CN220812600U - Magnetron sputtering coating equipment - Google Patents
Magnetron sputtering coating equipment Download PDFInfo
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- CN220812600U CN220812600U CN202321799540.1U CN202321799540U CN220812600U CN 220812600 U CN220812600 U CN 220812600U CN 202321799540 U CN202321799540 U CN 202321799540U CN 220812600 U CN220812600 U CN 220812600U
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- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 25
- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 230000017525 heat dissipation Effects 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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Abstract
The utility model belongs to the technical field of magnetron sputtering, in particular to magnetron sputtering coating equipment, which aims at the problems that when the existing magnetron handle performs circular motion, the whole rotating device is driven to work only through the rotating connection of a movable block and a sliding block, the connecting part of the sliding block and the movable block is easy to damage and easy to separate when the magnetron handle is used for a long time, or the sliding block cannot move, so that the circular motion radius cannot be adjusted by the magnetron handle.
Description
Technical Field
The utility model relates to the technical field of magnetron sputtering, in particular to magnetron sputtering coating equipment.
Background
Currently, magnetron sputtering technology is a surface modification technology for experiments and production which has been widely used in the fields of physical science and material science. Magnetron sputtering coating is a technique of bombarding the surface of a target in vacuum by using charged particles, so that the bombarded particles deposit on a substrate.
Through searching, the patent with the bulletin number of CN110144558A discloses a magnetron sputtering coating device, which comprises a vacuum chamber, the inside lower extreme of vacuum chamber is equipped with the substrate platform, the upper end of substrate platform is equipped with the target holder, the upper end of target holder is equipped with fixing device, the inside upper end of vacuum chamber is equipped with rotary device, rotary device's lower extreme is equipped with the connecting piece, the one end of connecting piece is equipped with the magnetron target, wherein, rotary device includes the mount, the upper end of mount is connected with the inside upper end of vacuum chamber, be equipped with two sets of dead levers between the mount upper end, the cover is equipped with the slide on the dead lever, the top both sides of slide are interluded and are equipped with two sets of movable levers, and the one end of two sets of movable levers and one side fixed connection of connecting piece, the one end that two sets of movable levers kept away from the connecting piece is equipped with the movable block, the slider is located the inboard of spout, the slider is located the upper end of movable disk, lower extreme one side of movable disk is connected with the mount, the slider interlude is equipped with the lead screw with slider matched with.
However, the technical scheme has the following problems: when the magnetic control handle performs circular motion, the whole rotating device is driven to work only through the rotating connection of the movable block and the sliding block, when the magnetic control handle is used for a long time, the connecting part of the sliding block and the movable block is easily damaged, the sliding block and the movable block are easily separated, or the sliding block cannot move, so that the magnetic control handle cannot adjust the circular motion radius.
In view of the above, the present disclosure proposes a magnetron sputtering coating apparatus for solving the above-mentioned problems.
Disclosure of utility model
The utility model provides magnetron sputtering coating equipment, which solves the problems that in the prior art, when a magnetic control handle moves circularly, the whole rotating device is driven to work only through the rotating connection of a movable block and a sliding block, and when the magnetic control handle is used for a long time, the connecting part of the sliding block and the movable block is easily damaged, the sliding block is easily separated from the connecting part, or the sliding block cannot move, so that the radius of the circular movement cannot be adjusted by the magnetic control handle.
The utility model provides the following technical scheme:
a magnetron sputtering coating apparatus comprising:
The device comprises a vacuum chamber and a magnetic control target, wherein an observation port is formed in the front side of the vacuum chamber, transparent glass is arranged on the observation port, a hole for taking and placing a workpiece is formed in one side of the vacuum chamber, a hole door is formed in the hole, and a collection box for collecting scraps or impurities is arranged on the inner wall of the bottom of the vacuum chamber;
the rotating mechanism is arranged on the inner wall of the top of the vacuum chamber and used for rotating the magnetic control target;
the moving mechanism is arranged on the rotating mechanism and used for moving the magnetic control target;
the clamping assembly is arranged on the collecting box and used for clamping the workpiece.
In a possible design, slewing mechanism includes motor, casing, two filter screens, swivel, four dead levers and carousel, the top of casing and the top inner wall fixed connection of vacuum chamber, the louvre has been seted up to the both sides of casing, the outside fixed connection of bolt and filter screen is used to the inner wall of louvre, the top of motor and the top inner wall fixed connection of casing, the output of motor runs through the bottom inner wall of casing and extends to the carousel inner wall, the output of motor and casing swivelling joint, the output and the carousel fixed connection of motor, the carousel is located the casing below, the outside sliding connection of carousel has the swivel, the top of swivel all is everywhere with the one end fixed connection of dead lever, four the other end of dead lever all with the top inner wall fixed connection of same vacuum chamber.
In one possible design, the moving mechanism comprises an electric telescopic rod, a connecting frame, a moving plate and a sliding groove, wherein the outer side of the electric telescopic rod is fixedly connected with the bottom of the rotary table, the sliding groove is formed in the bottom of the rotary table, the telescopic end of the electric telescopic rod is fixedly connected with one side of the moving plate, the top of the moving plate is fixedly connected with a sliding block, the sliding block is in sliding connection with the sliding groove, the bottom of the moving plate is fixedly connected with the top of the connecting frame, and the magnetic control target is arranged on the connecting frame.
In one possible design, the clamping assembly comprises two electric telescopic rods and two clamping blocks, wherein the fixed ends of the two electric telescopic rods are fixedly connected with the inner walls of the two sides of the vacuum chamber, the telescopic ends of the two electric telescopic rods penetrate through the two sides of the collecting box respectively and extend to the inside of the collecting box, the telescopic ends of the two electric telescopic rods are fixedly connected with one side of the clamping blocks, and the two clamping blocks are located above the collecting box.
In one possible design, two sides of the clamping blocks, which are close to each other, are all set to be toothed, and soft cushions for protecting the workpiece are fixedly connected to the sides of the clamping blocks, which are close to each other.
In one possible design, a drawing box is arranged on one side of the collecting box, a drawing column is fixedly connected to the front side of the drawing box, and a groove matched with a finger is formed in the drawing column.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed.
According to the utility model, the soft cushion is arranged between the two clamping blocks, so that when a workpiece is clamped, the damage to the workpiece can be reduced, the integrity of the workpiece is ensured, the collection box and the drawing box are arranged in the vacuum chamber, so that when the workpiece is processed, scraps and impurities are conveniently collected and treated, and the drawing column and the groove arranged on the drawing box facilitate the movement of the drawing box;
According to the utility model, the rotating and moving mechanism and the clamping assembly are arranged in the vacuum chamber, so that the workpiece is clamped more easily and conveniently, the labor amount of manually aligning the clamping plate is reduced, the clamping block is provided with a plurality of teeth, the workpiece is clamped more firmly, the position of the magnetic control target can be freely adjusted, the workpieces with different types and sizes are further met, the magnetic control target can be enabled to surround the workpiece for processing, meanwhile, the swivel can play a role in fixing the turntable through the fixing rod, the motor plays a role in secondarily fixing the turntable, the possibility of damage to the joint after the turntable is used for a long time is prevented, and the heat dissipation holes and the filter screen are arranged on the shell, so that the operation of the motor is facilitated.
Drawings
FIG. 1 is a schematic diagram of a front view of a magnetron sputtering coating apparatus according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a schematic front sectional structure of a magnetron sputtering coating apparatus according to an embodiment of the utility model;
FIG. 3 is a schematic view of a partial bottom view of a magnetron sputtering coating apparatus according to an embodiment of the present utility model;
Fig. 4 is a schematic diagram of a partial top view structure of a magnetron sputtering coating apparatus according to an embodiment of the utility model.
Reference numerals:
1. A vacuum chamber; 2. a swivel; 3. a fixed rod; 4. a housing; 5. a filter screen; 6. a first electric telescopic rod; 7. a connecting frame; 8. a magnetic control target; 9. clamping blocks; 10. a collection box; 11. a motor; 12. a turntable; 13. a second electric telescopic rod; 14. a moving plate; 15. a chute; 16. a soft cushion; 17. the box is pulled out.
Detailed Description
Embodiments of the present utility model will be described below with reference to the accompanying drawings in the embodiments of the present utility model.
In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled" and "mounted" should be interpreted broadly, and for example, "coupled" may or may not be detachably coupled; may be directly connected or indirectly connected through an intermediate medium. In addition, "communication" may be direct communication or may be indirect communication through an intermediary. Wherein, "fixed" means that the relative positional relationship is not changed after being connected to each other. References to orientation terms, such as "inner", "outer", "top", "bottom", etc., in the embodiments of the present utility model are merely to refer to the orientation of the drawings and, therefore, the use of orientation terms is intended to better and more clearly illustrate and understand the embodiments of the present utility model, rather than to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the embodiments of the present utility model.
In embodiments of the present utility model, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature.
In the embodiment of the present utility model, "and/or" is merely an association relationship describing an association object, and indicates that three relationships may exist, for example, a and/or B may indicate: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
Reference in the specification to "one embodiment" or "some embodiments" or the like means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the utility model. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless expressly specified otherwise.
Example 1
Referring to fig. 1 to 4, a magnetron sputtering coating apparatus includes:
The device comprises a vacuum chamber 1 and a magnetic control target 8, wherein an observation port is formed in the front side of the vacuum chamber 1, transparent glass is arranged on the observation port, a hole for taking and placing a workpiece is formed in one side of the vacuum chamber 1, a hole door is formed in the hole, and a collection box 10 for collecting scraps or impurities is arranged on the inner wall of the bottom of the vacuum chamber 1;
The rotating mechanism is arranged on the inner wall of the top of the vacuum chamber 1 and used for rotating the magnetic control target 8;
A moving mechanism provided on the rotating mechanism for moving the magnetron target 8;
and a clamping assembly provided on the collecting box 10 for clamping the workpiece.
Set up rotation and moving mechanism in vacuum chamber 1 to and clamping assembly, make easier and convenient when carrying out the centre gripping to the work piece, reduce the manual work and aim at the amount of labour of grip block, and set up a plurality of teeth on clamp splice 9, guarantee to hold more firmly to the work piece, also make the position that can freely adjust magnetron target 8, and then satisfy the work piece of different models and size, guarantee that magnetron target 8 can surround around the work piece and process, swivel 2 can play the fixed action to carousel 12 through dead lever 3 simultaneously, motor 11 plays the effect of secondary fixation to carousel 12, prevent carousel 12 after long-time use to the probability of junction harm, and set up louvre and filter screen 5 on casing 4, make things convenient for motor 11's operation.
Referring to fig. 1-2, the rotating mechanism comprises a motor 11, a housing 4, two filter screens 5, a swivel 2, four fixing rods 3 and a turntable 12, wherein the top of the housing 4 is fixedly connected with the inner wall of the top of a vacuum chamber 1, two sides of the housing 4 are provided with heat dissipation holes, the inner wall of each heat dissipation hole is fixedly connected with the outer side of the filter screen 5 through bolts, the top of the motor 11 is fixedly connected with the inner wall of the top of the housing 4, the output end of the motor 11 penetrates through the inner wall of the bottom of the housing 4 and extends to the inner wall of the turntable 12, the output end of the motor 11 is rotationally connected with the housing 4, the turntable 12 is positioned below the housing 4, the swivel 2 is slidingly connected with the outer side of the turntable 12, the top of the swivel 2 is fixedly connected with one end of the fixing rod 3, and the other ends of the four fixing rods 3 are fixedly connected with the inner wall of the top of the same vacuum chamber 1.
The motor 11 is started, the output shaft of the motor 11 drives the rotary table 12 to slide in the rotary table 2, so that the rotary table 2 plays a role in fixing the rotary table 12 through the fixing rod 3, the motor 11 plays a role in secondary fixing the rotary table 12, the possibility that the rotary table 12 damages a connecting part after long-time use is prevented, and the heat dissipation holes and the filter screen 5 are formed in the shell 4, so that the motor 11 can conveniently operate.
Referring to fig. 1 and 3, the moving mechanism comprises an electric telescopic rod 6, a connecting frame 7, a moving plate 14 and a sliding groove 15, wherein the outer side of the electric telescopic rod 6 is fixedly connected with the bottom of the rotary table 12, the sliding groove 15 is arranged at the bottom of the rotary table 12, the telescopic end of the electric telescopic rod 6 is fixedly connected with one side of the moving plate 14, the top of the moving plate 14 is fixedly connected with a sliding block, the sliding block is in sliding connection with the sliding groove 15, the bottom of the moving plate 14 is fixedly connected with the top of the connecting frame 7, and the magnetic control target 8 is arranged on the connecting frame 7.
The first electric telescopic rod 6 is started, the telescopic end of the first electric telescopic rod 6 drives the sliding block on the moving plate 14 to slide in the sliding groove 15, and the moving plate 14 drives the connecting frame 7 and the magnetic control target 8 to move, so that the position of the magnetic control target 8 can be freely adjusted, workpieces of different types and sizes can be further met, and the magnetic control target 8 can be ensured to surround the workpiece to process the workpiece.
Referring to fig. 1 and 4, the clamping assembly comprises two electric telescopic rods 13 and two clamping blocks 9, the fixed ends of the two electric telescopic rods 13 are fixedly connected with the inner walls of the two sides of the vacuum chamber 1, the telescopic ends of the two electric telescopic rods 13 penetrate through the two sides of the collecting box 10 respectively and extend to the inside of the collecting box 10, the telescopic ends of the two electric telescopic rods 13 are fixedly connected with one side of the clamping blocks 9, and the two clamping blocks 9 are located above the collecting box 10.
The workpiece is placed between the two clamping blocks 9, and then the two electric telescopic rods 13 are activated. The telescopic ends of the two second electric telescopic rods 13 drive the clamping blocks 9 to be close to each other, then one sides of the two clamping blocks 9 clamp the workpiece, so that the workpiece is clamped more easily and conveniently, the labor amount of manually aligning the clamping plates is reduced, and a plurality of teeth are arranged on the clamping blocks 9, so that the workpiece is clamped more firmly.
The application can be used in the technical field of magnetron sputtering and can also be used in other fields suitable for the application.
Example 2
Referring to fig. 1 to 4, a magnetron sputtering coating apparatus includes:
The device comprises a vacuum chamber 1 and a magnetic control target 8, wherein an observation port is formed in the front side of the vacuum chamber 1, transparent glass is arranged on the observation port, a hole for taking and placing a workpiece is formed in one side of the vacuum chamber 1, a hole door is formed in the hole, and a collection box 10 for collecting scraps or impurities is arranged on the inner wall of the bottom of the vacuum chamber 1;
The rotating mechanism is arranged on the inner wall of the top of the vacuum chamber 1 and used for rotating the magnetic control target 8;
A moving mechanism provided on the rotating mechanism for moving the magnetron target 8;
and a clamping assembly provided on the collecting box 10 for clamping the workpiece.
Set up rotation and moving mechanism in vacuum chamber 1 to and clamping assembly, make easier and convenient when carrying out the centre gripping to the work piece, reduce the manual work and aim at the amount of labour of grip block, and set up a plurality of teeth on clamp splice 9, guarantee to hold more firmly to the work piece, also make the position that can freely adjust magnetron target 8, and then satisfy the work piece of different models and size, guarantee that magnetron target 8 can surround around the work piece and process, swivel 2 can play the fixed action to carousel 12 through dead lever 3 simultaneously, motor 11 plays the effect of secondary fixation to carousel 12, prevent carousel 12 after long-time use to the probability of junction harm, and set up louvre and filter screen 5 on casing 4, make things convenient for motor 11's operation.
Referring to fig. 1-2, the rotating mechanism comprises a motor 11, a housing 4, two filter screens 5, a swivel 2, four fixing rods 3 and a turntable 12, wherein the top of the housing 4 is fixedly connected with the inner wall of the top of a vacuum chamber 1, two sides of the housing 4 are provided with heat dissipation holes, the inner wall of each heat dissipation hole is fixedly connected with the outer side of the filter screen 5 through bolts, the top of the motor 11 is fixedly connected with the inner wall of the top of the housing 4, the output end of the motor 11 penetrates through the inner wall of the bottom of the housing 4 and extends to the inner wall of the turntable 12, the output end of the motor 11 is rotationally connected with the housing 4, the turntable 12 is positioned below the housing 4, the swivel 2 is slidingly connected with the outer side of the turntable 12, the top of the swivel 2 is fixedly connected with one end of the fixing rod 3, and the other ends of the four fixing rods 3 are fixedly connected with the inner wall of the top of the same vacuum chamber 1.
The motor 11 is started, the output shaft of the motor 11 drives the rotary table 12 to slide in the rotary table 2, so that the rotary table 2 plays a role in fixing the rotary table 12 through the fixing rod 3, the motor 11 plays a role in secondary fixing the rotary table 12, the possibility that the rotary table 12 damages a connecting part after long-time use is prevented, and the heat dissipation holes and the filter screen 5 are formed in the shell 4, so that the motor 11 can conveniently operate.
Referring to fig. 1 and 3, the moving mechanism comprises an electric telescopic rod 6, a connecting frame 7, a moving plate 14 and a sliding groove 15, wherein the outer side of the electric telescopic rod 6 is fixedly connected with the bottom of the rotary table 12, the sliding groove 15 is arranged at the bottom of the rotary table 12, the telescopic end of the electric telescopic rod 6 is fixedly connected with one side of the moving plate 14, the top of the moving plate 14 is fixedly connected with a sliding block, the sliding block is in sliding connection with the sliding groove 15, the bottom of the moving plate 14 is fixedly connected with the top of the connecting frame 7, and the magnetic control target 8 is arranged on the connecting frame 7.
The first electric telescopic rod 6 is started, the telescopic end of the first electric telescopic rod 6 drives the sliding block on the moving plate 14 to slide in the sliding groove 15, and the moving plate 14 drives the connecting frame 7 and the magnetic control target 8 to move, so that the position of the magnetic control target 8 can be freely adjusted, workpieces of different types and sizes can be further met, and the magnetic control target 8 can be ensured to surround the workpiece to process the workpiece.
Referring to fig. 1 and 4, the clamping assembly comprises two electric telescopic rods 13 and two clamping blocks 9, the fixed ends of the two electric telescopic rods 13 are fixedly connected with the inner walls of the two sides of the vacuum chamber 1, the telescopic ends of the two electric telescopic rods 13 penetrate through the two sides of the collecting box 10 respectively and extend to the inside of the collecting box 10, the telescopic ends of the two electric telescopic rods 13 are fixedly connected with one side of the clamping blocks 9, and the two clamping blocks 9 are located above the collecting box 10.
The workpiece is placed between the two clamping blocks 9, and then the two electric telescopic rods 13 are activated. The telescopic ends of the two second electric telescopic rods 13 drive the clamping blocks 9 to be close to each other, then one sides of the two clamping blocks 9 clamp the workpiece, so that the workpiece is clamped more easily and conveniently, the labor amount of manually aligning the clamping plates is reduced, and a plurality of teeth are arranged on the clamping blocks 9, so that the workpiece is clamped more firmly.
Referring to fig. 4, the sides of the two clamping blocks 9 close to each other are each provided with teeth, and the sides of the two clamping blocks 9 close to each other are each fixedly connected with a soft pad 16 for protecting a workpiece.
A soft cushion 16 is arranged between the two clamping blocks 9, so that when the workpiece is clamped, the damage to the workpiece can be reduced, and the integrity of the workpiece is ensured.
Referring to fig. 4, a drawing box 17 is provided at one side of the collecting box 10, a drawing column is fixedly connected to the front side of the drawing box 17, and a groove adapted to fingers is provided on the drawing column.
The collection box 10 and the drawing box 17 are arranged in the vacuum chamber 1, so that scraps and impurities can be collected and treated conveniently when the workpiece is processed, and the drawing columns and the grooves arranged on the drawing box 17 facilitate the movement of the drawing box 17.
However, as well known to those skilled in the art, the working principles and wiring methods of the first electric telescopic rod 6, the second electric telescopic rod 13 and the motor 11 are well known, which are all conventional means or common knowledge, and are not described herein in detail, and any choice can be made by those skilled in the art according to their needs or convenience.
The working principle and the using flow of the technical scheme are as follows: in specific use, the workpiece is first placed between the two clamping blocks 9, and then the two electric telescopic rods 13 are started. The flexible end of two No. two electric telescopic handle 13 drives clamp splice 9 and is close to each other, then one side clamping work piece of two clamp splice 9, make like this easier and convenient when carrying out the centre gripping to the work piece, reduce the manual work and aim at the amount of labour of grip block, and set up a plurality of teeth on clamp splice 9, guarantee to work piece centre gripping more firm, owing to set up cushion 16 between two clamp splice 9, make when the work piece is processed, can reduce the harm to the work piece, guarantee the integrality of work piece, start electric telescopic handle 6 afterwards, the flexible end of electric telescopic handle 6 drives the slider on the movable plate 14 and slides in spout 15, movable plate 14 drives link 7 and magnetic control target 8 and removes, so make the position that can freely adjust magnetic control target 8, and then satisfy the work piece of different models and sizes, guarantee that magnetic control target 8 can surround around the work piece and process, start motor 11, the output shaft drive carousel 12 of motor 11 slides in carousel 2, make carousel 2 pass through dead lever 3 fixed action to carousel 12, guarantee the integrality of work piece, start electric telescopic handle 6, the slider on the movable plate 14 slides in spout 15, the time frame 7 and magnetic control target 8 move in spout 15, so that the filter cartridge is provided with the filter cartridge is convenient for setting up at 17 and the filter screen 5, and the filter cartridge is convenient for setting up at the time 17, and the filter cartridge is convenient for setting up in the filter cartridge is used in the filter cartridge 17. The working principle of the vacuum chamber 1 and the magnetron target 8 is the same as that of the bulletin number CN110144558a and is described in detail in the comparison document, so that redundant description is omitted herein.
The present utility model is not limited to the above embodiments, and any person skilled in the art can easily think about the changes or substitutions within the technical scope of the present utility model, and the changes or substitutions are intended to be covered by the scope of the present utility model; embodiments of the utility model and features of the embodiments may be combined with each other without conflict. Therefore, the protection scope of the utility model is subject to the protection scope of the claims.
Claims (6)
1. A magnetron sputtering coating apparatus, comprising:
The device comprises a vacuum chamber (1) and a magnetic control target (8), wherein an observation port is formed in the front side of the vacuum chamber (1), transparent glass is arranged on the observation port, a hole for taking and placing a workpiece is formed in one side of the vacuum chamber (1), a hole door is formed in the hole, and a collection box (10) for collecting scraps or impurities is arranged on the inner wall of the bottom of the vacuum chamber (1);
The rotating mechanism is arranged on the inner wall of the top of the vacuum chamber (1) and used for rotating the magnetic control target (8);
The moving mechanism is arranged on the rotating mechanism and used for moving the magnetic control target (8);
and the clamping assembly is arranged on the collecting box (10) and used for clamping the workpiece.
2. The magnetron sputtering coating equipment according to claim 1, wherein the rotating mechanism comprises a motor (11), a shell (4), two filter screens (5), a swivel (2), four fixing rods (3) and a rotary table (12), the top of the shell (4) is fixedly connected with the top inner wall of the vacuum chamber (1), heat dissipation holes are formed in two sides of the shell (4), the inner wall of the heat dissipation holes is fixedly connected with the outer side of the filter screens (5) through bolts, the top of the motor (11) is fixedly connected with the top inner wall of the shell (4), the output end of the motor (11) penetrates through the bottom inner wall of the shell (4) and extends to the inner wall of the rotary table (12), the output end of the motor (11) is rotatably connected with the shell (4), the rotary table (12) is located below the shell (4), the outer side of the rotary table (12) is slidably connected with the swivel (2), and the top of the rotary table (2) is fixedly connected with the four fixing rods (3) at the top of the same one end of the same vacuum chamber (1).
3. The magnetron sputtering coating equipment according to claim 1, wherein the moving mechanism comprises an electric telescopic rod (6), a connecting frame (7), a moving plate (14) and a sliding groove (15), the outer side of the electric telescopic rod (6) is fixedly connected with the bottom of the rotary table (12), the sliding groove (15) is arranged at the bottom of the rotary table (12), the telescopic end of the electric telescopic rod (6) is fixedly connected with one side of the moving plate (14), the top of the moving plate (14) is fixedly connected with a sliding block, the sliding block is in sliding connection with the sliding groove (15), the bottom of the moving plate (14) is fixedly connected with the top of the connecting frame (7), and the magnetron target (8) is arranged on the connecting frame (7).
4. The magnetron sputtering coating equipment according to claim 1, wherein the clamping assembly comprises two electric telescopic rods (13) and two clamping blocks (9), the fixed ends of the two electric telescopic rods (13) are fixedly connected with the inner walls of the two sides of the vacuum chamber (1), the telescopic ends of the two electric telescopic rods (13) penetrate through the two sides of the collecting box (10) respectively and extend to the inside of the collecting box (10), the telescopic ends of the two electric telescopic rods (13) are fixedly connected with one side of the clamping blocks (9), and the two clamping blocks (9) are located above the collecting box (10).
5. The magnetron sputtering coating equipment according to claim 4, wherein the sides of the two clamping blocks (9) close to each other are toothed, and a soft cushion (16) for protecting a workpiece is fixedly connected to the sides of the two clamping blocks (9) close to each other.
6. The magnetron sputtering coating equipment according to claim 1, wherein a drawing box (17) is arranged on one side of the collecting box (10), a drawing column is fixedly connected to the front side of the drawing box (17), and a groove matched with a finger is formed in the drawing column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321799540.1U CN220812600U (en) | 2023-07-10 | 2023-07-10 | Magnetron sputtering coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321799540.1U CN220812600U (en) | 2023-07-10 | 2023-07-10 | Magnetron sputtering coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220812600U true CN220812600U (en) | 2024-04-19 |
Family
ID=90706468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321799540.1U Active CN220812600U (en) | 2023-07-10 | 2023-07-10 | Magnetron sputtering coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220812600U (en) |
-
2023
- 2023-07-10 CN CN202321799540.1U patent/CN220812600U/en active Active
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