CN220805886U - Substrate grooving equipment - Google Patents

Abstract

The utility model discloses substrate grooving equipment, which comprises a base, wherein an operation platform, a bracket and a CCD machine vision system are arranged on the base, and the operation platform is used for driving a jig to drive a substrate on the operation platform to move along the X direction or the Y direction; the bracket is provided with a cantilever above the operation platform, and the cantilever is provided with a laser emitter, an optical shaping device and a vibrating mirror cutting head which are arranged at intervals; the CCD machine vision system is arranged on the cantilever and is provided with an image acquisition end facing the processing position. The utility model performs grooving processing on the substrate by the operation platform, the laser emitter, the optical shaping device, the vibrating mirror cutting head and the CCD machine vision system, ensures the quality of light beams emitted to the substrate by the vibrating mirror cutting head, can process a forming groove with the depth of less than 0.7mm, controls the processing error to be less than +/-0.05 mm, avoids burrs in the forming groove of the substrate during the processing, and improves the grooving processing efficiency of the substrate.

Description

Substrate grooving equipment

Technical Field

The utility model relates to the technical field of substrate processing, in particular to substrate grooving equipment.

Background

In the related art, in the process of forming and processing the substrate, a mechanical grooving and forming mode is adopted, namely, a method of extrusion cutting by a drill bit is utilized to perform grooving and processing on the substrate.

However, with the development of technology and the increasing demands on product quality, the demands on processing precision and processing efficiency of substrate forming equipment are also increasing.

In the mode of carrying out mechanical slotting molding on the substrate, the size of the used drill bit determines the size of a substrate molding groove, a notch below 0.7mm cannot be formed, the machining precision can only achieve +/-0.05 mm, the precision is low, burrs are easily formed in the notch of the molding groove, the quality of a processed substrate product is poor, the grooving speed is low, and the machining efficiency is low.

Disclosure of utility model

The main purpose of the utility model is that: the substrate grooving equipment aims at solving the technical problems that in the prior art, the precision of a mechanical grooving forming mode is low, burrs are easy to form in a notch of a substrate grooving, the quality of a processed substrate product is poor, the grooving speed is low and the processing efficiency is low.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides substrate grooving equipment, which comprises a base, wherein the base is provided with:

The operation platform comprises a first driving device and a second driving device which is in sliding connection with the first driving device, wherein the first driving device is in sliding connection with a jig, and the jig is provided with a processing position for installing the substrate; the second driving device is used for driving the first driving device and the jig to slide along the Y direction, and the first driving device is used for driving the jig to slide along the X direction;

The device comprises a bracket, wherein a cantilever positioned above an operation platform is arranged on the bracket, a laser transmitter, an optical shaping device and a vibrating mirror cutting head are arranged on the cantilever at intervals, and outgoing rays of the laser transmitter are emitted to the jig from the vibrating mirror cutting head after passing through the optical shaping device;

The CCD machine vision system is arranged on the cantilever, the CCD machine vision system and the vibrating mirror cutting head are arranged at intervals along the X direction, and the CCD machine vision system is provided with an image acquisition end facing the processing position.

Optionally, in the substrate grooving apparatus, the optical shaping device includes a first reflection mechanism and a second reflection mechanism, where the first reflection mechanism and the second reflection mechanism are disposed at intervals along a Z direction on the cantilever, a light incident end of the first reflection mechanism faces and corresponds to a light emitting end of the laser emitter, a light incident end of the second reflection mechanism faces and corresponds to a light emitting end of the first reflection mechanism, and a light emitting end of the second reflection mechanism faces and corresponds to a light incident end of the galvanometer cutting head; the outgoing light of the laser transmitter is reflected by the first reflecting mechanism to form first reflected light, the first reflected light is reflected by the second reflecting mechanism to form second reflected light, and the second reflected light is emitted to the jig through the vibrating mirror cutting head.

Optionally, in the substrate grooving apparatus, the first reflection mechanism includes a first housing, a first beam shaper and a first reflection lens, the first housing and the laser transmitter are installed at the top of the cantilever at intervals in a Y-direction, the first housing is installed at a side of the first housing facing the laser transmitter, the first housing is formed with a first through hole facing and corresponding to a light incident end of the second reflection mechanism, and the first reflection lens which is obliquely arranged from the first beam shaper towards the first through hole is installed in the first housing; the outgoing light of the laser transmitter forms first shaping light through the first beam shaper, and the first shaping light is reflected by the first reflecting mirror plate to form first reflected light and then is injected into the second reflecting mechanism.

Optionally, in the substrate grooving apparatus, the second reflection mechanism includes a second housing and a second reflection lens, the second housing is mounted on the cantilever, the second housing is disposed below the first housing at intervals, the galvanometer cutting head is disposed at one side of the second housing at intervals along a Y direction, a second through hole is formed at a position of a top of the second housing facing and corresponding to the first through hole, a third through hole is formed at a side of the second housing facing and corresponding to a light incident end of the galvanometer cutting head, and the second reflection lens disposed obliquely from the second through hole to the third through hole is mounted in the second housing; the first reflected light rays formed by the reflection of the first reflecting mirror plates are reflected by the second reflecting mirror plates through the second through holes to form second reflected light rays, and the second reflected light rays are injected into the vibrating mirror cutting head through the third through holes.

Optionally, in the substrate grooving device, the second reflection mechanism further includes a second beam shaper, and the second beam shaper is inserted into the second through hole; the first reflection light formed by the reflection of the first reflection lens is reflected by the second reflection lens to form the second reflection light after passing through the second beam shaper, and the second reflection light is emitted to the jig through the vibrating mirror cutting head.

Optionally, in the above substrate grooving apparatus, the first driving device includes a bottom plate, a first guide rail, a first sliding table and a first driving member, the bottom plate is slidably connected to the second driving device, the first guide rail and the bottom plate all extend along the X direction, the first guide rail set up in the bottom plate, the first sliding table along the X direction sliding connection in the first guide rail, the tool connect in the top of the first sliding table, the first driving member set up in the bottom plate, the first driving member with the first sliding table is connected and is used for driving the first sliding table and the tool drives the substrate slides along the X direction.

Optionally, in the above substrate grooving apparatus, the second driving device includes a second guide rail, a second sliding table and a second driving member, the second guide rail is set up in the base, the second guide rail extends along the Y direction, the second sliding table along the Y direction sliding connection in the second guide rail, the bottom plate connect in the top of second sliding table, the second driving member set up in the base, the second driving member with the second sliding table is connected and is used for driving the second sliding table and the bottom plate drives the substrate slides along the Y direction.

Optionally, in the substrate grooving device, a first telescopic dust cover and a second telescopic dust cover are sleeved on the first guide rail, the first telescopic dust cover and the second telescopic dust cover extend along the X direction, and the first telescopic dust cover and the second telescopic dust cover are respectively arranged on two sides of the first sliding table along the X direction; the second guide rail is sleeved with a third telescopic dust cover and a fourth telescopic dust cover, the third telescopic dust cover and the fourth telescopic dust cover extend along the Y direction, and the third telescopic dust cover and the fourth telescopic dust cover are respectively arranged on two sides of the second sliding table along the Y direction.

Optionally, in the substrate grooving apparatus, the CCD machine vision system includes a CCD camera and a mounting frame, the mounting frame is mounted on the cantilever, the mounting frame and the galvanometer cutting head are arranged along the X-direction at intervals, the CCD camera is mounted on the mounting frame, and the CCD camera forms the image acquisition end.

Optionally, in the substrate grooving apparatus, the base, the bracket and the cantilever are all made of marble.

The one or more technical schemes provided by the utility model can have the following advantages or at least realize the following technical effects:

According to the substrate grooving equipment, the substrate is subjected to grooving processing through the operation platform, the laser transmitter, the optical shaping device, the vibrating mirror cutting head and the CCD machine vision system, under the positioning auxiliary effect of the CCD machine vision system, the jig on the operation platform is used for driving the substrate to slide in the X direction or the Y direction relative to the vibrating mirror cutting head, the optical shaping device is used for shaping emergent rays emitted by the laser transmitter, the quality of the light beams emitted to the substrate through the vibrating mirror cutting head is ensured, a forming groove with the depth of less than 0.7mm can be processed, the processing error is controlled to be less than +/-0.05 mm, burrs in the forming groove of the substrate in the processing process are avoided, and the grooving processing efficiency of the substrate is improved.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are required in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that other drawings may be obtained from the drawings provided without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a substrate channeling apparatus of the present utility model;

fig. 2 is a schematic structural view of a first driving device and a second driving device according to the present utility model;

fig. 3 is a schematic view of a mounting structure of a CCD camera according to the present utility model;

FIG. 4 is a schematic diagram of the positional relationship of a laser transmitter, an optical shaping device and a galvanometer cutting head according to the present utility model;

Fig. 5 is a schematic view showing the mounting structure of the first mirror plate and the second mirror plate according to the present utility model.

Reference numerals illustrate:

The achievement of the objects, functional features and advantages of the present utility model will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, in the embodiment of the present utility model, all directional indicators (such as up, down, left, right, front, and rear … …) are merely used to explain the relative positional relationship, movement conditions, and the like between the components in a certain specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is correspondingly changed.

In the present disclosure, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other like elements in a process, method, article, or system that comprises the element. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously.

In the present utility model, unless explicitly specified and limited otherwise, the terms "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be either a fixed connection or a removable connection or integrated; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium; the communication between the two elements can be realized, or the interaction relationship between the two elements can be realized.

In the present utility model, if there is a description referring to "first", "second", etc., the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature.

In the present utility model, suffixes such as "module", "assembly", "piece", "part" or "unit" used for representing elements are used only for facilitating the description of the present utility model, and have no specific meaning per se. Thus, "module," "component," or "unit" may be used in combination.

The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances. In addition, the technical solutions of the embodiments may be combined with each other, but on the basis of the fact that those skilled in the art can realize the technical solutions, when the technical solutions are contradictory or cannot be realized, the technical solutions should be considered to be absent and not within the scope of protection claimed by the present utility model.

The inventive concept of the present utility model is further elucidated below in connection with some embodiments.

The utility model provides substrate grooving equipment.

Referring to fig. 1, fig. 1 is a schematic structural view of a substrate grooving apparatus of the present utility model.

In an embodiment of the present utility model, as shown in fig. 1, a substrate grooving apparatus includes a base 100, an operation platform 200, a bracket 400 and a CCD machine vision system 800 are installed on the base 100, the operation platform 200 includes a first driving device 210 and a second driving device 220 slidably connected to the first driving device 210, the first driving device 210 is slidably connected to a jig 300, and the jig 300 is formed with a processing position for installing a substrate; the second driving device 220 is used for driving the first driving device 210 and the jig 300 to slide along the Y direction, and the first driving device 210 is used for driving the jig 300 to slide along the X direction; the bracket 400 is provided with a cantilever 410 positioned above the operation platform 200, the cantilever 410 is provided with a laser transmitter 500, an optical shaping device 600 and a galvanometer cutting head 700 which are arranged at intervals, and the emergent light of the laser transmitter 500 is emitted from the galvanometer cutting head 700 to the jig 300 after passing through the optical shaping device 600; the CCD machine vision system 800 is mounted on the cantilever 410, the CCD machine vision system 800 and the galvanometer cutting head 700 are arranged at intervals along the X direction, and the CCD machine vision system 800 is provided with an image acquisition end facing the processing position.

The Y direction is the width direction of the substrate in fig. 1, and the X direction is the length direction of the substrate in fig. 1; the CCD machine vision system 800 is one way commonly used in manufacturing industry to ensure that the quality of products improves the detection efficiency, and the objects are detected and identified by optical imaging technology, so that the CCD machine vision system 800 is generally used in industrial production to detect appearance defects of the products.

It should be understood that during the grooving process of the substrate, the image collected by the image collecting end of the CCD machine vision system 800 is utilized to position the processing position of the substrate, when the initial processing position of the substrate is just below the light emitting end of the galvanometer cutting head 700, the laser emitter 500 is started, the emitted light of the laser emitter 500 is emitted from the galvanometer cutting head 700 to the jig 300 after passing through the optical shaping device 600, meanwhile, the first driving device 210 is started at a constant speed, the first driving device 210 drives the jig 300 to slide along the X direction, or the second driving device 220 is started at a constant speed, and the second driving device 220 drives the first driving device 210 and the jig 300 to slide along the Y direction, so that a notch matched with the preset pattern is formed on the substrate; the optical shaping device 600 performs beam shaping on the outgoing light of the laser transmitter 500, expands, amplifies and collimates the light beam, filters stray light with large edge divergence angle and insufficient energy density of the outgoing light, avoids generating thermal influence on subsequent material processing, passes the expanded light beam through the aberration compensation device, eliminates optical aberration generated by the beam expander such as the laser transmitter 500, and ensures that the outgoing light is close to an optical theoretical value when focusing to a substrate; in the process of grooving the substrate, the image acquisition end of the CCD machine vision system 800 monitors the substrate in real time, and the image acquisition end of the CCD machine vision system 800 can be used for amplifying and observing the groove body of the substrate in the process of grooving the substrate, so that the grooving quality of the substrate is ensured.

According to the technical scheme, the base plate is subjected to grooving processing through the operation platform 200, the laser emitter 500, the optical shaping device 600, the vibrating mirror cutting head 700 and the CCD machine vision system 800, under the positioning auxiliary effect of the CCD machine vision system 800, the jig 300 on the operation platform 200 is used for driving the base plate to slide in the X direction or the Y direction relative to the vibrating mirror cutting head 700, the optical shaping device 600 is used for shaping emergent rays emitted by the laser emitter 500, the quality of the light beam emitted to the base plate through the vibrating mirror cutting head 700 is ensured, a forming groove with the depth of less than 0.7mm can be processed, the processing error is controlled to be less than +/-0.05 mm, burrs in the forming groove of the base plate in the processing process are avoided, and the grooving processing efficiency of the base plate is improved.

With continued reference to fig. 1.

Further, as shown in fig. 1, the optical shaping device 600 includes a first reflection mechanism 610 and a second reflection mechanism 620, where the first reflection mechanism 610 and the second reflection mechanism 620 are disposed at intervals along the Z direction on the cantilever 410, the light incident end of the first reflection mechanism 610 is disposed towards and corresponds to the light emitting end of the laser transmitter 500, the light incident end of the second reflection mechanism 620 is disposed towards and corresponds to the light emitting end of the first reflection mechanism 610, and the light emitting end of the second reflection mechanism 620 is disposed towards and corresponds to the light incident end of the galvanometer cutting head 700; the outgoing light of the laser transmitter 500 is reflected by the first reflecting mechanism 610 to form a first reflected light, the first reflected light is reflected by the second reflecting mechanism 620 to form a second reflected light, and the second reflected light is emitted to the fixture 300 through the vibrating mirror cutting head 700.

The Z direction is the height direction of the substrate in fig. 1.

It should be appreciated that, to ensure the quality of the grooving of the substrate by the outgoing light emitted from the laser emitter 500, the outgoing light emitted from the laser emitter 500 is guided to a position close to the substrate by the first reflecting mechanism 610 and the second reflecting mechanism 620 disposed at intervals along the Z direction and then emitted via the galvanometer cutting head 700, so that the quality of the grooving of the substrate is prevented from being reduced due to premature beam expansion of the outgoing light emitted from the laser emitter 500, and the first reflecting mechanism 610 and the second reflecting mechanism 620 provide optical shaping conditions for the outgoing light emitted from the laser emitter 500, so that the outgoing light emitted from the laser emitter 500 is optimized.

With continued reference to fig. 1 and with further reference to fig. 4, fig. 4 is a schematic diagram of the positional relationship of the laser transmitter, optical shaping device and galvanometer cutting head in accordance with the present utility model.

Further, as shown in fig. 1 and 4, the first reflecting mechanism 610 includes a first housing 611, a first beam shaper 612 and a first reflecting mirror 613, the first housing 611 and the laser transmitter 500 are installed at the top of the cantilever 410 at a Y-direction interval, the first housing 611 is installed with the first beam shaper 612 toward one side of the laser transmitter 500, the bottom of the first housing 611 is formed with a first through hole toward and corresponding to the light incident end of the second reflecting mechanism 620, and the first reflecting mirror 613 is installed in the first housing 611 to be inclined from the first beam shaper 612 toward the first through hole; the outgoing light of the laser transmitter 500 forms a first shaped light through the first beam shaper 612, and the first shaped light is reflected by the first reflecting mirror 613 to form a first reflected light, and then the first reflected light is incident on the second reflecting mechanism 620.

It should be noted that, the first beam shaper 612 may be an optical filter in the prior art, and is used for filtering stray light with a large edge divergence angle and insufficient energy density, so as to avoid thermal influence on the subsequent substrate grooving process and ensure the substrate grooving quality.

It should be appreciated that the first housing 611 provides mounting conditions for the first mirror plate 613, preventing the first mirror plate 613 from being contaminated by smoke and reducing the quality of the process of the outgoing light rays emitted from the laser transmitter 500.

With continued reference to fig. 1 and 4, and with reference to fig. 5, fig. 5 is a schematic view of the mounting structure of the first and second reflective mirrors according to the present utility model.

Further, as shown in fig. 1, 4 and 5, the second reflection mechanism 620 includes a second housing 621 and a second reflection lens, the second housing 621 is mounted on the cantilever 410, the second housing 621 is disposed below the first housing 611 at intervals, the vibrating mirror cutter head 700 is disposed on one side of the second housing 621 at intervals along the Y direction, a second through hole is formed at a position of the top of the second housing 621 facing and corresponding to the first through hole, a third through hole is formed at a side of the second housing 621 facing and corresponding to the light incident end of the Yu Zhenjing cutter head 700, and the second reflection lens disposed obliquely from the second through hole to the third through hole is mounted in the second housing 621; the first reflected light beam reflected by the first reflecting mirror 613 is reflected by the second reflecting mirror through the second through hole to form a second reflected light beam, and the second reflected light beam is incident on the vibrating mirror cutting head 700 through the third through hole.

It should be noted that, the second housing 621 and the first housing 611 are disposed at a Z-direction interval, so that the mounting positions of the first reflecting mechanism 610 and the second reflecting mechanism 620 are more compact, when the outgoing light of the laser emitter 500 is transmitted to the galvanometer cutting head 700 and then is emitted to the substrate on the fixture 300 through the galvanometer cutting head 700, the overall mounting area of the optical shaping device 600 is reduced, and the second housing 621 provides mounting conditions for the second reflecting lens, so as to prevent the second reflecting lens from being polluted by smoke dust and reduce the processing quality of the outgoing light emitted by the laser emitter 500.

It should be understood that the first housing 611 and the second housing 621 can be circularly filtered by injecting the shielding gas into the cavity of the external optical path, so that the cleanliness of the surfaces of the first reflecting mirror 613 and the second reflecting mirror is correspondingly higher, and the damage to devices and diffraction phenomenon of the light beam caused by the light beam passing through the polluted first reflecting mirror 613 and second reflecting mirror are avoided.

Further, the second reflection mechanism 620 further includes a second beam shaper 623, where the second beam shaper 623 is inserted into the second through hole; the first reflected light beam reflected by the first reflecting mirror 613 is reflected by the second reflecting mirror 623 to form a second reflected light beam, and the second reflected light beam is emitted to the fixture 300 through the galvanometer cutting head 700.

It should be noted that the second beam shaper 623 may be an aberration compensator in the prior art, for eliminating optical aberration generated by the laser transmitter 500 itself and the beam expansion of the first beam shaper 612 to the light speed, so as to ensure the substrate grooving efficiency and grooving quality.

With continued reference to fig. 1, and with reference to fig. 2, fig. 2 is a schematic structural view of a first driving device and a second driving device according to the present utility model.

Further, as shown in fig. 1 and 2, the first driving device 210 includes a bottom plate 211, a first guide rail 212, a first sliding table 213 and a first driving member, the bottom plate 211 is slidably connected to the second driving device 220, the first guide rail 212 and the bottom plate 211 extend along the X direction, the first guide rail 212 is disposed on the bottom plate 211, the first sliding table 213 is slidably connected to the first guide rail 212 along the X direction, the jig 300 is connected to the top of the first sliding table 213, the first driving member is disposed on the bottom plate 211, and the first driving member is connected to the first sliding table 213 and is used for driving the first sliding table 213 and the jig 300 to drive the substrate to slide along the X direction.

It should be noted that the first driving member may be a motor in the prior art, and an output end of the first driving member is connected to the first sliding table 213.

It should be understood that, to ensure the sliding stability of the first sliding table 213 on the first guide rail 212 and improve the moving precision of the substrate in the X direction, a plurality of first guide rails 212 may be provided, and a plurality of first guide rails 212 are disposed on the bottom plate 211 at intervals along the Y direction, and the first sliding table 213 is slidably connected to each first guide rail 212.

Further, the second driving device 220 includes a second guide rail 221, a second sliding table 222, and a second driving member, where the second guide rail 221 extends along the Y direction, the second guide rail 221 is disposed on the base 100, the second sliding table 222 is slidably connected to the second guide rail 221 along the Y direction, the bottom plate 211 is connected to the top of the second sliding table 222, the second driving member is disposed on the base 100, and the second driving member is connected to the second sliding table 222 and is used for driving the second sliding table 222 and the bottom plate 211 to drive the substrate to slide along the Y direction.

It should be noted that the second driving member may be a motor in the prior art, and an output end of the second driving member is connected to the second sliding table 222.

It should be understood that, to ensure the sliding stability of the second sliding table 222 on the second guide rail 221 and improve the moving precision of the substrate in the Y direction, a plurality of second guide rails 221 may be provided, and a plurality of second guide rails 221 may be disposed on the base 100 at intervals along the X direction, and the second sliding table 222 is slidably connected to each second guide rail 221.

With continued reference to fig. 1.

Further, as shown in fig. 1, a first telescopic dust cover 214 and a second telescopic dust cover 215 are sleeved on the first guide rail 212, the first telescopic dust cover 214 and the second telescopic dust cover 215 extend along the X direction, and the first telescopic dust cover 214 and the second telescopic dust cover 215 are respectively arranged at two sides of the first sliding table 213 along the X direction; the second guide rail 221 is sleeved with a third telescopic dust cover 223 and a fourth telescopic dust cover 224, the third telescopic dust cover 223 and the fourth telescopic dust cover 224 extend along the Y direction, and the third telescopic dust cover 223 and the fourth telescopic dust cover 224 are respectively arranged on two sides of the second sliding table 222 along the Y direction.

It should be noted that, the first telescopic dust cover 214 and the second telescopic dust cover 215 may be telescopic along the X direction, the third telescopic dust cover 223 and the fourth telescopic dust cover 224 may be telescopic along the Y direction, and the first telescopic dust cover 214, the second telescopic dust cover 215, the third telescopic dust cover 223 and the fourth telescopic dust cover 224 may have the capability of recovering deformation, and the first telescopic dust cover 214, the second telescopic dust cover 215, the third telescopic dust cover 223 and the fourth telescopic dust cover 224 may be made of rubber materials.

It should be understood that when the first sliding table 213 slides along the X direction, when the first sliding table 213 presses the first telescopic dust cover 214 or the second telescopic dust cover 215, so that the first telescopic dust cover 214 or the second telescopic dust cover 215 is shortened in the X direction, the second telescopic dust cover 215 or the first telescopic dust cover 214 correspondingly extends in the X direction, so that the first guide rail 212 is always protected by the first telescopic dust cover 214 and the second telescopic dust cover 215 during the processing of the substrate, and the sliding path of smoke dust entering the first sliding table 213 on the first guide rail 212 is prevented from being blocked, thereby ensuring the moving precision of the substrate in the X direction; when the second sliding table 222 extrudes the third telescopic dust cover 223 or the fourth telescopic dust cover 224, the third telescopic dust cover 223 or the fourth telescopic dust cover 224 correspondingly stretches in the Y direction when the third telescopic dust cover 223 or the fourth telescopic dust cover 224 shortens in the Y direction, so that the second guide rail 221 is always protected by the third telescopic dust cover 223 and the fourth telescopic dust cover 224 in the processing process of the substrate, smoke dust is prevented from entering the second guide rail 221, the sliding path of the second sliding table 222 is blocked, the moving precision of the substrate in the Y direction is ensured, the grooving quality of the substrate is ensured, and the displacement control precision of the substrate is improved.

With continued reference to fig. 1 and 4, and with reference to fig. 3, fig. 3 is a schematic view of the mounting structure of the CCD camera according to the present utility model.

Further, as shown in fig. 1, 3 and 4, the CCD machine vision system 800 includes a CCD camera 810 and a mounting frame 820, the mounting frame 820 is mounted on the cantilever 410, the mounting frame 820 and the galvanometer cutting head 700 are disposed at intervals along the X-direction, the CCD camera 810 is mounted on the mounting frame 820, and the CCD camera 810 forms an image capturing end.

It should be noted that, the CCD machine vision system 800 is used for detecting the substrate on the fixture 300, in the process of grooving the substrate by using the operation platform 200, the laser emitter 500, the optical shaping device 600 and the galvanometer cutting head 700, the CCD camera 810 monitors the substrate in real time, positions the processing position of the substrate according to the image of the CCD camera 810, and in the grooving process of the substrate, the groove body of the substrate can be amplified and observed by using the CCD camera 810, so as to ensure the grooving quality of the substrate.

Further, the base 100, the bracket 400, and the cantilever 410 are all made of marble.

It should be noted that, the marble base 100, the bracket 400 and the cantilever 410 have a larger dead weight, and when the operation platform 200 drives the jig 300 to move along the X-direction or the Y-direction relative to the cantilever 410, the shake of the bracket 400 is reduced, thereby reducing the shake of the laser transmitter 500, the optical shaping device 600 and the galvanometer cutting head 700, improving the grooving quality of the substrate, and avoiding burrs generated on the groove body of the substrate.

It should be appreciated that the marble bracket 400 and cantilever 410 can reduce the interference of the operation platform 200, the laser transmitter 500, the optical shaping device 600, and the galvanometer cutting head 700 to the CCD machine vision system 800 to some extent, and prevent the CCD machine vision system 800 from generating noise to reduce the accuracy of the calibration for visual positioning using the same, compared to the metal material.

Finally, it should be noted that the foregoing reference numerals of the embodiments of the present utility model are merely for describing the embodiments, and do not represent the advantages and disadvantages of the embodiments. The above embodiments are only optional embodiments of the present utility model, and not limiting the scope of the present utility model, and all equivalent structures or equivalent processes using the descriptions of the present utility model and the accompanying drawings or direct or indirect application in other related technical fields are included in the scope of the present utility model.

Claims (10)

1. The substrate grooving equipment is characterized by comprising a base, wherein the base is provided with:

The operation platform comprises a first driving device and a second driving device which is in sliding connection with the first driving device, wherein the first driving device is in sliding connection with a jig, and the jig is provided with a processing position for installing the substrate; the second driving device is used for driving the first driving device and the jig to slide along the Y direction, and the first driving device is used for driving the jig to slide along the X direction;

The device comprises a bracket, wherein a cantilever positioned above an operation platform is arranged on the bracket, a laser transmitter, an optical shaping device and a vibrating mirror cutting head are arranged on the cantilever at intervals, and outgoing rays of the laser transmitter are emitted to the jig from the vibrating mirror cutting head after passing through the optical shaping device;

The CCD machine vision system is arranged on the cantilever, the CCD machine vision system and the vibrating mirror cutting head are arranged at intervals along the X direction, and the CCD machine vision system is provided with an image acquisition end facing the processing position.

2. The substrate grooving apparatus according to claim 1, wherein the optical shaping device includes a first reflecting mechanism and a second reflecting mechanism, the first reflecting mechanism and the second reflecting mechanism being disposed at intervals in a Z direction on the cantilever, a light incident end of the first reflecting mechanism being disposed toward and corresponding to a light emitting end of the laser emitter, a light incident end of the second reflecting mechanism being disposed toward and corresponding to a light emitting end of the first reflecting mechanism, a light emitting end of the second reflecting mechanism being disposed toward and corresponding to a light incident end of the galvanometer cutting head; the outgoing light of the laser transmitter is reflected by the first reflecting mechanism to form first reflected light, the first reflected light is reflected by the second reflecting mechanism to form second reflected light, and the second reflected light is emitted to the jig through the vibrating mirror cutting head.

3. The substrate trenching apparatus of claim 2 wherein said first reflecting mechanism comprises a first housing, a first beam shaper and a first mirror plate, said first housing and said laser transmitter being mounted at Y-direction intervals on top of said cantilever, said first housing having said first beam shaper mounted on a side thereof facing said laser transmitter, a bottom of said first housing having a first through hole formed therein facing and corresponding to a light incident end of said second reflecting mechanism, said first mirror plate being mounted therein obliquely from said first beam shaper toward said first through hole; the outgoing light of the laser transmitter forms first shaping light through the first beam shaper, and the first shaping light is reflected by the first reflecting mirror plate to form first reflected light and then is injected into the second reflecting mechanism.

4. The substrate grooving apparatus according to claim 3, wherein the second reflecting mechanism includes a second housing and a second reflecting mirror, the second housing is mounted to the cantilever, the second housing is disposed below the first housing at intervals, the galvanometer cutting head is disposed at intervals along a Y direction on one side of the second housing, a second through hole is formed at a position of a top of the second housing facing and corresponding to the first through hole, a third through hole is formed at a side of the second housing facing and corresponding to a light incident end of the galvanometer cutting head, and the second reflecting mirror is mounted in the second housing and is disposed obliquely from the second through hole toward the third through hole; the first reflected light rays formed by the reflection of the first reflecting mirror plates are reflected by the second reflecting mirror plates through the second through holes to form second reflected light rays, and the second reflected light rays are injected into the vibrating mirror cutting head through the third through holes.

5. The substrate trenching apparatus of claim 4 wherein said second reflective mechanism further comprises a second beam shaper, said second beam shaper being inserted in said second through hole; the first reflection light formed by the reflection of the first reflection lens is reflected by the second reflection lens to form the second reflection light after passing through the second beam shaper, and the second reflection light is emitted to the jig through the vibrating mirror cutting head.

6. The substrate grooving apparatus according to any one of claims 1 to 5, wherein the first driving device includes a base plate, a first guide rail, a first slide table and a first driving member, the base plate is slidably connected to the second driving device, the first guide rail and the base plate both extend in an X direction, the first guide rail is disposed on the base plate, the first slide table is slidably connected to the first guide rail in the X direction, the jig is connected to a top of the first slide table, the first driving member is disposed on the base plate, and the first driving member is connected to the first slide table and is used for driving the first slide table and the jig to drive the substrate to slide in the X direction.

7. The substrate grooving apparatus according to claim 6, wherein the second driving device includes a second guide rail, a second sliding table and a second driving member, the second guide rail is disposed on the base, the second guide rail extends along a Y direction, the second sliding table is slidably connected to the second guide rail along the Y direction, the bottom plate is connected to a top of the second sliding table, the second driving member is disposed on the base, and the second driving member is connected to the second sliding table and is used for driving the second sliding table and the bottom plate to drive the substrate to slide along the Y direction.

8. The substrate grooving device according to claim 7, wherein a first telescopic dust cover and a second telescopic dust cover are sleeved on the first guide rail, the first telescopic dust cover and the second telescopic dust cover extend along the X direction, and the first telescopic dust cover and the second telescopic dust cover are respectively arranged on two sides of the first sliding table along the X direction; the second guide rail is sleeved with a third telescopic dust cover and a fourth telescopic dust cover, the third telescopic dust cover and the fourth telescopic dust cover extend along the Y direction, and the third telescopic dust cover and the fourth telescopic dust cover are respectively arranged on two sides of the second sliding table along the Y direction.

9. The substrate trenching apparatus of any of claims 1-5 wherein the CCD machine vision system comprises a CCD camera and a mounting bracket, the mounting bracket mounted to the cantilever, the mounting bracket spaced apart from the galvanometer cutting head along the X-direction, the CCD camera mounted to the mounting bracket, and the CCD camera forming the image capturing end.

10. The substrate trenching apparatus of any of claims 1-5 wherein the base, the support and the cantilever are all marble.