CN204373313U - A kind of argon gas of double tower coupling reclaims purifier apparatus - Google Patents

A kind of argon gas of double tower coupling reclaims purifier apparatus Download PDF

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Publication number
CN204373313U
CN204373313U CN201420657809.7U CN201420657809U CN204373313U CN 204373313 U CN204373313 U CN 204373313U CN 201420657809 U CN201420657809 U CN 201420657809U CN 204373313 U CN204373313 U CN 204373313U
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argon
tower
nitrogen
liquid
column
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CN201420657809.7U
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Chinese (zh)
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顾燕新
郑达海
彭旭东
朱云峰
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Hangzhou Hangyang Co Ltd
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Hangzhou Hangyang Co Ltd
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Abstract

A kind of argon gas of double tower coupling reclaims purifier apparatus, described equipment mainly comprises an ice chest, one main heat exchanger, low-temperature fractionating tower and liquid argon pump, in described ice chest, main heat exchanger and low-temperature fractionating tower are at least installed, described low-temperature fractionating tower is the double tower coupled structure be made up of Shang Ta and lower tower, wherein go up that tower is argon column, lower tower is nitrogen tower, the top of described argon column arranges condenser; Described method is: crude argon enters main heat exchanger cooling liquid in ice chest, throttling enters the argon column in the low-temperature fractionating tower of argon column nitrogen tower double tower coupling again, in argon column, make argon gas and nitrogen hydrogen produce rectifying be separated, bottom argon column, obtain pure liquid argon, pure liquid argon obtains pure argon product after the re-heat of liquid argon pump supercharging main heat exchanger; It is high that it has the argon gas rate of recovery, and reclaim purity of argon high, impurity oxygen Gas content is low, reclaim purifying energy consumption low, the feature such as nitrogen byproduct and oxygen-enriched air byproduct can be obtained.

Description

A kind of argon gas of double tower coupling reclaims purifier apparatus
Technical field
The utility model relates to a kind of argon gas being mainly used in the double tower coupling of argon gas recovery purifying in monocrystalline silicon production and reclaim purifier apparatus.
Background technology
Vertical pulling method (Czochralski method) is the main method of manufacture order crystal silicon, and the monocrystalline silicon in the whole world 70% ~ 80% is produced by vertical pulling method.The most frequently used vertical pulling method produce single crystal silicon technology adopts not only picture vacuum technology but also the decompression crystal pulling technique as flowing atmosphere technique; Decompression technique is in silicon single crystal pulling process, continuous constant speed ground passes into high purity argon in single crystal growing furnace burner hearth, vavuum pump is constantly from the outside pump Argon of burner hearth simultaneously, vacustat in burner hearth is kept to hold in the palm left and right 20, the feature of the existing vacuum technology of this technique, has again the feature of flowing atmosphere technique.The vavuum pump of decompression crystal pulling technique generally adopts slide valve pump, and slide valve pump is the oil-sealed rotary pump keeping sealing with oil.Argon gas carries the Si oxide and impurity volatile matter that produce due to high temperature in crystal-pulling process, and is discharged into air by pumping of vavuum pump.
By the analysis to discharge argon gas, major impurity composition is, the alkane such as oxygen, nitrogen, carbon monoxide, carbon dioxide, methane, liquid lubricant mist; Recycle this part argon gas and have very large realistic meaning.
Argon gas reclaims the known technology of purifying: carry out thick oil removing to the argon gas reclaimed from single crystal growing furnace, then high accuracy oil removing dedusting after compressed cooling; Then made by high-temperature catalytic the hydro carbons such as methane and carbon monoxide produce water and carbon dioxide with oxygen reaction, in catalytic reaction, ensure oxygen excessive (impurity oxygen not then adds oxygen); By making excessive oxygen generate water with the hydrogen reaction added after cooling under catalyst action, and ensure that reaction hydrogen is excessive, after process, in argon gas, impurity component is water, carbon dioxide, hydrogen and nitrogen; Eventually pass argon gas normal temperature absorbing unit adsorbed water and carbon dioxide, obtain being only the crude argon of impurity containing nitrogen and hydrogen.Argon gas normal temperature absorbing unit is made up of two absorbers, and the adsorbent of adsorbed water and carbon dioxide is housed in absorber, and an absorber carries out absorption work, and another absorber carries out comprising pressure release, heats, the reproduction operation of blast-cold.The gas of described reproduction operation uses nitrogen, and this regeneration nitrogen is produced or outsourcing from low-temperature fractionating tower in ice chest, and argon gas normal temperature absorbing unit is switched by program timer auto-controll operation.
Summary of the invention
It is high that the purpose of this utility model is to provide a kind of argon gas rate of recovery, recovery purity of argon is high, oxygen content is low, reclaims purifying energy consumption low, is particularly suitable for large-scale monocrystalline silicon production enterprise and carries out the argon gas recovery purifier apparatus that a large amount of argon gas reclaims the double tower coupling of purifying recycling.
The purpose of this utility model has been come by following technical solution, a kind of argon gas of double tower coupling reclaims purifier apparatus, this equipment mainly comprises an ice chest, one main heat exchanger, low-temperature fractionating tower and liquid argon pump, in described ice chest, main heat exchanger and low-temperature fractionating tower are at least installed, described low-temperature fractionating tower is the double tower coupled structure be made up of Shang Ta and lower tower, wherein goes up that tower is argon column, lower tower is nitrogen tower, is middlely coupled by condenser/evaporator; The top of described argon column arranges condenser, and described argon column is a upper rectifying column that the crude argon rectifying entering this tower can be separated into liquid argon and rectifying waste gas; And described nitrogen tower is one air separation can be gone out nitrogen and make a part of nitrogen as byproduct, another part is used for the lower rectifying column of argon gas normal temperature absorbing unit regeneration.
Condenser/evaporator between argon column described in the utility model and nitrogen tower is coupled to form by as the evaporimeter bottom argon column with as the condenser of nitrogen top of tower, thermal source is wherein the source nitrogen from nitrogen tower, low-temperature receiver is the liquid argon source from argon column, source nitrogen is in intermediate condensation, and liquid argon evaporates in outside; The thermal source of the condenser that described argon column top is arranged is the upflowing vapor from argon column, and low-temperature receiver is the throttling oxygen-enriched liquid air from nitrogen tower bottom, and wherein upflowing vapor is in the intermediate condensation of condenser, and throttling oxygen-enriched liquid air evaporates in the outside of condenser; Described liquid argon pump is also installed in ice chest, and the liquid argon products export bottom described argon column connects described liquid argon pump and carries out supercharging, and by the main heat exchanger re-heat in ice chest to normal temperature access user argon gas pipe network.
At least be provided with in main heat exchanger described in the utility model:
One crude argon cooling liquid passage, the import of this passage connects the crude argon inlet pipe entering ice chest, and outlet connection one choke valve accesses argon column again;
One pressure-air cooling passage, the import of this passage connects the compressed air inlet pipe entering ice chest, outlet access nitrogen tower;
One nitrogen re-heat passage, the import of this passage is connected to the nitrogen outlet of nitrogen top of tower, and the outlet of passage picks out ice chest by nitrogen tube;
An oxygen enrichment re-heat passage, the import of this passage is communicated with oxygen-enriched liquid air outlet and the oxygen-rich steam outlet at argon column top respectively, and the outlet of passage picks out ice chest by oxygen enrichment tube connector; Or have two oxygen enrichment re-heat passages, the import of these two passages is communicated with oxygen-enriched liquid air outlet and the oxygen-rich steam outlet at argon column top respectively, and the outlet of two passages picks out ice chest respectively by oxygen enrichment tube connector.
The argon gas utilizing above-mentioned double tower to be coupled reclaims purifier apparatus and carries out the method that argon gas reclaims purifying, and the method that described argon gas reclaims purifying comprises:
A) cooling of crude argon, first adopt known technology to produce only containing the crude argon of nitrogen hydrogen, crude argon 101 enters ice chest B1, then to enter main heat exchanger E1 cooling liquid be liquid argon 102; Liquid argon 102 enters argon column T1 and carries out rectifying separation after choke valve 103 throttling;
B) crude argon rectifying, crude argon carries out rectifying separation according to the characteristic that component boiling point is different in argon column T1, obtains liquid argon product 106 bottom argon column T1, discharges rectifying waste gas 112 at argon column T1 top; The condenser E3 condensation upflowing vapor 104 at argon column T1 top, the liquid 111 of condensation is as the phegma of argon column T1, and not solidifying gas is rectifying waste gas 112, and this rectifying waste gas 112 is extracted out from condenser E3 condensation side; Phegma 111 and the liquid that obtains through choke valve 103 throttling liquid argon 102 to decline liquid as rectifying, decline liquid carries out heat and mass with the upflowing vapor counter current contacting of evaporating from condenser/evaporator E2 bottom argon column T1, thus under flow to bottom argon column T1 and obtain liquid argon, upflowing vapor rises and to converge and gas that choke valve 103 throttling liquid argon 102 of hanging oneself obtains finally becomes upflowing vapor 104 at the bottom of tower; Bottom argon column T1, a part for liquid argon is discharged as product liquid argon 106, and another part is condensed evaporimeter E2 evaporation as upflowing vapor;
C) the producing of argon gas product, product liquid argon 106 is pressurized to the liquid argon 108 of user's argon gas ductwork pressure through liquid argon pump 107, and liquid argon 108 enters main heat exchanger E1 re-heat to be become the real argon gas 109 reclaiming purifying to normal temperature and enter user's argon gas pipe network; In product liquid argon 106, oxygen content general control is at below 2PPm, and the mole of product liquid argon 106 can reach more than 92% of argon mole in crude argon 101.
Method described in the utility model also comprises:
D is through the compressed air 121 of impurity such as removing moisture content and carbon dioxide etc., enter ice chest B1, enter main heat exchanger E1 cooling again and become Cryogenic air 122, Cryogenic air 122 can be that gas also can contain a small amount of liquid entirely, Cryogenic air 122 enters low-temperature fractionating tower nitrogen tower T2, wherein gas fraction is as the upflowing vapor of nitrogen tower T2, and liquid part flows to the tower reactor at the bottom of tower; Upflowing vapor is with carrying out heat and mass from the phegma counter current contacting under overhead streams, obtain nitrogen 123 at nitrogen tower T2 top and enter condenser/evaporator E2 nitrogen 124, nitrogen 124 is condensed into liquid part as nitrogen tower liquid nitrogen reflux liquid 126 in condenser/evaporator E2, solidifying portion gas is that fixed gas 127 is extracted condenser/evaporator E2 out and discharged, and the discharge capacity of fixed gas 127 is generally less than 1% of compressed air 121; Liquid nitrogen reflux liquid 126 in nitrogen tower T2 to dirty, through flow to the heat and mass of upflowing vapor in the tower reactor at the bottom of nitrogen tower T2 tower with Cryogenic air 122 in flow to tower reactor liquid joint become oxygen-enriched liquid air 128 and extract out.
Nitrogen 123 described in the utility model obtains byproduct nitrogen 125 through main heat exchanger E1 re-heat to normal temperature, and this nitrogen 125 part is as the regeneration nitrogen of argon gas normal temperature absorbing unit, and all the other can be used as plant protection gas and use;
Described oxygen-enriched liquid air 128 enters argon column condenser E3 after choke valve 129, as the upflowing vapor 104 of low-temperature receiver condensation from argon column T1 in condenser E3, self overwhelming majority is vaporizated into oxygen-rich steam 130, does not have evaporation section to discharge as oxygen-enriched liquid air 131 bottom condenser E3; The discharge effect of oxygen-enriched liquid air 131 is a small amount of CH preventing from containing in oxygen-enriched liquid air 128 4gathering at condenser E3 with heavy components such as nitrous oxides thus cause dangerous hidden danger, the discharge capacity of oxygen-enriched liquid air 131 is generally about 1% ~ 3% of oxygen-enriched liquid air 128 total amount; Converge after described oxygen-enriched liquid air 131 and oxygen-rich steam 130 go out condenser E3 and enter main heat exchanger E1 re-heat and become normal temperature oxygen-enriched air 133 to normal temperature; Or oxygen-enriched liquid air 131 and oxygen-rich steam 130 enter main heat exchanger E1 respectively, go out main heat exchanger E1 respectively; Oxygen-enriched air 133, as the regeneration gas of air normal temperature absorbing unit, also can be used for the place needing oxygen-enriched combusting.
The fresh liquid argon 105 of supplementary rectifying institute chilling requirement directly can be passed into bottom argon column T1 described in the utility model, then discharge argon column T1 with the liquid argon product reclaimed and become liquid argon product 106, fresh liquid argon 105 also can add in liquid argon 108 after liquid argon pump 107, or described fresh liquid argon 105 directly enters after main heat exchanger E1 carries out re-heat to enter separately argon gas pipe network separately.
The utility model first uses known technology to produce the crude argon only containing hydrogen nitrogen, then the utility model is used to carry out being separated of argon gas and nitrogen hydrogen, the crude argon using known technology to produce enters main heat exchanger cooling liquid in ice chest, enter low-temperature fractionating tower, make argon gas and nitrogen hydrogen produce rectifying to be separated, obtain pure liquid argon, liquid argon obtains straight argon product after the re-heat of liquid argon pump supercharging main heat exchanger; The argon gas rate of recovery of the utility model argon gas retracting device can reach 92% even higher, and fresh liquid argon can supplement cryogenic rectification cold while supplementing argon gas waste, so just do not need additionally to arrange refrigeration plant as decompressor etc., thus simple flow and minimizing investment.
It is high that the utility model has the argon gas rate of recovery, and reclaim purity of argon high, oxygen content is low, reclaims purifying energy consumption low, is particularly suitable for large-scale monocrystalline silicon production enterprise and carries out the features such as a large amount of argon gas recovery purifying recycling.
Accompanying drawing explanation
Fig. 1 is the structure explanation schematic flow sheet that argon gas described in the utility model reclaims purification devices.
Detailed description of the invention
Be described in detail the utility model below in conjunction with accompanying drawing: shown in Fig. 1, the argon gas of a kind of double tower coupling described in the utility model reclaims purifier apparatus, and this equipment mainly comprises an ice chest B1, a main heat exchanger E1, low-temperature fractionating tower and liquid argon pump 107.
Ice chest purposes is for Cryo Equipment pipeline provides a cold insulated cabinet, and equipment pipe is arranged in the full pearlife of middle rear filling, thus minimizing medium apparatus pipeline transmits cold in environment.The placement of liquid argon pump can be placed in ice chest and also can be placed on outside ice chest, and being placed on ice chest then needs outward to adopt vacuum tube heat insulation.
In described ice chest B1, main heat exchanger E1 and low-temperature fractionating tower are at least installed, described low-temperature fractionating tower is the double tower coupled structure be made up of Shang Ta and lower tower, wherein go up that tower is argon column T1, lower tower is nitrogen tower T2, centre is coupled by condenser/evaporator E2, it can save energy consumption, saves space; The top of described argon column T1 arranges condenser E3, and described argon column T1 is a upper rectifying column that the crude argon rectifying entering this tower can be separated into liquid argon and rectifying waste gas; And air separation one can be gone out nitrogen and make a part of nitrogen as byproduct by described nitrogen tower T2, another part is used for the lower rectifying column of argon gas normal temperature absorbing unit regeneration.
Condenser/evaporator E2 between described argon column T1 and nitrogen tower T2 is coupled to form by as the evaporimeter bottom argon column T1 with as the condenser at nitrogen tower T2 top, thermal source is wherein the source nitrogen from nitrogen tower T2, low-temperature receiver is the liquid argon source from argon column T1, source nitrogen is in intermediate condensation, and liquid argon evaporates in outside; The thermal source of the condenser that described argon column top is arranged is the upflowing vapor from argon column, and low-temperature receiver is the throttling oxygen-enriched liquid air from nitrogen tower bottom, and wherein upflowing vapor is in the intermediate condensation of condenser, and throttling oxygen-enriched liquid air evaporates in the outside of condenser; Described liquid argon pump 107 is also installed in ice chest B1, and the liquid argon products export bottom described argon column T1 connects described liquid argon pump 107 and carries out supercharging, and by the main heat exchanger re-heat in ice chest B1 to normal temperature access user argon gas pipe network.
At least be provided with in main heat exchanger E1 described in the utility model:
One crude argon cooling liquid passage 1, the import of this passage connects crude argon 101 inlet pipe entering ice chest B1, and outlet connection one choke valve 103 accesses argon column T1 again;
One pressure-air cooling passage 2, the import of this passage connects compressed air 121 inlet pipe entering ice chest B1, outlet access nitrogen tower T2;
One nitrogen re-heat passage 3, the import connection of this passage and the nitrogen outlet at nitrogen tower T2 top, the outlet of passage picks out ice chest B1 by nitrogen tube;
An oxygen enrichment re-heat passage 4, the import of this passage is communicated with oxygen-enriched liquid air outlet and the oxygen-rich steam outlet at argon column T1 top respectively, and the outlet of passage picks out ice chest B1 by oxygen enrichment tube connector; Or have two oxygen enrichment re-heat passages, the import of these two passages is communicated with oxygen-enriched liquid air outlet and the oxygen-rich steam outlet at argon column top respectively, and the outlet of two passages picks out ice chest respectively by oxygen enrichment tube connector.
The argon gas utilizing described double tower to be coupled reclaims purifier apparatus and carries out the method that argon gas reclaims purifying, and the method that described argon gas reclaims purifying comprises:
A) cooling of crude argon, first adopt known technology to produce only containing the crude argon of nitrogen hydrogen, crude argon 101 enters ice chest B1, then to enter main heat exchanger E1 cooling liquid be liquid argon 102; Liquid argon 102 enters argon column T1 and carries out rectifying separation after choke valve 103 throttling;
B) crude argon rectifying, crude argon carries out rectifying separation according to the characteristic that component boiling point is different in argon column T1, obtains liquid argon product 106 bottom argon column T1, discharges rectifying waste gas 112 at argon column T1 top; The condenser E3 condensation upflowing vapor 104 at argon column T1 top, the liquid 111 of condensation is as the phegma of argon column T1, and not solidifying gas is rectifying waste gas 112, and this rectifying waste gas 112 is extracted out from condenser E3 condensation side; Phegma 111 and the liquid that obtains through choke valve 103 throttling liquid argon 102 to decline liquid as rectifying, decline liquid carries out heat and mass with the upflowing vapor counter current contacting of evaporating from condenser/evaporator E2 bottom argon column T1, thus under flow to bottom argon column T1 and obtain liquid argon, upflowing vapor rises and to converge and gas that choke valve 103 throttling liquid argon 102 of hanging oneself obtains finally becomes upflowing vapor 104 at the bottom of tower; Bottom argon column T1, a part for liquid argon is discharged as product liquid argon 106, and another part is condensed evaporimeter E2 evaporation as upflowing vapor;
C) the producing of argon gas product, product liquid argon 106 is pressurized to the liquid argon 108 of user's argon gas ductwork pressure through liquid argon pump 107, and liquid argon 108 enters main heat exchanger E1 re-heat to be become the real argon gas 109 reclaiming purifying to normal temperature and enter user's argon gas pipe network; In product liquid argon 106, oxygen content general control is at below 2PPm, and the mole of product liquid argon 106 can reach more than 92% of argon mole in crude argon 101.
Shown in Fig. 1, the main component of rectifying waste gas 112 is nitrogen, hydrogen and argon gas, the rate of recovery of argon in how many direct reflection crude argons 101 of this portion gas amount.
Method described in the utility model also comprises:
Through the compressed air 121 of impurity such as removing moisture content and carbon dioxide etc., enter ice chest B1, enter main heat exchanger E1 cooling again and become Cryogenic air 122, Cryogenic air 122 can be that gas also can contain a small amount of liquid entirely, Cryogenic air 122 enters low-temperature fractionating tower nitrogen tower T2, wherein gas fraction is as the upflowing vapor of nitrogen tower T2, and liquid part flows to the tower reactor at the bottom of tower; Upflowing vapor is with carrying out heat and mass from the phegma counter current contacting under overhead streams, obtain nitrogen 123 at nitrogen tower T2 top and enter condenser/evaporator E2 nitrogen 124, nitrogen 124 is condensed into liquid part as nitrogen tower liquid nitrogen reflux liquid 126 in condenser/evaporator E2, solidifying portion gas is that fixed gas 127 is extracted condenser/evaporator E2 out and discharged, and the discharge capacity of fixed gas 127 is generally less than 1% of compressed air 121; Liquid nitrogen reflux liquid 126 in nitrogen tower T2 to dirty, through flow to the heat and mass of upflowing vapor in the tower reactor at the bottom of nitrogen tower T2 tower with Cryogenic air 122 in flow to tower reactor liquid joint become oxygen-enriched liquid air 128 and extract out.
Described nitrogen 123 obtains byproduct nitrogen 125 through main heat exchanger E1 re-heat to normal temperature, and this nitrogen 125 part is as the regeneration nitrogen of argon gas normal temperature absorbing unit, and all the other can be used as plant protection gas and use;
Described oxygen-enriched liquid air 128 enters argon column condenser E3 after choke valve 129, as the upflowing vapor 104 of low-temperature receiver condensation from argon column T1 in condenser E3, self overwhelming majority is vaporizated into oxygen-rich steam 130, does not have evaporation section to discharge as oxygen-enriched liquid air 131 bottom condenser E3; The discharge effect of oxygen-enriched liquid air 131 is a small amount of CH preventing from containing in oxygen-enriched liquid air 128 4gathering at condenser E3 with heavy components such as nitrous oxides thus cause dangerous hidden danger, the discharge capacity of oxygen-enriched liquid air 131 is generally about 1% ~ 3% of oxygen-enriched liquid air 128 total amount; Converge after described oxygen-enriched liquid air 131 and oxygen-rich steam 130 go out condenser E3 and enter main heat exchanger E1 re-heat and become normal temperature oxygen-enriched air 133 to normal temperature; Or oxygen-enriched liquid air 131 and oxygen-rich steam 130 enter main heat exchanger E1 respectively, go out main heat exchanger E1 respectively; Oxygen-enriched air 133, as the regeneration gas of air normal temperature absorbing unit, also can be used for the place needing oxygen-enriched combusting.
The fresh liquid argon 105 of supplementary rectifying institute chilling requirement directly can be passed into bottom argon column T1 described in the utility model, then discharge argon column T1 with the liquid argon product reclaimed and become liquid argon product 106, fresh liquid argon 105 also can add in liquid argon 108 after liquid argon pump 107, or described fresh liquid argon 105 directly enters after main heat exchanger E1 carries out re-heat to enter separately argon gas pipe network separately.
The utility model cryogenic rectification adopts double tower coupled structure, upper tower is argon column, and lower tower is nitrogen tower, and centre is coupled together by condenser/evaporator, rectifying institute chilling requirement provides by supplementing fresh liquid argon, while recovery purifying argon gas, produce nitrogen byproduct and oxygen-enriched air byproduct.
embodiment:
Reclaim in purifying project at the argon gas designed for certain monocrystalline silicon production enterprise, the amount of crude argon 101 is 960Nm 3/ H, argon molar content ~ 97% in crude argon 101, nitrogen and hydrogen molar content ~ 3%, argon mole is ~ 931.2 Nm 3/ H.Product liquid argon 106 output 927 Nm 3/ H, oxygen content 1.5PPm, nitrogen content 3PPm.Fresh liquid argon 127 directly passes into bottom argon column, and fresh liquid argon 127 magnitude of recruitment is 60Nm 3/ H, the argon gas amount reclaimed from crude argon is 867 Nm 3/ H.The rate of recovery of argon gas is 93.1%, and the supplementary rate of fresh liquid argon is 6.25% of crude argon.The amount of compressed air 121 is 1250 Nm 3/ H, the output of nitrogen 123 is 230 Nm 3/ H.
Utilize the utility model argon gas organic efficiency to reach more than 92%, purity of argon is 1.5PPm oxygen and 3PPm nitrogen, and it is simple that rectifying cold adopts fresh liquid argon to supplement without the need to the low system of extra refrigeration plant energy consumption, and can produce nitrogen byproduct and secondary oxygen air byproduct.

Claims (3)

1. the argon gas of a double tower coupling reclaims purifier apparatus, this equipment mainly comprises an ice chest, one main heat exchanger, low-temperature fractionating tower and liquid argon pump, it is characterized in that, in described ice chest, main heat exchanger and low-temperature fractionating tower are at least installed, described low-temperature fractionating tower is the double tower coupled structure be made up of Shang Ta and lower tower, wherein go up that tower is argon column, lower tower is nitrogen tower, to be middlely coupled by condenser/evaporator; The top of described argon column arranges condenser, and described argon column is a upper rectifying column that the crude argon rectifying entering this tower can be separated into liquid argon and rectifying waste gas; And described nitrogen tower is one air separation can be gone out nitrogen and make a part of nitrogen as byproduct, another part is used for the lower rectifying column of argon gas normal temperature absorbing unit regeneration.
2. the argon gas of double tower coupling according to claim 1 reclaims purifier apparatus, it is characterized in that the condenser/evaporator between described argon column and nitrogen tower is coupled to form by as the evaporimeter bottom argon column with as the condenser of nitrogen top of tower, thermal source is wherein the source nitrogen from nitrogen tower, low-temperature receiver is the liquid argon source from argon column, source nitrogen is in intermediate condensation, and liquid argon evaporates in outside; The thermal source of the condenser that described argon column top is arranged is the upflowing vapor from argon column, and low-temperature receiver is the throttling oxygen-enriched liquid air from nitrogen tower bottom, and wherein upflowing vapor is in the intermediate condensation of condenser, and throttling oxygen-enriched liquid air evaporates in the outside of condenser; Described liquid argon pump is also installed in ice chest, and the liquid argon products export bottom described argon column connects described liquid argon pump and carries out supercharging, and by the main heat exchanger re-heat in ice chest to normal temperature access user argon gas pipe network.
3. the argon gas of double tower coupling according to claim 1 and 2 reclaims purifier apparatus, it is characterized in that at least being provided with in main heat exchanger:
One crude argon cooling liquid passage, the import of this passage connects the crude argon inlet pipe entering ice chest, and outlet connection one choke valve accesses argon column again;
One pressure-air cooling passage, the import of this passage connects the compressed air inlet pipe entering ice chest, outlet access nitrogen tower;
One nitrogen re-heat passage, the import of this passage is connected to the nitrogen outlet of nitrogen top of tower, and the outlet of passage picks out ice chest by nitrogen tube;
An oxygen enrichment re-heat passage, the import of this passage is communicated with oxygen-enriched liquid air outlet and the oxygen-rich steam outlet at argon column top respectively, and the outlet of passage picks out ice chest by oxygen enrichment tube connector; Or have two oxygen enrichment re-heat passages, the import of these two passages is communicated with oxygen-enriched liquid air outlet and the oxygen-rich steam outlet at argon column top respectively, and the outlet of two passages picks out ice chest respectively by oxygen enrichment tube connector.
CN201420657809.7U 2014-11-06 2014-11-06 A kind of argon gas of double tower coupling reclaims purifier apparatus Withdrawn - After Issue CN204373313U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406364A (en) * 2014-11-06 2015-03-11 杭州杭氧股份有限公司 Double-tower coupling type argon recovery and purifying equipment and argon recovery and purifying method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406364A (en) * 2014-11-06 2015-03-11 杭州杭氧股份有限公司 Double-tower coupling type argon recovery and purifying equipment and argon recovery and purifying method

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