrogen, help the steady operation of compressor 7, the loss of public medium has been reduced, the purpose of reducing the cost and increasing efficiency has been realized.
It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (10)
1. The chlorosilane and hydrogen gas-liquid separation system is characterized by comprising a separation tower, a heat exchanger, a vortex cooler, a gas-liquid separation device, an adsorption tower and a pipeline;
the discharge port of the separation tower is connected with the feed port of the heat exchanger;
The discharge port of the heat exchanger is connected with the feed port of the vortex cooler;
the vortex cooler comprises a high temperature section and a low temperature section; the chlorosilane is in a low-temperature section, the hydrogen and part of the chlorosilane are in a high-temperature section, the low-temperature section is provided with a first outlet, and the high-temperature section is provided with a second outlet;
The first outlet is connected with a feed inlet of the gas-liquid separation device to liquefy the chlorosilane, the gas-liquid separation device is provided with a third outlet and a fourth outlet, the third outlet is a liquid-phase chlorosilane collecting port, the fourth outlet is connected with the heat exchanger, and chlorosilane gas in the separation tower enters the heat exchanger to be used as a cold source of the heat exchanger;
The second outlet is connected with the adsorption tower, and the adsorption tower adsorbs part of chlorosilane in the hydrogen to obtain pure hydrogen;
the pipeline is used for connecting the components.
2. The chlorosilane and hydrogen gas-liquid separation system of claim 1 wherein a heating stage cold source is arranged at the second outlet, and the heating stage cold source heats the hydrogen gas containing part of chlorosilane in the heating stage.
3. The chlorosilane and hydrogen gas-liquid separation system of claim 2, wherein the heat exchanger is connected with the second outlet, and the cold end material after heat exchange is used as a heating section cold source.
4. The chlorosilane and hydrogen gas-liquid separation system of claim 2, wherein the heating section cold source is liquid nitrogen.
5. The chlorosilane and hydrogen gas-liquid separation system of claim 1, wherein the gas-liquid separation device is a spiral gas-liquid separator.
6. The chlorosilane and hydrogen gas-liquid separation system of claim 1 further comprising a circulating water system, wherein the circulating water system provides a cold source for the gas-liquid separation apparatus.
7. The chlorosilane and hydrogen gas-liquid separation system of claim 6, wherein the circulating water system comprises a cooling water tank, a cooling water pump and a cooler which are sequentially connected in series and connected in parallel on the gas-liquid separation device.
8. The chlorosilane and hydrogen gas-liquid separation system of any one of claims 1 to 6 wherein flow meters are provided at the first outlet and the second outlet.
9. The chlorosilane and hydrogen gas-liquid separation system of any one of claims 1 to 6 wherein control valves are provided at the first and second outlets.
10. The chlorosilane and hydrogen gas-liquid separation system of any one of claims 1 to 6 wherein said pipeline is provided with a heat-insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322579708.4U CN220834824U (en) | 2023-09-21 | 2023-09-21 | Gas-liquid separation system for chlorosilane and hydrogen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322579708.4U CN220834824U (en) | 2023-09-21 | 2023-09-21 | Gas-liquid separation system for chlorosilane and hydrogen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220834824U true CN220834824U (en) | 2024-04-26 |
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ID=90776483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322579708.4U Active CN220834824U (en) | 2023-09-21 | 2023-09-21 | Gas-liquid separation system for chlorosilane and hydrogen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220834824U (en) |
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2023
- 2023-09-21 CN CN202322579708.4U patent/CN220834824U/en active Active
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