CN220823342U - Secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing - Google Patents
Secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing Download PDFInfo
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- CN220823342U CN220823342U CN202322470157.8U CN202322470157U CN220823342U CN 220823342 U CN220823342 U CN 220823342U CN 202322470157 U CN202322470157 U CN 202322470157U CN 220823342 U CN220823342 U CN 220823342U
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- air knife
- quartz boat
- ion air
- static electricity
- removing device
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- 239000010453 quartz Substances 0.000 title claims abstract description 65
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 230000003068 static effect Effects 0.000 title claims abstract description 46
- 230000005611 electricity Effects 0.000 title claims abstract description 38
- 238000009792 diffusion process Methods 0.000 claims abstract description 9
- 238000013519 translation Methods 0.000 claims description 14
- 235000012431 wafers Nutrition 0.000 abstract description 41
- 229910052710 silicon Inorganic materials 0.000 abstract description 38
- 239000010703 silicon Substances 0.000 abstract description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 37
- 238000007664 blowing Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000001179 sorption measurement Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 description 8
- 238000009434 installation Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a secondary air knife static electricity removing device for dividing double-piece battery pieces of a quartz boat, which relates to the technical field of photovoltaic battery piece production and is arranged at the outer side of a quartz boat outlet conveying mechanism in a photovoltaic battery piece diffusion process; comprising the following steps: a first ion air knife and a second ion air knife; the first ion air knife and the second ion air knife are sequentially arranged along the conveying direction of the quartz boat outlet conveying mechanism; the arrangement height of the first ion air knife corresponds to the conveying height of the quartz boat, and the arrangement height of the second ion air knife is located above the conveying height of the quartz boat and corresponds to the fetching height of the fetching manipulator. According to the utility model, the first-pass static-removing blowing operation is performed on the silicon wafers on the transported quartz boat through the first ion air knife, and then the second-pass static-removing blowing operation is performed on the fetched silicon wafers through the second ion air knife when the mechanical arm fetches the workpieces, and the two operations are sequentially performed, so that the problem that the silicon wafers are not easy to separate due to static adsorption can be greatly reduced.
Description
Technical Field
The utility model relates to the technical field of photovoltaic cell production, in particular to a diffusion process in a cell production process, and more particularly relates to a secondary air knife static electricity removing device for quartz boat double-piece cell slicing.
Background
Diffusion in the solar panel production process refers to: the process for preparing PN junction on two sides of silicon wafer by chemical reaction is one of the most important procedures in the production process of photovoltaic cell; the quartz boat is a jig used in the diffusion process, and is generally divided into 100 grooves, but as the corresponding basket is composed of two groups of modules with 50 grooves, 2 silicon wafers are placed back to back in each groove of the quartz boat, namely 200 silicon wafers can be diffused by one quartz boat at a time; before the diffusion process is performed, 200 wafers need to be loaded into a quartz boat. The general outline structure of the existing quartz boat is shown in fig. 1, and the existing photovoltaic silicon wafer production line gradually tends to be fully automated, and the taking of the silicon wafer can be realized by a sucker type manipulator.
Because 2 silicon wafers are placed back to back in each groove of the quartz boat, when a piece is taken out, the sucker type mechanical arm stretches in from two sides of each groove and is attached to the outer sides of the 2 silicon wafers placed back to back, as shown in fig. 2, and then the 2 silicon wafers are taken out by means of respective suction and then are separately transported, as shown in fig. 3.
However, in the above workpiece taking process, 2 silicon wafers are easy to generate larger adsorption force due to static electricity, so that the sucking disc type manipulators on two sides can be affected by static electricity adsorption during workpiece taking, and then 2 silicon wafers cannot be separated, and the manipulator can seriously affect the production efficiency if the manipulator fails to take the workpiece, such as falling of the silicon wafers and fragments.
Therefore, how to provide an auxiliary device for picking up a wafer by a manipulator after a diffusion process, which can effectively eliminate the electrostatic adsorption effect between silicon wafers, is a problem to be solved by those skilled in the art.
Disclosure of utility model
In view of the above, the present utility model provides a secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, which aims to solve the above technical problems.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
The secondary air knife static electricity removing device for the double-piece battery piece of the quartz boat is arranged at the outer side of a quartz boat outlet conveying mechanism in the photovoltaic cell piece diffusion process; comprising the following steps: a first ion air knife and a second ion air knife; the first ion air knife and the second ion air knife are sequentially arranged along the conveying direction of the quartz boat outlet conveying mechanism; the arrangement height of the first ion air knife corresponds to the conveying height of the quartz boat, and the arrangement height of the second ion air knife is located above the conveying height of the quartz boat and corresponds to the fetching height of the fetching manipulator.
According to the technical scheme, in order to solve the problem that silicon wafers are not easy to separate when the silicon wafers are picked up due to electrostatic adsorption in the existing production line body, the ion air knife structure is arranged to remove static, in order to ensure the static removal effect, the first ion air knife is used for carrying out first static removal blowing operation on the silicon wafers on the transported quartz boat, and then the second ion air knife is used for carrying out second static removal blowing operation on the picked silicon wafers when the mechanical arm picks up the workpieces, the two operations are carried out sequentially, the problem that the silicon wafers are not easy to separate due to electrostatic adsorption can be greatly reduced, and the structure is simple in layout, high in use efficiency and easy to popularize and install.
Preferably, in the secondary air knife static electricity removing device for dividing the double-piece battery piece of the quartz boat, a mounting frame is arranged on the outer side of the quartz boat outlet conveying mechanism, and the first ion air knife and the second ion air knife are connected to the mounting frame. The installation that sets up the mounting bracket can be convenient for first ion air knife and second ion air knife is fixed, can carry out the installation fixedly of adaptability according to the running position of quartz boat and the getting position of manipulator.
Preferably, in the secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, the first ion air knife is fixed on the mounting frame through bolts. The first ion air knife is directly fixed through bolt installation, and because the quartz boat just goes out of the furnace body, the quartz boat is conveyed on the conveying belt, dynamic and static matching can be realized, and the silicon wafer on the quartz boat is subjected to primary static removal in the advancing process of the quartz boat.
Preferably, in the secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, the mounting frame is connected with a transverse translation driving mechanism, and the second ion air knife is connected with a translation end of the transverse translation driving mechanism. After the quartz boat is parked in place, the silicon wafers on the quartz boat need to be sequentially fetched by the fetching manipulator, so that the second ion air knife needs to be driven by the transverse translation driving structure to move along with the manipulator.
Preferably, in the secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, the transverse translation driving mechanism comprises a track beam, a sliding block, a driving motor and a screw rod; the track cross beam is horizontally fixed on the mounting frame; the sliding block is connected to the track cross beam in a sliding way, and the second ion air knife is connected to the sliding block; the driving motor is fixed on the mounting frame; one end of the screw rod is connected with the power output end of the driving motor through a coupling, the other end of the screw rod is rotationally connected with the mounting frame, and the screw rod penetrates through the sliding block and is in threaded connection with the sliding block. The screw rod sliding block structure is adopted for driving, so that the screw rod sliding block structure is simple in structure, stable in driving and high in reliability.
Preferably, in the secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, a hydraulic cylinder is fixed on the sliding block, the expansion direction of the hydraulic cylinder is perpendicular to the screw rod, and the second ion air knife is connected to the expansion end of the hydraulic cylinder. In order to further improve the static electricity removing effect, the utility model is provided with the hydraulic cylinder pushing structure, so that the second ion air knife can be gradually close to the silicon wafer in the air blowing process, the position deviation of the silicon wafer caused by overlarge wind force is prevented, and the static electricity removing effect is more stable and reliable.
Preferably, in the secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, the telescopic end of the hydraulic cylinder is fixed with a mounting plate, and the second ion air knife is fixed on the mounting plate through a screw. The installation board is arranged to be convenient for the installation and fixation of the second ion air knife.
Preferably, in the secondary air knife static electricity removing device for dividing the double-piece battery piece of the quartz boat, the mounting plate is provided with a plurality of mounting holes. The position of the second ion air knife can be installed and fixed according to different position demands by the aid of the plurality of installation holes.
Preferably, in the above two-stage air knife static electricity removing device for quartz boat double-piece battery piece slicing, the number of the first ion air knives and/or the second ion air knives is plural. The development size of the silicon wafer is gradually changed, so that the number of the air knives can be adaptively designed according to the requirements, and the static electricity removing effect of the air knives can be met.
Compared with the prior art, the utility model discloses the two-stage air knife static electricity removing device for dividing the quartz boat double-piece battery piece, which has the following beneficial effects:
1. The utility model solves the problem that the silicon wafer is not easy to separate when the silicon wafer is taken out due to electrostatic adsorption in the prior art, can greatly reduce the obstacle of the silicon wafer not easy to separate due to electrostatic adsorption, has simple structural layout, is efficient to use and is easy to popularize and install.
2. According to the utility model, the first-pass static-removing blowing operation is performed on the silicon wafers on the transported quartz boat through the first ion air knife, and then the second-pass static-removing blowing operation is performed on the silicon wafers taken through the second ion air knife when the mechanical arm takes the silicon wafers, and the two operations are sequentially performed, so that the static removing effect is ensured.
3. According to the utility model, the mechanical arm is driven to act by virtue of the transverse translation driving structure, the hydraulic cylinder pushes the structure to enable the second ion air knife to gradually approach the silicon wafer in the blowing process, so that the position deviation of the silicon wafer caused by overlarge wind force is prevented, and the static electricity removing effect is more stable and reliable.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present utility model, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a prior art quartz boat;
FIG. 2 is a schematic diagram of 2 wafers placed back-to-back in the prior art with the robot contacting;
FIG. 3 is a schematic diagram of 2 wafers placed back-to-back in the prior art with the robot separated;
fig. 4 is a schematic front view of a secondary air knife static electricity removing device according to embodiment 1 of the present utility model;
FIG. 5 is a schematic diagram showing the back structure of the secondary air knife static electricity removing device according to embodiment 1 of the present utility model;
FIG. 6 is a schematic diagram showing the installation structure of a second ion air knife according to embodiment 1 of the present utility model;
Fig. 7 is a schematic diagram of the front structure of the secondary air knife static electricity removing device in embodiment 2 according to the present utility model.
Wherein:
1-a first ion air knife;
2-a second ion air knife;
3-mounting rack;
4-a lateral translational drive mechanism;
41-track cross beam; 42-sliding blocks; 43-driving a motor; 44-screw rod; 45-hydraulic cylinder; 46-mounting plates; 461-mounting holes;
5-quartz boat;
6-silicon wafer;
7-a manipulator.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1:
Referring to fig. 4, the embodiment of the utility model discloses a secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing, which is arranged at the outer side of a quartz boat outlet conveying mechanism of a photovoltaic cell piece diffusion process; comprising the following steps: a first ionic air knife 1 and a second ionic air knife 2; the first ion air knife 1 and the second ion air knife 2 are sequentially arranged along the conveying direction of the quartz boat outlet conveying mechanism; the arrangement height of the first ion air knife 1 corresponds to the conveying height of the quartz boat, and the arrangement height of the second ion air knife 2 is located above the conveying height of the quartz boat and corresponds to the picking height of the picking manipulator.
In order to further optimize the technical scheme, the outer side of the quartz boat outlet conveying mechanism is provided with a mounting frame 3, and the first ion air knife 1 and the second ion air knife 2 are connected to the mounting frame 3.
In order to further optimize the technical scheme, the first ion air knife 1 is fixed on the mounting frame 3 through bolts.
Referring to fig. 5, a transverse translation driving mechanism 4 is connected to the mounting frame 3, and the second ionic wind knife 2 is connected to a translation end of the transverse translation driving mechanism 4.
In order to further optimize the technical scheme, the transverse translation driving mechanism 4 comprises a track beam 41, a sliding block 42, a driving motor 43 and a screw rod 44; the track beam 41 is horizontally fixed on the mounting frame 3; the sliding block 42 is connected to the track beam 41 in a sliding way, and the second ion air knife 2 is connected to the sliding block 42; the driving motor 43 is fixed on the mounting frame 3; one end of a screw rod 44 is connected with a power output end of the driving motor 43 through a coupling, the other end of the screw rod 44 is rotatably connected with the mounting frame 3, and the screw rod 44 penetrates through the sliding block 42 and is in threaded connection with the sliding block 42.
Referring to fig. 6, a hydraulic cylinder 45 is fixed on the slider 42, the telescopic direction of the hydraulic cylinder 45 is perpendicular to the screw rod 44, and the second ionic wind knife 2 is connected to the telescopic end of the hydraulic cylinder 45.
In order to further optimize the technical scheme, a mounting plate 46 is fixed at the telescopic end of the hydraulic cylinder 45, and the second ion air knife 2 is fixed on the mounting plate 46 through screws.
In order to further optimize the above technical solution, a plurality of mounting holes 461 are formed in the mounting plate 46.
The working principle of the secondary air knife static electricity removing device provided by the embodiment is as follows:
When the quartz boat just leaves the furnace body, the quartz boat is conveyed on a conveyor belt, firstly, the first ion air knife 1 is used for carrying out first static electricity removing and blowing operation on the silicon wafers on the conveyed quartz boat, and then, when the mechanical arm is used for taking a piece, the second ion air knife 2 is used for carrying out second static electricity removing and blowing operation on the silicon wafers taken. The two operations are sequentially carried out, so that the problem that the silicon wafer is not easy to separate due to electrostatic adsorption can be greatly reduced.
Example 2:
Referring to fig. 7, this embodiment is different from embodiment 1 in that: the number of the second ion wind knives 2 is plural. Because the development size of the silicon chip is gradually changed, the number of the air knives is adaptively designed according to the requirements so as to meet the static electricity removing effect.
The principle of this embodiment is the same as that of embodiment 1, and the description thereof will be omitted.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. The secondary air knife static electricity removing device for the double-piece battery piece of the quartz boat is characterized by being arranged at the outer side of a quartz boat outlet conveying mechanism in a photovoltaic cell piece diffusion process; comprising the following steps: a first ion air knife (1) and a second ion air knife (2); the first ion air knife (1) and the second ion air knife (2) are sequentially arranged along the conveying direction of the quartz boat outlet conveying mechanism; the arrangement height of the first ion air knife (1) corresponds to the conveying height of the quartz boat, and the arrangement height of the second ion air knife (2) is located above the conveying height of the quartz boat and corresponds to the fetching height of the fetching manipulator.
2. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 1, wherein a mounting frame (3) is arranged on the outer side of the quartz boat outlet conveying mechanism, and the first ion air knife (1) and the second ion air knife (2) are connected to the mounting frame (3).
3. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 2, wherein the first ion air knife (1) is fixed on the mounting frame (3) through bolts.
4. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 2, wherein the mounting frame (3) is connected with a transverse translation driving mechanism (4), and the second ion air knife (2) is connected to the translation end of the transverse translation driving mechanism (4).
5. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 4, wherein the transverse translation driving mechanism (4) comprises a track cross beam (41), a sliding block (42), a driving motor (43) and a screw rod (44); the track cross beam (41) is horizontally fixed on the mounting frame (3); the sliding block (42) is connected to the track cross beam (41) in a sliding way, and the second ion air knife (2) is connected to the sliding block (42); the driving motor (43) is fixed on the mounting frame (3); one end of the screw rod (44) is connected with a power output end of the driving motor (43) through a coupler, the other end of the screw rod (44) is rotationally connected with the mounting frame (3), and the screw rod (44) penetrates through the sliding block (42) and is in threaded connection with the sliding block (42).
6. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 5, wherein a hydraulic cylinder (45) is fixed on the sliding block (42), the telescopic direction of the hydraulic cylinder (45) is perpendicular to the screw rod (44), and the second ion air knife (2) is connected to the telescopic end of the hydraulic cylinder (45).
7. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 6, wherein a mounting plate (46) is fixed at the telescopic end of the hydraulic cylinder (45), and the second ion air knife (2) is fixed on the mounting plate (46) through screws.
8. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to claim 7, wherein a plurality of mounting holes (461) are formed in the mounting plate (46).
9. The secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing according to any one of claims 1-8, wherein the number of the first ion air knives (1) and/or the second ion air knives (2) is a plurality.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322470157.8U CN220823342U (en) | 2023-09-12 | 2023-09-12 | Secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322470157.8U CN220823342U (en) | 2023-09-12 | 2023-09-12 | Secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220823342U true CN220823342U (en) | 2024-04-19 |
Family
ID=90674466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322470157.8U Active CN220823342U (en) | 2023-09-12 | 2023-09-12 | Secondary air knife static electricity removing device for quartz boat double-piece battery piece slicing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220823342U (en) |
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2023
- 2023-09-12 CN CN202322470157.8U patent/CN220823342U/en active Active
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